CN203705821U - Levelling mechanism for photomask bracket - Google Patents
Levelling mechanism for photomask bracket Download PDFInfo
- Publication number
- CN203705821U CN203705821U CN201420046395.4U CN201420046395U CN203705821U CN 203705821 U CN203705821 U CN 203705821U CN 201420046395 U CN201420046395 U CN 201420046395U CN 203705821 U CN203705821 U CN 203705821U
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- CN
- China
- Prior art keywords
- upper cover
- screw
- hole
- light shield
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
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Abstract
The utility model discloses a levelling mechanism for a photomask bracket. The levelling mechanism comprises a quadrangular base and a photomask bracket; through holes are formed in the four corners of the quadrangular base; a support frame is arranged above each through hole, and comprises an upper cover and side walls supporting the upper cover; the bottom of the upper cover of the support frame takes the shape of a convex spherical surface; connecting rods are mounted at the four corners of the photomask bracket upward, and penetrate through the corresponding through holes in the quadrangular base; the end parts of the connecting rods extend into the support frames; the end part of each connecting rod takes a concave spherical surface shape, and is fitted with the convex spherical surface shape of the bottom of the upper cover; bolt through holes are formed in the upper covers; screw holes are formed in the end parts of the connecting rods; bolts penetrate in the screw holes of the end parts of the connecting rods passing the bolt through holes from the upper covers; the diameter of the bolt through holes is greater than that of the bolts. The levelling mechanism can conduct suspending levelling on the photomask bracket; the photomask bracket does not slide during the levelling, and is easy to fix after the levelling; the whole operation process is cushy and fast.
Description
Technical field
The utility model relates to exposure machine preparation field, in particular to a kind of light shield support levelling gear.
Background technology
Exposure machine refers to by opening light and sends ultraviolet ray, the image information on film or other transparent bodies is transferred to the lip-deep equipment that scribbles photoactive substance, has now been widely used in semiconductor, microelectronics, biological device and nanosecond science and technology neck.The light shield support of exposure machine inside is used for placing light shield, and light shield is selected to see through to ultraviolet light, so that the photoactive substance egative film below light shield prints out various figures, and then the corresponding circuit of carve.In real work, it is mutually vertical with ultraviolet ray that light shield must be placed level, if angle generation deflection can not accurately on photoactive substance egative film, print by the figure on light shield, thereby finally cause circuit incompleteness.At present main manual adjustment light shield support makes light shield level, and in adjustment process, the position of light shield support is wayward, easily slides, and leveling is fixing difficulty later, makes the whole course of work loaded down with trivial details, operation effort.
Utility model content
The purpose of this utility model is to provide a kind of light shield support levelling gear, and this mechanism can be to the leveling that suspends of light shield support, and leveling time cover stent does not slide, and easily fixing after leveling, whole operating process is easily quick.
For achieving the above object, the utility model is taked following technical scheme:
A kind of light shield support levelling gear, comprise quadrilateral pedestal and light shield support, it is characterized in that, four jiaos of quadrilateral pedestal are provided with through hole, each through hole top is provided with carriage, carriage is made up of the sidewall of upper cover and support upper cover, the upper cover bottom of carriage is protruding spheric, four jiaos, described light shield support is all upwards provided with connecting rod, each connecting rod stretches into end in carriage through corresponding through hole on quadrilateral pedestal, each interlinking lever end is concave spherical and fits with the protruding spheric of described upper cover bottom, be provided with screwing through hole upper covering, be equipped with screw at interlinking lever end, in the screw of interlinking lever end, be installed with screw through screwing through hole from upper cover, the diameter of described screwing through hole is greater than the diameter of described screw.
The screwing through hole of described upper cover is four, be evenly distributed in around the centre normal of protruding spheric of upper cover bottom, the screw of described interlinking lever end is four, is evenly distributed in around the centre normal of concave spherical of interlinking lever end, is all installed with screw in described screwing through hole and screw.
Between described screw and the upper surface of described upper cover, cushion block is installed, the upper surface contact position of described cushion block and upper cover is protruding spheric, and the upper surface of described upper cover and described cushion block contact position are concave spherical.
In technique scheme, light shield support is connected with carriage by connecting rod, be suspended in quadrilateral pedestal below, the upper cover bottom of interlinking lever end and carriage is respectively concavo-convex spheric, and the two fixes by screw after fitting tightly, when this is conducive to leveling light shield support, interlinking lever end still can carry out close contact with upper cover bottom after move to any direction upper cover bottom, can after leveling is fastening, not carry out less desirable slip; Cushion block between screw and upper cover upper surface is protruding sphere, and upper surface and cushion block contact position are concave spherical surface, also can make the two combine closely, and after can making screw comply with connecting rod to move, the direction of screw on it, is closely connected with upper cover base connecting rod.
Accompanying drawing explanation
Fig. 1 is the one-piece construction schematic diagram of the utility model during to catotropia;
Fig. 2 is the one-piece construction schematic diagram of the upward apparent time of the utility model;
Fig. 3 is carriage partial top view;
Fig. 4 is the cut-open view of Fig. 3 along A-A direction.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described further:
As shown in Figure 1, Figure 2, Figure 3 and Figure 4, quadrilateral pedestal 1 is fixed on exposure machine, on four angles of quadrilateral pedestal 1, all offer through hole 12, carriage 4 is all installed above each through hole 12, carriage 4 is made up of sidewall 10 and the sidewall 11 of upper cover 9 and support upper cover 9, is protruding spheric 7 in the bottom of upper cover 9 to lower convexity.Light shield support 2 is positioned at the below of quadrilateral pedestal 1, on four angles of light shield support 2, connecting rod 5 is all upwards installed, and connecting rod 5 passes and stretches in carriage 4 from the corresponding through hole 12 of quadrilateral pedestal 1, and connecting rod 5 ends are concave spherical 8.Concave spherical 8 fits with corresponding protruding spheric 7.On upper cover 9, be provided with screwing through hole 13, the diameter of bolt hole is greater than the diameter of screw 3, and connecting rod 5 ends are provided with screw 14, and screw 3 penetrates to the screw 14 of connecting rod 5 ends through bolt hole 13 downwards from upper cover 9, and connecting rod 5 and upper cover 9 are fixed together.In order to increase tightness, on the upper surface of bolt 3 and upper cover 9, be lined with cushion block 6, cushion block 6 is protruding spheric with upper cover 9 contact positions, upper cover 9 is concave spherical with cushion block 6 contact positions, this is conducive to the two laminating, even if cushion block 6 changes direction run-off the straight vertically downward, always also can guarantee that a little position contacts thereby strong friction occurs with upper cover 9, (as run-off the straight, rather than vertically downward) still can effectively be paved and do not got loose changing after direction so just can to make screw 3.Screwing through hole 13 and screw 14 are generally 4, and screwing through hole 13 is evenly distributed in the centre normal surrounding of protruding spheric 7, and screw 14 is evenly distributed in the centre normal surrounding of concave spherical 8.
While utilizing this mechanism to carry out leveling to light shield support 2, the first screw 3 on suitably loosening each carriage 4, then start manual leveling light shield support 2, light shield support 2 is in leveling process, all likely slide in the position of each connecting rod 5 relative upper cover 9 bottoms under manually, in the time that correct position is arrived in leveling, each connecting rod 5 may have new position with respect to the bottom of the upper cover 9 of carriage 4 separately, but because be the design of concavo-convex sphere, no matter where be, between two spheres, all can there is microcosmic stress point to carry out rubbing contact, can rest on new position and can arbitrarily not slide, because the diameter of screwing through hole 13 is greater than the diameter of screw 3, make screw 3 have freely movable surplus, therefore screw 3 can be moved and tilt along with the screw of connecting rod 5 14, after arriving leveling position, can make between connecting rod 5 and upper cover 9 more fastening by fastening each screw 3, reduce slippage and lose flat possibility.After screw 3 run-off the straights, between the upper surface of cushion block 6 and upper cover 9 because be also the design of concavo-convex sphere, can make cushion block 6 after being moved, still keep there is larger friction force between the upper surface of upper cover 9, finally make screw 3 still can effectively be paved after run-off the straight, thereby keep larger painstaking degree, prevent the slippage that fluffs.
The advantage of this mechanism is suitably to become flexible when screw 3 carries out leveling and also can keeps can not making light shield support 2 arbitrarily move compared with large friction, only under manual effect, moves forward into the leveling of departure date prestige; After leveling, can also convert according to reposition the orientation of screw 3, thereby can make all the time to carry out between connecting rod 5 and upper cover 9 effectively fastening.After convenient two the above-mentioned key factors of leveling front-to-back effect work are effectively solved, it is easily quick that whole leveling work just becomes.
The present embodiment is an explanation to the utility model design and realization just, is not limited, and under the utility model design, the technical scheme converting without essence is still in protection domain.
Claims (3)
1. a light shield support levelling gear, comprise quadrilateral pedestal and light shield support, it is characterized in that, four jiaos of quadrilateral pedestal are provided with through hole, each through hole top is provided with carriage, carriage is made up of the sidewall of upper cover and support upper cover, the upper cover bottom of carriage is protruding spheric, four jiaos, described light shield support is all upwards provided with connecting rod, each connecting rod stretches into end in carriage through corresponding through hole on quadrilateral pedestal, each interlinking lever end is concave spherical and fits with the protruding spheric of described upper cover bottom, be provided with screwing through hole upper covering, be equipped with screw at interlinking lever end, in the screw of interlinking lever end, be installed with screw through screwing through hole from upper cover, the diameter of described screwing through hole is greater than the diameter of described screw.
2. light shield support levelling gear as claimed in claim 1, it is characterized in that, the screwing through hole of described upper cover is four, be evenly distributed in around the centre normal of protruding spheric of upper cover bottom, the screw of described interlinking lever end is four, be evenly distributed in around the centre normal of concave spherical of interlinking lever end, in described screwing through hole and screw, be all installed with screw.
3. light shield support levelling gear as claimed in claim 1 or 2, it is characterized in that, between described screw and the upper surface of described upper cover, cushion block is installed, the upper surface contact position of described cushion block and upper cover is protruding spheric, and the upper surface of described upper cover and described cushion block contact position are concave spherical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420046395.4U CN203705821U (en) | 2014-01-25 | 2014-01-25 | Levelling mechanism for photomask bracket |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420046395.4U CN203705821U (en) | 2014-01-25 | 2014-01-25 | Levelling mechanism for photomask bracket |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203705821U true CN203705821U (en) | 2014-07-09 |
Family
ID=51056234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420046395.4U Withdrawn - After Issue CN203705821U (en) | 2014-01-25 | 2014-01-25 | Levelling mechanism for photomask bracket |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203705821U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103792796A (en) * | 2014-01-25 | 2014-05-14 | 保定来福光电科技有限公司 | Photomask support levelling mechanism |
| CN113309785A (en) * | 2020-02-27 | 2021-08-27 | 上海微电子装备（集团）股份有限公司 | Air bearing device, motion table and photoetching equipment |
-
2014
- 2014-01-25 CN CN201420046395.4U patent/CN203705821U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103792796A (en) * | 2014-01-25 | 2014-05-14 | 保定来福光电科技有限公司 | Photomask support levelling mechanism |
| CN113309785A (en) * | 2020-02-27 | 2021-08-27 | 上海微电子装备（集团）股份有限公司 | Air bearing device, motion table and photoetching equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20140709 Effective date of abandoning: 20170711 |
|
| AV01 | Patent right actively abandoned |