CN203595821U - Error correcting device and plasma equipment - Google Patents
Error correcting device and plasma equipment Download PDFInfo
- Publication number
- CN203595821U CN203595821U CN201320708594.2U CN201320708594U CN203595821U CN 203595821 U CN203595821 U CN 203595821U CN 201320708594 U CN201320708594 U CN 201320708594U CN 203595821 U CN203595821 U CN 203595821U
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- Prior art keywords
- correcting device
- deviation correcting
- signal receiver
- cable
- deflection correction
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- Expired - Lifetime
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- 239000000463 material Substances 0.000 claims abstract description 43
- 238000005260 corrosion Methods 0.000 claims description 41
- 230000007797 corrosion Effects 0.000 claims description 31
- 230000001681 protective effect Effects 0.000 claims description 26
- 229910000838 Al alloy Inorganic materials 0.000 claims description 9
- 239000004809 Teflon Substances 0.000 claims description 7
- 229920006362 Teflon® Polymers 0.000 claims description 7
- 239000011521 glass Substances 0.000 claims description 6
- 239000004801 Chlorinated PVC Substances 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 5
- XECAHXYUAAWDEL-UHFFFAOYSA-N acrylonitrile butadiene styrene Chemical compound C=CC=C.C=CC#N.C=CC1=CC=CC=C1 XECAHXYUAAWDEL-UHFFFAOYSA-N 0.000 claims description 5
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 claims description 5
- 239000004676 acrylonitrile butadiene styrene Substances 0.000 claims description 5
- 229920000457 chlorinated polyvinyl chloride Polymers 0.000 claims description 5
- 229920005556 chlorobutyl Polymers 0.000 claims description 5
- 239000004417 polycarbonate Substances 0.000 claims description 5
- 229920000515 polycarbonate Polymers 0.000 claims description 5
- 239000010936 titanium Substances 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 238000001020 plasma etching Methods 0.000 abstract description 11
- 239000002253 acid Substances 0.000 abstract description 2
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 229920000459 Nitrile rubber Polymers 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
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- Plasma Technology (AREA)
- ing And Chemical Polishing (AREA)
Abstract
The utility model discloses an error correcting device and plasma equipment. The error correcting device comprises an error correcting sensor, a signal receiver and a cable coated by a protection layer. The error correcting sensor is connected with the signal receiver through the cable. The error correcting sensor includes a frame made of first anticorrosion material, and an infrared photosensitive lens fixed on the frame. The infrared photosensitive lens is coated by an anticorrosion layer made of second anticorrosion material. While in use, the signal receiver is arranged in a normal pressure environment, and the error correcting sensor is arranged in a vacuum ion environment, such that, as the frame and the infrared photosensitive lens of the error correcting sensor are made of the anticorrosion materials, the frame and the infrared lens are protected from being corroded by acid gas for plasma etching. Besides, for the signal receiver in the normal pressure environment, the internal circuit board is not influenced by plasma etching environment, and can be used for a long time. The plasma equipment using the aforementioned error correcting device has stable performance and long service life.
Description
Technical field
The utility model relates to plasma treatment field, particularly relates to deviation correcting device and plasma apparatus.
Background technology
Plasma processing is widely used in the occasions such as plasma cleaning, etching, plasma plating, plasma coated, plasma ashing and surface active, modification.Process by it, can improve the wetting ability of material, make the operations such as multiple material can apply, plating, strengthen bounding force, bonding force, remove organic contaminant, greasy dirt or grease simultaneously.Volume property plasma processing is for processing flexible rolling circuit board and volume property electronic material, as polyimide (Polyimide, PI), and circuit board coverlay etc.
Usually, in volume property plasma processing, be provided with deviation correcting device, its deviation correcting device comprises deflection correction sensor and signal receiver, and deflection correction sensor and signal receiver are all placed in the vacuum end of volume property plasma apparatus.In the time that plasma apparatus is worked, deviation correcting device is in plasma etching environment, and now, the infrared light microscopic head that is subject to of the circuit board of signal receiver inside and deflection correction sensor is easily corroded in plasma etching environment, affects the performance of deviation correcting device.
Utility model content
Based on this, be necessary to provide the circuit board of a kind of signal receiver inside and infrared deviation correcting device and the plasma apparatus that is subject to light microscopic head to be difficult for being corroded of deflection correction sensor.
