CN203628275U - Packing type condensation storage equipment for chlorosilane - Google Patents
Packing type condensation storage equipment for chlorosilane Download PDFInfo
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- CN203628275U CN203628275U CN201320693706.1U CN201320693706U CN203628275U CN 203628275 U CN203628275 U CN 203628275U CN 201320693706 U CN201320693706 U CN 201320693706U CN 203628275 U CN203628275 U CN 203628275U
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Abstract
The utility model discloses packing type condensation storage equipment for chlorosilane, which is used for recovering chlorosilane in chlorosilane contained tail gas during polycrystalline silicon production. The storage equipment comprises a condenser, a storage tank and a packing type column plate, wherein the condenser is provided with a refrigerant inlet in the upper part, provided with a refrigerant outlet in the lower part, and provided with a noncondensable gas outlet in the top; the storage tank is arranged below the condenser, communicated with the condenser, provided with a heating medium inlet used for introducing the tail gas in the middle, provided with a condensate outlet in the bottom and provided with a nitrogen port in the lower part, and the nitrogen port is formed above the condensate outlet; and the packing type column plate is arranged in the storage tank and located above the heating medium inlet. According to the storage equipment, a certain purification function can be achieved, the utilization rate of the refrigerant refrigerating capacity is increased, the manufacturing cost of the equipment is reduced greatly, and the cost for recovering chlorosilane from the tail gas is reduced eventually; and meanwhile, a certain rectification column purification function is achieved.
Description
Technical field
The utility model relates to field of polysilicon production, relates in particular in improved Siemens production of polysilicon, the material filling type chlorosilane condensate storage facilities that the chlorosilane in tail gas containing chlorsilane is reclaimed.
Background technique
Chlorosilane is the important source material of producing high purity polycrystalline silicon, reduction operation, hydrogenation process, trichlorosilane synthesis procedure, the chlorosilane rectification and purification operation of polycrystalline silicon production system all can produce the tail gas of chlorine-containing silane at present, and domestic and international most producer adopts improved Siemens manufacture high purity polycrystalline silicon, the method adopts dry method exhaust gas recovery system to the chlorosilane in technique of trichlorosilane synthetic tail gas, reduction tail gas and hydrogenation tail gas, but the chlorosilane in tai gas of rectifying is not recycled.For a device of producing 3000 tons of polysilicons per year, only the chlorosilane discharge amount in tai gas of rectifying is just up to 2000～4000 tons, if it does not reclaimed and utilizing, will certainly cause the waste of chlorosilane, also can increase load and the difficulty of follow-up system processing, even can serious environment pollution, finally increase production and the operating cost of polysilicon.
The function of most condensers utilizes refrigerant to lower the temperature to tail gas containing chlorsilane exactly, wouldn't possess the effect of direct storage of chlorine silane condensed fluid, also need special chlorosilane storage tank, corresponding instrument, pipeline, valve etc. that its condensed fluid is stored and carried, will certainly increase equipment cost and security risk.
In the known technology of model utility people, there is a kind of chlorosilane condensate storage, solve the problem of tail gas containing chlorsilane condensation and storage integrated, but this storage is just embedded in condenser in holding vessel, need larger condensing heat-exchange area and coolant quantity, cause the increase of apparatus body, increased device fabrication cost, also can increase the repair and maintenance cost of factory to equipment.
Model utility content
The utility model is intended at least solve one of technical problem existing in prior art.For this reason, an object of the present utility model is to propose a kind of material filling type chlorosilane condensate storage facilities.
According to a kind of material filling type chlorosilane condensate storage facilities of the utility model embodiment, reclaim for the chlorosilane in the tail gas of the chlorine-containing silane to production of polysilicon, described material filling type chlorosilane condensate storage facilities comprises: condenser, the top of described condenser has refrigerant entrance and bottom has refrigerant exit, and top has incoagulable gas outlet; Holding vessel, described holding vessel is located at described condenser below and is communicated with described condenser, the middle part of described holding vessel has the heating agent entrance for passing into described tail gas, bottom has condensate outlet, the bottom of described holding vessel has nitrogen interface, and described nitrogen interface is positioned at described condensate outlet top; And material filling type column plate, described material filling type column plate is located in described holding vessel and is positioned at the top of described heating agent entrance.
According to the utility model embodiment's material filling type chlorosilane condensate storage facilities, by material filling type column plate is set, and heating agent entrance is located to the below of material filling type column plate, the tail gas of the chlorine-containing silane newly entering is lowered the temperature through the chlorosilane condensate liquid drip washing on material filling type column plate, the tail gas containing chlorsilane of having lowered the temperature subsequently forms chlorosilane liquid produced through condenser condenses, be mixed in a small amount of low-boiling-point substance in chlorosilane condensate liquid separates because the heat and mass on material filling type column plate becomes gaseous state simultaneously, play certain removal of impurities effect, improve the utilization ratio of refrigerant cold, cause the tail gas containing chlorsilane of isodose to be condensed and reclaim required condensing heat-exchange area reducing, required refrigerant cold reduces, greatly reduce the manufacture cost of equipment, finally reduce the cost recovery of chlorosilane in tail gas.Meanwhile, because of the heat and mass effect of its material filling type column plate, also play certain rectifying column purification effect, can remove a small amount of low-boiling-point substance.
According to an embodiment of the present utility model, the external diameter of described material filling type column plate is less than the internal diameter of described holding vessel, and described material filling type column plate is fixed by screws in described holding vessel.
According to an embodiment of the present utility model, the external diameter of described condenser and the external diameter of described holding vessel are roughly equal.Thus, make the integrated manufacture of condenser and holding vessel more convenient, and connect attractive in appearancely, also facilitated in addition the maintenance of condenser and replacing and the cleaning of column plate filler.
According to an embodiment of the present utility model, the top of described condenser is opened wide, described material filling type chlorosilane condensate storage facilities also comprises top end socket, and described top end socket is located at the top of described condenser, and wherein said incoagulable gas outlet is formed on the end socket of described top.
According to an embodiment of the present utility model, described condenser is connected by the first flange with described top end socket; Described condenser is connected by the second flange with described holding vessel.
According to an embodiment of the present utility model, described material filling type chlorosilane condensate storage facilities also comprises: nitrogen tube, described nitrogen tube is connected with described nitrogen interface.Thus, can utilize the pneumatic conveying mode of nitrogen pressurization that the chlorosilane condensate liquid in holding vessel is delivered in corresponding pipeline, equipment and system, thereby reduce input cost and the maintenance cost of power equipment.In addition, can also easy access displacement and binder operation.
According to an embodiment of the present utility model, described material filling type chlorosilane condensate storage facilities comprises the control system that the recovery for controlling described tail gas stores, described control system is connected with described condenser, described holding vessel respectively, and described control system comprises controller.
According to an embodiment of the present utility model, on described holding vessel, there is upward pressure interface and downforce interface, lay respectively at the above and below of described material filling type column plate at the above upward pressure interface of axial direction of described holding vessel and downforce interface; Described control system also comprises the pressure gauge and the downforce table that are connected with described controller, and described pressure gauge is connected with described upward pressure interface, and described downforce table is connected with described downforce interface.Can reflect by the demonstration of pressure difference thus the stopping state of material filling type column plate, convenient timely replacing or cleaning to material filling type column plate.
Preferably, described control system also comprises the modulating valve that is located at described incoagulable gas outlet port, and described modulating valve is connected with described controller with the aperture of modulating valve described in the pressure control by described holding vessel with described pressure gauge respectively.
According to an embodiment of the present utility model, described control system also comprises: with the level meter that described controller is connected, described level meter is located between the upper end interface and lower end interface on described holding vessel; Cut-off valve, described cut-off valve is located at described condensate outlet place and is connected with described controller with described level meter respectively.
According to an embodiment of the present utility model, described control system also comprises: the thermometer that is connected to described holding vessel; With cold medium flux valve, described cold medium flux valve is connected to described refrigerant ingress, and described cold medium flux valve is connected with described controller with the aperture of cold medium flux valve described in the temperature control of the chlorosilane condensate liquid by storing in described holding vessel with described thermometer respectively.
According to the utility model embodiment's material filling type chlorosilane condensate storage facilities, by controller, the switch of cut-off valve is decided by the height of liquid level in holding vessel, thereby controlled the discharge of condensed fluid.The aperture size of modulating valve is decided by the pressure in holding vessel, thereby has controlled the discharge of incoagulable gas.The aperture size of cold medium flux valve is decided by the temperature of the chlorosilane condensate liquid in holding vessel, forms DCS system thus by multiple single loops control point, has realized automatic operation more completely.
Additional aspect of the present utility model and advantage in the following description part provide, and part will become obviously from the following description, or recognize by practice of the present utility model.
Brief description of the drawings
Above-mentioned and/or additional aspect of the present utility model and advantage accompanying drawing below combination is understood becoming embodiment's description obviously and easily, wherein:
Fig. 1 is according to the schematic diagram of the utility model embodiment's material filling type chlorosilane condensate storage facilities.
Reference character:
Condenser 1; Refrigerant entrance 11; Refrigerant exit 12; The first flange 13; The second flange 14;
Holding vessel 2; Heating agent entrance 21; Condensate outlet 22; Nitrogen interface 23;
Material filling type column plate 3;
Top end socket 4; Solidifying property gas outlet 41;
Manhole 6; Safety attachment interface 7
Embodiment
Describe embodiment of the present utility model below in detail, described embodiment's example is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of identical or similar functions from start to finish.Be exemplary below by the embodiment who is described with reference to the drawings, only for explaining the utility model, and can not be interpreted as restriction of the present utility model.
In description of the present utility model, it will be appreciated that, term " middle part ", " on ", orientation or the position relationship of the instruction such as D score, " top ", " end ", " interior ", " outward ", " axially " be based on orientation shown in the drawings or position relationship, only the utility model and simplified characterization for convenience of description, instead of indicate or imply that the device of indication or element must have specific orientation, construct and operation with specific orientation, therefore can not be interpreted as restriction of the present utility model.In description of the present utility model, except as otherwise noted, the implication of " multiple " is two or more.
In description of the present utility model, it should be noted that, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection " should be interpreted broadly, and for example, can be to be fixedly connected with, and can be also to removably connect, or connect integratedly; Can be mechanical connection, can be also electrical connection; Can be to be directly connected, also can indirectly be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, can concrete condition understand the concrete meaning of above-mentioned term in the utility model.
In the utility model, unless otherwise clearly defined and limited, First Characteristic Second Characteristic it " on " or D score can comprise that the first and second features directly contact, also can comprise that the first and second features are not directly contacts but by the other feature contact between them.And, First Characteristic Second Characteristic " on ", " top " and " above " comprise First Characteristic directly over Second Characteristic and oblique upper, or only represent that First Characteristic level height is higher than Second Characteristic.First Characteristic Second Characteristic " under ", " below " and " below " comprise First Characteristic directly over Second Characteristic and oblique upper, or only represent that First Characteristic level height is less than Second Characteristic.
Describe according to the utility model embodiment's material filling type chlorosilane condensate storage facilities below with reference to Fig. 1, described material filling type chlorosilane condensate storage facilities reclaims the chlorosilane in the tail gas containing chlorsilane producing in polysilicon production process, and the chlorosilane condensate liquid of its recovery is stored.
According to the utility model embodiment's material filling type chlorosilane condensate storage facilities, comprising: condenser 1, holding vessel 2 and material filling type column plate 3.As shown in Figure 1, the top of condenser 1 has refrigerant entrance 11 and bottom has refrigerant exit 12, and top has incoagulable gas outlet 41.Holding vessel 2 is located at condenser 1 below and is communicated with condenser 1, the middle part of holding vessel 2 has the heating agent entrance 21 for passing into tail gas, bottom has condensate outlet 22, and the bottom of holding vessel 2 has nitrogen interface 23, and nitrogen interface 23 is positioned at condensate outlet 22 tops.Material filling type column plate 3 is located in holding vessel 2 and is positioned at the top of heating agent entrance 21.
Thus, as shown in Figure 1, the tail gas containing chlorsilane producing in polysilicon production process enters holding vessel 2 from heating agent entrance 21, and low temperature refrigerant enters condenser by refrigerant entrance 11.While starting working, tail gas enters backward the going up of holding vessel 2 and enters condenser 1 by material filling type column plate 3, tail gas and low temperature refrigerant carry out heat exchange in condenser 1, arrive material filling type column plate 3 places and spray downwards after the chlorosilane in tail gas is condensed under the Action of Gravity Field of himself.When the tail gas that enters holding vessel 2 by heating agent entrance 21 subsequently upwards passes through material filling type column plate 3, with the condensed chlorosilane liquid produced moving down through material filling type column plate 3 in the effect of the interior generation heat and mass of material filling type column plate 3, thereby played the effect of carrying out precooling to newly entering tail gas.Be mixed in a small amount of low-boiling-point substance in chlorosilane liquid produced simultaneously and after heat exchange, become gaseous state and move up, finally discharge from non-condensition gas outlet 41, thereby played removal of impurities effect.Tail gas after the interior heat exchange of material filling type column plate 3 continues upwards to enter the interior quilt of condenser 1 and is finally condensed into liquid state, and the incoagulable gas not being condensed also exports 41 discharges by incoagulable gas.
In other words, condensed chlorosilane liquid produced process material filling type column plate 3 under its Action of Gravity Field in condenser 1, on material filling type column plate 3, there is heat and mass with the chlorosilane tail gas newly entering on the one hand, and play the effect of drip washing, be subject on the other hand the impact of self gravitation to enter storage in chlorosilane holding vessel 2.
Thus, according to the utility model embodiment's material filling type chlorosilane condensate storage facilities, by material filling type column plate 3 is set, and heating agent entrance is located to the below of material filling type column plate 3, the tail gas of the chlorine-containing silane newly entering is lowered the temperature through the chlorosilane condensate liquid drip washing on material filling type column plate 3, the tail gas containing chlorsilane of having lowered the temperature subsequently forms chlorosilane liquid produced through condenser condenses, be mixed in a small amount of low-boiling-point substance in chlorosilane condensate liquid separates because the heat and mass on material filling type column plate 3 becomes gaseous state simultaneously, play certain removal of impurities effect, improve the utilization ratio of refrigerant cold, cause the tail gas containing chlorsilane of isodose to be condensed and reclaim required condensing heat-exchange area reducing, required refrigerant cold reduces, greatly reduce the manufacture cost of equipment, finally reduce the cost recovery of chlorosilane in tail gas.Meanwhile, because of the heat and mass effect of its material filling type column plate 3, also play certain rectifying column purification effect, can remove a small amount of low-boiling-point substance.
According to preferred embodiments more of the present utility model, the external diameter of material filling type column plate 3 is slightly less than the internal diameter of holding vessel 2, and material filling type column plate 3 is fixed by screws in holding vessel 2.Further, the external diameter of the external diameter of condenser 1 and holding vessel 2 is roughly equal.Thus, make the integrated manufacture convenience more of condenser 1 and holding vessel 2, and connect attractive in appearancely, also facilitated in addition the maintenance of condenser 1 and replacing and the cleaning of column plate filler 2.As shown in Figure 1, alternatively, on holding vessel 2, be provided with manhole 6, be convenient to thus the maintenance to holding vessel 2.
Alternatively, the top of condenser 1 is opened wide, and material filling type chlorosilane condensate storage facilities also comprises top end socket 4, and top end socket 4 is located at the top of condenser 1, and wherein incoagulable gas outlet 41 is formed on top end socket 4.Preferably, condenser 1 is connected by two the first flanges 13 with top end socket 4; Condenser 1 is connected by two the second flanges 14 with holding vessel 2, wherein between two the first flanges 13, is bolted, and is also bolted between two the second flanges 14, schemes not shown.Further; in order to protect holding vessel 2 and condenser 1; improve the usage safety performance of whole equipment; in top public attention 4, offer safety attachment interface 7; as shown in Figure 1, can be convenient to thus the installation of corresponding safety attachment rupture disk, pressure-detecting device, safety valve and safety relief pipeline etc.
In certain embodiments, material filling type chlorosilane condensate storage facilities also comprises: nitrogen tube (scheming not shown), nitrogen tube is connected with nitrogen interface 23.Thus, can utilize the pneumatic conveying mode of nitrogen pressurization that the chlorosilane condensate liquid in holding vessel 2 is delivered in corresponding pipeline, equipment and system, thereby reduce input cost and the maintenance cost of power equipment.In addition, can also easy access displacement and binder operation.
In order to realize the automation control of whole equipment, also comprise according to the utility model embodiment's material filling type chlorosilane condensate storage facilities the control system that the recovery for controlling tail gas stores, control system is connected with condenser 1, holding vessel 2 respectively, and control system comprises controller.Alternatively, controller is PLC controller.Thus, improved the automatic control level that chlorosilane reclaims.
Thereby consider that in the tail gas of chlorine-containing silane, containing a certain amount of impurity more easily stops up material filling type column plate 3, and the smooth and easy of packing tower plates is the deciding factor that ensures its heat and mass effect quality, in order to improve the utilization ratio of equipment, therefore, according in an embodiment of the present utility model, as shown in Figure 1, on holding vessel 2, have upward pressure interface 241 and downforce interface 242, on the axial direction of holding vessel 2, upward pressure interface 241 and downforce interface 242 lay respectively at the above and below of material filling type column plate 3.Control system also comprises the pressure gauge 51 and the downforce table 52 that are connected with controller, and pressure gauge 51 is connected with upward pressure interface 241, and downforce table 52 is connected with downforce interface 242.That is to say, pressure gauge 51 and downforce table 52 are located at respectively the above and below of material filling type column plate 3, can reflect by the demonstration of pressure difference thus the stopping state of material filling type column plate 3, convenient timely replacing or cleaning to material filling type column plate 3, particularly, if pressure difference increases, illustrate that material filling type column plate 3 is blocked, need to material filling type column plate 3 be changed or be cleaned; If pressure reduction is very little or have no increase tendency, illustrate that material filling type column plate 3 does not stop up, wouldn't be with it is processed.
Preferably, as shown in Figure 1, control system also comprises the modulating valve 53 that is located at incoagulable gas and exports 41 places, and modulating valve 53 is connected with controller with pressure gauge 51 respectively with the aperture of the pressure regulating and controlling valve 53 by holding vessel 2.Thus, the modulating valve 53 that the show value by pressure gauge 51 and incoagulable gas export 41 places forms single loop control, carrys out the aperture of regulating and controlling valve 53 by the height of pressure, and then controls the discharge of incoagulable gas in condenser 1 and holding vessel 2.
According to further embodiment of the present utility model, control system also comprises the level meter 54 being connected with controller, and level meter 54 is connected between the upper end interface 251 and lower end interface 252 being located on holding vessel 2.Preferably, control system also comprises cut-off valve 55, and cut-off valve 55 is located at condensate outlet 22 places and is connected with controller with level meter 54 respectively, as shown in Figure 1.The show value of level meter 54 and cut-off valve 55 form single loop control, are controlling the on off state of cut-off valve 55 by the height of holding vessel 2 interior liquid levels.
In further embodiments, control system can also comprise the thermometer 56 and the cold medium flux valve 57 that are connected to holding vessel 2.Particularly, as shown in Figure 1, thermometer 56 is connected to temperature interface 26 places of holding vessel 2, cold medium flux valve 57 is connected to refrigerant entrance 11 places, and cold medium flux valve 57 is connected with controller with thermometer 56 respectively with the aperture of the temperature control cold medium flux valve 57 of the chlorosilane condensate liquid by holding vessel 2 interior storages.In other words, thermometer 56 and cold medium flux valve 57 form single loop control, utilize the temperature of the chlorosilane condensate liquid in holding vessel 2 to regulate the aperture of cold medium flux valve 57, thereby control the flow of refrigerant.
According to the utility model embodiment's material filling type chlorosilane condensate storage facilities, by PLC programmable logic controller (PLC), the switch of cut-off valve 55 is decided by the height of holding vessel 2 interior liquid levels, thereby controlled the discharge of condensed fluid.The aperture size of modulating valve 53 is decided by the pressure in holding vessel 2, thereby has controlled the discharge of incoagulable gas.The aperture size of cold medium flux valve 57 is decided by the temperature of the chlorosilane condensate liquid in holding vessel 2, forms DCS system thus by multiple single loops control point, has realized automatic operation more completely.
Describe in detail according to the utility model embodiment's material filling type chlorosilane condensate storage facilities the recovery of chlorosilane in the tail gas containing chlorsilane producing in production of polysilicon and the process of storage below with reference to Fig. 1.
As shown in Figure 1, the tail gas containing chlorsilane producing in polysilicon production process enters holding vessel 2 from heating agent entrance 21, and low temperature refrigerant enters condenser by refrigerant entrance 11.While starting working, tail gas enters backward the going up of holding vessel 2 and enters condenser 1 by material filling type column plate 3, tail gas and low temperature refrigerant carry out heat exchange in condenser 1, arrive material filling type column plate 3 places and spray downwards after the chlorosilane in tail gas is condensed under the Action of Gravity Field of himself.When the tail gas that enters holding vessel 2 by heating agent entrance 21 subsequently upwards passes through material filling type column plate 3, with the condensed chlorosilane liquid produced moving down through material filling type column plate 3 in the effect of the interior generation heat and mass of material filling type column plate 3, thereby played the effect of carrying out precooling to newly entering tail gas.Be mixed in a small amount of low-boiling-point substance in chlorosilane liquid produced simultaneously and after heat exchange, become gaseous state and move up, finally discharge from non-condensition gas outlet 41, thereby played removal of impurities effect.Tail gas after the interior heat exchange of material filling type column plate 3 continues upwards to enter the interior quilt of condenser 1 and is finally condensed into liquid state, then because its Action of Gravity Field down to preserving in holding vessel 2, and the incoagulable gas not being condensed also export 41 discharges by incoagulable gas.
When being connected to that level meter 54 on holding vessel 2 reaches high some liquid level and while sending node signal, cut-off valve 55 will be opened automatically, and takes the pneumatic conveying mode of nitrogen pressurization that the chlorosilane liquid produced in holding vessel 2 is delivered to corresponding system.And in the time that level meter 54 reaches low spot liquid level and provides signal, cut-off valve 55 cuts out.
In addition, the pressure of pressure gauge 51 changes will be to controller with corresponding signal, and now the aperture of modulating valve 53 changes the variation with pressure, and the aperture of modulating valve 53 increases with the increase of pressure, reducing and reduce with pressure.In addition, the variation of thermometer 56 also will be controlled the aperture of cold medium flux valve 57, the aperture that is cold medium flux valve increases along with the rising of temperature, and the reduction with temperature reduces, and refrigerant, by being flowed out condenser and got back to refrigerant stocking system (scheming not shown) by refrigerant exit 12 under the effect of the pressure difference at pressure gauge 51 and downforce table 52 (being the pressure difference between refrigerant entrance 11 and refrigerant exit 12), is wherein indicated cold medium flux by flowmeter 58.
Thus, according to the utility model embodiment's material filling type chlorosilane condensate storage facilities, removal of impurities is made good use of, and has improved the utilization ratio of refrigerant cold, greatly reduces the manufacture cost of equipment, has finally reduced the cost recovery of chlorosilane in tail gas.Meanwhile, because of the heat and mass effect of its material filling type column plate 3, also play certain rectifying column purification effect, can remove a small amount of low-boiling-point substance.In addition, control system comprises the corresponding instrument and the pipeline that are located on holding vessel and condenser, utilizes the DCS system of single loop controlling composition to operate, and has improved the automatic control level that chlorosilane reclaims.
In the description of this specification, the description of reference term " embodiment ", " some embodiments ", " illustrative examples ", " example ", " concrete example " or " some examples " etc. means to be contained at least one embodiment of the present utility model or example in conjunction with specific features, structure, material or the feature of this embodiment or example description.In this manual, the schematic statement of above-mentioned term is not necessarily referred to identical embodiment or example.And specific features, structure, material or the feature of description can be with suitable mode combination in any one or more embodiments or example.
Although illustrated and described embodiment of the present utility model, those having ordinary skill in the art will appreciate that: in the situation that not departing from principle of the present utility model and aim, can carry out multiple variation, amendment, replacement and modification to these embodiments, scope of the present utility model is limited by claim and equivalent thereof.
Claims (10)
1. a material filling type chlorosilane condensate storage facilities, reclaims for the chlorosilane in the tail gas of the chlorine-containing silane to production of polysilicon, it is characterized in that, described material filling type chlorosilane condensate storage facilities comprises:
Condenser, the top of described condenser has refrigerant entrance and bottom has refrigerant exit, and top has incoagulable gas outlet;
Holding vessel, described holding vessel is located at described condenser below and is communicated with described condenser, the middle part of described holding vessel has the heating agent entrance for passing into described tail gas, bottom has condensate outlet, the bottom of described holding vessel has nitrogen interface, and described nitrogen interface is positioned at described condensate outlet top; And
Material filling type column plate, described material filling type column plate is located in described holding vessel and is positioned at the top of described heating agent entrance.
2. material filling type chlorosilane condensate storage facilities according to claim 1, is characterized in that, the external diameter of described material filling type column plate is less than the internal diameter of described holding vessel, and described material filling type column plate is fixed by screws in described holding vessel.
3. material filling type chlorosilane condensate storage facilities according to claim 1, is characterized in that, the external diameter of described condenser and the external diameter of described holding vessel are roughly equal.
4. material filling type chlorosilane condensate storage facilities according to claim 3, it is characterized in that, the top of described condenser is opened wide, described material filling type chlorosilane condensate storage facilities also comprises top end socket, described top end socket is located at the top of described condenser, and wherein said incoagulable gas outlet is formed on the end socket of described top.
5. material filling type chlorosilane condensate storage facilities according to claim 4, is characterized in that, described condenser is connected by the first flange with described top end socket;
Described condenser is connected by the second flange with described holding vessel.
6. material filling type chlorosilane condensate storage facilities according to claim 1, is characterized in that, also comprises:
Nitrogen tube, described nitrogen tube is connected with described nitrogen interface.
7. according to the material filling type chlorosilane condensate storage facilities described in any one in claim 1-6, it is characterized in that, also comprise the control system that the recovery for controlling described tail gas stores, described control system is connected with described condenser, described holding vessel respectively, and described control system comprises controller.
8. material filling type chlorosilane condensate storage facilities according to claim 7, it is characterized in that, on described holding vessel, there is upward pressure interface and downforce interface, lay respectively at the above and below of described material filling type column plate at the above upward pressure interface of axial direction of described holding vessel and downforce interface;
Described control system also comprises the pressure gauge and the downforce table that are connected with described controller, and described pressure gauge is connected with described upward pressure interface, and described downforce table is connected with described downforce interface;
Be located at the modulating valve in described incoagulable gas outlet port, described modulating valve is connected with described controller with the aperture of modulating valve described in the pressure control by described holding vessel with described pressure gauge respectively.
9. material filling type chlorosilane condensate storage facilities according to claim 8, is characterized in that, described control system also comprises:
With the level meter that described controller is connected, described level meter is located between the upper end interface and lower end interface on described holding vessel; And
Cut-off valve, described cut-off valve is located at described condensate outlet place and is connected with described controller with described level meter respectively.
10. material filling type chlorosilane condensate storage facilities according to claim 9, is characterized in that, described control system also comprises:
Be connected to the thermometer of described holding vessel; With
Cold medium flux valve, described cold medium flux valve is connected to described refrigerant ingress, and described cold medium flux valve is connected with described controller with the aperture of cold medium flux valve described in the temperature control of the chlorosilane condensate liquid by storing in described holding vessel with described thermometer respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320693706.1U CN203628275U (en) | 2013-11-05 | 2013-11-05 | Packing type condensation storage equipment for chlorosilane |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320693706.1U CN203628275U (en) | 2013-11-05 | 2013-11-05 | Packing type condensation storage equipment for chlorosilane |
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| Publication Number | Publication Date |
|---|---|
| CN203628275U true CN203628275U (en) | 2014-06-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320693706.1U Withdrawn - After Issue CN203628275U (en) | 2013-11-05 | 2013-11-05 | Packing type condensation storage equipment for chlorosilane |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103542257A (en) * | 2013-11-05 | 2014-01-29 | 昆明冶研新材料股份有限公司 | Packing type chlorosilane condensing and storing device |
-
2013
- 2013-11-05 CN CN201320693706.1U patent/CN203628275U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103542257A (en) * | 2013-11-05 | 2014-01-29 | 昆明冶研新材料股份有限公司 | Packing type chlorosilane condensing and storing device |
| CN103542257B (en) * | 2013-11-05 | 2016-04-06 | 昆明冶研新材料股份有限公司 | Material filling type chlorosilane condensate storage facilities |
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