CN203745624U - Nonmagnetic full-sealed three-shaft fluxgate magnetometer - Google Patents
Nonmagnetic full-sealed three-shaft fluxgate magnetometer Download PDFInfo
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- CN203745624U CN203745624U CN201320608774.3U CN201320608774U CN203745624U CN 203745624 U CN203745624 U CN 203745624U CN 201320608774 U CN201320608774 U CN 201320608774U CN 203745624 U CN203745624 U CN 203745624U
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Abstract
The utility model discloses a nonmagnetic full-sealed three-shaft fluxgate magnetometer, and the magnetometer comprises a housing, a full-sealed cavity, a measurement coil, and a magnetic core. The full-sealed cavity is provided with a plurality of welding pins through glass sintering. The full-sealed cavity, the welding pins and the housing are all made of nonmagnetic alloy materials which have the same expansion coefficient with glass. The measurement coil comprises three orthogonal measurement coils. The center of the three measurement coils is provided with a common magnetic core, thereby forming a three-shaft fluxgate. The interior of the full-sealed cavity is provided with an exciting circuit and a measurement circuit in an integrated packaging manner. The measurement coil, the magnetic core and the circuit are all disposed in the full-sealed cavity, and connecting lines of the measurement coil, the magnetic core and the circuit are led out through the glass-insulation welding pins. Through the developing of nonmagnetic alloy and packaging glass, which have the same expansion coefficient, and the technology of nonmagnetic full-sealed glass packaging, the magnetometer is enabled to be in the state of zero stress in a very wide range of temperature, and can carry synchronous precise measurement for three components of a magnetic field at one point in the space.
Description
Technical field
The present invention relates to a kind of magnetometer, particularly a kind of without the hermetically sealed three axis fluxgate magnetometers of magnetic.
Background technology
Flux-gate magnetometer grows up in order to survey enemy's submarine from aircraft in World War II, at aspects such as geomagnetic observatory and land magnetic survey, airborne magnetic survey, satellite magnetic surveys, is used widely.It is generally combined by fluxgate magnetic core, and each fluxgate magnetic core can be found out the intensity of terrestrial magnetic field in a direction independently, and three probes are combined mutual vertically, can measure three components of geomagnetic field intensity simultaneously.
In prior art, the patented technology of relevant three axis fluxgate magnetometers has more, more representational patented technology has: as Chinese inventing type patent < < implicit type structure mini inertia measurement unit > > of patent CN200710063635.6, according to the requirement of certain verticality, flatness and smooth finish, adopt synthesize ceramic materials processing one square pedestal.Utilization has the feature of the synthesize ceramic material surface electrodepositable circuit of certain smooth finish, according to accelerometer, gyrostatic encapsulation, circuit theory diagrams and installation requirement, at base-plates surface, electroplates circuit attach pad.Secondly this stupalith first cost is higher, and, this encapsulating structure is not without magnetic, neither all-sealed structure, and each part expansion coefficient not etc., does not cause the repeatability of Temperature Modeling bad.Suchlike patented technology also has a lot, but its common some shortcomings that exist, such as structure non-tight, profile spatial volume is larger, a little less than resistance to environment capacity, during measurement, be easily disturbed, be difficult to three components in the magnetic field of the point in space to carry out synchronization accuracy measurement, the deficiencies such as the poor repeatability of Temperature Modeling.
Summary of the invention
The present invention is in order to overcome the deficiencies in the prior art, nonmagnetic alloy and seal glass that expansion coefficient equates have been developed, provide a kind of and integratedly without magnetic, entirely encapsulate, can in wider temperature range, demonstrate remarkable Temperature Modeling repeatability without the hermetically sealed three axis fluxgate magnetometers of magnetic.
The object of the invention is to realize by following measures: a kind ofly without the hermetically sealed three axis fluxgate magnetometers of magnetic, comprise housing, hermetically sealed cavity, measuring coil and magnetic core, on described hermetically sealed cavity, by glass sintering, have a plurality of capillaries; Described hermetically sealed cavity, capillary and housing are made by the nonmagnetic alloy material equating with glass swelling coefficient.
