CN203745660U - MEMS geophone - Google Patents
MEMS geophone Download PDFInfo
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- CN203745660U CN203745660U CN201420068594.5U CN201420068594U CN203745660U CN 203745660 U CN203745660 U CN 203745660U CN 201420068594 U CN201420068594 U CN 201420068594U CN 203745660 U CN203745660 U CN 203745660U
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- 239000011258 core-shell material Substances 0.000 claims abstract description 37
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 24
- 229910052742 iron Inorganic materials 0.000 claims description 12
- 210000000988 bone and bone Anatomy 0.000 claims description 11
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- 229910052782 aluminium Inorganic materials 0.000 claims description 9
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- Geophysics And Detection Of Objects (AREA)
Abstract
The utility model discloses a micro-electro mechanic system (MEMS) geophone comprising a protection shell with an upper cover, an MEMS machine core arranged in the protection shell and a tail cone arranged outside the protection shell. The MEMS machine core includes a machine core shell fixed in the protection shell, a support frame arranged in the machine core shell, and a plurality of MEMS accelerometers arranged at the support frame. The support frame is in a cuboid shape. The MEMS accelerometers are capacitance type ones including an X accelerometer, a Y accelerometer, and a Z accelerometer, wherein the three accelerometers are respectively arranged at three adjacent side surfaces of the support frame in a standing mode; and the side surface where the Z accelerometer is located is the top surface, orientating at the upper cover, of the support frame. The tail core is arranged at a screw rod that penetrates the base plate of the protection shell and is abutted against the machine core shell. With the MEMS geophone, the coil with the inherent frequency is used; the recorded dynamic range is large; the response frequency band is wide; and the resolution ratio is high. And all wide-frequency band elastic waves generated by an artificial seismic source can be detected beneficially.
Description
Technical field
The utility model relates to seismic exploration equipment technical field, more particularly, relates to a kind of MEMS seismoreceiver.
Background technology
Seismic prospecting is to utilize instrument to detect, record the travel-time, amplitude, waveform etc. of reflection wave, the refraction wave of artificial excitation's earthquake, judge bed boundary, formation properties, architectonic a kind of geophysical exploration method thereby analyze, it is the Main Means of exploring at present the resource such as land and ocean PetroChina Company Limited. and rock gas.
At present, in oil and gas prospect field, conventional seismic exploration equipment is movable coil velocity-type detector, it makes movable coil be fixed on the spring coaxial with magnet, makes spring and coil produce mobile with respect to magnet and produce induction electromotive force by coil by exterior vibration.But, in above-mentioned movable coil velocity-type detector, because spring has natural frequency, cause the recordable maximum dynamic range of whole movable coil velocity profile wave detector to be about 60dB, the distortion that receives signal is large, response band is narrow, resolution rate variance, is not enough to survey the whole broadband elastic waves that produced by man-made explosion.
In addition, it is low that above-mentioned movable coil velocity-type detector also has sensitivity, is difficult to collect the defect of deep layer feeble signal, has a strong impact on the validity of seismic prospecting.Moreover in above-mentioned movable coil velocity-type detector, coil is also subject to noise effect and produces vibration, a little less than antijamming capability, when exploration, need severally could reduce the impact of noise jamming on test result to tens receiver patteries, cause that to survey cost high.
In sum, how the seismoreceiver that a kind of dynamic recording range is large, reception signal distortion is little and response band is wide, resolution is high is provided, can survey the whole wideband elastic waves that produced by man-made explosion, meeting oil or gas prospecting requirement is those skilled in the art's problem demanding prompt solutions.
Utility model content
In view of this, the utility model provides a kind of MEMS seismoreceiver, it adopts mems accelerometer to detect the vibrations of seismic event, avoid using the coil of natural frequency, recordable responding range is large, response band is wide, resolution is high, is beneficial to and surveys the whole broadband elastic waves that produced by man-made explosion.
