CN203638501U - Multi-layer storage table device - Google Patents
Multi-layer storage table device Download PDFInfo
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- CN203638501U CN203638501U CN201420001669.8U CN201420001669U CN203638501U CN 203638501 U CN203638501 U CN 203638501U CN 201420001669 U CN201420001669 U CN 201420001669U CN 203638501 U CN203638501 U CN 203638501U
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- bracing frame
- feet
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- table apparatus
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Abstract
The utility model discloses a multi-layer storage table device. A leveling base of the multi-layer storage table device comprises a support plate at the bottom layer, an adjusting plate at the top layer, a leveling part between the support plate and the adjusting plate and a locking part for fixing the support plate and the adjusting plate. Support legs are supported by support leg supporting frames in pairs, the adjusting plate is fixedly connected via a pair of oppositely-arranged connection side plates and the support leg supporting frames which can be arranged in multiple layers on the inner sides of the connection side plates vertically, and a plurality of the support legs are arranged on the supper surface of the support leg support frame in each layer. By the aid of the multi-layer storage table device, wafers can be stored in multiple layers, utilization rate of a manipulator can be improved, and production yield can be increased. The multi-layer storage table device has the outstanding advantages of simple structure, easiness in realizing and capability of saving floor space of equipment.
Description
Technical field
The utility model relates to a kind of wafer memory storage for semiconductor manufacturing equipment, more specifically, relates to a kind of storage table apparatus that can simultaneously store multilayer wafer for semiconductor manufacturing equipment.
Background technology
Semiconductor manufacturing industry is circulation and the repetition of a series of main technological steps.Many preparation technologies comprise the chemical reaction occurring in semiconductor manufacturing equipment process cavity.Now, to the treatment process of semiconductor crystal wafer, conventionally to use the chemical reaction occurring in process cavity.
According to treatment process of different nature, wafer often need to transmit by wafer transfer system between the process cavity of multiple semiconductor manufacturing equipments.In process equipment, the radical function of wafer transfer system is to load wafer, and all handling are all completed by automation.Wafer receives into from device external, and waiting period before technique is carried out, needs the place of a temporary transient storage.The device of using when storage is wafer storage platform.
At present, for the process equipment of semicon industry, mostly only there is individual layer process cavity.For receiving and temporarily store the storage platform of wafer, be also single layer designs at device interior.
Chinese invention patent application CN 102840425 A support feets disclose a kind of support feet for wafer storage platform.This device fixes by the feet being arranged on an annular brace ring wafer being placed on it.With the storage platform of this support ring supporting construction, it is exactly a kind of storage platform of single layer designs.The storage platform of this form can only be one deck structure, and a storage platform once can only be stored a wafer.Trace it to its cause, exactly because the support ring of wafer below has stopped manipulator motion path longitudinally.The storage platform support ring stack of supposing this structure arranges, and so, manipulator is being taken away after the wafer on upper strata, owing to being subject to stopping of this wafer supported underneath ring, can not continue to pick up wafer toward lower floor again.
In recent years, along with semiconductor industry fast development, industry size expands rapidly, and design and manufacturing technology level significantly promotes.Be subject to occupation area of equipment and produce and produce quantitative limitation, device layout has started to be developed to the process cavity of multilayer by the process cavity of individual layer.Now, if still adopt individual layer wafer storage table apparatus in equipment, degree of utilization that to a great extent can limit mechanical hand, reduces the work efficiency of process cavity.This will be very uneconomic defect for semiconductor industry with keen competition.
Utility model content
The purpose of this utility model is to overcome the above-mentioned defect that prior art exists, a kind of memory storage that can simultaneously store multilayer wafer for semiconductor manufacturing equipment is provided, by adopting stent-type feet to support to, multilayer is arranged on to a pair of connecting lateral plate inner side of installing on the base with leveling effect, makes wafer be able to multilayered memory; Space between every pair of feet bracing frame arranging in opposite directions, makes manipulator can successfully pick up the wafer of each layer, thereby can improve the degree of utilization of manipulator, increases production output.
