CN203025473U - Nanoimprint composite template - Google Patents
Nanoimprint composite template Download PDFInfo
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- CN203025473U CN203025473U CN 201220615655 CN201220615655U CN203025473U CN 203025473 U CN203025473 U CN 203025473U CN 201220615655 CN201220615655 CN 201220615655 CN 201220615655 U CN201220615655 U CN 201220615655U CN 203025473 U CN203025473 U CN 203025473U
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Abstract
The utility model discloses a nanoimprint composite template. The nanoimprint composite template is of a three-layer adhering structure, wherein the upper layer is a high-elasticity-modulus PDMS (polydimethylsiloxane) layer, the middle layer is a low-elasticity-modulus PDMS layer, and the lower layer is a plastic plate or a glass plate; and a micro-nanoimprint structure is arranged on the upper surface of the high-elasticity-modulus PDMS layer. According to the nanoimprint composite template, the hardness is high, and the elasticity modulus can reach 80 Mpa and is 30-40 times of that of a normal PDMS template; as the nanoimprint composite template contains the PDMS layers, the nanoimprint composite template has a certain elasticity, so that nanoimprint composite template disclosed by the utility model has the advantages that a soft template can be deformed and imprinted in a large area, the hardness of a hard template is high, and a high-precision structure can be accurately copied; and the accuracy requirement of a nanoimprint process is guaranteed.
Description
Technical field
The utility model belongs to micro-nano element manufacturing technical field, is specifically related to a kind of nano-imprinting composite template.
Background technology
Nanometer embossing is an important technology in micro-nano device making technics, and nanometer embossing is taken the lead in proposing in nineteen ninety-five by Stephen Y Chou professor the earliest, and this is the brand-new figure transfer techniques of a kind of difference and conventional lithographic techniques.Nanometer embossing is defined as: do not use light or irradiation that photoresist sensitization is shaped, but directly utilize physical mechanism structure nano-scale figure on silicon substrate or other substrate.
The PDMS template is a kind of duplicating material of nano-imprint stamp simply and easily, usually mixed by a certain percentage by bulk material and hardening agent, remove and to be cast in the caster surface after bubble, by being heated and cured into the working template of elastic silicone rubber material, this kind nano-imprint stamp is used for large tracts of land ultraviolet nanometer impression and has following advantage:
1, cost is low, can repeatedly copy the PDMS template from caster;
2, itself has elasticity, affected by contaminant particles little, and the template life-span is long;
3, solidify the rear surface and have shrink, be used for nano impression and need not anti-stick processing;
4, can combine closely in large-area nano impression substrate out-of-flatness surface of flexible PDMS working template.
But common PDMS template also causes a lot of problems in nano impression is used:
1) elastic modulus of common PDMS template is 2 ~ 3MPa, when copying the structure of high density or high-aspect-ratio, due to the surface can effect, structure is easily caved in, and the corner of structure easily is out of shape passivation, can't loyalty copy high-precision configuration;
2) common PDMS template easily distortion under pressure, the distortion of structure and shape of template is excessive in moulding process.
Therefore, need to improve the hardness of PDMS template, make it both have advantages of that soft template can deformation and carry out large area imprinting, have again hard template hardness high, can accurately copy the advantage of high-precision configuration.Delivered high rigidity PDMS template in more existing documents, elastic modulus is in the 12MPa left and right, but hardness still can't reach the requirement of high precision nano impression, and the storage time is short, and use procedure is complicated.
Summary of the invention
In view of this, the utility model provides a kind of nano-imprinting composite template, greatly improves the hardness of PDMS template, makes it both have advantages of that soft template can deformation and carry out large area imprinting, have again hard template hardness high, can accurately copy the advantage of high-precision configuration.
Nano-imprinting composite template of the present utility model, described composite shuttering is three layers of bonded structure, and the upper strata is high elastic modulus PDMS layer, and the middle level is low elastic modulus PDMS layer, lower floor is plastic plate or glass plate, and the upper surface of described high elastic modulus PDMS layer has the micro-nano imprint structure.
Further, described plastic plate is PET plate or PC plate.
Further, the elastic modulus of described high elastic modulus PDMS layer is 9 ~ 12Mpa, and the elastic modulus of described low elastic modulus PDMS layer is 2 ~ 3Mpa.
The beneficial effects of the utility model are:
1, nano-imprinting composite template hardness of the present utility model is high, elastic modulus can reach 80Mpa, 30 ~ 40 times of common PDMS template, and itself comprise the PDMS layer, therefore have certain elasticity, nano-imprinting composite template of the present utility model had both had advantages of that soft template can deformation and carry out large area imprinting, had again hard template hardness high, can accurately copy the advantage of high-precision configuration, guarantee the accuracy requirement of nano-imprint process;
2, nano-imprinting composite template of the present utility model use simple, need not surperficial anti-stick processing during use, can directly impress demoulding non cohesive gel.
Description of drawings
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with accompanying drawing, the utility model is described in further detail, wherein:
Fig. 1 is the structural representation of nano-imprinting composite template of the present utility model.