For achieving the above object, the utility model provides following technical scheme:
A kind of MEMS seismoreceiver, comprising: be provided with upper cover containment vessel, be arranged on the MEMS movement in containment vessel and be arranged on the tail cone outside containment vessel;
Wherein, described MEMS movement comprises the machine core shell that is fixed in described containment vessel, is arranged on the bracing frame in described machine core shell and is arranged on the mems accelerometer on bracing frame; Support frame as described above is rectangular parallelepiped; Described mems accelerometer is capacitive accelerometer, comprise X accelerometer, Y accelerometer and Z accelerometer, three erects respectively on three sides adjacent on support frame as described above, and the residing side of described Z accelerometer is towards the side of described upper cover on support frame as described above; Described tail cone is arranged on screw rod; Described screw rod passes the base plate of described containment vessel, and offsets with described machine core shell.
Preferably, in above-mentioned MEMS seismoreceiver, described upper cover is fixed on described containment vessel by fixture, and is provided with seal between the two.
Preferably, in above-mentioned MEMS seismoreceiver, on described upper cover and described containment vessel, be respectively equipped with seal groove, described seal is inserted in the seal groove of described upper cover and described containment vessel.
Preferably, in above-mentioned MEMS seismoreceiver, be fixed with the conductive pad that is adjacent to described machine core shell on the base plate of described containment vessel, described conductive gasket is in described screw rod periphery; Described machine core shell is iron machine core shell or permalloy machine core shell; Described conductive pad is iron conductive pad, aluminium conductive pad, ferroalloy conductive pad or aluminium alloy conductive pad, and described tail cone is iron tail cone, aluminium tail cone, ferroalloy tail bone or aluminium alloy tail bone, and described screw rod is iron screw rod, aluminium screw rod, ferroalloy screw rod or aluminium alloy screw rod.
Preferably, in above-mentioned MEMS seismoreceiver, described conductive pad, described containment vessel and described screw rod once plastify into entirety.
Preferably, in above-mentioned MEMS seismoreceiver, cover on described and be embedded with level meter and compass, and on described, cover and be fixed with the transparency glass plate pasting outside described level meter and described compass.
Preferably, in above-mentioned MEMS seismoreceiver, described tail cone is tetrapyamid shape, and side is the arcwall face of the recessed central shaft to described tail cone.
Preferably, in above-mentioned MEMS seismoreceiver, described containment vessel and described on cover and be respectively equipped with reflecting coating layer.
Preferably, in above-mentioned MEMS seismoreceiver, described containment vessel is provided with and lifts hole; Described containment vessel outside is provided with circumferential recess, and described circumferential recess is positioned at described containment vessel bottom, and is provided with rubber ring in described circumferential recess.
The utility model provides a kind of MEMS seismoreceiver, it comprise be provided with upper cover containment vessel, be arranged on the MEMS movement in containment vessel and be arranged on the tail cone outside containment vessel, wherein, MEMS movement comprises the machine core shell that is fixed in containment vessel, is arranged on the bracing frame in machine core shell and is arranged on the multiple mems accelerometers on bracing frame; Above-mentioned bracing frame is rectangular-shaped; Above-mentioned mems accelerometer is capacitive accelerometer, comprises X accelerometer, Y accelerometer and Z accelerometer, and three erects respectively on three sides adjacent on bracing frame, and the residing side of Z accelerometer is towards the end face of upper cover on bracing frame; Above-mentioned tail cone is arranged on screw rod, and screw rod passes the base plate of containment vessel and offsets with machine core shell.
While applying above-mentioned MEMS seismoreceiver, tail cone inserts ground, the screw rod arrival MEMS movement place that seismic event passes through tail cone and is connected with tail cone, under the drive of seismic event, there is micro-movement in the Tiny Mass piece in mems accelerometer, thereby make the capacitance variations of mems accelerometer, capacitance variations signal passes through integrator successively, differential capacitance detection, a quantification, on the one hand, quantized signal is through electrostatic force negative feedback, make mass keep equilibrium position, on the other hand, quantized signal is through digital filtering, after DAC conversion, export in DC voltage mode, thereby complete the detection to seismic event.