For achieving the above object, the technical solution of the utility model is as follows:
A kind of multilayered memory table apparatus, comprise base, feet supports, feet, is characterized in that, the leveling base that described base is two-layer structure, comprise the stay bearing plate that is positioned at lower floor, be positioned at the regulating plate on upper strata, be located at the leveling parts between stay bearing plate and regulating plate, and the locking member of fixed support plate and regulating plate; Described feet is supported for paired feet bracing frame, described regulating plate is affixed by a pair of connecting lateral plate and the described feet bracing frame arranging in opposite directions, wherein, described paired feet bracing frame is in the vertically multilayer setting in opposite directions of the inner side of described connecting lateral plate; Every layer of upper surface of described feet bracing frame is provided with several feets.The technical program can be adjusted the level of storage platform easily, and wafer multilayered memory is achieved, and it is simple in structure, stable that the design's device has, the distinguishing feature that can save occupation area of equipment.
Further, the leveling parts of described leveling base are three levelling bolts, and described levelling bolt lower end and described stay bearing plate are affixed, and described regulating plate is supported in its upper end, and described levelling bolt forms equicrural triangle by its line and distributes.Use levelling bolt to regulate level very convenient, the distribution form of equicrural triangle makes the regulating plate on its top easily keep stable horizontality.
Further, the locking member of described leveling base is two lock screws, described stay bearing plate is connected by described lock screw with regulating plate and is fixing, and the disconnected side plate that described two lock screws are arranged on described leveling base in opposite directions arranges the limit portion center of end.Regulate after level at levelling bolt, only need to be by these two lock screws, just can be together with levelling bolt, guarantee base firmly and the horizontal stable of topside.
Further, described two connecting lateral plates inner side has the contour boss arranging in opposite directions in pairs, and described paired boss can vertically arrange 1 to multilayer; The position, top that described connecting lateral plate is positioned at every layer of described paired boss is provided with pin hole.The effect of boss is for supported pin bracing frame, and pin hole is used for installing fixedly uses pin.
Further, described feet bracing frame is arranged on the inner side of described connecting lateral plate in pairs in opposite directions, and described feet bracing frame can vertically arrange 1 to multilayer.The design's device can arrange 1 layer or Multi-layer supporting pin bracing frame as required, make wafer also can monolithic or the form of multi-disc store, such design makes device very flexible in use.
Further, described feet bracing frame is arranged on the corresponding boss of described connecting lateral plate inner side in pairs in opposite directions, described feet bracing frame is provided with the feet bracing frame pin hole matching with described connecting lateral plate pin hole, and by pin being installed by described feet bracing frame and described connecting lateral plate Joint.The pin hole that pin threading connecting lateral plate and feet bracing frame match, couples together these two parts; Feet bracing frame also can be by the boss of supported underneath, resists better the gravity effect producing after its carrying wafer.
Further, the sidepiece of described feet bracing frame pin hole is provided with top wire hole, and holds out against described pin by jackscrew is installed.
Further, the relative medial surface of described feet bracing frame arranging in opposite directions is in pairs concave panel.Spill design can alleviate the weight of feet bracing frame, the steadily of centre of gravity of assurance device.
Further, the upper surface of every layer of described feet bracing frame is provided with several feets, and its quantity is at least 3.
Further, the upper surface of every layer of described feet bracing frame is all provided with several feets, and each feet of every layer is positioned at same level, makes the wafer being placed on it in horizontality; The each layer of imaginary circle concentric that described several feets form, makes the each layer of wafer of placing keep in the vertical direction with one heart, with the structural stability of intensifier like this.
Can find out from technique scheme, the utility model, by the feet bracing frame that adopts multilayer to arrange on leveling base, makes wafer be able to multilayered memory, has improved the service efficiency of device; Manipulator can successfully pick up the wafer of each layer between the bracing frame of separating, thereby can improve the degree of utilization of manipulator, increases production output.Therefore the distinguishing feature that, the utlity model has simple in structure, easy realization, can save occupation area of equipment.
