CN203643359U - 一种基于折射成像的高反光表面同轴光路检测系统 - Google Patents
一种基于折射成像的高反光表面同轴光路检测系统 Download PDFInfo
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- CN203643359U CN203643359U CN201420024410.5U CN201420024410U CN203643359U CN 203643359 U CN203643359 U CN 203643359U CN 201420024410 U CN201420024410 U CN 201420024410U CN 203643359 U CN203643359 U CN 203643359U
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- 238000003384 imaging method Methods 0.000 title claims abstract description 60
- 238000001514 detection method Methods 0.000 title claims abstract description 30
- 230000003287 optical effect Effects 0.000 claims description 4
- 230000000694 effects Effects 0.000 abstract description 14
- 239000006185 dispersion Substances 0.000 abstract description 3
- 238000005286 illumination Methods 0.000 abstract 1
- 238000001579 optical reflectometry Methods 0.000 description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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Cited By (1)
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CN103760167A (zh) * | 2014-01-15 | 2014-04-30 | 唐山英莱科技有限公司 | 一种基于折射成像的高反光表面同轴光路检测系统 |
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CN103760167A (zh) * | 2014-01-15 | 2014-04-30 | 唐山英莱科技有限公司 | 一种基于折射成像的高反光表面同轴光路检测系统 |
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