CN203632744U - Microscopic scanning device - Google Patents
Microscopic scanning device Download PDFInfo
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- CN203632744U CN203632744U CN201320650614.5U CN201320650614U CN203632744U CN 203632744 U CN203632744 U CN 203632744U CN 201320650614 U CN201320650614 U CN 201320650614U CN 203632744 U CN203632744 U CN 203632744U
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- 230000003287 optical effect Effects 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000003384 imaging method Methods 0.000 abstract description 9
- 230000000694 effects Effects 0.000 abstract description 5
- 230000003321 amplification Effects 0.000 abstract description 4
- 238000003199 nucleic acid amplification method Methods 0.000 abstract description 4
- 230000001678 irradiating effect Effects 0.000 abstract 1
- 238000004458 analytical method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
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Abstract
The utility model provides a microscopic scanning device. The microscopic scanning device comprises a light source, an image sensing module and a lens group, wherein the light source is used for generating light for irradiating an object to generate image light, the image sensing module is used for receiving the image light from the object to generate an image signal, the lens group is arranged at a light entry side of the image sensing module and is used for gathering the image light from the object to the image sensing module, the lens group comprises multiple lenses, light axes of the multiple lenses are mutually parallel, and an object height of the lens group at an object end is smaller than an image height of the lens group at the image sensing module end. The microscopic scanning device has an imaging amplification effect and can acquire microscopic scanning images of objects in a large area scope through continuous linear scanning.
Description
Technical field
The utility model is about a kind of scanning means, particularly a kind of microscan device.
Background technology
Due to the microminiaturization of product size, or for the discussion of material microscopic property and structure, micro-imaging technique is used in material analysis, product yield analysis or raw doctor field widely.But traditional micro-imaging, only can obtain the image of zonule, the if desired observation in large region, needs a large amount of map interlinkings.For example,, for 1 " x1 " wafer area, may obtain the figure of up to a hundred or a upper thousand sheets, then also to be spliced, process is loaded down with trivial details and easily produce error.In addition, traditional scanning means is all contracting as system, its be by larger object to be scanned via optical system imaging in less image sensor, as shown in Figure 1, that is object height O
0be greater than image height I
0, therefore traditional scanning means cannot be obtained the thin portion scan-image of object to be scanned.
Therefore, develop and a kind ofly can obtain large regional extent and high resolution image is the target of needing at present realization badly.
Utility model content
The utility model a kind of scanning means is provided, it has the effect of amplification imaging, via continuous linear scan, can obtain the microscan image of large regional extent object.
According to an embodiment of the present utility model, a kind of microscan device, comprises a light source, an image sensing module and a set of lenses.Light source irradiates an object to produce an image light in order to produce a light; Image sensing module is in order to receive from the image light of object to produce a signal of video signal; Set of lenses is arranged at a light inlet side of image sensing module, in order to assemble from the image light of object to image sensing module, wherein set of lenses comprises multiple lens, and the optical axis of multiple lens is parallel to each other, and set of lenses is less than an image height of image sensing module end in an object height of object end.
Coordinate accompanying drawing to illustrate in detail by specific embodiment below, when the effect that is easier to understand the purpose of this utility model, technology contents, feature and reaches.
Accompanying drawing explanation
The scanning imagery schematic diagram of prior art shown in Fig. 1.
Figure 2 shows that the structural representation of the scanning means of the utility model one embodiment.
Figure 3 shows that the structural representation of the scanning means of another embodiment of the utility model.
Figure 4 shows that the structural representation of the scanning means of another embodiment of the utility model.
Symbol description
1 scanning means
10 light sources
20 image sensing modules
30 set of lenses
31 lens
40 driver modules
50 image processing modules
I
0image height in prior art
O
0object height in prior art
I image
I
himage height
O object
O
hobject height
Embodiment
Please refer to Fig. 2, Figure 2 shows that the structural representation of the scanning means of the utility model one embodiment.A kind of microscan device 1, comprises a light source 10, an image sensing module 20 and a set of lenses 30.Light source irradiates an object O to produce an image light in order to produce a light, and in an embodiment, light source 10 comprises a light-emitting diode or cold-cathode fluorescence lamp (cold cathode fluorescent lamp, CCFL).Image sensing module 20 is in order to receive from the image light of object to produce a signal of video signal.In an embodiment, image sensing module 20 can be a wire image sensor (linear image sensor), the image being obtained to accept linear scan.30 of set of lenses are arranged at a light inlet side of image sensing module 20, in order to assemble from the image light of object O to image sensing module 20, obtain an image I; Wherein set of lenses 30 comprises multiple lens 31, and the optical axis of multiple lens 31 is parallel to each other, and set of lenses 30 is a magnifying optics, that is less object O images in image sensing module 20 after set of lenses 30 optical amplifiers.In other words, the optical system of set of lenses 30 is in an object height O of object O end
hbe less than an image height I of image sensing module 20 ends
h.
According to above-mentioned framework, microscan device 1 of the present utility model is an amplification imaging system, therefore can obtain micro-imaging.In addition on the one hand, see through continuous linear scan, can obtain the micro-imaging of whole large regional extent, the process of having removed a large amount of map interlinkings from, promotes convenience with accuracy.In an embodiment, the optical magnification of set of lenses 30 is between 4 to 100 times.