In the MEMS seismoreceiver that the utility model provides, seismic event conducts to MEMS movement place and drives the Tiny Mass piece of mems accelerometer to move the detection that can complete seismic event, than existing seismoreceiver, it has adopted MEMS technology and close loop negative feedback technology, improve dynamic recording range, the linearity of guaranteeing to receive signal is high, response band is wide, resolution is high, can be used in and surveys the whole frequency band elastic waves that produced by man-made explosion.Concrete, in MEMS seismoreceiver of the present utility model, more than its dynamic recording range can reach 120dB, ± 3g gamut, frequency response range is 0Hz-1500Hz, resolution reaches
In addition, in the MEMS seismoreceiver that the utility model provides, the background noise of mems accelerometer is low, experiencing seismic wave minutely can be subjected to displacement, highly sensitive, be beneficial to faintly seismic wave signal of effective collection deep layer, the validity that improves result of seismic explosion, the MEMS seismoreceiver that concrete the utility model provides has good receiving ability to low frequency signal (being particularly less than the signal of 6Hz).
Moreover, in the MEMS seismoreceiver that the utility model provides, use shock absorbing ring, weaken the impact of the neighbourhood noises such as the rustle of leaves in the wind on tail bone reception signal; Meanwhile, in the MEMS seismoreceiver that the utility model provides, tail bone, screw rod, conductive pad and machine core shell form electromagnetic shielding system, reduce even to have shielded the impact of electromagnetic interference (EMI).To sum up, the antijamming capability of the seismoreceiver that the utility model provides is strong, has avoided using too much receiver pattern, has saved construction cost.
Brief description of the drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, accompanying drawing in the following describes is only embodiment more of the present utility model, for those of ordinary skill in the art, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
The main TV structure schematic diagram of the MEMS seismoreceiver that Fig. 1 provides for the utility model embodiment;
The side-looking structural representation of the MEMS seismoreceiver that Fig. 2 provides for the utility model embodiment;
The bracing frame that Fig. 3 provides for the utility model embodiment and the wiring layout of mems accelerometer;
The upper cover that Fig. 4 provides for the utility model embodiment and the wiring layout of circuit switching plate 14;
The plan structure schematic diagram of the upper cover that Fig. 5 provides for the utility model embodiment;
The sectional view of the tail bone that Fig. 6 provides for the utility model embodiment;
The Part I power circuit diagram of the MEMS movement that Fig. 7 a provides for the utility model embodiment;
The Part II power circuit diagram of the MEMS movement that Fig. 7 b provides for the utility model embodiment;
The Part III power circuit diagram of the MEMS movement that Fig. 7 c provides for the utility model embodiment;
The Part IV power circuit diagram of the MEMS movement that Fig. 7 d provides for the utility model embodiment;
The circuit diagram of the X accelerometer that Fig. 8 provides for the utility model embodiment;
The circuit diagram of the Y accelerometer that Fig. 9 provides for the utility model embodiment;
The circuit diagram of the Z accelerometer that Figure 10 provides for the utility model embodiment;
Wherein, in upper Fig. 1-10:
Upper cover 10, level meter 11, transparency glass plate 12, compass 13, circuit switching plate 14; power-line plug 15, signal wire plug 16, pilot hole 17, screw 18, seal 20; wire 21, connection plug 22, MEMS movement 30, machine core shell 31, power line socket 32; signal wire socket 33, bracing frame 301, X accelerometer 302, Y accelerometer 303, Z accelerometer 304; containment vessel 40, plastic ring 41, shock absorbing ring 42, conductive pad 43; screw rod 44, handle 45 holes, tail cone 50, hexagonal prism type nut 51.
Embodiment
The utility model embodiment discloses a kind of MEMS seismoreceiver, it adopts mems accelerometer to detect the vibrations of seismic event, avoid using the coil of natural frequency, recordable dynamic range of signals is large, response band is wide, resolution is high, can survey the whole broadband elastic waves that produced by man-made explosion.