Accompanying drawing explanation
Fig. 1 is the integral structure schematic diagram of the utility model multilayered memory table apparatus;
Fig. 2 is the leveling base structural representation of the utility model multilayered memory table apparatus;
Fig. 3 is the connecting lateral plate structural representation of the utility model multilayered memory table apparatus;
Fig. 4 is the feet support frame structure birds-eye view of the utility model multilayered memory table apparatus;
Fig. 5 is the feet bracing frame local structure schematic diagram of the utility model multilayered memory table apparatus;
Fig. 6 is the feet bracing frame mounting structure schematic diagram of the utility model multilayered memory table apparatus.
100. leveling bases in figure, 101. stay bearing plates, 102. leveling boards, 103. lock screws, 104. levelling bolts, 105. leveling board fixed orifices, 200. connecting lateral plates, 201. connecting lateral plate pin holes, 202. connecting lateral plate fixed orifices, 203. boss, 300. feet bracing frames, 301. top wire holes, 302. feet bracing frame pin holes, 303. feet mounting holes, 304. concave panels, 400. jackscrews, 500. pins, 600. feets, 700. wafers.
The specific embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present utility model is described in further detail.
In the present embodiment, refer to Fig. 1, Fig. 1 is the integral structure schematic diagram of the utility model multilayered memory table apparatus.As shown in the figure, multilayered memory table apparatus of the present utility model comprises the double-deck leveling base 100 that regulates horizontal functional that has that is positioned at bottom of device, and two connecting lateral plates 200 of vertically installing are in opposite directions installed on the both ends of leveling base 100 superstructures.The inner side of two connecting lateral plates 200 is provided with feet bracing frame 300, and feet bracing frame 300 is in pairs to separate along short transverse the inner side that is arranged on two connecting lateral plates 200.Such structure design, makes to arrange as required one to multiple layer feet bracing frame.
Refer to Fig. 1, be processed with pin hole at the installation connection location of connecting lateral plate 200 and feet bracing frame 300, and be fixedly connected with by pin 500; Pin hole side at feet bracing frame 300 is processed with top wire hole, and by jackscrew 400 pins for suppressing metal 500, makes feet bracing frame 300 firm with the installation of connecting lateral plate 200.
Refer to Fig. 1, in four ends of every layer of feet bracing frame 300 upper surface, horizontal symmetrical is provided with 4 feets 600, is used for supporting the wafer 700 that is placed on it while use, and guarantees the wafer placement that is the level of state.If change position each other of feet, the feet of configurable multiple quantity, but at least will guarantee to configure 3, and should keep stress balance, prevents from that wafer is unbalance to fall.And the installation site of the feet of each layer will make the imaginary circle concentric of its formation, make so the each layer of wafer of placing keep in the vertical direction with one heart, with the structural stability of intensifier.
Refer to Fig. 2, Fig. 2 is the leveling base structural representation of the utility model multilayered memory table apparatus.As shown in the figure, leveling base comprises the stay bearing plate 101 that is positioned at lower floor bottom, and is positioned at the leveling board 102 on stay bearing plate 101.104,3 levelling bolts of 3 levelling bolts 104 are installed between stay bearing plate 101 and leveling board 102 and arrange by symmetrical equicrural triangle, and the limit portion of as far as possible close leveling board 102, to guarantee good regulating effect.The lower end of levelling bolt 104 is fixedly connected with stay bearing plate 101; The movable top of upper end supports leveling board 102, and leveling board 102 is lain in a horizontal plane on 3 levelling bolts 104.Regulate with levelling bolt 104 after the level of leveling board 102, then stay bearing plate 101 and 2 of leveling board 102 use are positioned to the lock screw 103 of limit portion are in opposite directions fixed, and make leveling board 102 in firm horizontality together with levelling bolt 104.End upper surface another two relative edges of leveling board 102 is processed with step, is processed with some leveling board fixed orifices 105 on step, is used for using with connecting lateral plate 200 is fixing.
