CN203705817U - Structure of photomask box - Google Patents
Structure of photomask box Download PDFInfo
- Publication number
- CN203705817U CN203705817U CN201320883992.8U CN201320883992U CN203705817U CN 203705817 U CN203705817 U CN 203705817U CN 201320883992 U CN201320883992 U CN 201320883992U CN 203705817 U CN203705817 U CN 203705817U
- Authority
- CN
- China
- Prior art keywords
- box
- upper cover
- base
- photomask structure
- light shield
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000000903 blocking effect Effects 0.000 claims description 18
- 238000005728 strengthening Methods 0.000 claims description 16
- 238000000465 moulding Methods 0.000 claims description 6
- 239000004033 plastic Substances 0.000 claims description 6
- 241000272165 Charadriidae Species 0.000 claims description 5
- 238000006073 displacement reaction Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 239000011435 rock Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000004615 ingredient Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Abstract
The utility model provides a structure of a photomask box. The structure of the photomask box comprises a base and an upper cover. The base is used for carrying a photomask, and is provided with a plurality of first stop components. The photomask is connected among the plurality of stop components in a propping manner. Each first stop component is provided with a hook-shaped part and an intensifying part. The intensifying parts are formed in the hook-shaped parts. The upper cover is connected with the base, and is provided with a plurality of positioning parts. When the upper cover covers the base, the plurality of positioning parts are connected with the fixed photomask in a propping manner. According to the structure of the photomask box, the structural intensity of each stop component of the base can be improved, and the damage of the photomask can be effectively avoided.
Description
Technical field
The utility model relates to a kind of box for photomask structure, relates to especially the box for photomask structure that a kind of structural strength more strengthens.
Background technology
Refer to Fig. 1, a kind of existing box for photomask structure 1 mainly includes a base 10 and a upper cover 20.
Base 10 is for carrying a light shield M, and base 10 has multiple first and keeps out element 11 and multiple second and keep out element 12.At this, multiple first to keep out element 11 be to take shape on base 10 in symmetrical mode.As mentioned above, in the time that light shield M is carried by base 10, light shield M is connected to multiple first and keeps out between element 11.
Upper cover 20 is that the mode of rotating is connected in base 10, and upper cover 20 has multiple blocking parts 21.At this, it is the multiple blocking parts 21 with respect to upper cover 20 that multiple second of base 10 is kept out element 12.As mentioned above, on upper cover 20 is covered on base 10 time, light shield M is connected to multiple second of base 10 to keep out between element 12 and multiple blocking parts 21 of upper cover 20.
Therefore, on upper cover 20 is covered on base 10 time, keep out the butt between element 11 and keep out the butt between element 12 and multiple blocking parts 21 of upper cover 20 by multiple second of base 10 by multiple first of base 10, the left and right of light shield M in box for photomask structure 1 and the displacement of fore-and-aft direction can be locked.
But; when the box for photomask structure 1 that contains light shield M is being transported when being subjected to rock or colliding in process; first of base 10 is kept out element 11 phenomenon (as shown in Figure 2) of damaging that often can deform, thereby can cause light shield M to be subjected to displacement in box for photomask structure 1 and damage.
Utility model content
The purpose of this utility model is that a kind of box for photomask structure will be provided, and it can improve the structural strength of keeping out element of base, to reach the effect that effectively prevents that light shield is damaged.
In order to address the above problem, the utility model proposes a kind of box for photomask structure, comprising:
One base, can carry a light shield, and has multiple first and keep out element, wherein, described light shield is to be connected to described first to keep out between element, and first keeps out element and have a hook-shaped portion and a strengthening section described in each, and described strengthening section takes shape among described hook-shaped portion; And
One upper cover, is connected in described base, and has multiple location divisions, and wherein, on described upper cover is covered on described base time, described location division can the fixing described light shield of butt.
In the utility model, described strengthening section comprises a spring again.
In the utility model, described strengthening section comprises a stilt again.
In the utility model, above support comprises a support bar or a back up pad again.
In the utility model, described first keeps out element takes shape on described base in symmetrical mode again.
In the utility model, described in each, location division has a horizontal branch and a longitudinal branch again, and described horizontal branch and described longitudinal branch are connected to a corner of described light shield simultaneously.
In the utility model, described location division takes shape on described upper cover in symmetrical mode again.
In the utility model, described location division takes shape on described upper cover in the mode of plastic rubber ejaculate molding again.
Again in the utility model, described base also has at least one second and keeps out element, described upper cover also has at least one blocking part, described second keeps out elements relative in described blocking part, and on described upper cover is covered on described base time, described light shield can be connected to described second and keep out between element and described blocking part.
In the utility model, described blocking part takes shape on described upper cover in the mode of plastic rubber ejaculate molding again.
