CN203630508U - High-hardness nanoimprinting flexible membrane composite die plate - Google Patents
High-hardness nanoimprinting flexible membrane composite die plate Download PDFInfo
- Publication number
- CN203630508U CN203630508U CN201320812483.6U CN201320812483U CN203630508U CN 203630508 U CN203630508 U CN 203630508U CN 201320812483 U CN201320812483 U CN 201320812483U CN 203630508 U CN203630508 U CN 203630508U
- Authority
- CN
- China
- Prior art keywords
- pdms
- elastic layer
- hardness
- impression
- nanoimprinting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002131 composite material Substances 0.000 title claims abstract description 24
- 239000012528 membrane Substances 0.000 title abstract 5
- 239000004205 dimethyl polysiloxane Substances 0.000 claims abstract description 59
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims abstract description 59
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims description 52
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims description 51
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 claims description 51
- 239000002114 nanocomposite Substances 0.000 claims description 19
- 238000009416 shuttering Methods 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 18
- 238000004026 adhesive bonding Methods 0.000 claims description 11
- -1 Polydimethylsiloxane Polymers 0.000 abstract description 2
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 238000004528 spin coating Methods 0.000 description 4
- 238000002161 passivation Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920005573 silicon-containing polymer Polymers 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Images
Abstract
The utility model discloses a high-hardness nanoimprinting flexible membrane composite die plate. The high-hardness nanoimprinting flexible membrane composite die plate comprises a base plate, a first PDMS (Polydimethylsiloxane) elastic layer arranged on the base plate, an adhering layer arranged on the first PDMS elastic layer, a second PDMS elastic layer arranged on the adhering layer, and a high-hardness PDMS structural layer on which an imprinting structure is arranged; the high-hardness PDMS structural layer is arranged on the second PDMS elastic layer. Compared with a conventional technological structure, the high-hardness nanoimprinting flexible membrane composite die plate has the advantage that the structure is firm, and the collapse, the deformation, the passivating of edge corners, and other phenomena can be effectively prevented; in addition, the high-hardness nanoimprinting flexible membrane composite die plate is firm and durable, and the service life is prolonged.
Description
Technical field
The utility model relates to a kind of nano impression device, particularly a kind of high hardness nanocomposite impression mantle composite shuttering.
Background technology
Dimethyl silicone polymer (PDMS, polydimethylsiloxane) be one nano-imprint stamp duplicating material simply and easily, conventionally mixed by a certain percentage by bulk material and hardening agent, after removing bubble, be cast in caster surface, there is elastic silicone rubber material working template by being heated and cured into, there is plurality of advantages for large area ultraviolet nanometer impression: cost is low, can repeatedly copy PDMS template from master mold version
; itself has elasticity, affected by contaminant particles little, and the template life-span is long
; curing rear surface has shrink, for nano impression without anti-stick processing
; the flexible PDMS working template substrate out-of-flatness surface of can combining closely in large-area nano impression.
But, in nano impression application, also there are some problems in current PDMS template, main manifestations is, elastic modulus is low, make the situations such as caving in easily appears in its structure, distortion, and passivation phenomenon also easily appears in edge, cannot reach the requirement of high precision nano impression, its structure is single, durable not simultaneously, affects the serviceable life of template.
Utility model content
The purpose of this utility model is exactly for the problems referred to above, and a kind of sound construction and durable high hardness nanocomposite impression mantle composite shuttering are provided.
To achieve these goals, the utility model provides following technical scheme: high hardness nanocomposite impression mantle composite shuttering, and it comprises: substrate; The one PDMS elastic layer, it is arranged on this substrate; Gluing layer, it is arranged on a PDMS elastic layer; The 2nd PDMS elastic layer, it is arranged on this gluing layer; High rigidity PDMS structural sheet, has stamping structure on it, this high rigidity PDMS structural sheet is arranged on the 2nd PDMS elastic layer.
Preferably, above-mentioned high rigidity PDMS structural sheet bonding connection is on above-mentioned the 2nd PDMS elastic layer.
Preferably, an above-mentioned PDMS elastic layer solidifies on aforesaid substrate.
Preferably, above-mentioned substrate is PC plate.
Preferably, the elastic modulus of the first and second above-mentioned PDMS elastic layers is 3-4Mpa, and the elastic modulus of above-mentioned high rigidity PDMS structural sheet is 12-13Mpa.
Adopt the beneficial effect of above technical scheme to be: five layered structures that adopt substrate, a PDMS elastic layer, gluing layer, the 2nd PDMS elastic layer and high rigidity PDMS structural sheet, make high hardness nanocomposite impression mantle composite shuttering of the present utility model more firm compared to conventional art structure, effectively prevent from caving in, the appearance of the phenomenon such as distortion and corner passivation, also make it durable simultaneously, extend the serviceable life of template.