Refer to Fig. 3, Fig. 3 is the connecting lateral plate structural representation of the utility model multilayered memory table apparatus.As shown in the figure, be processed with in two side portion of connecting lateral plate some to connecting lateral plate pin hole 201, for the use that is connected of feet bracing frame 300; Be processed with the connecting lateral plate fixed orifice 202 matching with the leveling board fixed orifice 105 on leveling board 102 in the lower surface of connecting lateral plate.In addition, below every pair of connecting lateral plate pin hole 201, be processed with boss 203, for supporting side's mounted thereto feet bracing frame 300, can resist better the gravity effect producing after its carrying wafer.
Refer to Fig. 4, Fig. 4 is the feet support frame structure birds-eye view of the utility model multilayered memory table apparatus.As shown in the figure, be processed with feet bracing frame pin hole 302 in feet bracing frame both sides with connecting lateral plate fixed orifice 202 places of matching, can insert pin and connect; For guarantee to connect firmly, be processed with top wire hole 301 in the side of feet bracing frame pin hole 302, insert after jackscrew, pin can be held out against fixingly, feet bracing frame and not being connected of connecting lateral plate can be become flexible.Two relative medial surfaces of feet bracing frame are processed into the concave panel 304 of indent, can alleviate the unnecessary weight of feet bracing frame, the steadily of centre of gravity of assurance device.Be processed with feet mounting hole 303 at feet bracing frame medial end, for fixed pedestal pin is installed.
Refer to Fig. 5, Fig. 5 is the feet bracing frame local structure schematic diagram of the utility model multilayered memory table apparatus.As shown in the figure, in the pin hole matching with connecting lateral plate at feet bracing frame, be inserted with pin 500; Be inserted with jackscrew 400 from the top wire hole of feet bracing frame pin hole side, pin held out against fixing, feet bracing frame and not being connected of connecting lateral plate can be become flexible.Feet 600 is provided with kidney-shaped mounting hole, can with feet bracing frame on feet mounting hole 303 by screw fastening, and feet 600 can be along kidney-shaped mounting hole fine setting installation site, the size of the wafer being carried to adapt to, and carry out position co-ordination with other feets.
Refer to Fig. 6, Fig. 6 is the feet bracing frame mounting structure schematic diagram of the utility model multilayered memory table apparatus.As shown in the figure, in the pin hole that feet bracing frame 300 matches with connecting lateral plate 200, be inserted with pin 500; Be inserted with jackscrew 400 from the top wire hole of feet bracing frame pin hole side, pin held out against fixing, feet bracing frame and not being connected of connecting lateral plate can be become flexible; Feet bracing frame 300 belows are pressed on the boss of connecting lateral plate 200 inner sides, can resist better the gravity effect producing after its carrying wafer.At feet bracing frame 300 upper surfaces, feet 600 is installed, its tip protrudes from feet bracing frame; Feet 600 upper support faces carry wafer 700, and make wafer 700 horizontal positioned, and each layer crystal circle 700 concentrics are placed.
Whole apparatus structure compactness, easily realization, can effectively save occupation area of equipment, is suitable for factory and promotes.
Above-described is only preferred embodiment of the present utility model; described embodiment is not in order to limit scope of patent protection of the present utility model; therefore the equivalent structure that every utilization specification sheets of the present utility model and accompanying drawing content are done changes, and in like manner all should be included in protection domain of the present utility model.
Claims (10)
1. a multilayered memory table apparatus, comprise base, feet supports, feet, is characterized in that, the leveling base that described base is two-layer structure, comprise the stay bearing plate that is positioned at lower floor, be positioned at the regulating plate on upper strata, be located at the leveling parts between stay bearing plate and regulating plate, and the locking member of fixed support plate and regulating plate; Described feet is supported for paired feet bracing frame, described regulating plate is affixed by a pair of connecting lateral plate and the described feet bracing frame arranging in opposite directions, wherein, described paired feet bracing frame is in the vertically multilayer setting in opposite directions of the inner side of described connecting lateral plate; Every layer of upper surface of described feet bracing frame is provided with several feets.
2. multilayered memory table apparatus as claimed in claim 1, it is characterized in that, the leveling parts of described leveling base are three levelling bolts, and described levelling bolt lower end and described stay bearing plate are affixed, described regulating plate is supported in its upper end, and described levelling bolt forms equicrural triangle by its line and distributes.
3. multilayered memory table apparatus as claimed in claim 1, it is characterized in that, the locking member of described leveling base is two lock screws, described stay bearing plate is connected by described lock screw with regulating plate and is fixing, and the disconnected side plate that described two lock screws are arranged on described leveling base in opposite directions arranges the limit portion center of end.
4. multilayered memory table apparatus as claimed in claim 1, is characterized in that, described two connecting lateral plates inner side has the contour boss arranging in opposite directions in pairs, and described paired boss can vertically arrange 1 to multilayer; The position, top that described connecting lateral plate is positioned at every layer of described paired boss is provided with pin hole.
5. multilayered memory table apparatus as claimed in claim 1, is characterized in that, described feet bracing frame is arranged on the inner side of described connecting lateral plate in pairs in opposite directions, and described feet bracing frame can vertically arrange 1 to multilayer.
6. multilayered memory table apparatus as claimed in claim 4, it is characterized in that, described feet bracing frame is arranged on the corresponding boss of described connecting lateral plate inner side in pairs in opposite directions, described feet bracing frame is provided with the feet bracing frame pin hole matching with described connecting lateral plate pin hole, and by pin being installed by described feet bracing frame and described connecting lateral plate Joint.
7. multilayered memory table apparatus as claimed in claim 6, is characterized in that, the sidepiece of described feet bracing frame pin hole is provided with top wire hole, and holds out against described pin by jackscrew is installed.
8. the multilayered memory table apparatus as described in claim 1,5 or 6, is characterized in that, the relative medial surface of described feet bracing frame arranging in opposite directions is in pairs concave panel.
9. multilayered memory table apparatus as claimed in claim 1, is characterized in that, the upper surface of every layer of described feet bracing frame is provided with several feets, and its quantity is at least 3.
10. the multilayered memory table apparatus as described in claim 1 or 9, it is characterized in that, the upper surface of every layer of described feet bracing frame is all provided with several feets, and each feet of every layer is positioned at same level, the each layer of imaginary circle concentric that described several feets form.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420001669.8U CN203638501U (en) | 2014-01-02 | 2014-01-02 | Multi-layer storage table device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420001669.8U CN203638501U (en) | 2014-01-02 | 2014-01-02 | Multi-layer storage table device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203638501U true CN203638501U (en) | 2014-06-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420001669.8U Withdrawn - After Issue CN203638501U (en) | 2014-01-02 | 2014-01-02 | Multi-layer storage table device |
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| CN (1) | CN203638501U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103693343A (en) * | 2014-01-02 | 2014-04-02 | 北京七星华创电子股份有限公司 | Multi-tiered storage stand device |
| CN106611722A (en) * | 2015-10-21 | 2017-05-03 | 沈阳拓荆科技有限公司 | A two-chamber double-layer support structure integrating positioning and centring functions |
| CN107672936A (en) * | 2017-09-06 | 2018-02-09 | 武汉华星光电半导体显示技术有限公司 | A kind of mask plate clip and its fixing device |
-
2014
- 2014-01-02 CN CN201420001669.8U patent/CN203638501U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103693343A (en) * | 2014-01-02 | 2014-04-02 | 北京七星华创电子股份有限公司 | Multi-tiered storage stand device |
| CN103693343B (en) * | 2014-01-02 | 2016-01-06 | 北京七星华创电子股份有限公司 | A kind of multilayered memory table apparatus |
| CN106611722A (en) * | 2015-10-21 | 2017-05-03 | 沈阳拓荆科技有限公司 | A two-chamber double-layer support structure integrating positioning and centring functions |
| CN107672936A (en) * | 2017-09-06 | 2018-02-09 | 武汉华星光电半导体显示技术有限公司 | A kind of mask plate clip and its fixing device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20140611 Effective date of abandoning: 20160106 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |