CN203598762U - Low-concentration two-stage gas distribution system - Google Patents
Low-concentration two-stage gas distribution system Download PDFInfo
- Publication number
- CN203598762U CN203598762U CN201320725143.XU CN201320725143U CN203598762U CN 203598762 U CN203598762 U CN 203598762U CN 201320725143 U CN201320725143 U CN 201320725143U CN 203598762 U CN203598762 U CN 203598762U
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- magnetic valve
- valve
- mass flow
- flow controller
- blender
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- 229910000831 Steel Inorganic materials 0.000 claims abstract description 17
- 239000010959 steel Substances 0.000 claims abstract description 17
- 239000007789 gas Substances 0.000 claims description 28
- 239000012159 carrier gas Substances 0.000 claims description 9
- 239000002912 waste gas Substances 0.000 claims description 4
- 230000006837 decompression Effects 0.000 abstract 2
- 238000007865 diluting Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 7
- 239000003085 diluting agent Substances 0.000 description 3
- 238000010790 dilution Methods 0.000 description 3
- 239000012895 dilution Substances 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 239000003595 mist Substances 0.000 description 2
- 230000037396 body weight Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
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Abstract
The utility model provides a low-concentration two-stage gas distribution system, which is characterized in that a feed gas steel cylinder is connected with a first mixer sequentially through a first decompression valve, a first electromagnetic valve and a first mass flow controller, a diluted gas steel cylinder is connected with a second electromagnetic valve and a third electromagnetic valve respectively through a second decompression valve, the other end of the second electromagnetic valve is connected with the first mixer through a second mass flow controller, an output end of the first mixer is connected with a second mixer sequentially through a first buffer tank, a pressure transmitter, a fourth electromagnetic valve and a third mass flow controller, the other end of the third electromagnetic valve is connected with the second mixer through a fourth mass flow controller, an output end of the second mixer is connected with a first rotor flow meter, a sixth electromagnetic valve and a second rotor flow meter respectively through a second buffer tank, the other end of the sixth electromagnetic valve is connected with a vacuum pump, the connection position between the pressure transmitter and the fourth electromagnetic valve is connected with a third input end of a four-way valve through a fifth electromagnetic valve. The system can realize two-stage automatic gas distribution, and is large in diluting range and high in automatic precision.
Description
Technical field
The utility model relates to a kind of low concentration two-stage air distribution system, belongs to distribution technical field.
Background technology
At present the more of use is static method, a certain amount of unstripped gas added in the high pressure or pressurizing vessel of known volume, then is filled with diluent gas and mixes and make Standard Gases.Its mesolow rubber bag distribution, low pressure water-sealed gasholder distribution and high pressure dry tank distribution precision are higher, generally can reach ± 2%.When calibrating gas large usage quantity or logical calibrating gas time requirement are grown, static distribution method just can not meet the demands, little for static distribution method distribution capacity, and equipment takes up an area large, and the problem that precision is not high, at this moment just need to use Devince By Dynamic Gas Ration Method.Devince By Dynamic Gas Ration Method is exactly to enter blender with diluent gas according to constant ratio according to the unstrpped gas of concentration known to mix, thereby continuously prepares and supply with certain density Standard Gases, calculates the concentration of Standard Gases according to thinner ratio.But current dynamic air-distributing thinner ratio is not high, being difficult to high concentrations of gas dilution is light concentration gas.Native system adopts Devince By Dynamic Gas Ration Method, utilizes two-stage dilution to improve thinner ratio, can realize the light concentration gas configuration of highly diluted ratio.
Utility model content
The purpose of this utility model is to provide that a kind of reasonable in design, compact conformation, body weight are light, distribution precision and the high low concentration two-stage air distribution system of automaticity.Its technical scheme is:
A kind of low concentration two-stage air distribution system, is characterized in that: comprise unstripped gas steel cylinder, carrier gas steel cylinder, the first pressure-reducing valve, the second pressure-reducing valve, the first magnetic valve, the second magnetic valve, the 3rd magnetic valve, the 4th magnetic valve, the 5th magnetic valve, the 6th magnetic valve, the first mass flow controller, the second mass flow controller, the 3rd mass flow controller, the 4th mass flow controller, the first blender, the second blender, the first surge tank, the second surge tank, pressure transmitter, the first rotor flowmeter, the second spinner flowmeter and vavuum pump, wherein the output of unstripped gas steel cylinder is successively through the first pressure-reducing valve, the first magnetic valve and the first mass flow controller connect the input of the first blender, the output of carrier gas steel cylinder connects respectively the second magnetic valve and the 3rd magnetic valve through the second pressure-reducing valve, the other end of the second magnetic valve connects the input of the first blender through the second mass flow controller, the output of the first blender is successively through the first surge tank, pressure transmitter, the 4th magnetic valve and the 3rd mass flow controller connect the input of the second blender, the other end of the 3rd magnetic valve connects the input of the second blender through the 4th mass flow controller, the output of the second blender connects respectively the first rotor flowmeter through the second surge tank, one end of the 6th magnetic valve and the second spinner flowmeter, the first input end of another termination cross valve of the second spinner flowmeter, the other end of the 6th magnetic valve connects the second input of cross valve through vavuum pump, another termination sample devices of the second spinner flowmeter, the junction of pressure transmitter and the 4th magnetic valve the 5th magnetic valve connects the 3rd input of cross valve, the output termination waste gas recovering device of cross valve.