Box for photomask structure of the present utility model, the structural strength of keeping out element and had because of the existence of strengthening section enhancing due to first of base, even therefore transporting when being subjected to rock or colliding in process when the box for photomask structure that contains light shield, first of base is kept out element and is also difficult for the damage that deforms, thereby can guarantee that light shield can not be subjected to displacement in box for photomask structure, and then can avoid light shield to be damaged.
Accompanying drawing explanation
Fig. 1 is the schematic perspective view that shows a kind of existing box for photomask structure that carries a light shield;
Fig. 2 be show existing box for photomask structure base first keep out element deform damage time schematic perspective view;
Fig. 3 shows the schematic perspective view of box for photomask structure of the present utility model under an opening;
Fig. 4 is the schematic perspective view that shows the box for photomask structure of the present utility model that carries a light shield;
Fig. 5 A to Fig. 5 E is the first schematic perspective view of keeping out the various structures of element that shows the base of box for photomask structure of the present utility model;
Fig. 6 is the upper cover of box for photomask structure and the elevational schematic view of light shield that shows a kind of embodiment of the present utility model; And
Fig. 7 is the upper cover of box for photomask structure and the elevational schematic view of light shield that shows another kind of embodiment of the present utility model.
Description of reference numerals:
1,100 box for photomask structures;
10,110 bases;
11,111 first keep out element;
12,112 second keep out element;
20,120 upper covers;
21,122 blocking parts;
1111 hook-shaped portions;
1112 strengthening sections;
121,121 ' location division;
The horizontal branch of 121a;
The longitudinal branch of 121b;
M light shield.
Embodiment
Understand for technical characterictic of the present utility model, object and effect being had more clearly, now contrast accompanying drawing embodiment of the present utility model is described.
About aforementioned and other technology contents, feature and effect of the present utility model, in the following detailed description coordinating with reference to a graphic preferred embodiment, can clearly present.The direction term of mentioning in following examples, for example: upper and lower, left and right, front or rear etc. are only the directions with reference to annexed drawings.Therefore, the direction term of use is to be not used for limiting the utility model for illustrating.
Refer to Fig. 3, the box for photomask structure 100 of the present embodiment mainly includes a base 110 and a upper cover 120.
As shown in Figures 3 and 4, base 110 is for carrying a light shield M, and base 110 has multiple first and keeps out element 111 and multiple second and keep out element 112.
Multiple first to keep out element 111 be to take shape on base 110 in symmetrical mode.At this, in the time that light shield M is carried by base 110, light shield M is connected to multiple first and keeps out between element 111.In addition, each first is kept out element 111 and has a hook-shaped portion 1111 and a strengthening section 1112.At this, strengthening section 1112 is to take shape among hook-shaped portion 1111.More specifically, strengthening section 1112 can be a spring (as shown in Figure 5A) or a stilt (as shown in Fig. 5 B to Fig. 5 E).At this, with regard to strengthening section 1112 is a stilt, this stilt can be the structure of a support bar (as shown in Figure 5 B), a back up pad (as shown in Fig. 5 C and Fig. 5 D) or a solid block (as shown in Fig. 5 E).As mentioned above, by strengthening section 1112 being taken shape among hook-shaped portion 1111, the first structural strength of keeping out element 111 can be strengthened effectively.
As shown in Figures 3 and 4, upper cover 120 is to be connected in base 110 in separable mode or in the mode of rotating, and upper cover 120 has multiple location divisions 121 and multiple blocking part 122.
As shown in Fig. 3, Fig. 4 and Fig. 6, multiple location divisions 121 are to take shape on upper cover 120 in symmetrical mode.More specifically, multiple location divisions 121 can be to take shape in the mode of plastic rubber ejaculate molding on upper cover 120.As mentioned above, on upper cover 120 is covered on base 110 time, multiple location divisions 121 can the fixing light shield M of butt.
But although it should be noted that each location division 121 is presented with the structure of the solid block in Fig. 6, each location division 121 can also have the structure of other patterns.For instance, among another kind of embodiment, each location division 121 ' can further be divided into a horizontal 121a of branch and a longitudinal 121b of branch, as shown in Figure 7.Therefore,, on upper cover 120 is covered on base 110 time, the horizontal 121a of branch of each location division 121 ' and the longitudinally 121b of branch are corners that is simultaneously connected to light shield M, thereby can reach better butt fixed effect.
As shown in Fig. 3, Fig. 4, Fig. 6 and Fig. 7, multiple blocking parts 122 of upper cover 120 are to keep out element 112 with respect to multiple second of base 110.At this, multiple blocking parts 122 can also be to take shape in the mode of plastic rubber ejaculate molding on upper cover 120.As mentioned above, on upper cover 120 is covered on base 110 time, light shield M is connected to multiple second of base 110 to keep out between element 112 and multiple blocking parts 122 of upper cover 120.
Therefore, on upper cover 120 is covered on base 110 time, keep out butt between element 111, keep out butt between element 112 and multiple blocking parts 122 of upper cover 120 and fix by the butt of multiple location divisions 121 (or 121 ') of upper cover 120 by multiple second of base 110 by multiple first of base 110, the displacement of left and right, front and back and the above-below direction of light shield M in box for photomask structure 100 can be locked.
In sum, among the disclosed box for photomask structure 100 of the utility model, the structural strength of keeping out element 111 and had because of the existence of strengthening section 1112 enhancing due to first of base 110, even therefore transporting when being subjected to rock or colliding in process when the box for photomask structure 100 that contains light shield M, first of base 110 is kept out element 111 and is also difficult for the damage that deforms, thereby can guarantee that light shield M can not be subjected to displacement in box for photomask structure 100, and then can avoid light shield M to be damaged.
The foregoing is only the schematic embodiment of the utility model, not in order to limit scope of the present utility model.Any those skilled in the art, is not departing from equivalent variations and the modification under the prerequisite of design of the present utility model and principle, done, all should belong to the scope of the utility model protection.And it should be noted that, each ingredient of the present utility model is not limited in above-mentioned overall applicability, each technical characterictic of describing in instructions of the present utility model can select one to adopt separately or select the multinomial use that combines according to actual needs, therefore, the utility model has naturally been contained other combinations relevant with this case innovative point and specifically application.
Claims (10)
1. a box for photomask structure, is characterized in that, described box for photomask structure comprises:
One base, can carry a light shield, and has multiple first and keep out element, wherein, described light shield is connected to described first and keeps out between element, and first keeps out element and have a hook-shaped portion and a strengthening section described in each, and described strengthening section takes shape among described hook-shaped portion; And
One upper cover, is connected in described base, and has multiple location divisions, and wherein, on described upper cover is covered on described base time, described location division can the fixing described light shield of butt.
2. box for photomask structure as claimed in claim 1, is characterized in that, described strengthening section comprises a spring.
3. box for photomask structure as claimed in claim 1, is characterized in that, described strengthening section comprises a stilt.
4. box for photomask structure as claimed in claim 3, is characterized in that, above support comprises a support bar or a back up pad.
5. box for photomask structure as claimed in claim 1, is characterized in that, described first keeps out element takes shape on described base in symmetrical mode.
6. box for photomask structure as claimed in claim 1, is characterized in that, described in each, location division has a horizontal branch and a longitudinal branch, and described horizontal branch and described longitudinal branch are connected to a corner of described light shield simultaneously.
7. box for photomask structure as claimed in claim 1, is characterized in that, described location division takes shape on described upper cover in symmetrical mode.
8. box for photomask structure as claimed in claim 1, is characterized in that, described location division takes shape on described upper cover in the mode of plastic rubber ejaculate molding.
9. box for photomask structure as claimed in claim 1, it is characterized in that, described base also has at least one second and keeps out element, described upper cover also has at least one blocking part, described second keeps out elements relative in described blocking part, and on described upper cover is covered on described base time, described light shield can be connected to described second and keep out between element and described blocking part.
10. box for photomask structure as claimed in claim 9, is characterized in that, described blocking part takes shape on described upper cover in the mode of plastic rubber ejaculate molding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320883992.8U CN203705817U (en) | 2013-12-30 | 2013-12-30 | Structure of photomask box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320883992.8U CN203705817U (en) | 2013-12-30 | 2013-12-30 | Structure of photomask box |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203705817U true CN203705817U (en) | 2014-07-09 |
Family
ID=51056230
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320883992.8U Expired - Lifetime CN203705817U (en) | 2013-12-30 | 2013-12-30 | Structure of photomask box |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203705817U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108107672A (en) * | 2016-11-25 | 2018-06-01 | 上海微电子装备（集团）股份有限公司 | A kind of mask version box |
| CN110865511A (en) * | 2018-08-27 | 2020-03-06 | 家登精密工业股份有限公司 | Photomask box and actuating method thereof |
-
2013
- 2013-12-30 CN CN201320883992.8U patent/CN203705817U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108107672A (en) * | 2016-11-25 | 2018-06-01 | 上海微电子装备（集团）股份有限公司 | A kind of mask version box |
| US10908497B2 (en) | 2016-11-25 | 2021-02-02 | Shanghai Micro Electronics Equipment (Group) Co., Ltd. | Mask box |
| CN108107672B (en) * | 2016-11-25 | 2021-03-02 | 上海微电子装备（集团）股份有限公司 | Mask plate box |
| CN110865511A (en) * | 2018-08-27 | 2020-03-06 | 家登精密工业股份有限公司 | Photomask box and actuating method thereof |
| CN110865511B (en) * | 2018-08-27 | 2023-08-29 | 家登精密工业股份有限公司 | Photomask box and actuating method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140709 |