CN203617933U - Package type piezoelectric ceramic actuator for realizing closed-loop control - Google Patents
Package type piezoelectric ceramic actuator for realizing closed-loop control Download PDFInfo
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- CN203617933U CN203617933U CN201320736492.1U CN201320736492U CN203617933U CN 203617933 U CN203617933 U CN 203617933U CN 201320736492 U CN201320736492 U CN 201320736492U CN 203617933 U CN203617933 U CN 203617933U
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Abstract
The utility model discloses a package type piezoelectric ceramic actuator for realizing closed-loop control. Through setting resistance strain gauges at planes of two opposite sides of piezoelectric ceramics, nonlinear characteristics of hysteresis, creep and the like of the piezoelectric ceramics in displacement output can be effectively eliminated, the normal displacement output of the piezoelectric ceramics is ensured, and the output precision is raised. At the same time, a displacement output amount can be fed through the resistance strain gauges, the closed-loop control is realized, and thus the overall structure of the actuator is simple and compact, and the size of the actuator is small. Through arranging the piezoelectric ceramics in a stainless steel casing pipe, the stainless steel casing pipe can effectively protect the piezoelectric ceramics from external vibration, shock and inertial force so as to improve the reliability, stability and installability of the piezoelectric ceramics, and the service life of the piezoelectric ceramics is ensured.
Description
Technical field
The utility model belongs to micro-driving applied technical field, is specifically related to a kind of encapsulation type piezoelectric actuator of realizing closed-loop control.
Background technology
At present, the advantage that piezoelectric actuator part has is admitted widely and is applied.Piezoelectric ceramic is to utilize the inverse piezoelectric effect of piezoelectric to carry out work, only rely on the size of extra electric field just can realize driving, piezoelectric ceramic has overcome mechanical type in the past, fluid pressure type, pneumatic type, the actuator inertia such as electromagnetic type are large, low-response, complex structure, the deficiencies such as poor reliability, there is volume little, compact conformation, machinery-free friction, gapless, resolution is high, response is fast, without heating, be not subject to magnetic interference, can be at low temperature, the advantage such as under vacuum degree environment, use, be widely used in microposition technology, for example object lens precision positioning, large-stroke nanometer alignment system, the micro-nano impression of high accuracy, active vibration damping, mask and wafer alignment, photoetching, optical interference, fiber alignment, sub-nano measurement, rom test, optic test, control valve for fluids, acoustic instrument transducer, the field such as linear motor and microwave acoustics, this controlled precision micro-displacement actuator will be bringing into play effect difficult to the appraisal in many technical fields from now on.But, on the one hand because piezoelectric actuator all adopts lamella to glue stack structure in order to realize larger driving scope, and be ceramic-like hard brittle material, so be in use often subject to the factors such as shearing force, moment of flexure, moment of torsion, vibrations, impact and inertia force to cause the damage of piezoelectric ceramic due to end face unbalance stress, side, make the coefficient of losses of piezoelectric ceramic very high.The characteristic such as sluggishness and creep existing due to piezoelectric ceramic on the other hand, causes the output of displacement in motion process to be non-linear, and mobile accuracy is poor.
In order to improve the useful life of piezoelectric ceramic, need carry out encapsulation process to piezoelectric ceramic, the current difference according to use material and packaged type is divided into mechanical encapsulation and two kinds of modes of flexible hinge encapsulation encapsulate piezoelectric ceramic.Wherein, adopt the mode of flexible hinge encapsulation piezoelectric ceramic to have a patent " the direct-drive type nanoscale precisely locating platform (patent No.: 201220411967.5); this locating platform comprises: stage body, jackscrew, jacking block, piezoelectric ceramic, screw etc.; have groove in stage body and process flexible hinge; piezoelectric ceramic is contained in groove; one end of piezoelectric ceramic and one end of jacking block lean in stage body groove one end, jackscrew leans the bottom (it is carried out to pretension) at piezoelectric ceramic through stage body.In work, Piezoelectric Ceramic flexible hinge is realized micro-nano location.But this kind of structural volume is larger, and number of parts is more, higher to the requirement on machining accuracy of flexible hinge and workbench.Also for example " a kind of flexible micro-positioning platform (patent No.: 201310103681.X).
