CN203746799U - 半导体工艺气路显示装置 - Google Patents
半导体工艺气路显示装置 Download PDFInfo
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- CN203746799U CN203746799U CN201320881824.5U CN201320881824U CN203746799U CN 203746799 U CN203746799 U CN 203746799U CN 201320881824 U CN201320881824 U CN 201320881824U CN 203746799 U CN203746799 U CN 203746799U
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 13
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- 238000004088 simulation Methods 0.000 claims abstract description 19
- 238000005516 engineering process Methods 0.000 claims description 7
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CN201320881824.5U CN203746799U (zh) | 2013-12-30 | 2013-12-30 | 半导体工艺气路显示装置 |
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CN201320881824.5U CN203746799U (zh) | 2013-12-30 | 2013-12-30 | 半导体工艺气路显示装置 |
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CN203746799U true CN203746799U (zh) | 2014-07-30 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105446275A (zh) * | 2014-08-12 | 2016-03-30 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 气路界面显示方法和系统 |
CN111101115A (zh) * | 2018-10-25 | 2020-05-05 | 北京北方华创微电子装备有限公司 | 气路切换装置及其控制方法、半导体加工设备 |
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- 2013-12-30 CN CN201320881824.5U patent/CN203746799U/zh not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105446275A (zh) * | 2014-08-12 | 2016-03-30 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 气路界面显示方法和系统 |
CN105446275B (zh) * | 2014-08-12 | 2018-05-25 | 北京北方华创微电子装备有限公司 | 气路界面显示方法和系统 |
CN111101115A (zh) * | 2018-10-25 | 2020-05-05 | 北京北方华创微电子装备有限公司 | 气路切换装置及其控制方法、半导体加工设备 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100015 Jiuxianqiao Chaoyang District, East Beijing Road, building M2, floor 1, No. 2 Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20180323 Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: North China Science and technology group Limited by Share Ltd. |
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CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20140730 |