CN203588980U - Wafer box chassis - Google Patents
Wafer box chassis Download PDFInfo
- Publication number
- CN203588980U CN203588980U CN201320629832.0U CN201320629832U CN203588980U CN 203588980 U CN203588980 U CN 203588980U CN 201320629832 U CN201320629832 U CN 201320629832U CN 203588980 U CN203588980 U CN 203588980U
- Authority
- CN
- China
- Prior art keywords
- wafer cassette
- lower cover
- chassis
- shrouding
- door latch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007789 sealing Methods 0.000 claims abstract description 17
- 230000004308 accommodation Effects 0.000 claims description 13
- 230000000712 assembly Effects 0.000 claims description 3
- 238000000429 assembly Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 7
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 62
- 239000002390 adhesive tape Substances 0.000 description 5
- 238000003825 pressing Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000032683 aging Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 230000007774 longterm Effects 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000000763 evoking effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67373—Closed carriers characterised by locking systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
- H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a wafer box chassis, which comprises a lower cover and a sealing plate, wherein the lower cover and the sealing plate are covered to form the wafer box chassis; a rotating device which is connected with the lower cover and is provided with at least two auxiliary components and at least two arc-shaped rails; the elastic positioning component is provided with at least two grooves and is connected with the auxiliary component; at least a two-door latch assembly connected to the arcuate track; and a T-shaped coupling assembly connected to the latch assembly and the lower cover portion. The rotating device is used for driving the bolt component to move, so that the auxiliary component is unfolded and rotated in the elastic positioning component, the groove is utilized to achieve the positioning effect, and then the T-shaped connecting component swings and rotates to push the bolt component in the oblique direction.
Description
Technical field
The utility model relates to a kind of wafer cassette chassis, relate in particular to and a kind ofly in tumbler, be provided with accessory part, and utilize the reeded elastic positioning member of tool to limit moving range and location, to reach light rotation, complete the wafer cassette chassis of padlock and release action.
Background technology
Wafer cassette is a kind of container that is used for protecting, transport, seal and storing wafer in manufacture of semiconductor.Wafer cassette comprises box cover, wafer rack and wafer cassette base; the box enclosure forms an accommodation space on wafer cassette base; and wafer rack is located at the end face of wafer cassette base; in order at least two wafers of carrying; and in wafer cassette base, be provided with bolt lock mechanism; by bolt lock mechanism, guarantee the locking of box cover and wafer cassette base, make wafer cassette form a closed container to protect inner wafer rack and the wafer of carrying, avoid wafer in the process of transporting, polluted and collide.
Bolt lock mechanism also comprises rotating switch and two symmetrically arranged latch plates, for controlling rotating switch, drive latch plate to reach padlock and release action, scope and the location that bumping post limits its rotation can in arranging stop section and wafer cassette base, rotating switch outside be set, or positioning convex point and locating piece are set on rotating switch reaches to climb the mode on rank scope and the location that restriction is rotated, or location notch is set with Location resilient piece engaging location, above-mentioned rotating switch all needs larger rotatory force to remove to reach locating effect and completes padlock and release action, and associated component can be aging because rubbing, vibrations or manual operation are uncertain, cause bolt lock mechanism there is no certain padlock box cover, so that the situation that in handling process, wafer rack and wafer cassette base meet accident and drop.In addition for increasing the sealing state of wafer cassette, can be with adhesive tape or inflatable airtight circle sealing between box cover and wafer cassette base, but because can caving in to cause because of long-term pressing, adhesive tape sticks wafer cassette base, and easily come off when the closed vacuum of wafer cassette, and inflatable airtight circle can leak situation, cause sealing wafer cassette, easily make wafer be polluted and damage.
Therefore known rotating switch needs larger rotatory force to make its start remove to reach locating effect and completes padlock and release action, and associated component can be aging because rubbing, vibrations or manual operation uncertain, cause bolt lock mechanism there is no certain padlock box cover, so that the situation that in handling process, wafer rack and wafer cassette base meet accident and drop.In addition for increasing the sealing state of wafer cassette, with adhesive tape or inflatable airtight circle sealing, but because can caving in to cause because of long-term pressing, adhesive tape pastes wafer cassette base, and the situation that easily comes off when the closed vacuum of wafer cassette, cause occurring wafer crash situation, and inflatable airtight circle can leak situation, cause sealing wafer cassette, easily make wafer be polluted and damage.
Utility model content
Main purpose of the present utility model is to provide a kind of wafer cassette chassis.