Further, described measuring coil comprises the measuring coil of three quadratures, and X-axis measuring coil, Y-axis measuring coil and Z axis measuring coil, form tri-of XYZ and measure axle; The center of described three measuring coils is provided with a shared magnetic core, forms three axis fluxgates; In described hermetically sealed cavity, go back integrative packaging and have exciting circuit and metering circuit; Described X-axis measuring coil, Y-axis measuring coil, Z axis measuring coil, magnetic core and circuit are all in hermetically sealed chamber, and their connecting line adopts the capillary of glass insulation externally to draw.
Further, the skeleton of described measuring coil also adopts the nonmagnetic alloy material equating with glass swelling coefficient to be made, coiling permalloy tape and winding on described skeleton.
For the installation method without the hermetically sealed three axis fluxgate magnetometers of magnetic, comprise following installation steps: the first step, X-axis measuring coil, Y-axis measuring coil, Z axis measuring coil, magnetic core and the circuit of installation three axis fluxgate magnetometers; Second step, installs X-axis accelerometer, Y-axis accelerometer, Z axis accelerometer and its accelerometer control circuit; The 3rd step, installs X-axis gyroscope, Y-axis gyroscope, Z axis gyroscope and its gyroscope circuit; The 4th step, installs the sensor of other analog voltage output transducers or frequency output; The 5th step, installs digital-to-analog circuit, temperature sensor, microprocessor, storer and interface circuit; The 6th step is installed power converting circuit or power amplification circuit; Finally will, without the hermetically sealed housing of magnetic and upper cover laser bonding, form a complete boat appearance frame of reference or inertial navigation measuring system or kinetic control system.
In the present invention, described three measurement axle correspondences are connected with three metering circuits, the metering circuit of each axle exchanges amplification and phase depending on rectification and filtering to four induced voltage pulses of this axle measuring coil output, filtered voltage is to integrator, voltage after integration adds to this axle measuring coil again and produces feedback current, and the magnetic-field component of this axle is offset in the magnetic field that this axle measuring coil is produced completely.Meanwhile, the magnetic core of being made by nano amorphous material, its magnetic hysteresis electric current is minimum, initial magnetic permeability is high, and magnetic conduction state is short to the state of saturation transition time, and four induced voltage pulse width is narrow, peak value is high, pulse is without adhesion, be convenient to all-wave phase depending on rectification, improved well open loop sensitivity.Measuring coil, magnetic core and circuit are carried out to integrative packaging, and integrated chip and high temperature Resistor-Capacitor Unit that wherein circuit is manufactured by SOI technique form, and the present invention can be worked in the environment of-50 ℃ to+210 ℃.The exciting circuit that oscillator and amplification driving circuit form provides exciting current to magnetic core; The metering circuit being comprised of amplifying circuit, phase depending on rectification and filtering, integrating circuit and feedback resistance is used for the measurement of each axle, Gong San road, and the magnetic-field component that makes three axles is zero, the magnetic-field component of accurately corresponding three axles of three road feedback currents.The nonmagnetic alloy material that described hermetically sealed cavity and capillary equate by expansion coefficient is made, the expansion coefficient of each part equates, in very wide temperature range, three axis fluxgate magnetometers are in zero stress state, thereby demonstrate remarkable Temperature Modeling repeatability.A plurality of capillaries are for the power wiring of power supply, motor or electromagnet; The digital signal wiring of a plurality of capillaries for programming and developing; A plurality of capillaries are for connecting the digital wiring of the communication of other digital modules; Saved a plurality of housings and connection, greatly reduced size, reduced costs, reduced and be electrically connected to number of times and the hermetically sealed reliability that improved again.
With respect to prior art, the present invention has following remarkable advantage:
(1) developed nonmagnetic alloy and seal glass that expansion coefficient equates, and nonmagnetic hermetically sealed glass sealing technology, thereby realize integrated and microminiaturized.