A kind of deviation correcting device, comprises deflection correction sensor and signal receiver, and described deviation correcting device also comprises the cable that is coated with protective seam, and described deflection correction sensor is connected with described signal receiver by described cable;
Described deflection correction sensor comprises the support that the first rotproofness material is made and is fixed on the infrared light microscopic head that is subject on described support, the described infrared anti-corrosion layer that is subject to light microscopic head to be coated with the second corrosion resistant material making.
Therein in an embodiment, the thickness of described protective seam is described cable size 0.5 times～3 times.
In an embodiment, the described infrared light microscopic head that is subject to comprises transmitting terminal and receiving end therein, and described transmitting terminal and described receiving end are oppositely arranged.
In an embodiment, the material of described protective seam is teflon, chlorinated polyvinyl chloride or butyl rubber therein.Teflon has good resistance to acids and bases, adopts teflon can protect cable to exempt from the corrosion of plasma ambient as the material of protective seam.
In an embodiment, described the first corrosion resistant material is aluminium alloy or titanium therein.Aluminium alloy not only has decay resistance, but also has advantages of that density is little, adopts aluminium alloy to make support, can alleviate the weight of deviation correcting device.
In an embodiment, described the second corrosion resistant material is glass, polycarbonate or acrylonitrile-butadiene-styrene copolymer therein.
A kind of plasma apparatus, comprise vacuum chamber and be arranged on dispensing shaft and the collecting shaft in described vacuum chamber, described dispensing shaft and described collecting shaft are respectively by driven by servomotor, in described vacuum chamber, be provided with plasma area, described plasma apparatus is also provided with deviation correcting device, described deviation correcting device comprises deflection correction sensor, signal receiver and the cable that is coated with protective seam, described deflection correction sensor is positioned at described plasma area, described cable passes described vacuum chamber, described cable one end is connected with described deflection correction sensor, the other end is connected with described signal receiver,
Described deflection correction sensor comprises the support that the first corrosion resistant material is made and is fixed on the infrared light microscopic head that is subject on described support, the described infrared anti-corrosion layer that is subject to light microscopic head to be coated with the second rotproofness material making.
Therein in an embodiment, the thickness of described protective seam is described cable size 0.5 times～3 times.
In an embodiment, the described infrared light microscopic head that is subject to comprises transmitting terminal and receiving end therein, and described transmitting terminal and described receiving end are oppositely arranged.
Therein in an embodiment; the material of described protective seam is teflon, chlorinated polyvinyl chloride or butyl rubber; described the first corrosion resistant material is aluminium alloy or titanium, and described the second corrosion resistant material is glass, polycarbonate or acrylonitrile-butadiene-styrene copolymer.
Above-mentioned deviation correcting device, adopts the cable that is coated with protective seam that deflection correction sensor and signal receiver are coupled together, the split type setting of deflection correction sensor and signal receiver, and deflection correction sensor and signal receiver can be in different working environment operations.In use; signal receiver is arranged in atmospheric pressure environment; deflection correction sensor is arranged in vacuum ionic environment, and the support of deflection correction sensor and infrared lens are made by anticorrosive property material, can protective cradle and infrared lens not by the sour gas corrosion of plasma etching.And being arranged in the signal receiver of atmospheric pressure environment, its internal circuit plate is not subject to the impact of plasma etching environment, is not easy to be corroded, and can use for a long time.Adopt the plasma apparatus of above-mentioned deviation correcting device, stable performance, long service life.
Accompanying drawing explanation
Fig. 1 is the structural representation of the deviation correcting device of an embodiment;
Fig. 2 is the perspective view of the deviation correcting device of an embodiment.
Embodiment
For above-mentioned purpose of the present utility model, feature and advantage can be become apparent more, below in conjunction with accompanying drawing, embodiment of the present utility model is described in detail.A lot of details are set forth in the following description so that fully understand the utility model.But the utility model can be implemented to be much different from alternate manner described here, and those skilled in the art can do similar improvement without prejudice to the utility model intension in the situation that, and therefore the utility model is not subject to the restriction of following public concrete enforcement.
Refer to Fig. 1 and Fig. 2, the deviation correcting device of an embodiment, comprises deflection correction sensor 10, signal receiver 20 and is coated with the cable 40 of protective seam 30, deflection correction sensor 10 is connected with signal receiver 20 by cable 40.Adopt the cable 40 with certain length to be connected with signal receiver 20 deflection correction sensor 10, the installation site of deflection correction sensor 10 and signal receiver 20 can be set flexibly.The length of cable 40 can be selected according to the size of the size of ion plasma and deviation correcting device, is arranged in atmospheric pressure environment as long as its length can realize signal receiver 20.The material of protective seam 30 is corrosion resistant material, can be in the sour gas environment of plasma etching retention constant.Protective seam 30 can be both coated whole cable 40, can be to be also only coated the cable 40 that is exposed to ion plasma part.In present embodiment, the coated whole cable 40 of protective seam 30.
Above-mentioned deviation correcting device, couples together deflection correction sensor 10 and signal receiver 20 by cable 40, can make deflection correction sensor 10 and signal receiver 20 be arranged in different working environments.In use; signal receiver 20 is arranged in atmospheric pressure environment; deflection correction sensor 10 is arranged in vacuum ionic environment; the support 12 of deflection correction sensor 10 and the infrared light microscopic head 14 that is subject to are made by corrosion resistant material; can protective cradle 12 and infrared lens not by the sour gas corrosion of plasma etching, and be arranged in the signal receiver 20 of atmospheric pressure environment, its internal circuit plate is not subject to the impact of plasma etching environment; be not easy to be corroded, can use for a long time.
In one embodiment, the material of protective seam 30 is teflon, chlorinated polyvinyl chloride or butyl rubber.In other embodiments, the material of protective seam 30 can be also other corrosion resistant materials, as nitrile rubber etc.
In one embodiment, the thickness of protective seam 30 is 0.5 times～3 times of cable 40 diameters.Cost of manufacture can be increased if the thickness of protective seam 30 is too thick, if too thin, desirable anticorrosion effect can be do not reached again.In the time that the thickness of protective seam 30 is 0.5 times～3 times of cable 40 diameters, both can realize the corrosion-resistant function of cable 40, can save again cost of manufacture.
In one embodiment, the infrared light microscopic head 14 that is subject to comprises receiving end 140 and transmitting terminal 142, and receiving end 140 is oppositely arranged with transmitting terminal 142.Receiving end 140 be positioned at transmitting terminal 142 directly over, in the time that transmitting terminal 142 and receiving end 140 detect shifted signal, shifted signal is sent to signal receiver 20, then shifted signal is processed.
In one embodiment, the first corrosion resistant material is aluminium alloy or titanium.Aluminium alloy not only has good rotproofness, and density is little, uses aluminium alloy to make support 12, can alleviate the weight of deviation correcting device.In other embodiments, the first corrosion resistant material can be also titanium.
In one embodiment, the second corrosion resistant material is glass, polycarbonate or acrylonitrile-butadiene-styrene copolymer.Making infraredly while being subject to light microscopic head 14, adopt spraying coating process to be subject to apply on light microscopic head 14 one deck anti-corrosion layer infrared.Be understandable that, anti-corrosion layer should be transparent, and anti-corrosion layer does not affect the infrared light transmission that is subject to light microscopic head 14.In other embodiments, also can directly adopt transparent corrosion resistant material to make the infrared light microscopic head 14 that is subject to.
Above-mentioned deviation correcting device can be in plasma apparatus, and particularly volume property plasma apparatus, for solving the offset problem of volume property material in plasma treatment process.Give an example with a concrete plasma apparatus below.
The plasma apparatus of one embodiment, comprise above-mentioned deviation correcting device, vacuum chamber and be arranged on dispensing shaft and the collecting shaft in vacuum chamber, dispensing shaft and collecting shaft are respectively by driven by servomotor, in vacuum chamber, be provided with plasma area, wherein, plasma area is made up of positive electrode and negative electrode.
Deflection correction sensor is positioned at plasma area, and cable passes vacuum chamber, and one end is connected with deflection correction sensor, and the other end is connected with signal receiver.
Above-mentioned plasma apparatus, deflection correction sensor is placed in the ion plasma in vacuum chamber, and signal receiver is positioned at vacuum chamber outside, deflection correction sensor is connected by the cable that is coated with protective seam with signal receiver.Be positioned at the deflection correction sensor of ion plasma owing to being subject to the protection of anti-corrosion layer, can be not by the sour gas corrosion of plasma etching, and be arranged in the signal receiver of atmospheric pressure environment, and be not subject to the impact of plasma ambient, avoid being corroded.Above-mentioned plasma apparatus stable performance, long service life.
The above embodiment has only expressed several embodiment of the present utility model, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to the utility model the scope of the claims.It should be pointed out that for the person of ordinary skill of the art, without departing from the concept of the premise utility, can also make some distortion and improvement, these all belong to protection domain of the present utility model.Therefore, the protection domain of the utility model patent should be as the criterion with claims.
Claims (10)
1. a deviation correcting device, comprises deflection correction sensor and signal receiver, it is characterized in that, described deviation correcting device also comprises the cable that is coated with protective seam, and described deflection correction sensor is connected with described signal receiver by described cable;
Described deflection correction sensor comprises the support that the first corrosion resistant material is made and is fixed on the infrared light microscopic head that is subject on described support, the described infrared anti-corrosion layer that is subject to light microscopic head to be coated with the second corrosion resistant material making.
2. deviation correcting device according to claim 1, is characterized in that, the thickness of described protective seam is described cable size 0.5 times～3 times.
3. deviation correcting device according to claim 1, is characterized in that, the described infrared light microscopic head that is subject to comprises transmitting terminal and receiving end, and described transmitting terminal and described receiving end are oppositely arranged.
4. deviation correcting device according to claim 1, is characterized in that, the material of described protective seam is teflon, chlorinated polyvinyl chloride or butyl rubber.
5. deviation correcting device according to claim 1, is characterized in that, described the first corrosion resistant material is aluminium alloy or titanium.
6. according to the deviation correcting device described in claim 1-5 any one, it is characterized in that, described the second corrosion resistant material is glass, polycarbonate or acrylonitrile-butadiene-styrene copolymer.
7. a plasma apparatus, comprise vacuum chamber and be arranged on dispensing shaft and the collecting shaft in described vacuum chamber, described dispensing shaft and described collecting shaft are respectively by driven by servomotor, in described vacuum chamber, be provided with plasma area, it is characterized in that, described plasma apparatus is also provided with deviation correcting device, described deviation correcting device comprises deflection correction sensor, signal receiver and the cable that is coated with protective seam, described deflection correction sensor is positioned at described plasma area, described cable passes described vacuum chamber, described cable one end is connected with described deflection correction sensor, the other end is connected with described signal receiver,
Described deflection correction sensor comprises the support that the first corrosion resistant material is made and is fixed on the infrared light microscopic head that is subject on described support, the described infrared anti-corrosion layer that is subject to light microscopic head to be coated with the second corrosion resistant material making.
8. plasma apparatus according to claim 7, is characterized in that, the thickness of described protective seam is described cable size 0.5 times～3 times.
9. plasma apparatus according to claim 7, is characterized in that, the described infrared light microscopic head that is subject to comprises transmitting terminal and receiving end, and described transmitting terminal and receiving end are oppositely arranged.
10. according to the plasma apparatus described in claim 7-9 any one; it is characterized in that; the material of described protective seam is teflon, chlorinated polyvinyl chloride or butyl rubber; described the first corrosion resistant material is aluminium alloy or nickel, and described the second corrosion resistant material is glass, polycarbonate or acrylonitrile-butadiene-styrene copolymer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320708594.2U CN203595821U (en) | 2013-11-11 | 2013-11-11 | Error correcting device and plasma equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320708594.2U CN203595821U (en) | 2013-11-11 | 2013-11-11 | Error correcting device and plasma equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203595821U true CN203595821U (en) | 2014-05-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320708594.2U Expired - Lifetime CN203595821U (en) | 2013-11-11 | 2013-11-11 | Error correcting device and plasma equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203595821U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103592693A (en) * | 2013-11-11 | 2014-02-19 | 珠海宝丰堂电子科技有限公司 | Rectifying device and plasma equipment |
-
2013
- 2013-11-11 CN CN201320708594.2U patent/CN203595821U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103592693A (en) * | 2013-11-11 | 2014-02-19 | 珠海宝丰堂电子科技有限公司 | Rectifying device and plasma equipment |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140514 |
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| CX01 | Expiry of patent term |