For achieving the above object, the utility model by the following technical solutions:
Wafer cassette chassis comprises a lower cover and a shrouding, and this lower cover and this shrouding cover and form this wafer cassette chassis; One tumbler, is connected with this lower cover, and it is provided with at least two accessory parts and at least two arc tracks; One elastic positioning member, is provided with at least two grooves, and this elastic positioning member is connected with this accessory part, in order to limit the moving range of this accessory part; At least two resistant door latch assemblies, it is connected with arc track; And a T-shaped tie-in module, this T-shaped tie-in module is partly connected with this resistant door latch assembly and this lower cover; Wherein, this tumbler drives this resistant door latch assembly to move in this arc track, and make this accessory part strut rotation in this elastic positioning member, and utilize this groove of this elastic positioning member to reach locating effect, and this resistant door latch assembly drives this T-shaped tie-in module to rotate, and this T-shaped tie-in module makes this resistant door latch assembly advance towards tilted direction.
This accessory part is also provided with at least one fixation kit, in order to prevent that this accessory part from deviating from this elastic positioning member.This lower cover is more provided with at least one vacuum breaker hole, at least two openings and a black box, and this vacuum breaker hole is sequentially provided with a filter screen and an airtight cover cap, and sealing assembly is also provided with at least one reinforced ribs, and this opening is separately positioned on this lower cover both sides.Wherein sealing assembly is placed in one of this lower cover groove, this groove also has at least one hole and can pass through for this reinforced ribs, by this reinforced ribs, more can make sealing assembly mean forced, therefore can not paste this lower cover because long-time pressing causes depression, more can avoid the sealing assembly situation that comes off.And wafer cassette internal vacuum can be lowered in this vacuum breaker hole, avoid vacuum state to occur, therefore can make wafer cassette internal gas pressure reach balance, reduce because losing vacuum state the possibility that wafer is damaged occurs.This lower cover can be a transparent lower cover, and therefore need not disassemble screw can confirm inner body situation.Wherein this accessory part can be bearing, nut or sleeve, can help this tumbler easily to rotate.
This shrouding is more provided with at least one osculum and an accommodation space, and this osculum is arranged at this shrouding bottom, and it is outside that this accommodation space is arranged at this shrouding.Wherein this accommodation space is in order to cover with a folder; and this folder covers and is provided with a radio frequency identification assembly; therefore when this radio frequency identification assembly is abnormal or when cleaned and changed; utilize the design of this folder lid need not disassemble this shrouding and tighten up a screw, can directly in outside, this radio frequency identification assembly be taken out.This shrouding being connected with at least one cross rib in addition, this cross rib prevents that in order to suppress this airtight cover cap this airtight cover cap from dropping.
So known wafer cassette of the present utility model chassis, not only can make rotating switch easily rotate padlock and release action, and do not need larger rotatory force to remove to reach locating effect, also can avoid that associated component friction is aging, vibrations or manual operation uncertain, and cause bolt lock mechanism there is no certain padlock box cover, and the long-term pressing of adhesive tape depression causes and sticks the wafer cassette chassis situation that comes off, therefore can reduce in handling process wafer rack and wafer cassette chassis, meet accident and drop, cause wafer by the situation of crash.
Accompanying drawing explanation
Fig. 1 is wafer cassette of the present utility model chassis outside drawing.
Fig. 2 is wafer cassette chassis structure schematic diagram of the present utility model.
Fig. 3 a is the resistant door latch assembly illustrative view on the utility model wafer cassette chassis.
Fig. 3 b is another illustrative view of resistant door latch assembly on the utility model wafer cassette chassis.
Fig. 4 a is lower cover of the present utility model.
Fig. 4 b is the vacuum breaker hole of the utility model lower cover.
Fig. 4 c is the black box of the utility model lower cover.
Fig. 5 a is accommodation space and the Jia Gai of the utility model shrouding.
Fig. 5 b is cross rib of the present utility model.
