CN203569177U - Mask plate - Google Patents
Mask plate Download PDFInfo
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- CN203569177U CN203569177U CN201320675974.0U CN201320675974U CN203569177U CN 203569177 U CN203569177 U CN 203569177U CN 201320675974 U CN201320675974 U CN 201320675974U CN 203569177 U CN203569177 U CN 203569177U
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- mask plate
- evaporation
- hole
- plate body
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Abstract
The utility model discloses a mask plate. The mask plate comprises a mask plate body and an evaporation hole formed in the mask plate body, wherein the evaporation hole penetrates through the mask plate body, and the mask plate is characterized by comprising an evaporation surface and an ITO (indium tin oxide) surface, the edge line of the evaporation hole on the section where the central axial line of the evaporation hole is located is shaped like a funnel, and the include angle between the hole wall of the evaporation hole of the evaporation surface and the plate surface of the mask plate body is 30-60 degrees. The mask plate disclosed by the utility model is manufactured by an electrocasting and laser cutting mixed process; the precision of the evaporation hole of the mask plate manufactured through an electrocasting process is high, and the hole wall of the evaporation hole in the evaporation surface and the mask plate body form the included angle of 30-60 degrees through a laser cutting process, so that the situation that an evaporation material is blocked by the hole wall of the evaporation hole can be effectively relieved, and the problems that the precision of an opening of the evaporation hole is not high and the hole wall of the evaporation hole blocks the evaporation material in the prior art are well solved.
Description
Technical field
The utility model relates to a mask plate, is specifically related to a kind of OLED evaporation mask plate.
Background technology
Organic Light Emitting Diode (Organic Light-Emitting Diode; OLED) indicating meter has a series of advantages such as independently luminous, low-voltage direct-current drives, entirely solidifies, visual angle is wide, color is abundant, compare with liquid-crystal display, OLED indicating meter does not need backlight, visual angle is large, power is low, its response speed can reach 1000 times of liquid-crystal display, and its manufacturing cost is but lower than the liquid-crystal display of equal resolving power.Therefore, OLED displaying appliance has broad application prospects, and becomes gradually the following 20 years the fastest novel technique of display of growth.
While making organic light emitting diode display, need to use the mask plate that evaporation is used, conventionally the evaporation hole of electroforming process making mask plate is vertical with mask plate plate face, the hole wall in evaporation hole produces masking phenomenon to deposition material, and as shown in Figure 1,10 is mask plate, 11 is evaporation hole, 12 is deposition substrate, and when the angle of plating source material transmitting route and mask plate plate face is less than δ, the hole wall in evaporation hole 11 will block material production, cause the in uneven thickness of organic material layer, thereby affect evaporating quality.
And while making mask plate by laser cutting parameter, cutting evaporation hole has certain angle but the precision in evaporation hole is not high, can have influence on equally the quality of mask plate.
The utility model is mainly to propose a kind of mask plate and preparation method thereof for above problem, solves preferably the above problem.
Utility model content
In view of this, main purpose of the present utility model is to provide a kind of mask plate and preparation method thereof, improves the precision in the evaporation hole of mask plate, reduces hole wall the blocking deposition material in evaporation hole.
The utility model provides a kind of mask plate, comprise mask plate body and be formed on the evaporation hole on described mask plate body, described mask plate body is run through in described evaporation hole, it is characterized in that: described mask plate comprises evaporation face and ito surface, on the cross section at central axis place, described evaporation hole, the edge line in described evaporation hole is funnel-form.
Further, the angle of the hole wall in the evaporation hole of evaporation face and the plate face of mask plate body is 30 °～60 °.
Further, the hole wall in the evaporation hole of ito surface and the plate face of mask plate body are vertical.
Further, the angle of the hole wall in the evaporation hole of ito surface and the plate face of mask plate body is 60 °～90 °.
Further, the thickness of mask plate evaporation face is 10～50 μ m.
Further, the thickness of mask plate ito surface is 2～30 μ m.
Further, the total thickness of mask plate is 12～80 μ m.