In view of this, be necessary to propose a kind of novel piezo-electric ceramic actuator, effectively to eliminate the nonlinear characteristic such as sluggishness and creep of piezoelectric ceramic in the time that displacement is exported, improve output accuracy, improve reliability, stability and the installability of piezoelectric ceramic, and realize the effective Feedback that displacement is exported, reach the object of closed-loop control.
Utility model content
In view of this, the utility model provides a kind of encapsulation type piezoelectric actuator of realizing closed-loop control, effectively to eliminate the nonlinear characteristic such as sluggishness and creep of piezoelectric ceramic in the time that displacement is exported, improve output accuracy, improve reliability, stability and the installability of piezoelectric ceramic, and realize the effective Feedback that displacement is exported, reach the object of closed-loop control.
A kind of encapsulation type piezoelectric actuator of realizing closed-loop control proposing according to the purpose of this utility model, comprise base, sleeve pipe, be positioned at the piezoelectric ceramic of described inside pipe casing, and be arranged at the pre-tightening apparatus of described piezoelectric ceramic top, described pre-tightening apparatus is fixedly connected with described sleeve pipe, on relative two side planes of described piezoelectric ceramic, is provided with resistance strain gage;
One end of described piezoelectric ceramic is fixed on described base, is fixedly connected with connector on the other end, and described pre-tightening apparatus center position has through hole, and the upper end of described connector is through described through hole.
Preferably, described pre-tightening apparatus is preloading spring, and described preloading spring is fixed on described sleeve pipe.
Preferably, described pre-tightening apparatus comprises the pretension head being fixedly connected on described sleeve pipe, between the lower end of described connector and described pretension head, is provided with preloading spring.
Preferably, described preloading spring is disk spring.
Preferably, described pretension head and described casing threads spin.
Preferably, described base and described sleeve pipe are detachably fixing.
Preferably, on described resistance strain gage, be connected with contact conductor, on described piezoelectric ceramic, be connected with shielding conductor, described sleeve pipe lower end offers the open slot for drawing described contact conductor and shielding conductor.
Compared with prior art, the advantage of the disclosed a kind of encapsulation type piezoelectric actuator of realizing closed-loop control of the utility model is: by resistance strain gage being set on two relative side planes of piezoelectric ceramic, can effectively eliminate the nonlinear characteristic such as sluggishness and creep of piezoelectric ceramic in the time that displacement is exported, guarantee piezoelectric ceramic normal displacement output, improve output accuracy.Displacement output variable can be fed back by resistance strain gage, be realized closed-loop control, make the overall structure of actuator simply compact, small volume simultaneously.By piezoelectric ceramic being arranged to the inside of stainless steel sleeve pipe; stainless steel sleeve pipe can effectively protect piezoelectric ceramic to avoid extraneous vibrations, impact and inertia force etc.; to improve reliability, stability and the installability of piezoelectric ceramic, guarantee the useful life of piezoelectric ceramic.
The utility model in fields such as micro-nano operation, micro robot, biological microoperation, optics and accurate drive systems because its structure is small, response is fast, actuating force is large, quality is light, driving power is low and operating frequency is wide, the advantage such as do not generate heat and gathering around has wide practical use.
Accompanying drawing explanation
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, accompanying drawing in the following describes is only embodiment more of the present utility model, for those of ordinary skills, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the structural representation of the disclosed a kind of encapsulation type piezoelectric actuator of realizing closed-loop control of the utility model.
Fig. 2 is the structural representation of female type connector.
Fig. 3 is the structural representation of forward type connector.
Fig. 4 is the structural representation of bulb-shaped connector.
Fig. 5 is the structural representation of outside screw type connector.
Fig. 6 is the scheme of installation of resistance strain gage.
The title of the numeral in figure or the corresponding component of alphabetical representative:
1, base 2, sleeve pipe 3, piezoelectric ceramic 4, resistance strain gage 5, connector 6, preloading spring 7, pretension head 8, open slot 31, shielding conductor 41, contact conductor 71, through hole
Embodiment
In prior art, piezoelectric actuator all adopts lamella to glue stack structure in order to realize larger driving scope, and is ceramic-like hard brittle material, fragile, so in use coefficient of losses is very high.The characteristic such as sluggishness and creep existing due to piezoelectric ceramic on the other hand, causes the output of displacement in motion process to be non-linear, and mobile accuracy is poor.The general useful life that adopts the mode that piezoelectric ceramic is encapsulated to improve piezoelectric ceramic at present, wherein there is mode " the direct-drive type nanoscale precisely locating platform (patent No.: 201220411967.5); but this kind of structural volume is larger; number of parts is more, higher to the requirement on machining accuracy of flexible hinge and workbench of a employing flexible hinge encapsulation piezoelectric ceramic.
The utility model is for deficiency of the prior art, the utility model provides a kind of encapsulation type piezoelectric actuator of realizing closed-loop control, effectively to eliminate the nonlinear characteristic such as sluggishness and creep of piezoelectric ceramic in the time that displacement is exported, improve output accuracy, improve reliability, stability and the installability of piezoelectric ceramic, and realize the effective Feedback that displacement is exported, reach the object of closed-loop control.
To be clearly and completely described the technical solution of the utility model by embodiment below.Obviously, described embodiment is only the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment obtaining under creative work prerequisite, all belong to the scope of the utility model protection.
Please also refer to Fig. 1 to Fig. 6, as shown in the figure, a kind of encapsulation type piezoelectric actuator of realizing closed-loop control, comprise base 1, sleeve pipe 2, be positioned at the piezoelectric ceramic 3 of sleeve pipe 2 inside, and be arranged at the pre-tightening apparatus of piezoelectric ceramic 3 tops, pre-tightening apparatus is fixedly connected with sleeve pipe 2, on relative two side planes of piezoelectric ceramic 3, is bonded with resistance strain gage 4.Wherein piezoelectric ceramic is rectangular configuration, and resistance strain gage is bonded on two relative long side surfaces of piezoelectric ceramic 3, compact conformation.
In order to improve the precision of piezoelectric ceramic displacement output, need to measure with this and realize closed-loop control the output displacement of piezoelectric ceramic.The displacement transducer that is applied at present micro-driving field has: resistance-strain type displacement transducer, inductive displacement transducer, capacitive displacement transducer, two-frequency laser interferometer etc.Because resistance-strain type displacement sensor structure is simple, good frequency response, cost is low, is easy to the features such as integrated, so the utility model adopts sensors with auxiliary electrode were to realize the closed-loop control to piezoelectric ceramic.By resistance strain gage is set, effectively eliminate the nonlinear characteristic such as sluggishness and creep of piezoelectric ceramic in the time that displacement is exported, improve output accuracy, improve reliability, stability and the installability of piezoelectric ceramic, and realize the effective Feedback that displacement is exported, reach the object of closed-loop control.
One end of piezoelectric ceramic 3 is fixed on base 1, is fixedly connected with connector 5 on the other end, and pre-tightening apparatus center position has through hole 71, and connector upper end is through through hole.When extra electric field, piezoelectric ceramic 3 relies on the size of electric field to realize and drives, and then drives connector 5 to realize front and back trace mobile.
Pre-tightening apparatus comprises the pretension head 7 being fixedly connected on sleeve pipe 2, between the lower end of connector 5 and pretension head 7, is provided with preloading spring 6.By pre-tightening apparatus is set, piezoelectric ceramic is applied to certain pretightning force, can avoid piezoelectric ceramic to be subject to the damage of outside tensile force.
Wherein, preloading spring is disk spring.Belleville spring buffering vibration absorption ability is strong, can bear large load with small deformation, is suitable for the little occasion of axial space requirement.
Pretension head 7 spins with sleeve pipe 2 screw threads.In the utility model, the quantity that can use with degree of tightness and disk spring according to revolving of pretension head 7 and various combination mode (involutory and superimposed) are controlled the size of mechanical encapsulation piezoelectric ceramic pretightning force.
