CN203643362U - Detection device for three-dimensional distribution of absorption characteristics in transparent optical material - Google Patents
Detection device for three-dimensional distribution of absorption characteristics in transparent optical material Download PDFInfo
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- CN203643362U CN203643362U CN201320867432.3U CN201320867432U CN203643362U CN 203643362 U CN203643362 U CN 203643362U CN 201320867432 U CN201320867432 U CN 201320867432U CN 203643362 U CN203643362 U CN 203643362U
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Abstract
The utility model provides a detection device for three-dimensional distribution of absorption characteristics in a transparent optical material. The device comprises a pump light source, a detection light source, a pump light absorption device and a photoelectric detector which are respectively connected with a light path of a transparent optical material to be detected, wherein a pump light modulating device, a pump light angle adjusting device and a pump light convergence device are arranged between the pump light source and the transparent optical material to be detected in sequence; a first detection light convergence device is arranged between the detection light source and the transparent optical material to be detected; a second detection light convergence device, a detection light filtering device and a space filter are arranged between the transparent optical material to be detected and the photoelectric detector in sequence; the outer end of the photoelectric detector is connected with the input end of an alternating-current weak signal detection device. The detection device for the three-dimensional distribution of the absorption characteristics in the transparent optical material has the advantages of high resolution, high sensitivity and the like.
Description
Technical field
The utility model relates to the detection technique field of optical material absorption characteristic, specifically the pick-up unit of absorption characteristic distributed in three dimensions in a kind of transparent optical material body.
Background technology
Transparent optical material is indispensable key element in strong laser system, and for example KDP crystal is used as optoelectronic switch and laser freuqency doubling element in the strong laser system of being everlasting.Therefore, the ability of the resisting laser damage of transparent optical material is one of vital factor affecting strong laser system performance.Concerning transparent optical material, what determine its resisting laser damage ability is the defect and impurity in material.
Defect and impurity in transparent optical material can be divided into two classes: a class is surface imperfection and impurity, and this is mainly that (as cutting, grinding, polishing etc.) are introduced in the process of material; Another kind of is defect and impurity in body, and this mainly introduces in Material growth process.In this two classes defect, people often pay close attention to surface imperfection more, and the analyzing and testing of effects on surface defect is relatively easier, and this is because the analyzing and testing of effects on surface defect is two-dimensional detection, detects and need to carry out three-dimensional to the analyzing and testing of defect in body.
For defect in the body of optical material, conventionally can be divided into native defect and non-native defect: native defect is by the absorption of luminous energy being caused to the variation of defect area optical properties of materials, thus the variation of the beam properties that change sees through; But not native defect can cause the scattering of light beam etc.; Different defects is different on the impact of optical system.
And some defect inspection methods of commonly using at present, as high resolving power scatter measurement method, the non-native defect sensitivity that mainly can cause beam divergence to some, is difficult to use in the analysis of native defect.But in strong laser system, in the body of transparent optical material, native defect often more easily causes destruction and the damage of material, therefore native defect in the body of transparent optical material is carried out to effective analyzing and testing and is of great practical significance for exploitation and the application of strong laser system.
Utility model content
The purpose of this utility model is to provide a kind of pick-up unit with absorption characteristic distributed in three dimensions in high resolving power and highly sensitive transparent optical material body, can obtain the three-dimensional spatial distribution of absorption characteristic and defect in transparent optical material body by this pick-up unit.
The technical solution of the utility model is:
The pick-up unit of absorption characteristic distributed in three dimensions in a kind of transparent optical material body, comprise the pump light source being connected with tested transparent optical material light path respectively, probe source, pump light absorption plant and photodetector, between described pump light source and tested transparent optical material, be provided with successively pump light modulating device, pump light angular adjustment apparatus and pump light convergence apparatus, between described probe source and tested transparent optical material, be provided with and survey light the first convergence apparatus, between described tested transparent optical material and photodetector, be provided with successively and survey light the second convergence apparatus, survey light filtering apparatus and spatial filter, the output terminal of described photodetector is connected with the input end that exchanges Testing of Feeble Signals device.
In described transparent optical material body, the pick-up unit of absorption characteristic distributed in three dimensions, also comprises the gearshift for placing and move tested transparent optical material, and described gearshift is fixedly connected with tested transparent optical material.
The pick-up unit of absorption characteristic distributed in three dimensions in described transparent optical material body, between described pump light modulating device and pump light angular adjustment apparatus, be provided with successively pump light cosmetic treatment apparatus and pump light light-dividing device, the reflected light path of described pump light light-dividing device is provided with pumping light power sniffer.