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is clearly and completely described, obviously, described embodiment is only the utility model part embodiment, instead of whole embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not making the every other embodiment obtaining under creative work prerequisite, all belong to the scope of the utility model protection.
Refer to Fig. 1-Figure 10, the MEMS(MEMS that the utility model embodiment provides, Micro-Electro-Mechanic System, microelectromechanical-systems) seismoreceiver comprise be provided with upper cover 10 containment vessel 40, be arranged on the MEMS movement 30 in containment vessel 40 and be arranged on the tail cone 50 outside containment vessel 40; Wherein, MEMS movement 30 comprises the machine core shell 31 that is fixed in containment vessel 40, is arranged on the bracing frame 301 in machine core shell 31 and is arranged on the mems accelerometer on bracing frame 301; Above-mentioned bracing frame 301 is rectangular-shaped, mems accelerometer is capacitive accelerometer, and mems accelerometer number is multiple, specifically comprise X accelerometer 302, Y accelerometer 303 and Z accelerometer 304, three erects respectively on three sides adjacent on bracing frame 301, and Z accelerometer 304 is positioned on bracing frame 301 the side place towards upper cover 10; Above-mentioned three adjacent sides refer to three sides at an angle that surrounds cuboid bracing frame 301; Above-mentioned tail cone 50 is arranged on screw rod 44, and screw rod 44 passes the base plate of containment vessel 40, and offsets with machine core shell 31.Above-mentioned containment vessel 40 comprises the sidewall of rectangular drum like and the shutoff base plate in sidewall one end, and the other end of sidewall is by upper cover 10 shutoff.
While applying above-mentioned MEMS seismoreceiver, tail cone 50 is inserted in large ground, the screw rod 44 that seismic event is connected by tail cone 50 and with tail cone 50 arrives MEMS movement 30 places, subsequently, Tiny Mass piece in mems accelerometer under the drive of seismic event because there is micro-movement in inertial force, thereby make the capacitance variations of mems accelerometer, capacitance variations signal obtains voltage signal after C/V (electric capacity/voltage) conversion, voltage signal keeps through sampling, one quantizes to form quantized signal, on the one hand, quantized signal feeds back to capacitor plate, form negative feedback, make mass keep equilibrium position, on the other hand, signal after quantification is through DAC(Digital to analog converter, digital simulation transforms) and the signal condition such as filtering after export in DC voltage mode, and then complete the detection to seismic event.
Than existing seismoreceiver, the MEMS seismoreceiver that the utility model provides has avoided using the spring with natural frequency, improve dynamic recording range, the distortion that can guarantee to receive signal is little, response band is wide, resolution is high, is beneficial to and surveys the whole frequency band elastic waves that produced by man-made explosion.Concrete, more than the dynamic recording range of the MEMS seismoreceiver that the utility model embodiment provides can reach 120dB, ± 3g gamut, frequency response range is 0Hz-1500Hz, meanwhile, the resolution of the MEMS seismoreceiver that the present embodiment provides reaches
In addition, in the MEMS seismoreceiver that the utility model embodiment provides, mass in mems accelerometer is little, experiencing seismic wave minutely can be subjected to displacement, highly sensitive, be beneficial to faintly seismic wave signal of effective collection deep layer, the validity that improves result of seismic explosion, the MEMS seismoreceiver that concrete the utility model embodiment provides has good ability to accept to low frequency signal (being particularly less than the signal of 6Hz).
Because MEMS seismoreceiver is applied to the severe field of environmental baseline more; therefore be damaged because making moist or leaking for fear of MEMS movement 30; in the MEMS seismoreceiver that above-described embodiment provides; seal 20 between upper cover 10 and containment vessel 40; accordingly, upper cover 10 is removably fixed on containment vessel 40 by the fixture coordinating with pilot hole on it 17.
Concrete, in the MEMS seismoreceiver that above-described embodiment provides, on upper cover 10 and containment vessel 40, being respectively equipped with seal groove, above-mentioned seal 20 inserts in the seal groove of upper cover 10 and containment vessel 40 simultaneously.
