CN110365915A - Array transmission formula micro image collection system - Google Patents
Array transmission formula micro image collection system Download PDFInfo
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- CN110365915A CN110365915A CN201910743158.0A CN201910743158A CN110365915A CN 110365915 A CN110365915 A CN 110365915A CN 201910743158 A CN201910743158 A CN 201910743158A CN 110365915 A CN110365915 A CN 110365915A
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- microimaging
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- 230000005540 biological transmission Effects 0.000 title claims abstract description 16
- 238000003384 imaging method Methods 0.000 claims abstract description 24
- 230000005284 excitation Effects 0.000 claims abstract description 10
- 239000011159 matrix material Substances 0.000 claims description 3
- 238000003491 array Methods 0.000 claims description 2
- 239000000523 sample Substances 0.000 abstract description 37
- 238000001514 detection method Methods 0.000 abstract description 6
- 239000012472 biological sample Substances 0.000 abstract description 4
- 238000000018 DNA microarray Methods 0.000 abstract description 2
- 229910052594 sapphire Inorganic materials 0.000 abstract description 2
- 239000010980 sapphire Substances 0.000 abstract description 2
- 230000003287 optical effect Effects 0.000 description 9
- 230000000007 visual effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000021615 conjugation Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/361—Optical details, e.g. image relay to the camera or image sensor
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/54—Mounting of pick-up tubes, electronic image sensors, deviation or focusing coils
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/55—Optical parts specially adapted for electronic image sensors; Mounting thereof
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/90—Arrangement of cameras or camera modules, e.g. multiple cameras in TV studios or sports stadiums
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Signal Processing (AREA)
- Optics & Photonics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Health & Medical Sciences (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The invention discloses a kind of array transmission formula micro image collection systems, including microimaging module array, receiving end, sample stage and excitation light source, the microimaging module array is located at the surface of sample stage, and the excitation light source is located at the lower section of the sample stage；The microimaging module array includes into multiple microimaging modules of array distribution, each microimaging module all includes the first lens group, the second lens group and imaging sensor, first lens group and second lens group are symmetrical arranged, first lens group is between second lens group and the sample stage, between first lens group and described image sensor, described image sensor and the receiving end are electrically connected second lens group.The present invention can acquire the multiple regions of large-area planar transparent sample simultaneously, improve detection speed, be suitable for the detection of the transparent samples high throughputs such as micro- sapphire, biochip, protein-chip and thin biological sample.
Description
Technical field
The invention belongs to mechanical vision inspection technology fields, more particularly to a kind of array transmission formula micro image collection system
System, can be applied to semiconductor crystal wafer and biological sample high throughput micro-imaging.
Background technique
Micro- imaging system is that human eye can be difficult to the small items observed or differentiated or details amplification imaging, for people
Extract the optical system or instrument of fine structure information, Related product is widely used in being related to experimental study, manufacturing etc.
The field of aspect.As related discipline is in the progress of microscopic fields, the micro imaging system based on many frontier theories is
Through breaking through the optical imagery limit, strided forward towards higher resolution.
However, traditional micro imaging system is limited to optical texture in terms of practical application, it is necessary to be neglected by having
The high-resolution object lens of rink corner (within 3 °) cooperate long conjugation distance to realize optical amplifier, huge so as to cause optical system
And it is complicated, and price is high.Simultaneously as visual field is small, traditional microscopic system is needed to use and be swept when to compared with large sample at complete picture
The method of splicing is retouched to realize, the introducing of relevant device enables its cost costly, also can enable microscopic system at work
Fine structure is easier to receive extraneous factor influence, such as vibration, temperature etc..Again, the operating mode of Overlap-scanning causes into
The picture time is long, and for the similar micro- large area sample of semiconductor, efficiency is lower.
To sum up, conventional microscope volume is generally huge, and it is at high cost, it is complex to large sample imaging process, it is time-consuming
It is long, it is difficult to meet the needs of existing semiconductor and biological sample micro- detection.
In conclusion realize a kind of visual field is big, high resolution, stability is strong, flux is big, inexpensive large sample it is micro- at
As system, be one it is urgently to be resolved, there is the problem of very high practical value.
Summary of the invention
The invention mainly solves the technical problem of providing a kind of array transmission formula micro image collection systems, can be simultaneously
The multiple regions of large-area planar transparent sample are acquired, detection speed is improved, micro-, biochip, albumen suitable for sapphire
The detection of the transparent samples high throughput such as matter chip and thin biological sample.
In order to solve the above technical problems, one technical scheme adopted by the invention is that: a kind of array transmission formula micro-image
Acquisition system, including microimaging module array, receiving end, sample stage and excitation light source, microimaging module array position
In the surface of sample stage, the excitation light source is located at the lower section of the sample stage；
The microimaging module array includes into multiple microimaging modules of array distribution, each microimaging
Module all includes the first lens group, the second lens group and imaging sensor, first lens group and second lens group pair
Claim setting, for first lens group between second lens group and the sample stage, second lens group is located at institute
It states between the first lens group and described image sensor, described image sensor and the receiving end are electrically connected.
The present invention is that further technical solution is used by solving its technical problem:
It further says, second lens group includes at least two lenticules, close to the micro- of described image sensor
The size of mirror is maximum, and the size of the lenticule far from described image sensor is minimum；First lens group includes at least two
Lenticule, the size close to the lenticule of described image sensor is minimum, the size of the lenticule far from described image sensor
It is maximum；The size of the lenticule is that diameter is 0.5-15mm.
Further say, the arrangement modes of several microimaging modules be linear array be arranged side by side, matrix arrangement or same
Heart circle best-fit.
It further says, the minimum diameter of the lenticule of the minimum diameter of first lens group and second lens group
Lenticule be different lenticules or be the same lenticule.
Further to say, the focal plane of second lens group is overlapped with the reception end face of imaging sensor, and described second
The focal length of lens group is 1-3mm, and the F number of second lens group is less than 5.
It further says, the focal length of first lens group is 1-6mm.
It further says, the pixel dimension of described image sensor is 0.8-2.5 μm.
It further says, described image sensor is cmos image sensor or ccd image sensor.
Beneficial effects of the present invention:
When shooting, the miniature microimaging module of multiple large visual field high resolutions can be linked together and forms array
Structure, the time same in this way can have multiple microimaging modules to carry out sample micro-imaging, to realize large area sample
The high-throughput micro-imaging of high-resolution, big visual field, is in particular in:
In each microimaging module, the size in the first lens group close to the lenticule of sample is maximum, passes close to image
The size of the lenticule of sensor is minimum, and effect is that the sample optical information in the big visual field scope in front is coupled into optical path,
To which single microimaging mould group has big imaging viewing field；The ratio between the focal length of second lens group and the focal length of the first lens group are just
It is the optical magnification of micro-imaging, the magnifying power of 0.5X -8X may be implemented in the focal length by configuring the two；First lens group and
Second lens group is all the optics microscope group of short focus, therefore small in size, and microimaging module could be used as to carry out array row in this way
Cloth；Imaging sensor also can under small optical magnification in this way using the imaging sensor of small pixel size
Enough realize high sample resolution ratio；
The structure design of the array of multiple microimaging module compositions enables all camera modules to cover large area as far as possible
All area-of-interests on sample can also assist realizing that the non-blind area of sample is micro- by the movement of small-scale sample stage
Imaging improves the micro- detection efficiency of sample so that receiving end can be handled all subgraphs as complete image；
And the micro-image of each microimaging module acquisition can also be handled independently, and result is sent to reception
End carries out synthesis analysis, and information collection efficiency of the invention and scan efficiency are higher.
Detailed description of the invention
Fig. 1 is overall structure diagram of the invention；
Fig. 2 be the microimaging module of the embodiment of the present invention 1 structural schematic diagram (minimum diameter of the first lens group it is micro-
Lens are different lenticules from the lenticule of the minimum diameter of the second lens group)；
Fig. 3 be the microimaging module of the embodiment of the present invention 2 structural schematic diagram (minimum diameter of the first lens group it is micro-
The lenticule of lens and the minimum diameter of the second lens group is the same lenticule)；
Each section label is as follows in attached drawing:
Microimaging module array 1, the first lens group 11, the second lens group 12, imaging sensor 13, receiving end 2, sample
Platform 3 and excitation light source 4.
