CN203588979U - Flexible substrate processing device - Google Patents
Flexible substrate processing device Download PDFInfo
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- CN203588979U CN203588979U CN201320698616.1U CN201320698616U CN203588979U CN 203588979 U CN203588979 U CN 203588979U CN 201320698616 U CN201320698616 U CN 201320698616U CN 203588979 U CN203588979 U CN 203588979U
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- running roller
- flexible base
- active roll
- treatment fluid
- processing unit
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- 238000012545 processing Methods 0.000 title claims abstract description 21
- 239000000758 substrate Substances 0.000 title abstract description 6
- 239000012530 fluid Substances 0.000 claims abstract description 40
- 238000006073 displacement reaction Methods 0.000 claims abstract description 21
- 239000007788 liquid Substances 0.000 claims abstract description 13
- 238000001514 detection method Methods 0.000 claims description 30
- 238000004891 communication Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 abstract description 9
- 230000008569 process Effects 0.000 abstract description 4
- 238000004804 winding Methods 0.000 abstract 1
- 230000008859 change Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000002699 waste material Substances 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000001802 infusion Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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Abstract
The utility model provides a flexible substrate processing device which comprises a treatment trough used for containing a treatment fluid, a positioning roller arranged below the liquid level of the treatment fluid, and a driving roller and a driven roller which are arranged above the liquid level of the treatment fluid. The device further comprises a detecting and calculating device and a displacement adjusting device, wherein the detecting and calculating device is used for detecting the real-time linear velocity of a flexible substrate winding the driving roller, the positioning roller and the driven roller and for calculating the real-time position data of the positioning roller according to the real-time linear velocity, and the detecting and calculating device is connected with the driving roller or the driven roller; and the displacement adjusting device is used for adjusting the position of the positioning roller in real time according to the real-time position data and connected with the detecting and calculating device and the positioning roller. By timely adjusting the position of the positioning roller, the treating time of the flexible substrate in the treatment fluid remains constant in the treating process, no additional increase or decrease of the treatment fluid is needed, and the quality of the flexible substrate is improved.
Description
technical field
The utility model relates to semiconductor fabrication, particularly relates to a kind of flexible base, board processing unit.
background technology
Along with flexibility shows continually developing of product, volume to volume technique relies on the characteristic of its low cost, high efficiency production, by progressively substituting, manufactures at present the production model one by one that inflexibility shows that product is used, and becomes the following main flow that shows production.In existing volume to volume technique, because the diameter of the running roller that is wound around flexible base, board changes along with flexible base, board is wound around the variation of the number of plies, this portable cord speed that just makes flexible base, board on running roller that fixed angles speed rotates changes not stopping.Thereby cause the soak time of flexible base, board to change and to change along with the diameter of running roller, and then cause the device size on flexible base, board inhomogeneous, the flexible quality that shows product of impact.
Common solution is: by the liquid level position of controlling treatment fluid, reach the constant effect of substrate soak time in treatment fluid, specifically by discharge opeing and liquid supply device, realize.But technique scheme has following deficiency: need to carry out the action of discharge opeing fluid infusion frequently, can cause larger treatment fluid disturbance, this disturbance has the non-uniform phenomenon of very large chance when causing that screen body shows, reduces the flexible quality that shows product, can cause the waste for the treatment of fluid simultaneously.
utility model content
For the problems referred to above that exist in conventional art, provide a kind of and make the processing time of flexible base, board in treatment fluid keep constant flexible base, board processing unit.
A kind of flexible base, board processing unit comprises: for hold treatment fluid treatment trough, be positioned at treatment fluid liquid level below location running roller, be positioned at active roll and the passive running roller for the treatment of fluid liquid level top, flexible base, board processing unit also comprises: for detection of the actual time line speed that is wound on the flexible base, board on active roll, location running roller and passive running roller, and according to actual time line speedometer, calculating the detection computations device of locating running roller real time position data, detection computations device is connected with active roll or passive running roller; According to real time position data, adjust in real time the displacement adjusting device of registration roller wheel location, displacement adjusting device is connected with detection computations device and location running roller respectively.
Preferably, detection computations device is range sensor and computing terminal, and range sensor is connected with active roll or passive running roller, range sensor and computing terminal communication connection.
Preferably, detection computations device comprises laser thickness gauge and computing terminal, and laser thickness gauge is connected with active roll or passive running roller, laser thickness gauge and computing terminal communication connection.