[symbol description]
1 wafer cassette chassis 10 lower cover 11 vacuum breaker hole 12 black boies
13 groove 14 opening 20 shrouding 21 osculums
22 accommodation space 23 cross rib 24 folders cover 30 tumblers
31 accessory part 32 arc track 40 elastic positioning member 41 grooves
The airtight cover cap of 50 resistant door latch assembly 60T type tie-in module 110 filter screen 111
120 reinforced ribs 130 hole 240 radio frequency identification assembly 310 fixation kits
Embodiment
Graphic below coordinating, further describe one of the utility model wafer cassette chassis 1 details.Please refer to Fig. 1 and Fig. 2, Fig. 1 is wafer cassette of the present utility model chassis 1 outside drawing, and Fig. 2 is wafer cassette of the present utility model chassis 1 structural representation.Wherein this wafer cassette chassis 1, comprises a lower cover 10 and a shrouding 20, and this lower cover 10 covers and forms this wafer cassette chassis 1 with this shrouding 20.One tumbler 30, is connected with this lower cover 10, and it is provided with two accessory parts 31 and two arc tracks 32; One elastic positioning member 40, is provided with four grooves 41, and this elastic positioning member 40 is connected with this accessory part 31, in order to limit the moving range of this accessory part 31; Two resistant door latch assemblies 50, are connected with this arc track 32 respectively; And a T-shaped tie-in module 60, this T-shaped tie-in module 60 is connected with this resistant door latch assembly 50 and this lower cover 10 parts.This accessory part 31 of this tumbler 30 is more provided with a fixation kit 310 in addition, in order to prevent this accessory part 31, deviate from this elastic positioning member 40, and this accessory part 31 can be bearing, nut or sleeve, in order to help this tumbler 30 easily to rotate and to reduce the fixing parts of coefficient of friction and retainer shaft center in power transmission process.
Please refer to shown in Fig. 2, Fig. 3 a and Fig. 3 b, Fig. 3 a is resistant door latch assembly 50 illustrative view on the utility model wafer cassette chassis 1, and Fig. 3 b is resistant door latch assembly 50 another illustrative view on the utility model wafer cassette chassis 1.When this tumbler 30 clockwise rotates, this tumbler 30 drives this resistant door latch assembly 50 to move in this arc track 32, and make this accessory part 31 strut rotation in this elastic positioning member 40, and utilize this groove 41 of this elastic positioning member 40 to reach locating effect, by this resistant door latch assembly 50, drive the rotation that swings of these T-shaped tie-in modules 60 again, this resistant door latch assembly 50 is advanced towards the tilted direction of an opening 14 of this lower cover 10, reach padlock state.Otherwise, when this tumbler 30 rotates counterclockwise, this tumbler 30 drives this resistant door latch assembly to move in this arc track 32, and make this accessory part 31 strut rotation in this elastic positioning member 40, and utilize this groove 41 of this elastic positioning member 40 to reach locating effect, by this resistant door latch assembly 50, drive rotations that swing of these T-shaped tie-in modules 60 again, make this resistant door latch assembly 50 towards these lower cover 10 internal direction retractions, reach released state.
Please refer to Fig. 4 a, Fig. 4 b and Fig. 4 c, Fig. 4 a is lower cover 10 of the present utility model, and Fig. 4 b is the vacuum breaker hole 11 of the utility model lower cover 10, and Fig. 4 c is the black box 12 of the utility model lower cover 10.This lower cover 10 is more provided with two vacuum breaker holes 11, a black box 12 and four these openings 14, this vacuum breaker hole 11 is sequentially provided with a filter screen 110 and an airtight cover cap 111, sealing assembly 12 is more provided with at least one reinforced ribs 120, in these lower cover 10 both sides, four these openings 14 is set respectively.Wherein sealing assembly 12 is placed in one of this lower cover 10 groove 13, this groove 13 also has at least one hole 130 and can pass through for this reinforced ribs 120, see through this reinforced ribs 120 and more can make sealing assembly 12 mean forceds, therefore can not paste this lower cover 10 because long-time pressing causes depression, more can avoid occurring sealing assembly 12 situation that comes off.And wafer cassette internal vacuum can be lowered in this vacuum breaker hole 11, avoid vacuum state to occur.This lower cover 10 can be a transparent lower cover in addition, make operating personnel need not disassemble screw and directly Visual Confirmation internal mechanism whether start is normal, when mechanism damages, just can circulate a notice of immediately to eliminate and change.
Please refer to Fig. 1, Fig. 5 a and Fig. 5 b, Fig. 5 a is that to cover 24, Fig. 5 b with folder be cross rib 23 of the present utility model to the accommodation space 22 of the utility model shrouding 20.Wherein this shrouding 20 on this wafer cassette chassis 1 is more provided with at least one osculum 21 and an accommodation space 22, and this at least one osculum 21 is arranged at this shrouding 20 bottoms, and this accommodation space 22 is arranged at this shrouding 20 outsides.Wherein this at least one osculum 21 can be discharged water to keep dry when cleaning, and improves this wafer cassette chassis 1 because cleaning the seeping phenomenon causing.This accommodation space 22 is in order to cover with a folder lid 24; and this folder lid 24 is also provided with a radio frequency identification assembly 240; this folder cover 24 design can directly take out replacings in outside by this radio frequency identification assembly 240; need not first disassemble this shrouding 20 tightens up a screw; make that this wafer cassette chassis 1 is abnormal or while cleaning, this radio frequency identification assembly 240 can be replaced in more convenient taking-up.This shrouding 20 is also connected with at least one cross rib 23, and this cross rib 23 prevents that in order to suppress this airtight cover cap 111 this airtight cover cap 111 from dropping.
