CN1330569C - Process for pressure purification of silicon trichlorohydrgen and apparatus thereof - Google Patents
Process for pressure purification of silicon trichlorohydrgen and apparatus thereof Download PDFInfo
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- CN1330569C CN1330569C CNB2005102003344A CN200510200334A CN1330569C CN 1330569 C CN1330569 C CN 1330569C CN B2005102003344 A CNB2005102003344 A CN B2005102003344A CN 200510200334 A CN200510200334 A CN 200510200334A CN 1330569 C CN1330569 C CN 1330569C
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- trichlorosilane
- purification tower
- purification
- silicon tetrachloride
- liquid
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Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CNB2005102003344A CN1330569C (en) | 2005-06-16 | 2005-06-16 | Process for pressure purification of silicon trichlorohydrgen and apparatus thereof |
Applications Claiming Priority (1)
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CNB2005102003344A CN1330569C (en) | 2005-06-16 | 2005-06-16 | Process for pressure purification of silicon trichlorohydrgen and apparatus thereof |
Publications (2)
Publication Number | Publication Date |
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CN1693192A CN1693192A (en) | 2005-11-09 |
CN1330569C true CN1330569C (en) | 2007-08-08 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CNB2005102003344A Active CN1330569C (en) | 2005-06-16 | 2005-06-16 | Process for pressure purification of silicon trichlorohydrgen and apparatus thereof |
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CN (1) | CN1330569C (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101357292B (en) * | 2007-07-31 | 2012-07-04 | 中国恩菲工程技术有限公司 | Method for recovering tail-gas generated during producing polycrystalline silicon using silicon tetrachloride |
CN101372335B (en) * | 2007-08-20 | 2011-08-10 | 中国恩菲工程技术有限公司 | Method for preparing polysilicon |
KR101292545B1 (en) | 2009-12-28 | 2013-08-12 | 주식회사 엘지화학 | Apparatus for purifying trichlorosilane and method of purifying trichlorosilane |
CN102101672A (en) * | 2011-01-10 | 2011-06-22 | 华陆工程科技有限责任公司 | Control method for stably adjusting purity of trichlorosilane |
CN102417182A (en) * | 2011-08-30 | 2012-04-18 | 沁阳市瑞元物资有限公司 | Separation device and method for purifying trichlorosilane in substances with high/low boiling point |
CN102502654A (en) * | 2011-10-20 | 2012-06-20 | 中国恩菲工程技术有限公司 | Method for treating solution containing silicon tetrachloride |
CN102381712A (en) * | 2011-10-20 | 2012-03-21 | 中国恩菲工程技术有限公司 | Equipment for treating solution containing silicon tetrachloride |
WO2015012257A1 (en) * | 2013-07-26 | 2015-01-29 | 株式会社 テクノ・バンダリー | Continuous-distillation-type trichlorosilane vaporization supply device and continuous-distillation-type trichlorosilane gas vaporization method |
CN111153925B (en) * | 2019-12-31 | 2022-08-12 | 江西宏柏新材料股份有限公司 | Device and method for continuously purifying 2-cyanoethyl trichlorosilane |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3516803A (en) * | 1966-10-06 | 1970-06-23 | Texas Instruments Inc | Method for the purification of trichlorosilane |
US4481178A (en) * | 1982-11-08 | 1984-11-06 | General Electric Company | Purification of chlorosilanes |
JP2000319095A (en) * | 1999-04-30 | 2000-11-21 | Komatsu Electronic Metals Co Ltd | Apparatus and method for vaporizing and supplying trichlorosilane |
JP2002362917A (en) * | 2001-06-07 | 2002-12-18 | Sumitomo Titanium Corp | Chlorosilane purifying method |
CN1403372A (en) * | 2002-10-23 | 2003-03-19 | 同济大学 | Method of producing polysilicon with mixed source of trichloro-hydrosilicon and silicon tetrachloride |
-
2005
- 2005-06-16 CN CNB2005102003344A patent/CN1330569C/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3516803A (en) * | 1966-10-06 | 1970-06-23 | Texas Instruments Inc | Method for the purification of trichlorosilane |
US4481178A (en) * | 1982-11-08 | 1984-11-06 | General Electric Company | Purification of chlorosilanes |
JP2000319095A (en) * | 1999-04-30 | 2000-11-21 | Komatsu Electronic Metals Co Ltd | Apparatus and method for vaporizing and supplying trichlorosilane |
JP2002362917A (en) * | 2001-06-07 | 2002-12-18 | Sumitomo Titanium Corp | Chlorosilane purifying method |
CN1403372A (en) * | 2002-10-23 | 2003-03-19 | 同济大学 | Method of producing polysilicon with mixed source of trichloro-hydrosilicon and silicon tetrachloride |
Also Published As
Publication number | Publication date |
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CN1693192A (en) | 2005-11-09 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Luoyang Zhonggui High-tech Co., Ltd. Assignor: China Non-ferrous Engineering Design General Inst. Contract fulfillment period: 2007.1.1 to 2016.12.31 contract change Contract record no.: 2008410000161 Denomination of invention: Process for pressure purification of silicon trichlorohydrgen and apparatus thereof Granted publication date: 20070808 License type: Exclusive license Record date: 2008.12.3 |
|
LIC | Patent licence contract for exploitation submitted for record |
Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2007.1.1 TO 2016.12.31; CHANGE OF CONTRACT Name of requester: LUOYANG ZHONGGUI HIGH SCIENCE CO., LTD. Effective date: 20081203 |
|
C56 | Change in the name or address of the patentee |
Owner name: CHINA YOUSE ENGINEERING CO., LTD. Free format text: FORMER NAME: CHINA NONFERROUS ENGINEERING RESEARCH INSTITUTE |
|
CP01 | Change in the name or title of a patent holder |
Address after: No. 12 Fuxing Road, Beijing, Beijing, Haidian District Patentee after: China Nonferrous Metals Engineering Company Limited Address before: No. 12 Fuxing Road, Beijing, Beijing, Haidian District Patentee before: China Non-ferrous Engineering Design General Inst. |