CN203639596U - High-frequency induction coil device with gourd-shaped drawing holes for producing seven silicon cores - Google Patents
High-frequency induction coil device with gourd-shaped drawing holes for producing seven silicon cores Download PDFInfo
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- CN203639596U CN203639596U CN201320851151.9U CN201320851151U CN203639596U CN 203639596 U CN203639596 U CN 203639596U CN 201320851151 U CN201320851151 U CN 201320851151U CN 203639596 U CN203639596 U CN 203639596U
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Abstract
The utility model relates to a high-frequency induction coil device with gourd-shaped drawing holes for producing seven silicon cores. The high-frequency induction coil device comprises an open flow gathering ring, a water inlet pipe, a water outlet pipe, a cathode connection flange, an anode connection flange and a grounding connection sheet, wherein the open flow gathering ring is of a cylindrical body with an open end part, the grounding connection sheet is mounted at the top of the cylindrical body, a flow gathering ring conical face is arranged at the center zone of the upper end face of the open flow gathering ring, and three annular material melting steps are sequentially arranged at the center zone of the lower end face of the open flow gathering ring from inside to outside; a center material melting hole is formed in the center material melting step of the open flow gathering ring, seven gourd-shaped drawing holes are distributed in the open flow gathering ring outside the center material melting hole in a surrounding manner, and a magnetic field dividing line is formed between every two adjacent gourd-shaped drawing holes, so that a radial structure from the center material melting hole to the periphery is formed. The high-frequency induction coil device has the beneficial effects that the zone-melting-method drawing of the silicon cores can be more stable, and the maximal increase of single-machine productivity is facilitated.
Description
Technical field
The utility model relates to silicon core zone melting method drawing device technology, relates in particular to a kind ofly to produce the radio-frequency induction coil coil apparatus with Pear-Shaped drawing hole for seven silicon cores.
Background technology
Zone-melted silicon single crystal is the crucial starting material of making range detector, sensor, and its market growth trend also clearly.Adopt high resistance zone-melting silicon to manufacture the high-end microelectronic devices such as microwave monolithic integrated circuit and microelectromechanical systems, demonstrate huge application prospect.For example zone melting method of the drawing of silicon core is divided into two kinds: horizontal zone-melting technique and vertical suspending zone melting method, the former is mainly used in purification and the single crystal growing of the material such as germanium, gallium arsenide, the latter is mainly used in silicon, this is because the temperature of silicon melt is high, chemical property is active, easily be subject to staining of foreign matter, be difficult to find applicable boat, can not adopt horizontal zone-melting technique.A large amount of silicon core stoves that use at present, once can only draw a silicon core, one heat can only draw 4-6 root silicon core, in the face of the market requirement of flood tide, need to drop into a large amount of silicon core stoves and produce, occupation area of equipment is increasing, and what energy consumption had also become production of polysilicon producer considers one of index, therefore, the more remarkable silicon core equipment of necessary research and development performance.Therefore,, for above aspect, need to reasonably improve prior art.
Utility model content
For above defect, the utility model provides a kind of stabilized structure, be conducive to save production cost, can make silicon core zone melting method draw more stablize, be conducive to improve to greatest extent unit production capacity produce the radio-frequency induction coil coil apparatus with Pear-Shaped drawing hole for seven silicon cores, to solve many deficiencies of prior art.
For achieving the above object, the utility model is by the following technical solutions:
A kind ofly produce the radio-frequency induction coil coil apparatus with Pear-Shaped drawing hole for seven silicon cores, comprise open type conflux ring, water inlet pipe, rising pipe, negative electrode joint flange, anodic bonding flange, grounding connection sheet, described open type conflux ring is open-ended cylindrical structure and is positioned at this right cylinder top installation grounding connection sheet, the central zone, upper surface that is positioned at this open type conflux ring is provided with the conflux ring cone surface caving inward, the central zone, lower surface that is positioned at open type conflux ring is provided with three annular material steps from inside to outside successively, it is center material step, cylindrical material step one and cylindrical material step two,
At open type conflux Huan center, the step site place of putting of material arranges material hole, center, in the open type conflux ring of outside, material hole, center around distribute seven Pear-Shaped drawing holes, between every two adjacent Pear-Shaped drawing holes with a magnetic field division line, thereby form from material hole, center emanant structure to the periphery;
Meanwhile, the outer rim that is positioned at seven Pear-Shaped drawing holes arranges the water-flowing trough of rhombus, is positioned at two outer ends of this water-flowing trough and offers respectively successively water inlet pipe, rising pipe, and this water inlet pipe is connected respectively cathode flange and anodic bonding flange successively with rising pipe outer end.