Embodiment
Hereinafter with reference to accompanying drawing, preferred embodiment of the present utility model is described in detail.
Fig. 1 is the structural representation of nano-imprinting composite template of the present utility model, as shown in the figure, nano-imprinting composite template of the present utility model is three layers of bonded structure, the upper strata is high elastic modulus PDMS layer 1, the middle level is low elastic modulus PDMS layer 2, lower floor is plastic plate or glass plate 3, and the upper surface of described high elastic modulus PDMS layer 1 has the micro-nano imprint structure; High elastic modulus PDMS layer 1 is the mould layer, and the micro-nano imprint structure of its upper surface copies from caster and obtains.
In nano-imprinting composite template of the present utility model, the effect of supporting spring is mainly played by lower floor, increases the hardness of composite shuttering, according to the requirement of Embosser, plastic plate or glass plate can be selected by lower floor, and plastic plate can be selected the PET plate of high ultraviolet light percent of pass or PC plate etc.
The elastic modulus of described high elastic modulus PDMS layer 1 is 9 ~ 12Mpa, and the elastic modulus of described low elastic modulus PDMS layer 2 is 2 ~ 3Mpa.
The preparation method of nano-imprinting composite template of the present utility model comprises the following steps:
1) at caster surface spin coating antisticking agent;
2) spin coating high elastic modulus PDMS on caster;
3) at high elastic modulus PDMS upper low elastic modulus PDMS;
4) adhere to plastic plate or glass plate on low elastic modulus PDMS;
5) separate with caster after curing PDMS, form composite shuttering.
Nano-imprinting composite template hardness of the present utility model is high, elastic modulus can reach 80Mpa, 30 ~ 40 times of common PDMS template, and itself comprise the PDMS layer, therefore have certain elasticity, nano-imprinting composite template of the present utility model had both had advantages of that soft template can deformation and carry out large area imprinting, had again hard template hardness high, can accurately copy the advantage of high-precision configuration, guarantee the accuracy requirement of nano-imprint process.
Explanation is at last, above embodiment is only unrestricted in order to the technical solution of the utility model to be described, although by the utility model being described with reference to preferred embodiment of the present utility model, but those of ordinary skill in the art is to be understood that, can make various changes to it in the form and details, and not depart from the spirit and scope of the present utility model that appended claims limits.
Claims (3)
1. nano-imprinting composite template, it is characterized in that: described composite shuttering is three layers of bonded structure, and the upper strata is high elastic modulus PDMS layer, and the middle level is low elastic modulus PDMS layer, lower floor is plastic plate or glass plate, and the upper surface of described high elastic modulus PDMS layer has the micro-nano imprint structure.
2. nano-imprinting composite template according to claim 1, it is characterized in that: described plastic plate is PET plate or PC plate.
3. nano-imprinting composite template according to claim 1 and 2, it is characterized in that: the elastic modulus of described high elastic modulus PDMS layer is 9 ~ 12Mpa, the elastic modulus of described low elastic modulus PDMS layer is 2 ~ 3Mpa.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220615655 CN203025473U (en) | 2012-11-20 | 2012-11-20 | Nanoimprint composite template |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220615655 CN203025473U (en) | 2012-11-20 | 2012-11-20 | Nanoimprint composite template |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203025473U true CN203025473U (en) | 2013-06-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220615655 Expired - Lifetime CN203025473U (en) | 2012-11-20 | 2012-11-20 | Nanoimprint composite template |
Country Status (1)
| Country | Link |
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| CN (1) | CN203025473U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102955357A (en) * | 2012-11-20 | 2013-03-06 | 苏州光舵微纳科技有限公司 | Nanometer imprinting composite template and preparation method thereof |
| CN104932195A (en) * | 2015-04-10 | 2015-09-23 | 苏州锦富新材料股份有限公司 | Composite nanoimprinting soft template and manufacturing method thereof |
-
2012
- 2012-11-20 CN CN 201220615655 patent/CN203025473U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102955357A (en) * | 2012-11-20 | 2013-03-06 | 苏州光舵微纳科技有限公司 | Nanometer imprinting composite template and preparation method thereof |
| CN104932195A (en) * | 2015-04-10 | 2015-09-23 | 苏州锦富新材料股份有限公司 | Composite nanoimprinting soft template and manufacturing method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C53 | Correction of patent of invention or patent application | ||
| CB03 | Change of inventor or designer information |
Inventor after: Shi Xiaohua Inventor before: Shi Xiaohua Inventor before: Ji Ran |
|
| COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: SHI XIAOHUA JI RAN TO: SHI XIAOHUA |
|
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 215513 No. four, 11 Seaway, Changshou City Economic Development Zone, Jiangsu, 104 Patentee after: SUZHOU GUANGDUO MICRO, NANO-DEVICE Co.,Ltd. Address before: 215513 No. four, 11 Seaway, Changshou City Economic Development Zone, Jiangsu, 104 Patentee before: SUZHOU GUANGDUO MICRO, NANO-DEVICE Co.,Ltd. |
|
| CX01 | Expiry of patent term |
Granted publication date: 20130626 |
|
| CX01 | Expiry of patent term |