The above; it is only embodiment of the present utility model; but protection range of the present utility model is not limited to this; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; can expect easily changing or replacing, within all should being encompassed in protection range of the present utility model.Therefore, protection range of the present utility model should be as the criterion with the protection range of described claim.
Claims (9)
1. a wafer cassette chassis, is characterized in that comprising:
One lower cover and a shrouding, this lower cover and this shrouding cover and form this wafer cassette chassis;
One tumbler, is connected with this lower cover, and it is provided with at least two accessory parts and at least two arc tracks;
One elastic positioning member, is provided with at least two grooves, and this elastic positioning member is connected with this accessory part, in order to limit the moving range of this accessory part;
At least two resistant door latch assemblies, are connected with this arc track; And
One T-shaped tie-in module, this T-shaped tie-in module is partly connected with this resistant door latch assembly and this lower cover;
Wherein, this tumbler drives this resistant door latch assembly to move in this arc track, and make this accessory part strut rotation in this elastic positioning member, and utilize this groove of this elastic positioning member to reach location, and this resistant door latch assembly drives this T-shaped tie-in module to rotate, and this T-shaped tie-in module makes this resistant door latch assembly advance towards tilted direction.
2. wafer cassette according to claim 1 chassis, is characterized in that, described lower cover is a transparent lower cover.
3. wafer cassette according to claim 1 chassis, it is characterized in that, described lower cover is also provided with at least one vacuum breaker hole, at least two openings and a black box, this vacuum breaker hole is sequentially provided with a filter screen and an airtight cover cap, sealing assembly is provided with at least one reinforced ribs, and this opening is separately positioned on this lower cover both sides.
4. wafer cassette according to claim 3 chassis, is characterized in that, described black box is placed in one of this lower cover groove, and this groove also has at least one hole, for this reinforced ribs, passes through.
5. wafer cassette according to claim 1 chassis, is characterized in that, described shrouding is also provided with at least one osculum and an accommodation space, and this osculum is arranged at this shrouding bottom, and it is outside that this accommodation space is arranged at this shrouding.
6. wafer cassette according to claim 5 chassis, is characterized in that, described accommodation space is in order to cover with a folder, and this folder covers and be provided with a radio frequency identification assembly.
7. wafer cassette according to claim 3 chassis, is characterized in that, described shrouding is also connected with at least one cross rib, and this cross rib prevents that in order to suppress this airtight cover cap this airtight cover cap from dropping.
8. wafer cassette according to claim 1 chassis, is characterized in that, described accessory part is also provided with at least one fixation kit, in order to prevent that this accessory part from deviating from this elastic positioning member.
9. wafer cassette according to claim 1 chassis, is characterized in that, described accessory part is bearing, nut or sleeve.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW102214345U TWM472694U (en) | 2013-07-31 | 2013-07-31 | Wafer cassette chassis structure |
| TW102214345 | 2013-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203588980U true CN203588980U (en) | 2014-05-07 |
Family
ID=50552183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320629832.0U Expired - Fee Related CN203588980U (en) | 2013-07-31 | 2013-10-12 | Wafer box chassis |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN203588980U (en) |
| TW (1) | TWM472694U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113386272A (en) * | 2021-05-17 | 2021-09-14 | 桂林芯隆科技有限公司 | Cutting device and method for laser chip |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI593612B (en) | 2014-11-25 | 2017-08-01 | 家登精密工業股份有限公司 | Wafer container and the latch directional device |
-
2013
- 2013-07-31 TW TW102214345U patent/TWM472694U/en not_active IP Right Cessation
- 2013-10-12 CN CN201320629832.0U patent/CN203588980U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113386272A (en) * | 2021-05-17 | 2021-09-14 | 桂林芯隆科技有限公司 | Cutting device and method for laser chip |
| CN113386272B (en) * | 2021-05-17 | 2023-03-24 | 桂林芯隆科技有限公司 | Cutting device and method for laser chip |
Also Published As
| Publication number | Publication date |
|---|---|
| TWM472694U (en) | 2014-02-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140507 Termination date: 20171012 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |