CN103792796A - Photomask support levelling mechanism - Google Patents
Photomask support levelling mechanism Download PDFInfo
- Publication number
- CN103792796A CN103792796A CN201410034588.2A CN201410034588A CN103792796A CN 103792796 A CN103792796 A CN 103792796A CN 201410034588 A CN201410034588 A CN 201410034588A CN 103792796 A CN103792796 A CN 103792796A
- Authority
- CN
- China
- Prior art keywords
- upper cover
- screw
- hole
- light shield
- connecting rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 11
- 238000000034 method Methods 0.000 abstract description 5
- 239000000725 suspension Substances 0.000 abstract 1
- 239000000126 substance Substances 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Landscapes
- Vibration Prevention Devices (AREA)
- Media Introduction/Drainage Providing Device (AREA)
Abstract
The invention discloses a photomask support levelling mechanism. The photomask support levelling mechanism comprises a quadrangle base and a photomask support, wherein four corners of the quadrangle base have through holes; a supporting frame is arranged above each through hole and is composed of an upper cover and a side wall for supporting the upper cover, the bottom of the upper cover of the supporting frame is in a convex sphere shape, and each of the four corners of the photomask support is upward provided with a connecting rod; each connecting rod passes through the corresponding through hole in the quadrangle base, and the end part of each connecting rod stretches into the supporting frame; the end part of each connecting rod is in a concave sphere shape and is fitted with the convex sphere shape of the bottom of the upper cover, the upper cover has a screw through hole, the end parts of the connecting rods have screw holes, a screw penetrates from the screw through hole to the screw holes formed in the end parts of the connecting rods, and the diameter of the screw through hole is greater than that of the screw. The mechanism provided by the invention has the advantages that the photomask support is subjected to suspension leveling and does not slide in leveling, the photomask support is easy to fix after leveling, and the whole operation process is easy and convenient.
Description
Technical field
The present invention relates to relate to exposure machine preparation field, in particular to a kind of light shield support levelling gear.
Background technology
Exposure machine refers to by opening light and sends ultraviolet ray, the image information on film or other transparent bodies is transferred to the lip-deep equipment that scribbles photoactive substance, has now been widely used in semiconductor, microelectronics, biological device and nanosecond science and technology neck.The light shield support of exposure machine inside is used for placing light shield, and light shield is selected to see through to ultraviolet light, so that the photoactive substance egative film below light shield prints out various figures, and then the corresponding circuit of carve.In real work, it is mutually vertical with ultraviolet ray that light shield must be placed level, if angle generation deflection can not accurately on photoactive substance egative film, print by the figure on light shield, thereby finally cause circuit incompleteness.At present main manual adjustment light shield support makes light shield level, and in adjustment process, the position of light shield support is wayward, easily slides, and leveling is fixing difficulty later, makes the whole course of work loaded down with trivial details, operation effort.
Summary of the invention
The object of this invention is to provide a kind of light shield support levelling gear, this mechanism can be to the leveling that suspends of light shield support, and leveling time cover stent does not slide, and easily fixing after leveling, whole operating process is easily quick.
For achieving the above object, the present invention takes following technical scheme:
A kind of light shield support levelling gear, comprise quadrilateral pedestal and light shield support, it is characterized in that, four jiaos of quadrilateral pedestal are provided with through hole, each through hole top is provided with carriage, carriage is made up of the sidewall of upper cover and support upper cover, the upper cover bottom of carriage is protruding spheric, four jiaos, described light shield support is all upwards provided with connecting rod, each connecting rod stretches into end in carriage through corresponding through hole on quadrilateral pedestal, each interlinking lever end is concave spherical and fits with the protruding spheric of described upper cover bottom, be provided with screwing through hole upper covering, be equipped with screw at interlinking lever end, in the screw of interlinking lever end, be installed with screw through screwing through hole from upper cover, the diameter of described screwing through hole is greater than the diameter of described screw.
The screwing through hole of described upper cover is four, be evenly distributed in around the centre normal of protruding spheric of upper cover bottom, the screw of described interlinking lever end is four, is evenly distributed in around the centre normal of concave spherical of interlinking lever end, is all installed with screw in described screwing through hole and screw.
Between described screw and the upper surface of described upper cover, cushion block is installed, the upper surface contact position of described cushion block and upper cover is protruding spheric, and the upper surface of described upper cover and described cushion block contact position are concave spherical.
In technique scheme, light shield support is connected with carriage by connecting rod, be suspended in quadrilateral pedestal below, the upper cover bottom of interlinking lever end and carriage is respectively concavo-convex spheric, and the two fixes by screw after fitting tightly, when this is conducive to leveling light shield support, interlinking lever end still can carry out close contact with upper cover bottom after move to any direction upper cover bottom, can after leveling is fastening, not carry out less desirable slip; Cushion block between screw and upper cover upper surface is protruding sphere, and upper surface and cushion block contact position are concave spherical surface, also can make the two combine closely, and after can making screw comply with connecting rod to move, the direction of screw on it, is closely connected with upper cover base connecting rod.
Accompanying drawing explanation
Fig. 1 is the one-piece construction schematic diagram of the present invention during to catotropia;
Fig. 2 is the one-piece construction schematic diagram of the upward apparent time of the present invention;
Fig. 3 is carriage partial top view;
Fig. 4 is the cut-open view of Fig. 3 along A-A direction.
Embodiment
Below in conjunction with accompanying drawing, the present invention will be further described:
As shown in Figure 1, Figure 2, Figure 3 and Figure 4, quadrilateral pedestal 1 is fixed on exposure machine, on four angles of quadrilateral pedestal 1, all offer through hole 12, carriage 4 is all installed above each through hole 12, carriage 4 is made up of sidewall 10 and the sidewall 11 of upper cover 9 and support upper cover 9, is protruding spheric 7 in the bottom of upper cover 9 to lower convexity.Light shield support 2 is positioned at the below of quadrilateral pedestal 1, on four angles of light shield support 2, connecting rod 5 is all upwards installed, and connecting rod 5 passes and stretches in carriage 4 from the corresponding through hole 12 of quadrilateral pedestal 1, and connecting rod 5 ends are concave spherical 8.Concave spherical 8 fits with corresponding protruding spheric 7.On upper cover 9, be provided with screwing through hole 13, the diameter of bolt hole is greater than the diameter of screw 3, and connecting rod 5 ends are provided with screw 14, and screw 3 penetrates to the screw 14 of connecting rod 5 ends through bolt hole 13 downwards from upper cover 9, and connecting rod 5 and upper cover 9 are fixed together.In order to increase tightness, on the upper surface of bolt 3 and upper cover 9, be lined with cushion block 6, cushion block 6 is protruding spheric with upper cover 9 contact positions, upper cover 9 is concave spherical with cushion block 6 contact positions, this is conducive to the two laminating, even if cushion block 6 changes direction run-off the straight vertically downward, always also can guarantee that a little position contacts thereby strong friction occurs with upper cover 9, (as run-off the straight, rather than vertically downward) still can effectively be paved and do not got loose changing after direction so just can to make screw 3.Screwing through hole 13 and screw 14 are generally 4, and screwing through hole 13 is evenly distributed in the centre normal surrounding of protruding spheric 7, and screw 14 is evenly distributed in the centre normal surrounding of concave spherical 8.
While utilizing this mechanism to carry out leveling to light shield support 2, the first screw 3 on suitably loosening each carriage 4, then start manual leveling light shield support 2, light shield support 2 is in leveling process, all likely slide in the position of each connecting rod 5 relative upper cover 9 bottoms under manually, in the time that correct position is arrived in leveling, each connecting rod 5 may have new position with respect to the bottom of the upper cover 9 of carriage 4 separately, but because be the design of concavo-convex sphere, no matter where be, between two spheres, all can there is microcosmic stress point to carry out rubbing contact, can rest on new position and can arbitrarily not slide, because the diameter of screwing through hole 13 is greater than the diameter of screw 3, make screw 3 have freely movable surplus, therefore screw 3 can be moved and tilt along with the screw of connecting rod 5 14, after arriving leveling position, can make between connecting rod 5 and upper cover 9 more fastening by fastening each screw 3, reduce slippage and lose flat possibility.After screw 3 run-off the straights, between the upper surface of cushion block 6 and upper cover 9 because be also the design of concavo-convex sphere, can make cushion block 6 after being moved, still keep there is larger friction force between the upper surface of upper cover 9, finally make screw 3 still can effectively be paved after run-off the straight, thereby keep larger painstaking degree, prevent the slippage that fluffs.
The advantage of this mechanism is suitably to become flexible when screw 3 carries out leveling and also can keeps can not making light shield support 2 arbitrarily move compared with large friction, only under manual effect, moves forward into the leveling of departure date prestige; After leveling, can also convert according to reposition the orientation of screw 3, thereby can make all the time to carry out between connecting rod 5 and upper cover 9 effectively fastening.After convenient two the above-mentioned key factors of leveling front-to-back effect work are effectively solved, it is easily quick that whole leveling work just becomes.
The present embodiment is an explanation to the present invention's design and realization just, is not limited, and under the present invention's design, the technical scheme converting without essence is still in protection domain.
Claims (3)
1. a light shield support levelling gear, comprise quadrilateral pedestal and light shield support, it is characterized in that, four jiaos of quadrilateral pedestal are provided with through hole, each through hole top is provided with carriage, carriage is made up of the sidewall of upper cover and support upper cover, the upper cover bottom of carriage is protruding spheric, four jiaos, described light shield support is all upwards provided with connecting rod, each connecting rod stretches into end in carriage through corresponding through hole on quadrilateral pedestal, each interlinking lever end is concave spherical and fits with the protruding spheric of described upper cover bottom, be provided with screwing through hole upper covering, be equipped with screw at interlinking lever end, in the screw of interlinking lever end, be installed with screw through screwing through hole from upper cover, the diameter of described screwing through hole is greater than the diameter of described screw.
2. light shield support levelling gear as claimed in claim 1, it is characterized in that, the screwing through hole of described upper cover is four, be evenly distributed in around the centre normal of protruding spheric of upper cover bottom, the screw of described interlinking lever end is four, be evenly distributed in around the centre normal of concave spherical of interlinking lever end, in described screwing through hole and screw, be all installed with screw.
3. light shield support levelling gear as claimed in claim 1 or 2, it is characterized in that, between described screw and the upper surface of described upper cover, cushion block is installed, the upper surface contact position of described cushion block and upper cover is protruding spheric, and the upper surface of described upper cover and described cushion block contact position are concave spherical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410034588.2A CN103792796B (en) | 2014-01-25 | 2014-01-25 | A kind of smooth cover stent levelling gear |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410034588.2A CN103792796B (en) | 2014-01-25 | 2014-01-25 | A kind of smooth cover stent levelling gear |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103792796A true CN103792796A (en) | 2014-05-14 |
| CN103792796B CN103792796B (en) | 2017-07-11 |
Family
ID=50668614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410034588.2A Active CN103792796B (en) | 2014-01-25 | 2014-01-25 | A kind of smooth cover stent levelling gear |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103792796B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116954038A (en) * | 2023-09-19 | 2023-10-27 | 上海隐冠半导体技术有限公司 | Movable connecting assembly and macro-micro combined vertical positioning device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0997564A (en) * | 1995-09-29 | 1997-04-08 | Toshiba Corp | Manufacture of cathode-ray tube shadow mask, and manufacturing device thereof |
| JPH1167079A (en) * | 1997-08-26 | 1999-03-09 | Nec Kansai Ltd | Device and method for molding shadow mask |
| CN2451249Y (en) * | 2000-11-29 | 2001-10-03 | 宝山钢铁股份有限公司 | Hydraulic cylinder spacer block for rolling mill |
| CN102808862A (en) * | 2011-06-03 | 2012-12-05 | 张文玲 | Novel universal joint device |
| CN203705821U (en) * | 2014-01-25 | 2014-07-09 | 保定来福光电科技有限公司 | Levelling mechanism for photomask bracket |
-
2014
- 2014-01-25 CN CN201410034588.2A patent/CN103792796B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0997564A (en) * | 1995-09-29 | 1997-04-08 | Toshiba Corp | Manufacture of cathode-ray tube shadow mask, and manufacturing device thereof |
| JPH1167079A (en) * | 1997-08-26 | 1999-03-09 | Nec Kansai Ltd | Device and method for molding shadow mask |
| CN2451249Y (en) * | 2000-11-29 | 2001-10-03 | 宝山钢铁股份有限公司 | Hydraulic cylinder spacer block for rolling mill |
| CN102808862A (en) * | 2011-06-03 | 2012-12-05 | 张文玲 | Novel universal joint device |
| CN203705821U (en) * | 2014-01-25 | 2014-07-09 | 保定来福光电科技有限公司 | Levelling mechanism for photomask bracket |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116954038A (en) * | 2023-09-19 | 2023-10-27 | 上海隐冠半导体技术有限公司 | Movable connecting assembly and macro-micro combined vertical positioning device |
| CN116954038B (en) * | 2023-09-19 | 2023-12-08 | 上海隐冠半导体技术有限公司 | Movable connecting assembly and macro-micro combined vertical positioning device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103792796B (en) | 2017-07-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR102187999B1 (en) | Reticle pressing unit and euv reticle pod using same | |
| CN203705821U (en) | Levelling mechanism for photomask bracket | |
| KR20160058770A (en) | Stereolithography apparatus | |
| CN205661584U (en) | Installation adjusting device of bassinet sunshade | |
| CN211232261U (en) | Camera shooting supporting platform | |
| Titan | 1—Printing Guide | |
| CN103792796A (en) | Photomask support levelling mechanism | |
| CN106241405B (en) | A kind of universal group of screens installing is standby | |
| CN105223059B (en) | A kind of slide adjusting part | |
| CN208221933U (en) | A kind of nuclear power three-dimensional laser scanner support device | |
| CN204106040U (en) | A kind of screen inclination degree regulation fixing apparatus and Medical Instruments thereof | |
| CN207424495U (en) | optical, mechanical and electronic integration space camera | |
| CN206946792U (en) | A kind of optics teaching condenser interlocking slidable adjustment device | |
| CN204530898U (en) | A kind of nut turn nut moves the bracing or strutting arrangement of erecting bed lower flume | |
| CN207416907U (en) | A kind of flat panel TV circulation trolley | |
| CN204530897U (en) | A kind of screw rod turns screw rod and moves the bearing support installing underlying type water tank | |
| CN204903841U (en) | Optical element assembly quality | |
| CN208924384U (en) | A kind of projector | |
| CN208805963U (en) | A kind of high school physics buoyancy experiment device | |
| CN204112108U (en) | For base and the washing machine with this base of washing machine | |
| CN105276344B (en) | Photoetching glue bottle holding unit | |
| CN108730127A (en) | Pylon tether system | |
| CN205237810U (en) | Auto -parts fixing device | |
| CN208253424U (en) | Lifting lamp with levelling device | |
| CN209399075U (en) | A kind of ball-shaped cloud platform |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230406 Address after: 062250 No. 8, Xianwang Road, Xianxian County Economic Development Zone, Cangzhou City, Hebei Province Patentee after: Baoding Laifu automobile lighting group Cangzhou Co.,Ltd. Address before: No. 3 Rongjin Road, Rongcheng East Development Zone, Rongcheng County, Baoding City, Hebei Province, 071700 Patentee before: BAODING LAIFU PHOTOELECTRIC TECHNOLOGY Co.,Ltd. |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A leveling mechanism for a mask bracket Granted publication date: 20170711 Pledgee: Bank of Cangzhou Limited by Share Ltd. Xianxian County branch Pledgor: Baoding Laifu automobile lighting group Cangzhou Co.,Ltd. Registration number: Y2024980022425 |