CN203705916U

CN203705916U - Safe interlocking device

Info

Publication number: CN203705916U
Application number: CN201320891245.9U
Authority: CN
Inventors: 谢伟; 陈威; 岳丰
Original assignee: Shanghai Huahong Grace Semiconductor Manufacturing Corp
Current assignee: Shanghai Huahong Grace Semiconductor Manufacturing Corp
Priority date: 2013-12-31
Filing date: 2013-12-31
Publication date: 2014-07-09
Anticipated expiration: 2023-12-31

Abstract

The utility model discloses a safe interlocking device which is used between a semiconductor production machine platform and a silicon chip box conveying machine. The safe interlocking device comprises a proximity switch, wherein the proximity switch is controlled to be turned on or off through a proximity switch sensor signal, on-off signals are output to a control end of the relay, a common end of the relay is connected to an alarm signal of a machine platform end, a first output end of the relay is connected to an operation control end of the production machine platform, and a second output end of the relay is connected to an on-off switch. The safe interlocking device is characterized in that when a pressing block approaches, a proximity switch sensor enables the proximity switch to be turned on; according to the on-off signals of the proximity switch, the relay is used for controlling the semiconductor production machine platform and the silicon chip box conveying machine to stop working, and therefore the phenomenon that the machine platform collide with each other can be prevented.

Description

Safety mutually-locking device

Technical field

The utility model relates to field of semiconductor manufacture, particularly relates to a kind of for the safety mutually-locking device between semiconductor production board and silicon box transporter.

Background technology

Conventional semiconductors is produced between board and silicon box transporter and is lacked communication connection, cannot realize the safety interlock function of producing between board and silicon box transporter, conflicts with the conveyance of silicon box transporter thereby may produce board, produces fault in production.For example: silicon box transporter in product is sent into board after, in the situation that silicon box transporter is not got back to home, due to without interlock function, now board action can cause board and silicon box transporter to have collision.Or in the time that board is not finished operation to product, due to without interlock function, the action of silicon box transporter can cause itself and board, the even collision of silicon chip, causes product or equipment damage.

Utility model content

The technical problems to be solved in the utility model is to provide a kind of for the safety mutually-locking device between semiconductor production board and silicon box transporter, comprise: approach switch, it is disconnected by approach switch sensor signal controlling or is closed, and output make-and-break signal is to the control end of relay; The alerting signal of the common port junctor you of relay, the first output terminal of relay connects produces board operation control end, and the second output terminal of relay connects on-off switch.

When the utility model work, briquetting dress sensor is set on silicon box transporter briquetting, arrange approach switch sensor corresponding to briquetting sensor on board; When silicon box transporter is carrying out vertical motion, briquetting sensor departs from approach switch sensor, and approach switch sensor output signal makes the output of approach switch in off-state; When silicon box transporter completes after down maneuver, briquetting sensor approaches approach switch sensor, and approach switch sensor output signal makes the output of approach switch in conducting state.The make-and-break signal of approach switch, as a switching signal, is connected to the control end of relay, the state of pilot relay, by the alerting signal of board end, is connected to the common port of relay, the first output terminal of relay is connected to produces board operation control end, and production control board quits work.The second output terminal of relay connects on-off switch, controls film magazine transporter and quits work

The utility model is approach switch conducting in the time that briquetting sensor approaches approach switch sensor, utilizes Control semiconductor production board to quit work according to the make-and-break signal of approach switch, can avoid occurring the situation of board and the collision of silicon box transporter.

Accompanying drawing explanation

Below in conjunction with accompanying drawing and embodiment, the utility model is described in further detail:

Fig. 1 is the structural representation of the utility model one embodiment.

Embodiment

As shown in Figure 1, the utility model one embodiment comprises: the briquetting dress sensor on silicon box transporter briquetting, arrange approach switch sensor corresponding to briquetting sensor on board;

Approach switch, it is disconnected by approach switch sensor signal controlling or is closed, and output make-and-break signal is to the control end of relay; The alerting signal of the common port junctor you of relay, the first output terminal of relay connects produces board operation control end, and the second output terminal of relay connects on-off switch, controls film magazine transporter and quits work.

When the utility model is applied to actual production equipment, can adopt on silicon box transporter briquetting and install sensor additional, in the operating table surface corresponding with briquetting sensor, approach switch sensor is set, when silicon box transporter is carrying out vertical motion, briquetting sensor departs from approach switch sensor, and approach switch sensor output signal makes the output of approach switch in off-state; When silicon box transporter completes after down maneuver, briquetting sensor approaches approach switch sensor, and approach switch sensor output signal makes the output of approach switch in conducting state.The make-and-break signal of approach switch, as a switching signal, be connected to the control end of relay, the state of pilot relay, (is applicable to 5 volts of the direct currents of industrial control computer or logic programmable controller, 12 volts by the alerting signal of board end, or 24 vor signal), be connected to the common port of relay, the output of relay is connected to for example produces board operation control end: any alerting signal of industrial control computer or logic programmable controller, production control board quits work.

Below through the specific embodiment and the embodiment the utility model is had been described in detail, but these not form restriction of the present utility model.In the situation that not departing from the utility model principle, those skilled in the art also can make many distortion and improvement, and these also should be considered as protection domain of the present utility model.

Claims

1. for the safety mutually-locking device between semiconductor production board and silicon box transporter, it is characterized in that, comprising: approach switch, it is disconnected by approach switch sensor signal controlling or is closed, and output make-and-break signal is to the control end of relay; The alerting signal of the common port junctor you of relay, the first output terminal of relay connects produces board operation control end, and the second output terminal of relay connects on-off switch.