Accompanying drawing explanation
Fig. 1 is the structural representation of high hardness nanocomposite impression mantle composite shuttering of the present utility model.
Wherein, 1. substrate 2. PDMS elastic layer 3. gluing layer 4. the 2nd PDMS elastic layer 5. high rigidity PDMS structural sheet 51. stamping structures.
Embodiment
Describe preferred implementation of the present utility model in detail below in conjunction with accompanying drawing.
As shown in Figure 1, in the first embodiment of high hardness nanocomposite impression mantle composite shuttering of the present utility model, it comprises: substrate 1; The one PDMS elastic layer 2, it is arranged on substrate 1; Gluing layer 3, it is arranged on a PDMS elastic layer 2; The 2nd PDMS elastic layer 4, it is arranged on gluing layer 3; High rigidity PDMS structural sheet 5, has stamping structure 51 on it, this stamping structure is for copying and obtain from caster, and this high rigidity PDMS structural sheet 5 is arranged on the 2nd PDMS elastic layer 4.Adopt five layered structures of substrate 1, a PDMS elastic layer 2, gluing layer 3, the 2nd PDMS elastic layer 4 and high rigidity PDMS structural sheet 5, make this high hardness nanocomposite impression mantle composite shuttering more firm compared to conventional art structure, effectively prevent from caving in, the appearance of the phenomenon such as distortion and corner passivation, also make it durable simultaneously, extend the serviceable life of template.
In the second embodiment of high hardness nanocomposite impression mantle composite shuttering of the present utility model, above-mentioned high rigidity PDMS structural sheet bonding connection is on above-mentioned the 2nd PDMS elastic layer, and it is convenient not only to implement, and structure is more firm.
In the third embodiment of high hardness nanocomposite impression mantle composite shuttering of the present utility model, an above-mentioned PDMS elastic layer solidifies on aforesaid substrate, makes structure more solid and reliable.
In the 4th kind of embodiment of high hardness nanocomposite impression mantle composite shuttering of the present utility model, above-mentioned substrate is PC plate.
In the 5th kind of embodiment of high hardness nanocomposite impression mantle composite shuttering of the present utility model, the elastic modulus of the first and second above-mentioned PDMS elastic layers is 3-4Mpa, and the elastic modulus of above-mentioned high rigidity PDMS structural sheet is 12-13Mpa.
The manufacturing process of high hardness nanocomposite impression mantle composite shuttering of the present utility model is: 1) by anti-stick caster processing: at caster surface spin coating Easy-ASL anti-sticking layer; 2) on caster, in modes such as spin coatings, high rigidity PDMS structural sheet is set; 3) in modes such as cast, the one PDMS elastic layer is set at the high rigidity PDMS structural sheet back side, then solidifies and depart from caster thereafter, form double template; 4) on the substrate of processing, in modes such as spin coatings, one deck the 2nd PDMS elastic layer is set, then solidifies; 5) in modes such as spin coatings, one deck gluing layer is set having cured on substrate and the 2nd PDMS elastic layer, then double template is sticked on gluing layer, then solidify the final high hardness nanocomposite impression mantle composite shuttering of the present utility model that forms.
Above-described is only preferred implementation of the present utility model; it should be pointed out that for the person of ordinary skill of the art, do not departing under the prerequisite of the utility model creation design; can also make some distortion and improvement, these all belong to protection domain of the present utility model.
Claims (5)
1. high hardness nanocomposite impression mantle composite shuttering, is characterized in that: comprising: substrate; The one PDMS elastic layer, it is arranged on described substrate; Gluing layer, it is arranged on a described PDMS elastic layer; The 2nd PDMS elastic layer, it is arranged on described gluing layer; High rigidity PDMS structural sheet, has stamping structure on it, described high rigidity PDMS structural sheet is arranged on described the 2nd PDMS elastic layer.
2. high hardness nanocomposite impression mantle composite shuttering according to claim 1, is characterized in that: the bonding connection of described high rigidity PDMS structural sheet is on described the 2nd PDMS elastic layer.
3. high hardness nanocomposite impression mantle composite shuttering according to claim 1, is characterized in that: a described PDMS elastic layer solidifies on described substrate.
4. according to the high hardness nanocomposite impression mantle composite shuttering described in claim 1 or 3, it is characterized in that: described substrate is PC plate.
5. high hardness nanocomposite impression mantle composite shuttering according to claim 1, is characterized in that: the elastic modulus of described the first and second PDMS elastic layers is 3-4Mpa, and the elastic modulus of described high rigidity PDMS structural sheet is 12-13Mpa.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320812483.6U CN203630508U (en) | 2013-12-12 | 2013-12-12 | High-hardness nanoimprinting flexible membrane composite die plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320812483.6U CN203630508U (en) | 2013-12-12 | 2013-12-12 | High-hardness nanoimprinting flexible membrane composite die plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203630508U true CN203630508U (en) | 2014-06-04 |
Family
ID=50816968
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320812483.6U Expired - Lifetime CN203630508U (en) | 2013-12-12 | 2013-12-12 | High-hardness nanoimprinting flexible membrane composite die plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203630508U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104932195A (en) * | 2015-04-10 | 2015-09-23 | 苏州锦富新材料股份有限公司 | Composite nanoimprinting soft template and manufacturing method thereof |
| CN107158958A (en) * | 2017-05-18 | 2017-09-15 | 苏州光舵微纳科技股份有限公司 | A kind of preparation method of filter membrane |
| CN109345959A (en) * | 2018-10-12 | 2019-02-15 | 京东方科技集团股份有限公司 | A kind of flexible substrate, flexible display panels, flexible display apparatus and production method |
| CN114433260A (en) * | 2022-01-25 | 2022-05-06 | 大连海事大学 | Nanofluidic chip based on nano cracks and processing method thereof |
-
2013
- 2013-12-12 CN CN201320812483.6U patent/CN203630508U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104932195A (en) * | 2015-04-10 | 2015-09-23 | 苏州锦富新材料股份有限公司 | Composite nanoimprinting soft template and manufacturing method thereof |
| CN107158958A (en) * | 2017-05-18 | 2017-09-15 | 苏州光舵微纳科技股份有限公司 | A kind of preparation method of filter membrane |
| CN109345959A (en) * | 2018-10-12 | 2019-02-15 | 京东方科技集团股份有限公司 | A kind of flexible substrate, flexible display panels, flexible display apparatus and production method |
| CN114433260A (en) * | 2022-01-25 | 2022-05-06 | 大连海事大学 | Nanofluidic chip based on nano cracks and processing method thereof |
| CN114433260B (en) * | 2022-01-25 | 2024-04-16 | 大连海事大学 | Nano-fluidic chip based on nano-cracks and processing method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203630508U (en) | High-hardness nanoimprinting flexible membrane composite die plate | |
| WO2011094317A3 (en) | Micro-conformal templates for nanoimprint lithography | |
| WO2011094696A3 (en) | Ultra-compliant nanoimprint lithography template | |
| EP2584408A3 (en) | Imprint method and imprint apparatus | |
| CN103279009B (en) | A kind of flexible ultraviolet impressing composite shuttering and preparation method thereof | |
| JP2009541873A5 (en) | ||
| JP2014080017A (en) | Resin-made mold, and production method and use thereof | |
| CN102955357A (en) | Nanometer imprinting composite template and preparation method thereof | |
| JP2010523378A5 (en) | ||
| WO2009147602A3 (en) | Silicone rubber material for soft lithography | |
| DE602007014362D1 (en) | Process for producing a flexographic printing plate | |
| EP2476538A3 (en) | Method of imprinting texture on rigid substrate using flexible stamp | |
| MY152467A (en) | Large area roll-to-roll imprint lithography | |
| DE602005008442D1 (en) | A method of making a lithographic printing form precursor | |
| WO2009041314A1 (en) | Decorative molded article and process for producing the same | |
| ATE440307T1 (en) | POLYMERIZABLE NEGATIVE PLANOGRAPHIC PRINTING PLATE PREPARATOR, STACK OF POLYMERIZABLE NEGATIVE PLANOGRAPHIC PRINTING PLATE PREPARATORS AND METHOD FOR PRODUCING A POLYMERIZABLE NEGATIVE PLANOGRAPHIC PRINTING PLATE PREPARATOR | |
| CN201268140Y (en) | Repeatedly-usable shift printing rubber head | |
| WO2014024161A3 (en) | Method for producing duplicates of an object having a three-dimensional decorative surface | |
| JP2010510091A5 (en) | ||
| CN203025473U (en) | Nanoimprint composite template | |
| WO2020098445A1 (en) | Imprint template and preparation method therefor and imprint method | |
| JP2007181980A5 (en) | ||
| CN205080364U (en) | Composite nanowire impression soft mode board | |
| CN104932195B (en) | Composite nano-imprinting soft template and preparation method thereof | |
| CN108473929A (en) | Cell culture substrate and its manufacturing method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 215513 Jiangsu city of Suzhou province Changshou City Changshu economic and Technological Development Zone (four Road No. 11) Branch Chong Park Building No. 2 102 Patentee after: SUZHOU GUANGDUO MICRO, NANO-DEVICE Co.,Ltd. Address before: 215513 Jiangsu city of Suzhou province Changshou City Changshu economic and Technological Development Zone (four Road No. 11) Branch Chong Park Building No. 2 102 Patentee before: SUZHOU GUANGDUO MICRO, NANO-DEVICE Co.,Ltd. |
|
| CX01 | Expiry of patent term |
Granted publication date: 20140604 |
|
| CX01 | Expiry of patent term |