On resistance strain gage 4, be connected with contact conductor 41, be connected with shielding conductor 31 on piezoelectric ceramic 3, sleeve pipe 2 lower ends offer the open slot 8 with shielding conductor 31 for extraction electrode lead-in wire 41.Contact conductor can feed back to the variable quantity of resistance strain gage the control section of system, makes user can clearly know the displacement of piezoelectric ceramic.
For a method for fixed resistance foil gauge, concrete steps are as follows:
(1), the thermoplastic tube on piezoelectric ceramic surface is peeled off, then adopt milling tools to polish to position to be pasted on relative two side planes of piezoelectric ceramic, remove the dirt cover layer on piezoelectric ceramic surface, until surfacing is glossy; Wherein milling tools is generally file, emery cloth etc.
(2), grind with resistance strain gage stickup direction and become the striped of 30 °-60 ° with crosus cloth again, to strengthen cohesive force; Wherein the direction of striped is preferably and is 45 ° with stickup direction.
(3), on relative two side planes of piezoelectric ceramic, mark the accurate location that resistance strain gage is installed; Main ruler and the scriber of adopting operates.
(4), dip in volatile solvent with scale removal cotton two paster positions, place are cleaned repeatedly, until can not see dirt on scale removal cotton; Scale removal cotton generally can be clean cotton yarn or rayon balls etc., and volatile solvent adopts acetone conventionally.
(5), after volatile solvent volatilization, drip 1: 502 glue in two place's patch location, get on and glue smoothened bonding resistance strain gage, then stir resistance strain gage with tweezers, adjust position and angle.Behind location, on resistance strain gage, pad layer of polyethylene or tetrafluoroethene film, squeeze out unnecessary glue and bubble with pointing.After glue primary solidification, can unclamp.The resistance strain gage pasting should guarantee that position is accurate, bonding firmly, glue-line evenly, without bubble and neatly clean.
(6), finally adopt electric iron that contact conductor is fixedly welded on the terminal of resistance strain gage.Welding is wanted rapidly, and the time can not be long, and solder joint requires smooth, can not rosin joint, and unnecessary contact conductor can be cut off.
Be adhesively fixed after resistance strain gage, whether well adopted universal instrument to check that foil gauge two draws line resistance, by thermoplastic tube, piezoelectric ceramic and resistance strain gage have been protected, prevented that resistance strain gage from making moist.
In addition, need first to detect resistance strain gage and had or not rust staining before bonding resistance strain gage, whether defect, damages, go between intact; Detect resistance, whether have and open circuit and short circuit.And carry out picking according to resistance, resistance differ can not exceed ± 0.5.
The encapsulation step of the piezoelectric ceramic of strip resistance foil gauge is as follows:
(1), the piezoelectric ceramic 3 that is bonded with resistance strain gage 4 is fixedly sticked on base 1 with epoxide-resin glue, and guarantee piezoelectric ceramic 3 perpendicular to base 1 and be placed in central authorities.
(2), by connector 5, pretension head 7, preloading spring 6, piezoelectric ceramic 3, sleeve pipe 2, base 1 by being installed together as shown in Figure 1.
(3), with epoxide-resin glue, the threaded portion of pretension head 7 and base 1 is bonded together with the threaded portion of sleeve pipe 2 respectively, then regulate revolving with the number of turns of pretension head 7 to obtain certain pretightning force according to the rigidity of the quantity of preloading spring used and compound mode (involutory and superimposed) and piezoelectric ceramic 3, make this structure can resist certain pulling force.
(4), with silica gel, shielding conductor 31 and contact conductor 41 are filled up with the gap at base 1 open slot 8 places.
(5), check whether the displacement of this kind of encapsulation type piezoelectric ceramic can reach the requirement of regulation, if can not pretension head 2 be adjusted to pine.
(6), encapsulation type piezoelectric ceramic qualified displacement is cured to processing, glue is solidified completely.
In addition, pre-tightening apparatus also can only adopt preloading spring, and preloading spring is fixed on sleeve pipe.Only by preloading spring, piezoelectric ceramic is carried out to pretension spacing.