Preferably, computing terminal is computer or server.
Preferably, displacement adjusting device is stepping motor and control band, and stepping motor is with location running roller and is connected by control.
Preferably, control band for leading screw.
The utlity model has following beneficial effect: detection computations device is connected with active roll or passive running roller, by detecting the radius of active roll or passive running roller or diameter situation of change, calculate the actual time line speed of flexible base, board.According to the variable quantity of flexible base, board actual time line speed, the real time position data of compute location running roller, detection computations device sends these enforcing location data to displacement adjusting device, for displacement adjusting device, adjusts in real time the position of location running roller in treatment fluid.Thereby it is constant to have realized the processing time maintenance of flexible base, board in treatment fluid, and without extra, increase or get rid for the treatment of fluid, having reduced the waste for the treatment of fluid, can not cause again the stirring that treatment fluid is larger, reduce non-uniform phenomenon when screen body shows, improved the quality of flexible base, board.
accompanying drawing explanation
Fig. 1 is the structural representation of the utility model flexible base, board processing unit.
embodiment
Fig. 1 is the structural representation of the utility model flexible base, board processing unit, as shown in Figure 1, flexible base, board processing unit comprises treatment trough 11, location running roller 14, active roll 132, passive running roller 131, detection computations device 16 and the displacement adjusting device 17 for holding treatment fluid 12.
Particularly, flexible base, board 18 is located on active roll 132, location running roller 14 and passive running roller 131.When flexible base, board processing unit moves, active roll 132 drives flexible base, board 18 to move, and flexible base, board 18 is by the location of location running roller 14, and wherein a part is immersed in treatment fluid 12.In the continuous rotation process of active roll 132, flexible base, board 18 constantly passes through treatment fluid 12, thereby every part of flexible base, board 18 all can be processed by processed liquid 12, and wherein treatment fluid 12 is etching liquid, cleaning fluid or stripper.
After flexible base, board 18 is constantly wound on active roll 132, the radius of active roll 132 constantly increases and meets following formula v=w*r (wherein, v is the linear velocity of flexible base, board 18, and w is the angular speed of active roll 132, and r is the radius of active roll 132).From above formula: when active roll 132 uniform rotation, angular speed w is steady state value, therefore linear velocity v is directly proportional to radius r, make when the radius of active roll 132 increases, the transfer rate of flexible base, board 18 of reeling on it will increase, and therefore can cause producing the trend of the time decreased that flexible base, board 18 soaked in treatment fluid 12.
In shown in Fig. 1, detection computations device 16 is connected on active roll 132, calculates the real time position data of location running roller 14 by detecting the radius change amount of active roll 132.Same, detection computations device 16 also can be connected on passive running roller 131, calculates the real time position data of location running roller 14 by detecting the radius change amount of passive running roller 131.On active roll 132 or passive running roller 131, connect after detection computations device 16, detection computations device 16 detects the real-time radius that obtains active roll 132 or passive running roller 131.According to the variable quantity of real-time radius, calculate the actual time line speed of flexible base, board 18, then according to actual time line speed, calculate the real time position data of registration roller wheel 14, wherein real time position data refers to that location running roller 14 needs the displacement for the treatment of of the vertical displacement that moves up and down in vertical direction.
The concrete computational process of real time position data is as follows: when technique starts, location running roller 14 is arranged in the initial position (being arranged in the treatment fluid position of bottom relatively) for the treatment of fluid, technique is carried out in process, the counter of detection computations device 16 can record the rotating cycle n of active roll, its initial value is zero, active roll 132 often rotates a circle, and counter rotating cycle n just increases by 1.According to formula v=w*r=w* (r
0+ n*t) (wherein, v is the linear velocity of active roll 132, and w is the angular speed of active roll 132, r
0for the own radius of active roll 132, n is the rotating cycle of active roll 132, and t is the thickness of flexible base, board 18) known, the linear velocity of active roll 132 is functions of active roll 132 rotating cycle n.
The distance of setting the liquid level of position running roller 14 centre-to-centre spacing treatment fluids 12 is y, if the length of flexible base, board 18 in treatment fluid 12 is S, S is the function of y, be S=f (y), the soak time t of flexible base, board in treatment fluid equals S/v, be f (y)/v, therefore by adjusting y, can realize the constant of soak time t.