Its operation principle is:
1, system pipeline cleans: open the first magnetic valve, the second magnetic valve, the 3rd magnetic valve, the 4th magnetic valve, the 6th magnetic valve and four mass flow controllers, drive vavuum pump and vacuumize.
2, one-level distribution: open unstripped gas steel cylinder, being adjusted to suitable gas pressure by the first pressure-reducing valve is 0.3MPa; Then open carrier gas steel cylinder, being adjusted to suitable gas pressure by the second pressure-reducing valve is 0.25MPa; Open the first magnetic valve, the second magnetic valve, the first mass flow controller and the second mass flow controller, the unstripped gas after proportioning and carrier gas mix in the first blender again, finally enter the first surge tank, complete one-level distribution.
3, when pressure transmitter is higher than 0.2MPa, the 5th magnetic valve is opened, emptying mist unnecessary in the first surge tank; Otherwise carry out secondary distribution: open the 4th magnetic valve and the 3rd mass flow controller, open the 3rd magnetic valve and the 4th mass flow controller simultaneously, diluent gas in mist in the first surge tank and carrier gas steel cylinder enters in the second blender in certain proportion, enter waste gas recovering device by the second surge tank through the first rotor flowmeter again, or enter sample devices through the second spinner flowmeter.
The utility model compared with prior art, has advantages of following aspect:
1, combined high precision mass flow controller, has realized two-stage automatic distributing, and dilution range is large, and automation precision is high, compact conformation.
2, adopt dynamic air-distributing method, can be applicable to the long or component gas molecular weight difference of calibrating gas large usage quantity, distribution time requirement large time.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model embodiment.
In figure: 1, unstripped gas steel cylinder 2, carrier gas steel cylinder 3, the first pressure-reducing valve 4, the second pressure-reducing valve 5, the first magnetic valve 6, the second magnetic valve 7, the 3rd magnetic valve 8, the 4th magnetic valve 9, the 5th magnetic valve 10, the 6th magnetic valve 11, the first mass flow controller 12, the second mass flow controller 13, the 3rd mass flow controller 14, the 4th mass flow controller 15, the first blender 16, the second blender 17, the first surge tank 18, the second surge tank 19, pressure transmitter 20, the first rotor flowmeter 21, the second spinner flowmeter 22, vavuum pump 23, cross valve
The specific embodiment
Below in conjunction with accompanying drawing, by embodiment, the utility model is described in further detail.In the embodiment shown in fig. 1: the output of unstripped gas steel cylinder 1 is successively through the first pressure-reducing valve 3, the first magnetic valve 5 and the first mass flow controller 11 connect the input of the first blender 15, the output of carrier gas steel cylinder 2 connects respectively the second magnetic valve 6 and the 3rd magnetic valve 7 through the second pressure-reducing valve 4, the other end of the second magnetic valve 6 connects the input of the first blender 15 through the second mass flow controller 12, the output of the first blender 15 is successively through the first surge tank 17, pressure transmitter 19, the 4th magnetic valve 8 and the 3rd mass flow controller 13 connect the input of the second blender 16, the other end of the 3rd magnetic valve 7 connects the input of the second blender 16 through the 4th mass flow controller 14, the output of the second blender 16 connects respectively the first rotor flowmeter 20 through the second surge tank 18, one end of the 6th magnetic valve 10 and the second spinner flowmeter 21, the first input end of another termination cross valve 23 of the first rotor flowmeter 20, the other end of the 6th magnetic valve 10 connects the second input of cross valve 23 through vavuum pump 22, another termination sample devices of the second spinner flowmeter 21, the junction of pressure transmitter 19 and the 4th magnetic valve 8 the 5th magnetic valve 9 connects the 3rd input of cross valve 23, the output termination waste gas recovering device of cross valve 23.