The pick-up unit of absorption characteristic distributed in three dimensions in described transparent optical material body, is provided with and surveys light shaping treating apparatus between described probe source and detection light the first convergence apparatus.
The pick-up unit of absorption characteristic distributed in three dimensions in described transparent optical material body, is provided with between described detection light filtering apparatus and spatial filter and surveys light light-dividing device, and the reflected light path of described detection light light-dividing device is provided with detection of optical power sniffer.
The pick-up unit of absorption characteristic distributed in three dimensions in described transparent optical material body, described interchange Testing of Feeble Signals device is selected lock-in amplifier.
The utility model is by focusing on transparent optical material inside by a branch of stronger pump light, raise because the absorption of luminous energy causes transparent optical material local temperature in pump light focal position, thereby cause that in transparent optical material body, local physical property changes, and the orthogonal weak detection light in a branch of direction of propagation and this pump light direction of propagation is also focused in transparent optical material body, overlap with the focus of pump light, the transparent optical material local physical property causing due to absorptive pumping light is changed and detected, thereby obtain the absorption characteristic of transparent optical material body inside-pumping optical focus position, and obtain the three-dimensional spatial distribution of absorption characteristic and defect in transparent optical material body by scanning, the utlity model has high-resolution, the advantages such as high sensitivity.
Accompanying drawing explanation
Fig. 1 is principle schematic of the present utility model;
Fig. 2 is apparatus structure schematic diagram of the present utility model.
Embodiment
As shown in Figure 1, pump beam 100 focuses on tested transparent optical material 8 through pump light convergence apparatus 6, and focus is in tested transparent optical material body.Due to the absorption to pump energy of tested transparent optical material 8 own, all can cause the rising of its temperature in the region of pump beam 100 processes, thereby the physical characteristics of tested transparent optical material 8 is changed, such as thermal expansion, refraction index changing etc.And in focal position, because laser energy is the most concentrated, therefore the change in physical properties of tested transparent optical material 8 is also remarkable.Now, with a branch of weak detecting light beam 110, the direction of propagation is vertical with pump beam 100 directions of propagation, focuses on tested transparent optical material 8 inside via surveying light the first convergence apparatus 13, overlaps with the focus of pump light.At the pump light focus place of tested transparent optical material 8 inside, due to the variation of the caused physical characteristics of materials of absorptive pumping light, can correspondingly cause through the propagation characteristic of the detecting light beam 110 in this region and change, as meeting produces newly-increased convergence or effect weakening.The size of this variation is that the size itself pump light being absorbed by tested transparent optical material 8 determines.Absorb greatlyr, cause that the variation of detecting light beam propagation characteristic is also larger, correspondingly, the induced with laser Photothermal Signals that photodetector 19 detects is also larger.Within the scope of certain pumping light power, absorb with measuring-signal linear.By the detection that this detecting light beam propagation characteristic is changed, just can obtain tested transparent optical material 8 at pump light focus place the absorption characteristic to pump light.
The detection of the variation to detecting light beam propagation characteristic, can adopt the detecting unit being made up of detection light the second convergence apparatus 14, detection light filtering apparatus 15, spatial filter 18 and photodetector 19 to carry out.Detecting light beam 110 through tested transparent optical material 8 is collected by surveying light the second convergence apparatus 14, and filter the parasitic light except surveying light by surveying light filtering apparatus 15, after spatial filter 18, surveyed by photodetector 19,18 of spatial filters allow part detecting light beam 110 pass through again.In detecting light beam 110, produce newly-increased convergence or effect weakening, can correspondingly cause by the change of the detection luminous energy of spatial filter 18, the detection luminous energy that photodetector 19 detects can change.Because the variable quantity of detecting light beam propagation characteristic is often smaller, even be less than the noise fluctuations of detecting light beam itself, therefore generally need to utilize interchange Testing of Feeble Signals device to detect, conventional interchange Testing of Feeble Signals device has lock-in amplifier etc., while adopting lock-in amplifier to detect induced with laser Photothermal Signals, to pump beam be carried out to the frequency modulating signal of intensity modulation as the reference signal frequency of lock-in amplifier, can greatly suppress like this noise and the external environmental noise etc. of detecting light beam itself to the impact of measurement result, reach very high detection sensitivity, the frequency of modulation signal is unsuitable too high, can eliminate like this impact of the thermophysical property of tested transparent optical material on testing result own.