Therefore, detection computations device 16 is by detecting after the radius change of active roll or passive running roller 13, and can calculate location running roller needs the displacement value of adjusting, i.e. real time position data in vertical direction.Detection computations device 16 is sent to this real time position data and the displacement adjusting device 17 of locating running roller 14 and being connected, and displacement adjusting device 17 is adjusted the position of location running roller 14 in real time according to this real time position data.
Preferably, detection computations device 16 is range sensor and computing terminal, and range sensor is connected with active roll 132 or passive running roller 131, range sensor and computing terminal communication connection.
Preferably, detection computations device 16 comprises laser thickness gauge and computing terminal, and laser thickness gauge is connected with active roll 132 or passive running roller 131, laser thickness gauge and computing terminal communication connection.
Preferably, computing terminal is computer or server.
Preferably, displacement adjusting device 17 is stepping motor and control band, and stepping motor is with location running roller and is connected by control.
Preferably, control band for leading screw.
In the technical scheme of the present embodiment, detection computations device is connected with active roll or passive running roller, calculates the actual time line speed of flexible base, board by detecting the radius of active roll or passive running roller or diameter situation of change.According to the variable quantity of flexible base, board actual time line speed, the real time position data of compute location running roller, detection computations device sends these enforcing location data to displacement adjusting device, for displacement adjusting device, adjusts in real time the position of location running roller in treatment fluid.Thereby it is constant to have realized the processing time maintenance of flexible base, board in treatment fluid, and without extra, increase or get rid for the treatment of fluid, having reduced the waste for the treatment of fluid, can not cause again the stirring that treatment fluid is larger, reduce non-uniform phenomenon when screen body shows, improved the quality of flexible base, board.
It should be noted that: above embodiment is only unrestricted in order to the utility model to be described, the utility model is also not limited in above-mentioned giving an example, all do not depart from technical scheme and the improvement thereof of spirit and scope of the present utility model, and it all should be encompassed in claim scope of the present utility model.
Claims (6)
1. a flexible base, board processing unit, comprise treatment trough for holding treatment fluid, be positioned at described treatment fluid liquid level below location running roller, be positioned at active roll and the passive running roller of described treatment fluid liquid level top, it is characterized in that, described flexible base, board processing unit also comprises:
For detection of the actual time line speed that is wound on the flexible base, board on described active roll, described location running roller and described passive running roller, and according to described actual time line speedometer, calculating the detection computations device of described location running roller real time position data, described detection computations device is connected with described active roll or passive running roller;
For adjust in real time the displacement adjusting device of the position of described location running roller according to described real time position data, described displacement adjusting device is connected with described detection computations device and described location running roller respectively.
2. flexible base, board processing unit according to claim 1, it is characterized in that, described detection computations device is range sensor and computing terminal, and described range sensor is connected with described active roll or described passive running roller, described range sensor and the communication connection of described computing terminal.
3. flexible base, board processing unit according to claim 1, it is characterized in that, described detection computations device comprises laser thickness gauge and computing terminal, described laser thickness gauge is connected with described active roll or described passive running roller, described laser thickness gauge and the communication connection of described computing terminal.
4. according to the flexible base, board processing unit described in claim 2 or 3, it is characterized in that, described computing terminal is computer or server.
5. flexible base, board processing unit according to claim 1, is characterized in that, described displacement adjusting device is stepping motor and control band, and described stepping motor is connected with described location running roller by described control band.
6. flexible base, board processing unit according to claim 5, is characterized in that, described control band is leading screw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320698616.1U CN203588979U (en) | 2013-11-07 | 2013-11-07 | Flexible substrate processing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320698616.1U CN203588979U (en) | 2013-11-07 | 2013-11-07 | Flexible substrate processing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203588979U true CN203588979U (en) | 2014-05-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320698616.1U Expired - Lifetime CN203588979U (en) | 2013-11-07 | 2013-11-07 | Flexible substrate processing device |
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| Country | Link |
|---|---|
| CN (1) | CN203588979U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106684015A (en) * | 2015-11-06 | 2017-05-17 | 恩智浦有限公司 | System and method for processing flexible substrate |
-
2013
- 2013-11-07 CN CN201320698616.1U patent/CN203588979U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106684015A (en) * | 2015-11-06 | 2017-05-17 | 恩智浦有限公司 | System and method for processing flexible substrate |
| CN106684015B (en) * | 2015-11-06 | 2021-09-10 | 恩智浦有限公司 | System and method for processing flexible substrates |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140507 |