The utility model is mainly used in the field of linear scan, and scanning means can have dissimilar image sensing module.In an embodiment, wherein image sensing module 20 can be a Charged Coupled Device (CCD), CMOS (Complementary Metal Oxide Semiconductor) (CMOS) transducer or contact image sensor (CIS).Wherein, the one that CIS is linear transducer, in order to be electronic format by file, image etc. scanning, utilizes for storing.When scanning, sweep object obtains multiple linear images one by one.Finally by image processing, can form a complete image.Advantage is, CIS has frivolous characteristic.In an embodiment, wherein set of lenses 30 can be a rod lens (rod lens) again.Rod lens (or claiming lens pillar), has advantages of into light path short, can be as light, thin assembly, therefore conventionally in order to the CIS that arranges in pairs or groups.In addition, CCD and CMOS have the good quality of image, no matter are presenting of image processing or chiaroscuro effect, have gratifying performance, therefore also can be used as image sensing module of the present utility model.
In addition, microscan device 1 of the present utility model can apply to penetration draft or reflective draft.As shown in Figure 2, in an embodiment, in the situation of scanning reflection formula draft, wherein light source 10 and image sensing module 20 are arranged at the same side of object O, and image sensing module 20 receives the image light through object O reflection.As for penetration draft, as shown in Figure 3, in another embodiment, wherein light source 10 and image sensing module 20 are arranged at the phase heteropleural of object O, and image sensing module 20 receives the image light of transmission object O.
Please refer to Fig. 4, in an embodiment, also comprise a driver module 40, in order to drive image sensing module 20 and object O to relatively move along one scan direction each other, so that image sensing module 20 sweep object O.For example, driver module can comprise a stepper motor, and the roller set of can arranging in pairs or groups is used.But be not limited to this, also can move with respect to image sensing module 20 by driven object O, so that image sensing module 20 carries out scanning imagery to object O.
Refer again to Fig. 4, in an embodiment, also comprise an image processing module 50, itself and image sensing module 20 are electrically connected, in order to signal of video signal is processed to form one scan image.For example, image processing module can comprise a computer software, sees through the auxiliary of computer software, can carry out character adjustment, repeatedly scheme, cut apart or merge for signal of video signal, to obtain required image.
Comprehensively above-mentioned, the utility model a kind of microscan device is provided, it has the effect of amplification imaging, via continuous linear scan, can obtain the microscan image of large regional extent object.
Above-described embodiment is only for technological thought of the present utility model and feature are described, its object can be understood content of the present utility model and implement according to this making to be familiar with the art person, when can not with restriction the scope of the claims of the present utility model, be that the equalization that all spirit disclosing according to the utility model is done changes or modifies, must be encompassed in the scope of the claims of the present utility model.
Claims (10)
1. a microscan device, is characterized in that, comprises:
One light source, it irradiates an object to produce an image light in order to produce a light;
One image sensing module, it is in order to receive from this image light of this object to produce a signal of video signal; And
One set of lenses, it is arranged at a light inlet side of this image sensing module, in order to assemble from this image light of this object to this image sensing module, wherein this set of lenses comprises multiple lens, the optical axis of the plurality of lens is parallel to each other, and this set of lenses is less than an image height of this image sensing module end in an object height of this object end.
2. microscan device as claimed in claim 1, is characterized in that, this light source comprises a light-emitting diode or cold-cathode fluorescence lamp.
3. microscan device as claimed in claim 1, is characterized in that, this light source and this image sensing module are arranged at the same side of this object, and this image sensing module receives this image light through this object reflection.
4. microscan device as claimed in claim 1, is characterized in that, this light source and this image sensing module are arranged at the phase heteropleural of this object, and this image sensing module receives this image light of this object of transmission.
5. microscan device as claimed in claim 1, is characterized in that, this set of lenses comprises a rod lens.
6. microscan device as claimed in claim 1, is characterized in that, also comprises a driver module, and it is in order to drive this image sensing module and this object to relatively move along one scan direction each other, so that this image sensing module scans this object.
7. microscan device as claimed in claim 6, is characterized in that, this driver module comprises a stepper motor.
8. microscan device as claimed in claim 1, is characterized in that, also comprises:
One image processing module, itself and this image sensing module is electrically connected, in order to this signal of video signal is processed to form one scan image.
9. microscan device as claimed in claim 1, is characterized in that, this image sensing module comprises a wire image sensor.
10. microscan device as claimed in claim 1, is characterized in that, this image sensing module comprises a Charged Coupled Device, CMOS semiconductor sensor or contact image sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320650614.5U CN203632744U (en) | 2013-10-21 | 2013-10-21 | Microscopic scanning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320650614.5U CN203632744U (en) | 2013-10-21 | 2013-10-21 | Microscopic scanning device |
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| Publication Number | Publication Date |
|---|---|
| CN203632744U true CN203632744U (en) | 2014-06-04 |
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| CN201320650614.5U Expired - Lifetime CN203632744U (en) | 2013-10-21 | 2013-10-21 | Microscopic scanning device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107959766A (en) * | 2016-10-18 | 2018-04-24 | 上海中晶科技有限公司 | The image scanning method and its system of object of the scanning with depth image |
-
2013
- 2013-10-21 CN CN201320650614.5U patent/CN203632744U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107959766A (en) * | 2016-10-18 | 2018-04-24 | 上海中晶科技有限公司 | The image scanning method and its system of object of the scanning with depth image |
| CN107959766B (en) * | 2016-10-18 | 2019-12-24 | 上海中晶科技有限公司 | Image scanning method and system for scanning object with thickness |
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Granted publication date: 20140604 |
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| CX01 | Expiry of patent term |