The utility model discloses a kind of encapsulation type piezoelectric actuator of realizing closed-loop control, by resistance strain gage being set on two relative side planes of piezoelectric ceramic, can effectively eliminate the nonlinear characteristic such as sluggishness and creep of piezoelectric ceramic in the time that displacement is exported, guarantee piezoelectric ceramic normal displacement output, improve output accuracy.Displacement output variable can be fed back by resistance strain gage, be realized closed-loop control, make the overall structure of actuator simply compact, small volume simultaneously.By piezoelectric ceramic being arranged to the inside of stainless steel sleeve pipe; stainless steel sleeve pipe can effectively protect piezoelectric ceramic to avoid extraneous vibrations, impact and inertia force etc.; to improve reliability, stability and the installability of piezoelectric ceramic, guarantee the useful life of piezoelectric ceramic.
The utility model in fields such as micro-nano operation, micro robot, biological microoperation, optics and accurate drive systems because its structure is small, response is fast, actuating force is large, quality is light, driving power is low and operating frequency is wide, the advantage such as do not generate heat and gathering around has wide practical use.
To the above-mentioned explanation of the disclosed embodiments, make professional and technical personnel in the field can realize or use the utility model.To be apparent for those skilled in the art to the multiple modification of these embodiment, General Principle as defined herein can, in the situation that not departing from spirit or scope of the present utility model, realize in other embodiments.Therefore, the utility model will can not be restricted to these embodiment shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (7)
1. realize the encapsulation type piezoelectric actuator of closed-loop control for one kind, it is characterized in that, comprise base, sleeve pipe, be positioned at the piezoelectric ceramic of described inside pipe casing, and be arranged at the pre-tightening apparatus of described piezoelectric ceramic top, described pre-tightening apparatus is fixedly connected with described sleeve pipe, on relative two side planes of described piezoelectric ceramic, is provided with resistance strain gage;
One end of described piezoelectric ceramic is fixed on described base, is fixedly connected with connector on the other end, and described pre-tightening apparatus center position has through hole, and the upper end of described connector is through described through hole.
2. the encapsulation type piezoelectric actuator of realizing closed-loop control as claimed in claim 1, is characterized in that, described pre-tightening apparatus is preloading spring, and described preloading spring is fixed on described sleeve pipe.
3. the encapsulation type piezoelectric actuator of realizing closed-loop control as claimed in claim 1, is characterized in that, described pre-tightening apparatus comprises the pretension head being fixedly connected on described sleeve pipe, between the lower end of described connector and described pretension head, is provided with preloading spring.
4. the encapsulation type piezoelectric actuator of realizing as claimed in claim 2 or claim 3 closed-loop control, is characterized in that, described preloading spring is disk spring.
5. the encapsulation type piezoelectric actuator of realizing closed-loop control as claimed in claim 3, is characterized in that, described pretension head and described casing threads spin.
6. the encapsulation type piezoelectric actuator of realizing closed-loop control as claimed in claim 1, is characterized in that, described base and described sleeve pipe are detachably fixing.
7. the encapsulation type piezoelectric actuator of realizing closed-loop control as claimed in claim 1, it is characterized in that, on described resistance strain gage, be connected with contact conductor, on described piezoelectric ceramic, be connected with shielding conductor, described sleeve pipe lower end offers the open slot for drawing described contact conductor and shielding conductor.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201320736492.1U CN203617933U (en) | 2013-11-19 | 2013-11-19 | Package type piezoelectric ceramic actuator for realizing closed-loop control |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201320736492.1U CN203617933U (en) | 2013-11-19 | 2013-11-19 | Package type piezoelectric ceramic actuator for realizing closed-loop control |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104109629A (en) * | 2014-07-30 | 2014-10-22 | 苏州大学 | Piezoelectric ultrasonic microinjector and piezoelectric ultrasonic microinjection system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104109629A (en) * | 2014-07-30 | 2014-10-22 | 苏州大学 | Piezoelectric ultrasonic microinjector and piezoelectric ultrasonic microinjection system |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140528 Termination date: 20211119 |
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| CF01 | Termination of patent right due to non-payment of annual fee |