(2) expansion coefficient of each part equates, in very wide temperature range, three axis fluxgate magnetometers are in zero stress state, thereby demonstrates remarkable Temperature Modeling repeatability.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Fig. 2 is that the present invention is for the structural representation without the hermetically sealed navigational system of magnetic.
Fig. 3 is that the present invention is for the structural representation without the hermetically sealed navigational system of magnetic.
Fig. 4 is high-temp magnetic open gate circuit theory diagrams in the present invention.
Wherein: 1. capillary, 2. housing, 3.X axle measuring coil, 4.Y axle measuring coil, 5.Z axle measuring coil, 6. magnetic core, 7. circuit, 8. hermetically sealed cavity, 9. seal glass, 10. three axis fluxgates, 11. accelerometer X, 12. accelerometer Y, 13. accelerometer Z, 14. accelerometer control circuits, 15. gyroscope X, 16. gyroscope Y, 17. gyroscope Z, 18. gyroscope circuit, 19. electronics nude films, 20. without the hermetically sealed housing of magnetic, and 21. without the hermetically sealed upper end cover of magnetic.
Embodiment
The present invention is further described in conjunction with the embodiments with reference to the accompanying drawings.
Embodiment 1: a kind of without the hermetically sealed three axis fluxgate magnetometers of magnetic, developed nonmagnetic alloy and seal glass that expansion coefficient equates.Comprise measuring coil, magnetic core and circuit, realized integrated without the hermetically sealed encapsulation of magnetic.The measuring coil of described three quadratures, X-axis measuring coil, Y-axis measuring coil and Z axis measuring coil, form tri-of XYZ and measure axle; The center of described three measuring coils is provided with a shared magnetic core, forms three axis fluxgates; In described hermetically sealed cavity, go back integrative packaging and have exciting circuit and metering circuit; Described circuit, measuring coil and magnetic core are all in hermetically sealed cavity, and their connecting line is externally drawn with the capillary of glass insulation entirely.On described hermetically sealed cavity, by glass sintering, there are a plurality of capillaries; Described hermetically sealed cavity, capillary and housing are made by the nonmagnetic alloy material equating with glass swelling coefficient.The described skeleton without the measuring coil in the hermetically sealed chamber of magnetic is also to make without magnetic controlled expansion alloy with this, coiling measuring coil on skeleton, the described skeleton without the magnetic core in the hermetically sealed chamber of magnetic is also to make without magnetic controlled expansion alloy with this, coiling permalloy tape and winding on this skeleton.Because the expansion coefficient of each part is equal, in very wide temperature range, three axis fluxgate magnetometers are in zero stress state, thereby demonstrate remarkable Temperature Modeling repeatability.
Embodiment 2
A kind of without the hermetically sealed cavity of magnetic; the first step is installed after X-axis measuring coil, Y-axis measuring coil, Z axis measuring coil, magnetic core and the circuit of three axis fluxgate magnetometers, and second step is installed X-axis accelerometer, Y-axis accelerometer, Z axis accelerometer and its accelerometer control circuit; The 3rd step is installed X-axis gyroscope, Y-axis gyroscope, Z axis gyroscope and its gyroscope circuit; The 4th step is installed the sensor of other analog voltage output transducers or frequency output; The 5th step is installed digital-to-analog circuit; The 6th step mounting temperature sensor; The 7th step is installed microprocessor and storer and interface circuit; The 8th step is installed power converting circuit or power amplification circuit.To form a complete boat appearance frame of reference or inertial navigation measuring system without the hermetically sealed housing of magnetic and upper cover laser bonding, or a kinetic control system.A plurality of capillaries are for the power wiring of power supply, motor or electromagnet; The digital signal wiring of a plurality of capillaries for programming and developing; A plurality of capillaries are for connecting the digital wiring of the communication of other digital modules; Saved a plurality of housings and connection, greatly reduced size, reduced costs.Reduce and be electrically connected to number of times and the hermetically sealed reliability that improved again.
Though it is pointed out that above-described embodiment is to the present invention's detailed text description of contrasting, these large WDs are the simple description to mentality of designing of the present invention just, rather than the restriction to thinking of the present invention.Any combination, increase or modification that is no more than mentality of designing of the present invention, all falls within the scope of protection of the present invention.
Claims (3)
1. without the hermetically sealed three axis fluxgate magnetometers of magnetic, comprise housing, hermetically sealed cavity, measuring coil and magnetic core, it is characterized in that by glass sintering, having a plurality of capillaries on hermetically sealed cavity; Described hermetically sealed cavity, capillary and housing are made by the nonmagnetic alloy material equating with glass swelling coefficient.
2. according to claim 1 a kind ofly it is characterized in that without the hermetically sealed three axis fluxgate magnetometers of magnetic, described measuring coil comprises the measuring coil of three quadratures, and X-axis measuring coil, Y-axis measuring coil and Z axis measuring coil, form tri-of XYZ and measure axles; The center of described three measuring coils is provided with a shared magnetic core, forms three axis fluxgates; In described hermetically sealed cavity, go back integrative packaging and have exciting circuit and metering circuit; Described X-axis measuring coil, Y-axis measuring coil, Z axis measuring coil, magnetic core and circuit are all in hermetically sealed chamber, and their connecting line adopts the capillary of glass insulation externally to draw.
3. according to claim 1 a kind of without the hermetically sealed three axis fluxgate magnetometers of magnetic, it is characterized in that, the skeleton of described measuring coil also adopts the nonmagnetic alloy material equating with glass swelling coefficient to be made, coiling permalloy tape and winding on described skeleton.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320608774.3U CN203745624U (en) | 2013-09-29 | 2013-09-29 | Nonmagnetic full-sealed three-shaft fluxgate magnetometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320608774.3U CN203745624U (en) | 2013-09-29 | 2013-09-29 | Nonmagnetic full-sealed three-shaft fluxgate magnetometer |
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|---|---|
| CN203745624U true CN203745624U (en) | 2014-07-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201320608774.3U Expired - Lifetime CN203745624U (en) | 2013-09-29 | 2013-09-29 | Nonmagnetic full-sealed three-shaft fluxgate magnetometer |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103487771A (en) * | 2013-09-29 | 2014-01-01 | 北京纳特斯拉科技有限公司 | Non-magnetic fully-sealed triaxial fluxgate magnetometer |
| CN105470315A (en) * | 2014-09-26 | 2016-04-06 | 德克萨斯仪器股份有限公司 | Optoelectronic packages having through-channels for routing and vacuum |
| CN106569154A (en) * | 2016-11-15 | 2017-04-19 | 上海交通大学 | Three-shaft fluxgate sensor |
| RU190352U1 (en) * | 2018-06-06 | 2019-06-28 | Акционерное общество "Научно-исследовательский институт командных приборов" | Ferrozond for the diagnosis of the elements of a magnetometer |
-
2013
- 2013-09-29 CN CN201320608774.3U patent/CN203745624U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103487771A (en) * | 2013-09-29 | 2014-01-01 | 北京纳特斯拉科技有限公司 | Non-magnetic fully-sealed triaxial fluxgate magnetometer |
| CN103487771B (en) * | 2013-09-29 | 2016-08-31 | 北京纳特斯拉科技有限公司 | Non-magnetic fully-sealed triaxial fluxgate magnetometer |
| CN105470315A (en) * | 2014-09-26 | 2016-04-06 | 德克萨斯仪器股份有限公司 | Optoelectronic packages having through-channels for routing and vacuum |
| CN105470343A (en) * | 2014-09-26 | 2016-04-06 | 德克萨斯仪器股份有限公司 | Optically pumped sensors or references with die-to-package cavities |
| CN106569154A (en) * | 2016-11-15 | 2017-04-19 | 上海交通大学 | Three-shaft fluxgate sensor |
| RU190352U1 (en) * | 2018-06-06 | 2019-06-28 | Акционерное общество "Научно-исследовательский институт командных приборов" | Ferrozond for the diagnosis of the elements of a magnetometer |
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Granted publication date: 20140730 |
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| CX01 | Expiry of patent term |