When move relative to tested transparent optical material 8 focal position of pump light, surveying the focal position of light also moves relative to tested transparent optical material 8, and overlap with pump light focal position all the time, every bit on the tested transparent optical material 8 of process is all detected, just can obtain the distributed in three dimensions of the native defect in tested transparent optical material body.In the region that has native defect, will be far away higher than the region that there is no native defect to the absorption of pump light, therefore at the Photothermal Signals that exists the region of native defect to record also far away higher than the region that there is no native defect, in the tested transparent optical material body obtaining in the distributed in three dimensions of absorption characteristic, native defect region and non-native defect region can make a distinction significantly, can obtain position distribution and the size of native defect.
The utility model adopts pump light and detection light positive to hand over, and only overlaps in focal position, and like this, in the time carrying out three dimensions scanning detection, the resolution of detection is only determined by the size of pump light focus.By suitable focalizer, can in tested transparent optical material body, obtain very little pump light focal spot size, as the laser for ultraviolet band, can reach micron dimension, this just means can obtain very high detection resolution.On the travel path of tested transparent optical material body inside-pumping light, because all can causing tested transparent optical material physical characteristics, absorptive pumping light changes, if adopt pump light and the structure of surveying light conllinear to detect, tested transparent optical material change in physical properties on tested transparent optical material body inside-pumping propagation path of light all can cause that surveying optical transmission characteristics changes, therefore on the direction of propagation of pump light, there is no spatial resolution, can only on perpendicular to the pump light direction of propagation, carry out two-dimentional resolved detection; If adopting pump light to intersect certain angle with detection light detects, resolution is to be determined with the size of surveying the crossing intersection of light by pump light, the minimum resolution of obvious this detection architecture will, much larger than the resolution of the detection architecture that adopts pump light and detection light positive to hand over, be unfavorable for carrying out high resolution detection.
As shown in Figure 2, the pick-up unit of absorption characteristic distributed in three dimensions in a kind of transparent optical material body, comprise pump light source 1, pump light modulating device 2, pump light cosmetic treatment apparatus 3, pump light light-dividing device 4, pumping light power sniffer 5, pump light convergence apparatus 6, pump light angular adjustment apparatus 7, tested transparent optical material 8, gearshift 9, pump light absorption plant 10, probe source 11, survey light shaping treating apparatus 12, survey light the first convergence apparatus 13, survey light the second convergence apparatus 14, survey light filtering apparatus 15, survey light light-dividing device 16, detection of optical power sniffer 17, spatial filter 18, photodetector 19 with exchange Testing of Feeble Signals device 20.
Pump light modulating device 2 can adopt photomodulator or chopper, pump light cosmetic treatment apparatus 3 and detection light shaping treating apparatus 12 can adopt beam expanding lens, pump light light-dividing device 4 and detection light light-dividing device 16 can adopt light splitting piece or Amici prism, pumping light power sniffer 5 and detection of optical power sniffer 17 can adopt power meter or power detector, pump light convergence apparatus 6, survey light the first convergence apparatus 13 and survey light the second convergence apparatus 14 and can adopt condenser lens, pump light angular adjustment apparatus 7 can adopt high reflection mirror, survey light filtering apparatus 15 and can adopt optical filter, exchange Testing of Feeble Signals device 20 and can adopt lock-in amplifier.
The light beam being sent by pump light source 1 light intensity after pump light modulating device 2 is modulated, after pump light cosmetic treatment apparatus 3, be divided into two bundles by pump light light-dividing device 4 again, wherein a branch of pumping light power sniffer 5 that enters into, for the power that incides the pump light in tested transparent optical material 8 bodies is monitored, another Shu Yici, after pump light angular adjustment apparatus 6, pump light convergence apparatus 7 and tested transparent optical material 8, is absorbed by pump light absorption plant 10.The focus of pump light is positioned at the body of tested transparent optical material 8, and tested transparent optical material 8 is positioned on gearshift 9, and the position of tested transparent optical material 8 can be with respect to the Focal Point Shift of pump light.Due to the absorption to laser energy of tested transparent optical material 8 own, all can cause the rising of tested transparent optical material 8 temperature in the region of pump beam process, thereby the physical characteristics of tested transparent optical material 8 is changed, as thermal expansion, refraction index changing etc.And in focal position, because laser energy is the most concentrated, therefore the physical characteristics of tested transparent optical material 8 changes also remarkable.
The detection light being sent by probe source 11 is successively through surveying light shaping treating apparatus 12, survey light the first convergence apparatus 13 and tested transparent optical material 8, in tested transparent optical material 8 bodies, survey optical propagation direction vertical with the pump light direction of propagation, focus detecting light and pump light focus overlap, detecting light beam through tested transparent optical material 8 is collected via surveying light the second convergence apparatus 14, filter again the parasitic light of other wave band except surveying light through surveying light filtering apparatus 15, be divided into two bundles through the detecting light beam of surveying light filtering apparatus 15 by surveying light light-dividing device 16, a branch of detection of optical power sniffer 17 that enters, for the power of surveying light is monitored, another Shu Ze is surveyed by photodetector 19 after spatial filter 18, the light signal of detection is changed into electric signal by photodetector 19, input AC Testing of Feeble Signals device 20 detects, pass through again follow-up data analysis processing, obtain the three-dimensional spatial distribution of the interior absorption characteristic of transparent optical material body and defect.
Tested transparent optical material 8 fixed placement, on gearshift 9, can scan movement with respect to pump light focus and focus detecting light, thereby obtain the three-dimensional spatial distribution of absorption characteristic in tested transparent optical material 8 bodies.
The above embodiment is only that preferred implementation of the present utility model is described; not scope of the present utility model is limited; do not departing under the prerequisite of the utility model design spirit; various distortion and improvement that those of ordinary skills make the technical solution of the utility model, all should fall in the definite protection domain of claims of the present utility model.
Claims (6)
1. the pick-up unit of absorption characteristic distributed in three dimensions in a transparent optical material body, it is characterized in that: comprise the pump light source being connected with tested transparent optical material light path respectively, probe source, pump light absorption plant and photodetector, between described pump light source and tested transparent optical material, be provided with successively pump light modulating device, pump light angular adjustment apparatus and pump light convergence apparatus, between described probe source and tested transparent optical material, be provided with and survey light the first convergence apparatus, between described tested transparent optical material and photodetector, be provided with successively and survey light the second convergence apparatus, survey light filtering apparatus and spatial filter, the output terminal of described photodetector is connected with the input end that exchanges Testing of Feeble Signals device.
2. the pick-up unit of absorption characteristic distributed in three dimensions in transparent optical material body according to claim 1, it is characterized in that: also comprise the gearshift for placing and move tested transparent optical material, described gearshift is fixedly connected with tested transparent optical material.
3. the pick-up unit of absorption characteristic distributed in three dimensions in transparent optical material body according to claim 1, it is characterized in that: between described pump light modulating device and pump light angular adjustment apparatus, be provided with successively pump light cosmetic treatment apparatus and pump light light-dividing device, the reflected light path of described pump light light-dividing device is provided with pumping light power sniffer.
4. the pick-up unit of absorption characteristic distributed in three dimensions in transparent optical material body according to claim 1, is characterized in that: between described probe source and detection light the first convergence apparatus, be provided with and survey light shaping treating apparatus.
5. the pick-up unit of absorption characteristic distributed in three dimensions in transparent optical material body according to claim 1, it is characterized in that: between described detection light filtering apparatus and spatial filter, be provided with and survey light light-dividing device, the reflected light path of described detection light light-dividing device is provided with detection of optical power sniffer.
6. the pick-up unit of absorption characteristic distributed in three dimensions in transparent optical material body according to claim 1, is characterized in that: described interchange Testing of Feeble Signals device is selected lock-in amplifier.
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| CN201320867432.3U CN203643362U (en) | 2013-12-26 | 2013-12-26 | Detection device for three-dimensional distribution of absorption characteristics in transparent optical material |
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| CN201320867432.3U CN203643362U (en) | 2013-12-26 | 2013-12-26 | Detection device for three-dimensional distribution of absorption characteristics in transparent optical material |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103712993A (en) * | 2013-12-26 | 2014-04-09 | 无锡利弗莫尔仪器有限公司 | Method and device for detecting three-dimensional distribution of absorption characteristics in transparent optical material body |
| CN106990051A (en) * | 2017-05-10 | 2017-07-28 | 中国科学院上海光学精密机械研究所 | Metal material sheet electron information lossless detection means and detection method |
-
2013
- 2013-12-26 CN CN201320867432.3U patent/CN203643362U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103712993A (en) * | 2013-12-26 | 2014-04-09 | 无锡利弗莫尔仪器有限公司 | Method and device for detecting three-dimensional distribution of absorption characteristics in transparent optical material body |
| CN103712993B (en) * | 2013-12-26 | 2016-08-17 | 无锡利弗莫尔仪器有限公司 | The detection method of transparent optical material body absorption characteristic distributed in three dimensions and device |
| CN106990051A (en) * | 2017-05-10 | 2017-07-28 | 中国科学院上海光学精密机械研究所 | Metal material sheet electron information lossless detection means and detection method |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20140611 Effective date of abandoning: 20160817 |
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| C25 | Abandonment of patent right or utility model to avoid double patenting |