CN203720145U - Electrochemical micro-fluidic chip - Google Patents
Electrochemical micro-fluidic chip Download PDFInfo
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- CN203720145U CN203720145U CN201420113601.9U CN201420113601U CN203720145U CN 203720145 U CN203720145 U CN 203720145U CN 201420113601 U CN201420113601 U CN 201420113601U CN 203720145 U CN203720145 U CN 203720145U
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- metal
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- fluidic chip
- electrochemical
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- 229910052751 metal Inorganic materials 0.000 claims abstract description 35
- 239000002184 metal Substances 0.000 claims abstract description 35
- 229910021607 Silver chloride Inorganic materials 0.000 claims abstract description 10
- HKZLPVFGJNLROG-UHFFFAOYSA-M silver monochloride Chemical compound [Cl-].[Ag+] HKZLPVFGJNLROG-UHFFFAOYSA-M 0.000 claims abstract description 10
- 239000000758 substrate Substances 0.000 claims description 17
- 239000012530 fluid Substances 0.000 claims description 9
- 229920001577 copolymer Polymers 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 abstract description 23
- 229910001385 heavy metal Inorganic materials 0.000 abstract description 14
- 238000000034 method Methods 0.000 abstract description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 8
- 238000005516 engineering process Methods 0.000 abstract description 6
- 238000002360 preparation method Methods 0.000 abstract description 6
- 239000002537 cosmetic Substances 0.000 abstract description 4
- 239000003814 drug Substances 0.000 abstract description 4
- 239000000575 pesticide Substances 0.000 abstract description 4
- 229920002120 photoresistant polymer Polymers 0.000 abstract description 4
- 238000005406 washing Methods 0.000 abstract description 4
- 150000001450 anions Chemical class 0.000 abstract description 2
- 230000008569 process Effects 0.000 abstract description 2
- 238000011978 dissolution method Methods 0.000 abstract 1
- 229940079593 drug Drugs 0.000 abstract 1
- 239000002917 insecticide Substances 0.000 abstract 1
- 238000005459 micromachining Methods 0.000 abstract 1
- 238000000465 moulding Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 description 8
- 239000000243 solution Substances 0.000 description 7
- 238000004458 analytical method Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 5
- 238000011161 development Methods 0.000 description 5
- RECVMTHOQWMYFX-UHFFFAOYSA-N oxygen(1+) dihydride Chemical compound [OH2+] RECVMTHOQWMYFX-UHFFFAOYSA-N 0.000 description 4
- 238000004026 adhesive bonding Methods 0.000 description 3
- 239000003905 agrochemical Substances 0.000 description 3
- 238000013459 approach Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000004445 quantitative analysis Methods 0.000 description 3
- 231100000331 toxic Toxicity 0.000 description 3
- 230000002588 toxic effect Effects 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004587 chromatography analysis Methods 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
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- 238000012545 processing Methods 0.000 description 2
- 238000004451 qualitative analysis Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical class [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
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- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000003651 drinking water Substances 0.000 description 1
- 235000020188 drinking water Nutrition 0.000 description 1
- 238000003894 drinking water pollution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000000840 electrochemical analysis Methods 0.000 description 1
- 238000000835 electrochemical detection Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000004993 emission spectroscopy Methods 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
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- 239000003292 glue Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000002354 inductively-coupled plasma atomic emission spectroscopy Methods 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 239000003456 ion exchange resin Substances 0.000 description 1
- 229920003303 ion-exchange polymer Polymers 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
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- 238000004544 sputter deposition Methods 0.000 description 1
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- 238000003950 stripping voltammetry Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000000870 ultraviolet spectroscopy Methods 0.000 description 1
- 239000003643 water by type Substances 0.000 description 1
Landscapes
- Automatic Analysis And Handling Materials Therefor (AREA)
Abstract
The utility model discloses an electrochemical micro-fluidic chip. The electrochemical micro-fluidic chip comprises a metal Cr layer arranged on a base, wherein a metal Au layer is arranged on the metal Cr layer; the metal Au layer is provided with a metal Bi layer which is used as a working electrode and an electrode Ag or AgCl layer which is used as an auxiliary electrode; the base is provided with an upper cover; a gap between the upper cover and the base is a micro-fluidic channel. According to the electrochemical micro-fluidic chip, a portable-type water body ion online detector chip based on an electrochemical dissolution method is prepared by using an MEMS (Micro-electromechanical Systems) micro-machining technology; only a common ultraviolet light source needs to be used; the excellent high-precision structure molding capability of photoresist is used and a common mask is used so as to finish the preparation of the electrochemical micro-fluidic chip. The electrochemical micro-fluidic chip is simple in process and low in cost and is easily produced in batches. The electrochemical micro-fluidic chip not only can be used for detecting heavy metal in water and can also be used for measuring residues of anions, pesticides, insecticides, drugs, cosmetics, washing products and the like.
Description
Technical field
The utility model relates to a kind of to residual galvanochemistry micro flow chip of heavy metal ion, negative ion, agricultural chemicals, pesticide, medicine, cosmetics and articles for washing etc. in water and preparation method thereof, in particular to the micro-fluidic detection chip of a kind of galvanochemistry of preparing based on micro-nano process technology and manufacture method thereof.
Background technology
Along with socioeconomic fast development, water body comprises river, river, lake, sea and underground water intermediate ion, comprises that heavy metal cation and anion concentration also constantly raise.Because development pattern is extensive, pollute long-term accumulated, the relevant harmful toxic matter such as some basin Regional Gravity And metals pollutes very outstanding, and particularly mercury, chromium, cadmium, lead, the heavy metal pollution of arsenic class highlight.The harmful toxic matter such as heavy metal pollutes and causes taking place frequently of drinking water pollution accident, require us must strengthen improvement and the control and monitoring that the harmful toxic matters such as heavy metal are polluted, set up comprehensive monitoring and early warning system, to eliminate the harm to ecological environment security and drinking water safety.
At present, the detection of these ions is also rested on to spot sampling, deliver to the conventional program that laboratory is detected.This not only can not grasp the information of object ion concentration change and distribution in time, gets its migration and variation rule in environment clear, to formulating the policy of corresponding pollution abatement, provides foundation accurately.And the impact of various factors tends to change form and the concentration of sample component in sample collection, storage, transportation.
At present the detection method of heavy metal ion is had to atomic absorption spectrography (AAS) (AAS), atom fluorescent luminosity method (AFS), inductive coupling emission spectrometry (ICP-AES), inductive coupling mass spectroscopy (ICP-MS) and the chromatography of ions etc.In these methods, AAS and AFS need the heavy metal ion in solution to be gasificated into gas atom form (temperature approximately 1,000K-1,500K), again by measuring it to the absorbance log of resonance absorption light (AAS) or the wavelength of fluorescence giving off after being stimulated, and intensity (AFS) is carried out quantitative and qualitative analysis calculating.ICP method more will be heated as heavy metal ion plasma, and (temperature reaches 10,000K), then records atomic emission spectrum (AES) or carries out mass-spectrometer measurement and carry out qualitative and quantitative analysis.AAS, AFS and ICP method, detectability is at 10-7-10-10mol/L, the range of linearity wide (3-5 the order of magnitude), precision is high, except AAS can carry out multielement and Determination of Different Valence States.But the instrument operation expense of these methods is high, and analysis time is long, can not carry out field quick detection.The chromatography of ions, is to utilize the different exchange capacity of different ion pair ion exchange resin to carry out separated different ion, leads or ultraviolet-visible spectrophotometer detects, simultaneously the separated different kinds of ions that detects in electricity consumption.Sample needs pre-service (filter, extraction, saltouts etc.), and the manufacture of separating column requires higher.
Electrochemical Stripping voltammetry is considered to detect the effective method the most of water body intermediate ion, especially heavy metal ion always.Portable water ion on-line detector based on Electrochemical Stripping Analysis, can realize the scene of above-mentioned Heavy Metals in Waters ion and some negative ion, online, fast detecting.
Electrochemical Stripping analytic approach is in solution, to have different electrochemical properties according to different band electron ion, and the electric current by measuring the electromotive force in oxidation/reduction process and producing, carries out qualitative, quantitative method.Generally acknowledge at present a kind of quick, accurately, sensitive analytical approach.Because instrument equipment is simple, be easy to operately easy to miniaturization.And Electrochemical Detection unit is also detection chip, be the core of Electrochemical Stripping analytic approach, it will complete in the lump to the measurement of the enrichment of ion, electrolysis stripping and current potential, electric current.
Utility model content
The purpose of this utility model is to overcome the above problem that prior art exists, a kind of galvanochemistry micro flow chip and preparation method thereof is provided, overcome the deficiency of the detecting instrument of existing heavy metal ion, portable water ion on-line detector principle of work based on Electrochemical Stripping Analysis, utilize MEMS processing (photoetching, sputter, electroplate) technology, on polymkeric substance COC substrate, prepare a kind of portable water ion on-line detector chip based on Electrochemical Stripping Analysis, through Accurate Calibration, make it meet heavy metal, negative ion, agricultural chemicals, pesticide, medicine, cosmetics, wait on-line testing requirement with articles for washing etc. is residual.
For realizing above-mentioned technical purpose, reach above-mentioned technique effect, the utility model is achieved through the following technical solutions:
A kind of galvanochemistry micro flow chip, comprise and be arranged on suprabasil Metal Cr layer, on described Metal Cr layer, be provided with metal A u layer, on described metal A u layer, be provided with as the metal Bi layer of working electrode with as Electrode Ag or the AgCl layer of auxiliary electrode, in described substrate, be provided with upper cover, the space between upper cover and substrate is fluid channel.
Preferably, described substrate is cyclenes copolymer material.
Preferably, described fluid channel is cyclenes copolymer material.
Preferably, described upper cover is strip, and middle part is wider than two ends, and two ends are fillet, and upper cover center is the groove that holds described galvanochemistry micro flow chip.
The beneficial effects of the utility model are:
The utility model is the portable water ion on-line detector chip based on Electrochemical Stripping Analysis with the preparation of MEMS Micrometer-Nanometer Processing Technology, and only need use general ultraviolet light source, high-precision configuration forming ability by photoresist excellence, use common mask, just can complete the preparation of galvanochemistry micro flow chip unit.The utility model technique is simple, cost is low, and is easy to mass production.
The utility model can not only detect for water heavy metal, also can be for residual etc. the measurement of negative ion, agricultural chemicals, pesticide, medicine, cosmetics, articles for washing.
Above-mentioned explanation is only the general introduction of technical solutions of the utility model, in order to better understand technological means of the present utility model, and can be implemented according to the content of instructions, below with preferred embodiment of the present utility model and coordinate accompanying drawing to be described in detail as follows.Embodiment of the present utility model is provided in detail by following examples and accompanying drawing thereof.
Accompanying drawing explanation
Accompanying drawing described herein is used to provide further understanding of the present utility model, forms the application's a part, and schematic description and description of the present utility model is used for explaining the utility model, does not form improper restriction of the present utility model.In the accompanying drawings:
The galvanochemistry micro flow chip schematic diagram that Fig. 1 provides for the utility model;
Fig. 2 a is splash-proofing sputtering metal layer Cr layer, Au layer and Bi layer;
Fig. 2 b is etching metal Bi layer;
Fig. 2 c is etching metal A u layer;
Fig. 2 d is electroplated electrode Ag or AgCl layer;
Fig. 2 e is for removing unnecessary Metal Cr layer;
Fig. 2 f is encapsulation microfluid raceway groove and electrode basement;
Fig. 3 is superstructure schematic diagram.
Wherein: 1, Metal Cr layer, 2, metal A u layer, 3, metal Bi layer, 4, Electrode Ag or AgCl layer, 5, substrate, 6, fluid channel, 7, upper cover.
Embodiment
Below with reference to the accompanying drawings and in conjunction with the embodiments, describe the utility model in detail.
Shown in Fig. 1, a kind of galvanochemistry micro flow chip, comprise the Metal Cr layer 1 being arranged in substrate 5, on described Metal Cr layer 1, be provided with metal A u layer 2, on described metal A u layer 2, be provided with as the metal Bi layer 3 of working electrode with as Electrode Ag or the AgCl layer 4 of auxiliary electrode, in described substrate 5, be provided with upper cover 7, the space between upper cover 7 and substrate 5 is fluid channel 6.Described substrate 5 and fluid channel 6 are cyclenes copolymer material.Shown in Fig. 3, described upper cover 7 is strip, and middle part is wider than two ends, and two ends are fillet, and upper cover 7 centers are the groove that holds described galvanochemistry micro flow chip.
Shown in Fig. 2 a to Fig. 2 f, the present embodiment is implemented under following implementation condition and technical requirement condition:
(1) clean.Three inches of cyclenes copolymers (COC) are substrate 5, and acetone, ethanol, deionized water respectively clean 5 minutes, with nitrogen, dry up afterwards, are placed in super-clean environment.
(2), in the COC substrate 5 of 3 inches, the Metal Cr layer 1 that in the COC substrate 5 after cleaning up, first sputter a layer thickness is 20-50nm is as articulamentum.
(3) metal A u layer 2 sputter.On the Metal Cr layer 1 of sputter, the golden film that sputter a layer thickness is 100-200nm.
(4) metal Bi layer 3 sputter.On the metal A u of sputter layer 2, then sputter a layer thickness bismuth film that is 100-150nm.
(5) graphical Bi electrode.On the metal Bi of sputter layer 3, utilize the steps such as gluing, exposure and development in MEMS technique, figure dissolves metal Bi electrode pattern.
(6) metal Bi layer 3 etching.Utilize metal Bi etching solution, remove unnecessary metal Bi, then remove unnecessary photoresist.
(7) graphical Au electrode.On metal Bi layer 3 after etching, utilize the steps such as gluing, exposure and development in MEMS technique, figure dissolves metal A u electrode pattern.
(8) metal A u layer 2 etching.Utilize metal A u etching solution, remove unnecessary metal A u, then remove unnecessary photoresist.
(9) patterned electrodes Ag or AgCl layer 4.On metal A u layer 2 after etching, utilize the steps such as gluing, exposure and development in MEMS technique, figure dissolves metal A g or AgCl electrode pattern.
(10) Electrode Ag or AgCl layer 4 are electroplated.In the silver-colored electroplating solution configuring, carry out the plating of Ag or AgCl electrode.
(11) fluid channel 6 preparations.Utilize injection molding technology, prepare the microfluid raceway groove with the micro-base material of COC.
(12) encapsulation.Utilize ultra-violet curing glue, the telephoning telephony test electrode substrate preparing and fluid channel 6 are encapsulated, form electro-chemical test chip.
The foregoing is only preferred embodiment of the present utility model, be not limited to the utility model, for a person skilled in the art, the utility model can have various modifications and variations.All within spirit of the present utility model and principle, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection domain of the present utility model.
Claims (4)
1. a galvanochemistry micro flow chip, it is characterized in that: comprise the Metal Cr layer (1) being arranged in substrate (5), on described Metal Cr layer (1), be provided with metal A u layer (2), on described metal A u layer (2), be provided with as the metal Bi layer (3) of working electrode with as Electrode Ag or the AgCl layer (4) of auxiliary electrode, in described substrate (5), be provided with upper cover (7), the space between upper cover (7) and substrate (5) is fluid channel (6).
2. galvanochemistry micro flow chip according to claim 1, is characterized in that: described substrate (5) is cyclenes copolymer material.
3. galvanochemistry micro flow chip according to claim 1, is characterized in that: described fluid channel (6) is cyclenes copolymer material.
4. galvanochemistry micro flow chip according to claim 1, is characterized in that: described upper cover (7) is strip, and middle part is wider than two ends, and two ends are fillet, and upper cover (7) center is the groove that holds described galvanochemistry micro flow chip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420113601.9U CN203720145U (en) | 2014-03-13 | 2014-03-13 | Electrochemical micro-fluidic chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420113601.9U CN203720145U (en) | 2014-03-13 | 2014-03-13 | Electrochemical micro-fluidic chip |
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| Publication Number | Publication Date |
|---|---|
| CN203720145U true CN203720145U (en) | 2014-07-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201420113601.9U Expired - Lifetime CN203720145U (en) | 2014-03-13 | 2014-03-13 | Electrochemical micro-fluidic chip |
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| Country | Link |
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| CN (1) | CN203720145U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103822961A (en) * | 2014-03-13 | 2014-05-28 | 南京洁态环保科技有限公司 | Electrochemical microfluidic chip and preparation method thereof |
| CN105399051A (en) * | 2015-12-29 | 2016-03-16 | 南京洁态环保科技有限公司 | Method for packaging microfluidic chip with cyclo-olefin copolymer (COC) substrate and COC upper cover |
| CN105548315A (en) * | 2016-02-02 | 2016-05-04 | 苏州甫一电子科技有限公司 | Polymer micro-fluidic chip and preparation method thereof |
| CN106093168A (en) * | 2016-06-14 | 2016-11-09 | 中国科学院合肥物质科学研究院 | Phosphate radical electrochemical sensor based on MEMS technology and the application in dynamically detection phosphate radical thereof |
-
2014
- 2014-03-13 CN CN201420113601.9U patent/CN203720145U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103822961A (en) * | 2014-03-13 | 2014-05-28 | 南京洁态环保科技有限公司 | Electrochemical microfluidic chip and preparation method thereof |
| CN105399051A (en) * | 2015-12-29 | 2016-03-16 | 南京洁态环保科技有限公司 | Method for packaging microfluidic chip with cyclo-olefin copolymer (COC) substrate and COC upper cover |
| CN105548315A (en) * | 2016-02-02 | 2016-05-04 | 苏州甫一电子科技有限公司 | Polymer micro-fluidic chip and preparation method thereof |
| CN106093168A (en) * | 2016-06-14 | 2016-11-09 | 中国科学院合肥物质科学研究院 | Phosphate radical electrochemical sensor based on MEMS technology and the application in dynamically detection phosphate radical thereof |
| CN106093168B (en) * | 2016-06-14 | 2018-12-07 | 中国科学院合肥物质科学研究院 | Phosphate radical electrochemical sensor based on MEMS technology and its application in dynamic detection phosphate radical |
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Denomination of utility model: Electrochemical microfluidic chip and preparation method thereof Effective date of registration: 20170412 Granted publication date: 20140716 Pledgee: Bank of Nanjing Jiangbei District branch of Limited by Share Ltd. Pledgor: NANJING JIETAI ENVIRONMENTAL PROTECTION TECHNOLOGY Co.,Ltd. Registration number: 2017320000010 |
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Date of cancellation: 20191014 Granted publication date: 20140716 Pledgee: Bank of Nanjing Jiangbei District branch of Limited by Share Ltd. Pledgor: NANJING JIETAI ENVIRONMENTAL PROTECTION TECHNOLOGY Co.,Ltd. Registration number: 2017320000010 |
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Effective date of registration: 20210107 Address after: 215000 No.1, Songhe Road, Luzhi Town, Wuzhong District, Suzhou City, Jiangsu Province Patentee after: Jiangsu Guoji Juneng Environmental Technology Co.,Ltd. Address before: No. 24-88, Qiaolin Industrial Park, Pukou District, Nanjing City, Jiangsu Province, 210000 Patentee before: NANJING JIETAI ENVIRONMENTAL PROTECTION TECHNOLOGY Co.,Ltd. |
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