In addition, outer edge place, material hole, described center is with the material hole circle conical surface, and each Pear-Shaped drawing hole outer edge place is with drawing hole cone surface, and described Pear-Shaped drawing hole is made up of outer circular hole and interior circular hole, and outer circular hole and interior circular hole intersection arrange arc-shaped transitional surface; The outer end of each match shape magnetic field division line is respectively equipped with the hole of circular arc.
Described open type conflux ring outer edge surface, by argon arc red copper welding water-flowing trough, makes water-flowing trough and open type conflux annular integral, and described negative electrode joint flange and anodic bonding flange are rhombus or semicircle, is positioned at the outside connecting earthing device of grounding connection sheet.
The beneficial effect of producing the radio-frequency induction coil coil apparatus with Pear-Shaped drawing hole for seven silicon cores described in the utility model is: this radio-frequency induction coil apparatus structure is firm, can make silicon core zone melting method draw and more stablize, be conducive to improve to greatest extent unit production capacity, greatly improve the production efficiency of silicon core, reduce the energy consumption of single silicon core, reduce the input of manpower and material resources, thereby reduced the cost of polysilicon production process.
Brief description of the drawings
With reference to the accompanying drawings the utility model is described in further detail below.
Fig. 1 is the structural representation of producing the radio-frequency induction coil coil apparatus with Pear-Shaped drawing hole described in the utility model embodiment for seven silicon cores;
Fig. 2 is the side sectional view of producing the radio-frequency induction coil coil apparatus with Pear-Shaped drawing hole described in the utility model embodiment for seven silicon cores;
Fig. 3 is the lower surface part material step part schematic diagram of producing the radio-frequency induction coil coil apparatus with Pear-Shaped drawing hole described in the utility model embodiment for seven silicon cores.
In figure:
1, open type conflux ring; 2, water inlet pipe; 3, rising pipe; 4, negative electrode joint flange; 5, anodic bonding flange; 6, grounding connection sheet; 7, Pear-Shaped drawing hole; 8, drawing hole cone surface; 9, magnetic field division line; 10, conflux ring cone surface; 11, center material hole; 12, the material hole circle conical surface; 13, water-flowing trough; 14, cylindrical material step one; 15, cylindrical material step two.
Embodiment
As Figure 1-3, described in the utility model embodiment, produce the radio-frequency induction coil coil apparatus with Pear-Shaped drawing hole for seven silicon cores, comprise open type conflux ring 1, water inlet pipe 2, rising pipe 3, negative electrode joint flange 4, anodic bonding flange 5, grounding connection sheet 6, described open type conflux ring 1 cylindrical hatch frame and be positioned at this right cylinder top grounding connection sheet 6 is installed, the central zone, upper surface that is positioned at this open type conflux ring 1 is provided with the conflux ring cone surface 10 caving inward, the central zone, lower surface that is positioned at open type conflux ring 1 is provided with three annular material steps that caliber size is different from inside to outside successively, it is home position Chu center material step, cylindrical material step 1 and cylindrical material step 2 15, at open type conflux Huan center, the step site place of putting of material arranges material hole, center 11, these 11 outer edge places, material hole, center are with the material hole circle conical surface 12, seven Pear-Shaped drawing holes 7 of annular spread on the open type conflux ring 1 of 11 outsides, material hole, center, each Pear-Shaped drawing hole 7 outer edge places are with drawing hole cone surface 8, between every two adjacent Pear-Shaped drawing holes 7 with a magnetic field division line 9, thereby form to be outwards from material hole, center 11 and disperse six match shape magnetic field division lines 9 of distribution of shapes, simultaneously, the outer rim that is positioned at seven Pear-Shaped drawing holes 7 arranges the water-flowing trough 13 of rhombus, be positioned at 13 two outer ends of this water-flowing trough and offer respectively successively water inlet pipe 2, rising pipe 3, this water inlet pipe 2 and rising pipe 3 outer ends are respectively equipped with negative electrode joint flange 4 and anodic bonding flange 5.
The above-mentioned description to embodiment is can understand and apply this case technology for the ease of those skilled in the art, person skilled in the art obviously can make various amendments to these examples easily, and General Principle described herein is applied in other embodiment and needn't passes through performing creative labour.Therefore, this case is not limited to above embodiment, and those skilled in the art is according to the announcement of this case, and the improvement of making for this case and amendment all should be in the protection domains of this case.
Claims (8)
1. produce the radio-frequency induction coil coil apparatus with Pear-Shaped drawing hole for seven silicon cores for one kind, comprise open type conflux ring (1), water inlet pipe (2), rising pipe (3), negative electrode joint flange (4), anodic bonding flange (5), grounding connection sheet (6), it is characterized in that:
Described open type conflux ring (1) is for open-ended cylindrical structure and be positioned at this right cylinder top installation grounding connection sheet (6), the central zone, upper surface that is positioned at this open type conflux ring (1) is provided with the conflux ring cone surface (10) caving inward, the central zone, lower surface that is positioned at open type conflux ring (1) is provided with three annular material steps from inside to outside successively, i.e. center material step, cylindrical material step one (14) and cylindrical material step two (15);
At open type conflux Huan center, the step site place of putting of material arranges material hole, center (11), in the outside open type conflux ring (1) in material hole, center (11) around seven Pear-Shaped drawing holes of distribution (7), between every two adjacent Pear-Shaped drawing holes (7) with a magnetic field division line (9), thereby form from material hole, center (11) emanant structure to the periphery;
Simultaneously, the outer rim that is positioned at seven Pear-Shaped drawing holes (7) arranges the water-flowing trough (13) of rhombus, be positioned at (13) two outer ends of this water-flowing trough and offer respectively successively water inlet pipe (2), rising pipe (3), this water inlet pipe (2) is connected respectively negative electrode joint flange (4) and anodic bonding flange (5) successively with rising pipe (3) outer end.
2. according to claim 1ly produce the radio-frequency induction coil coil apparatus with Pear-Shaped drawing hole for seven silicon cores, it is characterized in that: outer edge place, material hole, described center (11) is with the material hole circle conical surface (12).
3. according to claim 1ly produce the radio-frequency induction coil coil apparatus with Pear-Shaped drawing hole for seven silicon cores, it is characterized in that: each Pear-Shaped drawing hole (7) outer edge place is with drawing hole cone surface (8).
4. according to claim 1ly produce the radio-frequency induction coil coil apparatus with Pear-Shaped drawing hole for seven silicon cores, it is characterized in that: described Pear-Shaped drawing hole (7) is made up of outer circular hole and interior circular hole, outer circular hole and interior circular hole intersection arrange arc-shaped transitional surface.
5. according to claim 1ly produce the radio-frequency induction coil coil apparatus with Pear-Shaped drawing hole for seven silicon cores, it is characterized in that: the outer end of each match shape magnetic field division line (9) is respectively equipped with the hole of circular arc.
6. according to claim 1ly produce the radio-frequency induction coil coil apparatus with Pear-Shaped drawing hole for seven silicon cores, it is characterized in that: described open type conflux ring (1) outer edge surface, by argon arc red copper welding water-flowing trough (13), makes water-flowing trough (13) and open type conflux ring (1) form one.
7. according to claim 1ly produce the radio-frequency induction coil coil apparatus with Pear-Shaped drawing hole for seven silicon cores, it is characterized in that: described negative electrode joint flange (4) is rhombus or semicircle with anodic bonding flange (5).
8. according to claim 1ly produce the radio-frequency induction coil coil apparatus with Pear-Shaped drawing hole for seven silicon cores, it is characterized in that: be positioned at the outside connecting earthing device of grounding connection sheet (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320851151.9U CN203639596U (en) | 2013-12-23 | 2013-12-23 | High-frequency induction coil device with gourd-shaped drawing holes for producing seven silicon cores |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320851151.9U CN203639596U (en) | 2013-12-23 | 2013-12-23 | High-frequency induction coil device with gourd-shaped drawing holes for producing seven silicon cores |
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| Publication Number | Publication Date |
|---|---|
| CN203639596U true CN203639596U (en) | 2014-06-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320851151.9U Expired - Fee Related CN203639596U (en) | 2013-12-23 | 2013-12-23 | High-frequency induction coil device with gourd-shaped drawing holes for producing seven silicon cores |
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| CN (1) | CN203639596U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104726929A (en) * | 2013-12-23 | 2015-06-24 | 刘剑 | Cucurbit-shaped drawing aperture high frequency induction coil device for seven silicon core production |
-
2013
- 2013-12-23 CN CN201320851151.9U patent/CN203639596U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104726929A (en) * | 2013-12-23 | 2015-06-24 | 刘剑 | Cucurbit-shaped drawing aperture high frequency induction coil device for seven silicon core production |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170508 Address after: 85 No. 332000 Jiangxi province Jiujiang District Lian Lian Road Patentee after: Jiujiang Mount Lu Xinhua Electronics Co., Ltd. Address before: 88 No. 332000 Jiangxi province Jiujiang Lianxi Road Patentee before: Liu Jian |
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| TR01 | Transfer of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140611 Termination date: 20181223 |
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| CF01 | Termination of patent right due to non-payment of annual fee |