Specific embodiment
The preferred embodiments of the present invention will be described in detail with reference to the accompanying drawing, so that advantages and features of the invention energy
It is easier to be readily appreciated by one skilled in the art, so as to make a clearer definition of the protection scope of the present invention.
Embodiment 1: a kind of array transmission formula micro image collection system, as depicted in figs. 1 and 2, including microimaging mould
Group pattern 1, receiving end 2, sample stage 3 and excitation light source 4, the microimaging module array are located at the surface of sample stage, institute
State the lower section that excitation light source is located at the sample stage；
The microimaging module array includes into multiple microimaging modules of array distribution, each microimaging
Module all includes the first lens group 11, the second lens group 12 and imaging sensor 13, and first lens group and described second is thoroughly
Microscope group is symmetrical arranged, and first lens group is between second lens group and the sample stage, second lens group
Between first lens group and described image sensor, described image sensor and the receiving end are electrically connected, more
A microimaging module is all fixed on same frame.
Second lens group includes at least two lenticules, and the size of the lenticule of close described image sensor is most
Greatly, the size of the lenticule far from described image sensor is minimum；First lens group includes at least two lenticules, close
The size of the lenticule of described image sensor is minimum, and the size of the lenticule far from described image sensor is maximum；It is described micro-
The size of lens is that diameter is 0.5-15mm.
The arrangement mode of several microimaging modules be linear array be arranged side by side, matrix arrangement or concentric arrays.
The arrangement spacing of the microimaging module can be adjusted according to the sample characteristic regularity of distribution.
The lenticule of the minimum diameter of first lens group and the lenticule of the minimum diameter of second lens group are
Different lenticules is the same lenticule.
The focal plane of second lens group is overlapped with the reception end face of imaging sensor, the focal length of second lens group
For 1-3mm, F (aperture) number of second lens group is less than 5.
The focal length of first lens group is 1-6mm.
The pixel dimension of described image sensor is 0.8-2.5 μm.
Described image sensor is cmos image sensor or ccd image sensor.
The excitation light source is laser light source, LED light source or gas lamp.
The receiving end is computer or mobile phone.
Embodiment 2: a kind of array transmission formula micro image collection system, as shown in figures 1 and 3, remaining and 1 phase of embodiment
Together, institute the difference is that, the minimum diameter of the lenticule of the minimum diameter of first lens group and second lens group
Lenticule be the same lenticule.
Working principle of the present invention is as follows:
In use, each component in the microscopic system is put up, microimaging module according to large area sample shape
It is arranged in an array, first passes through the height that each microimaging module is adjusted in the imaging of standard flat sample in advance.Actual sample
When test, sample to be tested is placed in sample stage, opens power supply, each micro- module image from receiving end, manually or
Person realizes micro regulating focusing by the height and levelness that electricity driving displacement platform adjusts sample, then adjusts illumination system brightness, enables observation
The image arrived is clearest, and the image obtained is saved in receiving end.It, can if necessary to the non-blind area micro-imaging on the full surface of sample
To realize that the zonule on the direction XY is scanned by an electronic XY displacement platform, then sample can be obtained by by image mosaic
Region-wide micro-imaging result.
The above description is only an embodiment of the present invention, is not intended to limit the scope of the invention, all to utilize this hair
Equivalent structure transformation made by bright specification and accompanying drawing content is applied directly or indirectly in other relevant technical fields,
Similarly it is included within the scope of the present invention.
Claims (8)
1. a kind of array transmission formula micro image collection system, it is characterised in that: including microimaging module array (1), receive
End (2), sample stage (3) and excitation light source (4), the microimaging module array are located at the surface of sample stage, the excitation
Light source is located at the lower section of the sample stage；
The microimaging module array includes into multiple microimaging modules of array distribution, each microimaging module
It all include the first lens group (11), the second lens group (12) and imaging sensor (13), first lens group and described second
Lens group is symmetrical arranged, and first lens group is between second lens group and the sample stage, second lens
Between first lens group and described image sensor, described image sensor and the receiving end are electrically connected group.
2. array transmission formula micro image collection system according to claim 1, it is characterised in that: second lens group
Including at least two lenticules, the size close to the lenticule of described image sensor is maximum, far from described image sensor
The size of lenticule is minimum；First lens group includes at least two lenticules, close to the lenticule of described image sensor
Size it is minimum, the size of the lenticule far from described image sensor is maximum；The size of the lenticule is that diameter is 0.5-
15mm。
3. array transmission formula micro image collection system according to claim 1, it is characterised in that: several described micro- to take the photograph
As the arrangement mode of module be linear array be arranged side by side, matrix arrangement or concentric arrays.
4. array transmission formula micro image collection system according to claim 1, it is characterised in that: first lens group
The lenticule of minimum diameter be different lenticules from the lenticule of the minimum diameter of second lens group or be same
A lenticule.
5. array transmission formula micro image collection system according to claim 1, it is characterised in that: second lens group
Focal plane be overlapped with the reception end face of imaging sensor, the focal length of second lens group is 1-3mm, second lens group
F number less than 5.
6. array transmission formula micro image collection system according to claim 1, it is characterised in that: first lens group
Focal length be 1-6mm.
7. array transmission formula micro image collection system according to claim 1, it is characterised in that: described image sensor
Pixel dimension be 0.8-2.5 μm.
8. array transmission formula micro image collection system according to claim 1, it is characterised in that: described image sensor
For cmos image sensor or ccd image sensor.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910743158.0A CN110365915B (en) | 2019-08-13 | 2019-08-13 | Array transmission type microscopic image acquisition system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910743158.0A CN110365915B (en) | 2019-08-13 | 2019-08-13 | Array transmission type microscopic image acquisition system |
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| CN110365915A true CN110365915A (en) | 2019-10-22 |
| CN110365915B CN110365915B (en) | 2024-07-12 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113037966A (en) * | 2021-02-27 | 2021-06-25 | 重庆市天实精工科技有限公司 | Micro-camera module and mobile terminal |
| WO2024092682A1 (en) * | 2022-11-04 | 2024-05-10 | 深圳华大智造科技股份有限公司 | Optical system and detection method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6320174B1 (en) * | 1999-11-16 | 2001-11-20 | Ikonisys Inc. | Composing microscope |
| CN102565069A (en) * | 2011-12-22 | 2012-07-11 | 天津理工大学 | Infrared microscopic non-destructive detector for integrated circuit |
| CN107091825A (en) * | 2017-03-31 | 2017-08-25 | 清华大学 | Fluorescent sample chromatography micro imaging method based on microlens array |
| US20180210187A1 (en) * | 2017-01-23 | 2018-07-26 | Tsinghua University | Rapid three-dimensional microscopic imaging system |
| CN210053477U (en) * | 2019-08-13 | 2020-02-11 | 苏州瑞霏光电科技有限公司 | Array transmission type microscopic image acquisition system |
-
2019
- 2019-08-13 CN CN201910743158.0A patent/CN110365915B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6320174B1 (en) * | 1999-11-16 | 2001-11-20 | Ikonisys Inc. | Composing microscope |
| CN102565069A (en) * | 2011-12-22 | 2012-07-11 | 天津理工大学 | Infrared microscopic non-destructive detector for integrated circuit |
| US20180210187A1 (en) * | 2017-01-23 | 2018-07-26 | Tsinghua University | Rapid three-dimensional microscopic imaging system |
| CN107091825A (en) * | 2017-03-31 | 2017-08-25 | 清华大学 | Fluorescent sample chromatography micro imaging method based on microlens array |
| CN210053477U (en) * | 2019-08-13 | 2020-02-11 | 苏州瑞霏光电科技有限公司 | Array transmission type microscopic image acquisition system |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113037966A (en) * | 2021-02-27 | 2021-06-25 | 重庆市天实精工科技有限公司 | Micro-camera module and mobile terminal |
| WO2024092682A1 (en) * | 2022-11-04 | 2024-05-10 | 深圳华大智造科技股份有限公司 | Optical system and detection method |
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