In the MEMS seismoreceiver that above-described embodiment provides, be fixed with the conductive pad 43 of being close to machine core shell 31 on the base plate of containment vessel 40, conductive pad 43 is in screw rod 44 peripheries.Concrete, machine core shell 31 is iron machine core shell or permalloy machine core shell, conductive pad 43 is iron conductive pad, aluminium conductive pad, ferroalloy conductive pad or aluminium alloy conductive pad, screw rod 44 is iron screw rod, aluminium screw rod, ferroalloy screw rod or aluminium alloy screw rod, and tail cone 50 is iron tail cone, aluminium tail cone, ferroalloy tail bone or aluminium alloy tail bone.In the seismoreceiver that the present embodiment provides, machine core shell 31, conductive pad 43, screw rod 44 and an electromagnetic shielding system of tail cone 50 common formations, can weaken the impact of the testing result of shield electromagnetic interference on mems accelerometer even completely.
Concrete, in the MEMS seismoreceiver that above-described embodiment provides, conductive pad 43, containment vessel 40 and screw rod 44 once plastify into entirety.The base plate of containment vessel 40 is provided with the groove corresponding with conductive pad 43, and conductive pad 43 is concordant towards the side of MEMS movement 30 with on base plate, and meanwhile, the end face of screw rod 44 is concordant with the side of being close to machine core shell 31 on conductive pad 43.
In addition; in the MEMS seismoreceiver that above-described embodiment provides; on upper cover 10, be fixed with circuit switching plate 14 towards a side of containment vessel 40 inside; on circuit switching plate 14, be fixed with plug; on corresponding machine core shell 31, be also provided with the socket being connected with each mems accelerometer, after assembling, the two ends up and down of machine core shell 31 are held out against by conductive pad 43 and circuit switching plate 14 respectively.Meanwhile, in order to prevent that machine core shell 31 from rocking, the sidewall of above-mentioned containment vessel 40 is provided with the plastic ring 41 for holding out against machine core shell 31.
Concrete, in above-mentioned MEMS seismoreceiver, the plug of circuit switching plate 14 is 2, be respectively the power-line plug 15 of convex and the signal wire plug 16 of convex, socket on machine core shell 31 is also 2, is respectively the matrix power line socket 32 coordinating with said power plug 15 and the matrix signal wire socket 33 coordinating with above-mentioned signal wire plug 16.Above-mentioned circuit switching plate 14 is fixed on upper cover 10 by screw 18; and the wire 21 that its upper end is provided with connection plug 22 is stretched out outside containment vessel 40 by the gap between upper cover 10 and containment vessel 40, the part contacting with seal 20 on wire 21 is integrated with the seal 20 plasticizings.
Above-mentioned plastic ring 41 is along the circumferential setting of containment vessel 40 upper side walls, and its number can be set to one or more.In the MEMS seismoreceiver that above-described embodiment provides, containment vessel 40 is plastic protection casing.
Preferably, in the MEMS seismoreceiver that above-described embodiment provides, level meter 11 and compass 13 are housed on upper cover 10, so that detect orientation and the flatness of whole MEMS seismoreceiver.Accordingly, make moist for fear of level meter 11 and compass 13, and protect both to exempt from shock, on above-mentioned upper cover 10, be also fixed with the transparency glass plate 12 pasting outside compass 13 and level meter 11.
In the MEMS seismoreceiver that above-described embodiment provides, tail cone 50 is tetrapyamid shape, and its bottom end near the base plate of containment vessel 40, top away from containment vessel 40, time easy to use, make tail cone 50 be inserted in the earth by its top.
Receive better seismic event for the ease of tail cone 50, in above-mentioned MEMS seismoreceiver, in tail cone 50, each side is set to the arcwall face of recessed axle wherein, or is set to the protruding arcwall face to the direction away from its central shaft.Each side of tail cone 50 is set to arcwall face and is beneficial to the coupling area that increases tail cone 50 and soil, is beneficial to tail cone 50 and receives better seismic event.In addition, the bottom surface of above-mentioned tail cone 50 is fixed with hexagonal prism type nut 51, is convenient to workman and implements the operation of installation or removal tail cone 50, and the end face of above-mentioned hexagonal prism type nut 51 and the bottom surface of tail cone 50 are close to.
Concrete, in the MEMS seismoreceiver that above-described embodiment provides, containment vessel 40 and upper cover 10 are provided with reflecting coating layer, when used night reflecting coating layer can be under the shining of light reflection light, be convenient to search, be difficult for losing.
In above-mentioned MEMS seismoreceiver, containment vessel 40 is outer is provided with two symmetrically arranged handle aperture 45, can adopt rope to tie up to two handle aperture 45 places when application, lifts rope to tail cone 50 and pull out ground while packing up wave detector.The MEMS seismoreceiver that the present embodiment provides has the effect of being convenient to pack up.
Preferably, in above-mentioned MEMS wave detector, the sidewall of containment vessel 40 is provided with the outer groove near bottom end place, and is provided with shock absorbing ring 42 in this outer groove, for weakening the interference of microseism to wave detector such as wind, husky movement.Concrete, above-mentioned shock absorbing ring 42 is rubber ring.
The MEMS seismoreceiver that the utility model embodiment provides has used shock absorbing ring, has weakened the impact of the neighbourhood noises such as the rustle of leaves in the wind on tail bone reception signal; Meanwhile, in this MEMS seismoreceiver, tail bone, screw rod, conductive pad and machine core shell form electromagnetic shielding system, reduce even to have shielded the impact of electromagnetic interference (EMI).To sum up, the antijamming capability of the seismoreceiver that the utility model provides is strong, has avoided using too much receiver pattern, has saved construction cost.
Concrete, in the seismoreceiver that the utility model provides, three mems accelerometers (being X accelerometer 302, Y accelerometer 303 and Z accelerometer 304) are respectively sigma-delta (summation-differential) closed loop dynamic balance mems accelerometer.The wiring diagram of the power unit of this MEMS movement 30 is as Fig. 7, (Fig. 7 a, Fig. 7 b, Fig. 7 c and Fig. 7 d, four width figure are combined into complete power circuit principle figure, wherein, the V5v in Fig. 7 b, Fig. 7 c and Fig. 7 d all refers to the V5v in Fig. 7 a).In power circuit, in power supply power1 and power supply power2, an input 6V-40V DC voltage, another inputs ground wire, it is DC-to-DC converter that the power supply of 6V-40V is input to DC-DC converter U1(through circuit bridge) pin 5, two voltage vccs and the Vdd of 5V exported in the 7 pin outputs of U1 after different wave filters, by the V5v output-5V voltage Vss after reverse converter U2 is anti-phase again of the 7 pin outputs of U1.Concrete, the model of DC-DC converter U1 is LM2574N, the model of reverse converter U2 is MAX764.
In addition, three MEMS acceleration structures are identical, accordingly, the circuit theory diagrams of three inside are all identical, below taking the circuit theory diagrams of X accelerometer 302 as example introduction: refer to Fig. 8,1 pin of MEMS sensor U3,2 pin, 3 pin respectively with ASIC(Application Specific Integrated Circuit, special IC) 8 pin, 12 pin, 14 pin of chip U4 connect, 40 pin of asic chip U4 are received in the 8 pin outputs of active crystal oscillator U5, and circuit clock is provided.13 pin of asic chip U4 connect the negative pole of capacitor C 26,15 pin of asic chip U4 connect the positive pole of capacitor C 27,3 pin, 5 pin, 17 pin, 20 pin and 25 pin of asic chip U4 meet 5V power supply Vdd, 1 pin, 4 pin, 16 pin, 19 pin, 26 pin, 27 pin and connect-5V of the 43 pin power supply Vss of asic chip U4.The 43 pin outputting analog signals of asic chip U4 are connected to 6 pin of amplifier U6 through resistance R 1,7 pin of amplifier U6 are linked 9 pin of amplifier U6 through resistance R 8, and 8 pin of amplifier U6 are connected to 42 pin of asic chip U4.Meanwhile, 13 pin, resistance R 5 and the capacitor C 22 of amplifier U6 linked in the 8 pin outputs of amplifier U6 through resistance R 3 and resistance R 4, and after buffering, 14 pin of U6 are exported the measurement signals of X accelerometers 302, export the signal of the directions X of seismic event.29 pin～34 pin of asic chip U4 are for operating the EEPROM(Electrically Erasable Programmable Read-Only Memory in asic chip, EEPROM (Electrically Erasable Programmable Read Only Memo)) and register, realize configuration and the correction of mems accelerometer.Concrete, the model of U6 is LT1353, in Fig. 8, U6B, U6C and U6D are three amplifiers of this amplifier chip U6.
In the MEMS seismoreceiver that the utility model embodiment provides, the sensor of MEMS movement is mainly made up through nanometer technique of silicon materials, and in this MEMS seismoreceiver, circuit major part is integrated on asic chip, so it has good anti-impact force, between centers is crosstalked lower than 1%.
In this instructions, each embodiment adopts the mode of going forward one by one to describe, and what each embodiment stressed is and the difference of other embodiment, between each embodiment identical similar part mutually referring to.
To the above-mentioned explanation of the disclosed embodiments, make professional and technical personnel in the field can realize or use the utility model.To be apparent for those skilled in the art to the multiple amendment of these embodiment, General Principle as defined herein can, in the situation that not departing from spirit or scope of the present utility model, realize in other embodiments.Therefore, the utility model will can not be restricted to these embodiment shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (9)
1. a MEMS seismoreceiver, is characterized in that, comprising: be provided with upper cover containment vessel, be arranged on the MEMS movement in containment vessel and be arranged on the tail cone outside containment vessel;
Wherein, described MEMS movement comprises the machine core shell that is fixed in described containment vessel, is arranged on the bracing frame in described machine core shell and is arranged on the mems accelerometer on bracing frame; Support frame as described above is rectangular parallelepiped; Described mems accelerometer is capacitive accelerometer, comprise X accelerometer, Y accelerometer and Z accelerometer, three erects respectively on three sides adjacent on support frame as described above, and the residing side of described Z accelerometer is towards the side of described upper cover on support frame as described above; Described tail cone is arranged on screw rod; Described screw rod passes the base plate of described containment vessel, and offsets with described machine core shell.
2. MEMS seismoreceiver according to claim 1, is characterized in that, described upper cover is fixed on described containment vessel by fixture, and is provided with seal between the two.
3. MEMS seismoreceiver according to claim 2, is characterized in that, on described upper cover and described containment vessel, is respectively equipped with seal groove, and described seal is inserted in the seal groove of described upper cover and described containment vessel.
4. MEMS seismoreceiver according to claim 1, is characterized in that, is fixed with the conductive pad that is adjacent to described machine core shell on the base plate of described containment vessel, and described conductive gasket is in described screw rod periphery; Described machine core shell is iron machine core shell or permalloy machine core shell; Described conductive pad is iron conductive pad, aluminium conductive pad, ferroalloy conductive pad or aluminium alloy conductive pad, and described tail cone is iron tail cone, aluminium tail cone, ferroalloy tail bone or aluminium alloy tail bone, and described screw rod is iron screw rod, aluminium screw rod, ferroalloy screw rod or aluminium alloy screw rod.
5. MEMS seismoreceiver according to claim 4, is characterized in that, described conductive pad, described containment vessel and described screw rod once plastify into entirety.
6. MEMS seismoreceiver according to claim 1, is characterized in that, covers on described and is embedded with level meter and compass, and on described, cover and be fixed with the transparency glass plate pasting outside described level meter and described compass.
7. MEMS seismoreceiver according to claim 1, is characterized in that, described tail cone is tetrapyamid shape, and side is the arcwall face of the recessed central shaft to described tail cone.
8. MEMS seismoreceiver according to claim 1, is characterized in that, described containment vessel and described on cover and be respectively equipped with reflecting coating layer.
9. MEMS seismoreceiver according to claim 8, is characterized in that, described containment vessel is provided with and lifts hole; Described containment vessel outside is provided with circumferential recess, and described circumferential recess is positioned at described containment vessel bottom, and is provided with rubber ring in described circumferential recess.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420068594.5U CN203745660U (en) | 2013-10-31 | 2014-02-17 | MEMS geophone |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320685192 | 2013-10-31 | ||
| CN201320685192.5 | 2013-10-31 | ||
| CN201420068594.5U CN203745660U (en) | 2013-10-31 | 2014-02-17 | MEMS geophone |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203745660U true CN203745660U (en) | 2014-07-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201420068594.5U Expired - Lifetime CN203745660U (en) | 2013-10-31 | 2014-02-17 | MEMS geophone |
| CN201410053313.3A Active CN103792568B (en) | 2013-10-31 | 2014-02-17 | MEMS geophone |
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| CN201410053313.3A Active CN103792568B (en) | 2013-10-31 | 2014-02-17 | MEMS geophone |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110380701A (en) * | 2019-07-09 | 2019-10-25 | 桂林电子科技大学 | A kind of composite filter with precipitous attenuation characteristic |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106199688B (en) * | 2016-06-29 | 2018-02-23 | 成都理工大学 | It is integrated with the high-precision three-component microseism wave detector and implementation method of active focus |
| CN106249278B (en) * | 2016-07-21 | 2018-12-21 | 华通科创(唐山)石油工程技术服务有限公司 | A kind of high-precision detection equipment for oil exploration |
| CN107870367B (en) * | 2016-09-26 | 2019-08-27 | 中国石油化工股份有限公司 | Well geophone direction-finding system and method |
| CN107024719A (en) * | 2017-04-13 | 2017-08-08 | 西安振兴泽博智能震感科技有限公司 | A kind of moving-coil sensor |
| CN107300716B (en) * | 2017-06-30 | 2018-11-23 | 黄河勘测规划设计有限公司 | For three-dimensional S H wave or the smart detectors device of multi-wave seismic survey |
| CN109507720A (en) * | 2018-10-30 | 2019-03-22 | 山西晋煤集团技术研究院有限责任公司 | A kind of delay means for correcting and method for slot wave detection |
| CN109143323B (en) * | 2018-11-01 | 2023-11-17 | 中国矿业大学(北京) | Three-component geophone shell capable of changing coccyx |
| CN109883310B (en) * | 2019-02-28 | 2020-02-21 | 华中科技大学 | Self-balancing variable-area array capacitance displacement detection device and method |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2783347Y (en) * | 2005-04-07 | 2006-05-24 | 周瑶琪 | Vibration wave detector for three-component high-precision micromechanical aueleration meter |
| US20080092653A1 (en) * | 2006-10-18 | 2008-04-24 | Scintrex Limited | Method of reducing the drift rate of accelerometer and accelerometer with reduced drift rate |
| CN101788684B (en) * | 2010-04-09 | 2013-02-06 | 中国科学院地质与地球物理研究所 | Piezoelectric digital seismometer on land |
| CN102486541B (en) * | 2010-12-02 | 2014-06-11 | 中国科学院地质与地球物理研究所 | MEMS (Micro-electromechanical System) digital geophone |
| CN102253408A (en) * | 2011-04-14 | 2011-11-23 | 中国神华能源股份有限公司 | Wave detector |
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2014
- 2014-02-17 CN CN201420068594.5U patent/CN203745660U/en not_active Expired - Lifetime
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110380701A (en) * | 2019-07-09 | 2019-10-25 | 桂林电子科技大学 | A kind of composite filter with precipitous attenuation characteristic |
| CN110380701B (en) * | 2019-07-09 | 2023-01-03 | 桂林电子科技大学 | Composite filter with steep attenuation characteristic |
Also Published As
| Publication number | Publication date |
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| CN103792568B (en) | 2015-04-08 |
| CN103792568A (en) | 2014-05-14 |
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