Claims (1)
1. a low concentration two-stage air distribution system, is characterized in that: comprise unstripped gas steel cylinder (1), carrier gas steel cylinder (2), the first pressure-reducing valve (3), the second pressure-reducing valve (4), the first magnetic valve (5), the second magnetic valve (6), the 3rd magnetic valve (7), the 4th magnetic valve (8), the 5th magnetic valve (9), the 6th magnetic valve (10), the first mass flow controller (11), the second mass flow controller (12), the 3rd mass flow controller (13), the 4th mass flow controller (14), the first blender (15), the second blender (16), the first surge tank (17), the second surge tank (18), pressure transmitter (19), the first rotor flowmeter (20), the second spinner flowmeter (21) and vavuum pump (22), wherein the output of unstripped gas steel cylinder (1) is successively through the first pressure-reducing valve (3), the first magnetic valve (5) and the first mass flow controller (11) connect the input of the first blender (15), the output of carrier gas steel cylinder (2) connects respectively the second magnetic valve (6) and the 3rd magnetic valve (7) through the second pressure-reducing valve (4), the other end of the second magnetic valve (6) connects the input of the first blender (15) through the second mass flow controller (12), the output of the first blender (15) is successively through the first surge tank (17), pressure transmitter (19), the 4th magnetic valve (8) and the 3rd mass flow controller (13) connect the input of the second blender (16), the other end of the 3rd magnetic valve (7) connects the input of the second blender (16) through the 4th mass flow controller (14), the output of the second blender (16) connects respectively the first rotor flowmeter (20) through the second surge tank (18), one end of the 6th magnetic valve (10) and the second spinner flowmeter (21), the first input end of another termination cross valve (23) of the first rotor flowmeter (20), the other end of the 6th magnetic valve (10) connects the second input of cross valve (23) through vavuum pump (22), another termination sample devices of the second spinner flowmeter (21), junction the 5th magnetic valve (9) of pressure transmitter (19) and the 4th magnetic valve (8) connects the 3rd input of cross valve (23), the output termination waste gas recovering device of cross valve (23).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320725143.XU CN203598762U (en) | 2013-11-15 | 2013-11-15 | Low-concentration two-stage gas distribution system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320725143.XU CN203598762U (en) | 2013-11-15 | 2013-11-15 | Low-concentration two-stage gas distribution system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203598762U true CN203598762U (en) | 2014-05-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320725143.XU Expired - Lifetime CN203598762U (en) | 2013-11-15 | 2013-11-15 | Low-concentration two-stage gas distribution system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203598762U (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107008200A (en) * | 2017-05-23 | 2017-08-04 | 淮海工学院 | Obtain the device of different gas concentration lwevels |
| CN107478494A (en) * | 2017-08-23 | 2017-12-15 | 力合科技（湖南）股份有限公司 | A kind of standard gas distribution meter |
| CN108445090A (en) * | 2018-03-29 | 2018-08-24 | 辽宁科技大学 | Realize device, the method for chemisorption amount and chemisorption electric signal simultaneous quantitative characterization |
| CN108896704A (en) * | 2018-05-10 | 2018-11-27 | 四川理工学院 | A kind of sampling of gas on-line dilution and standard gas generating device and method |
| CN109647235A (en) * | 2018-12-29 | 2019-04-19 | 苏州天蓝分析仪器有限公司 | A kind of dilution device based on gas mixing dilution mode |
| CN110487957A (en) * | 2018-05-14 | 2019-11-22 | 中国石油化工股份有限公司 | A kind of efficient gas alarm calibration method and device |
| CN111408289A (en) * | 2020-03-30 | 2020-07-14 | 山东重山光电材料股份有限公司 | Method and system for industrially continuously mixing gas with high precision |
| CN112316761A (en) * | 2020-10-21 | 2021-02-05 | 海南聚能科技创新研究院有限公司 | Intelligent dynamic gas distribution system |
| CN113805614A (en) * | 2021-09-01 | 2021-12-17 | 中山大学 | Ozone gas concentration control system |
| CN114514486A (en) * | 2019-03-06 | 2022-05-17 | 法国国家科学研究中心 | Microfluidic generator for generating a gaseous mixture |
-
2013
- 2013-11-15 CN CN201320725143.XU patent/CN203598762U/en not_active Expired - Lifetime
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107008200A (en) * | 2017-05-23 | 2017-08-04 | 淮海工学院 | Obtain the device of different gas concentration lwevels |
| CN107478494A (en) * | 2017-08-23 | 2017-12-15 | 力合科技（湖南）股份有限公司 | A kind of standard gas distribution meter |
| CN108445090A (en) * | 2018-03-29 | 2018-08-24 | 辽宁科技大学 | Realize device, the method for chemisorption amount and chemisorption electric signal simultaneous quantitative characterization |
| CN108896704A (en) * | 2018-05-10 | 2018-11-27 | 四川理工学院 | A kind of sampling of gas on-line dilution and standard gas generating device and method |
| CN108896704B (en) * | 2018-05-10 | 2021-02-26 | 四川理工学院 | Gas online dilution sampling and standard gas generating device and method |
| CN110487957A (en) * | 2018-05-14 | 2019-11-22 | 中国石油化工股份有限公司 | A kind of efficient gas alarm calibration method and device |
| CN109647235A (en) * | 2018-12-29 | 2019-04-19 | 苏州天蓝分析仪器有限公司 | A kind of dilution device based on gas mixing dilution mode |
| CN114514486A (en) * | 2019-03-06 | 2022-05-17 | 法国国家科学研究中心 | Microfluidic generator for generating a gaseous mixture |
| CN111408289A (en) * | 2020-03-30 | 2020-07-14 | 山东重山光电材料股份有限公司 | Method and system for industrially continuously mixing gas with high precision |
| CN112316761A (en) * | 2020-10-21 | 2021-02-05 | 海南聚能科技创新研究院有限公司 | Intelligent dynamic gas distribution system |
| CN113805614A (en) * | 2021-09-01 | 2021-12-17 | 中山大学 | Ozone gas concentration control system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140521 |