The utility model also provides a kind of method of making mask plate described above, comprises electroforming step and laser cutting step, it is characterized in that:
Described electroforming step forms described mask plate body and is formed on the through hole on described mask plate body, and described laser cutting step is excised the neighboring area of described mask plate evaporation face through hole, forms described evaporation hole.
Further, in laser cutting step, the angle setting range between the Laser emission route of laser head and mask plate entity plate face is 30 °～60 °.
Further, the thickness of the mask plate body forming in electroforming step is 12～80 μ m, and the thickness that excises described mask plate body in described laser cutting step is 2～30 μ m.
The beneficial effects of the utility model are, mask plate providing by the utility model and preparation method thereof, the precision of making mask plate evaporation hole by electroforming process is high, by laser cutting parameter, make hole wall and the mask plate body in the evaporation hole of evaporation face there is the angle of 30 °～60 °, the evaporation hole that combines and form by electroforming step and laser cutting step, can effectively reduce the precision of blocking, improve evaporation hole of the hole wall in evaporation hole to deposition material, solve well problems of the prior art.
The aspect that the utility model is additional and advantage in the following description part provide, and part will become obviously from the following description, or recognize by practice of the present utility model.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present utility model and advantage will become from the following description of the accompanying drawings of embodiments and obviously and easily understand, wherein:
Figure 1 shows that the schematic cross-section that utilizes mask plate evaporation organic materials in prior art;
Figure 2 shows that the mask plate integral planar structural representation that the utility model provides;
Figure 3 shows that in Fig. 2 along the schematic cross-section of a kind of structure of A-A direction;
Figure 4 shows that in Fig. 2 along the schematic cross-section of the another kind of structure of A-A direction;
Figure 5 shows that the utility model completes the schematic cross-section of step of membrane sticking;
Figure 6 shows that the utility model completes the schematic cross-section of step of exposure;
Figure 7 shows that the utility model completes the schematic cross-section of development step;
Figure 8 shows that the utility model completes the schematic cross-section of electroforming step;
Figure 9 shows that the utility model completes peels off rapid cross section enlarged diagram;
Figure 10 shows that the utility model completes the rapid cross section enlarged diagram of laser cutting;
In Fig. 1,10 is mask plate, and 11 is evaporation hole, and 12 is deposition substrate, and δ is the angle of vapor deposition source material transmitting route and mask plate plate face;
In Fig. 2,20 is that mask plate is whole, and 21 is evaporation hole, and 22 is mask plate body, and A-A is for treating Anatomical observation direction;
In Fig. 3, the angle of the hole wall in the evaporation hole of θ evaporation face and the plate face of mask plate body, 1 ito surface that is mask plate, the 2 evaporation faces that are mask plate, the total thickness that t is mask plate, t1 is the thickness of mask plate ito surface, t2 is the thickness of mask plate evaporation face;
In Fig. 4, the angle of the hole wall in the evaporation hole that β is ito surface and the plate face of mask plate body;
In Fig. 5,50 is core, and 51 is film;
In Fig. 6,60 is exposed film;
In Fig. 7,70 is the core region of exposing;
In Fig. 9,90 is through hole;
In Figure 10,100 is laser head, the angle between the Laser emission route that α is middle laser head and mask plate entity plate face.
Embodiment
Describe below with reference to accompanying drawings embodiment of the present utility model, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of identical or similar functions from start to finish.Below by the embodiment being described with reference to the drawings, be exemplary, only for explaining the utility model, and can not be interpreted as restriction of the present utility model.
According to embodiment of the present utility model, shown in figure 2～Fig. 4, a kind of mask plate is provided, comprise mask plate body 22 and be formed on the evaporation hole 21 on described mask plate body, described mask plate body 22 is run through in described evaporation hole 21, it is characterized in that: described mask plate 20 comprises evaporation face (in Fig. 3,2 represent evaporation face) and ito surface (in Fig. 3,1 represents ito surface), and on the cross section at 21 central axis places, described evaporation hole, the edge line in described evaporation hole is funnel-form.
In addition, according to the disclosed a kind of mask plate of the utility model, also there is following additional technical feature:
According to embodiment more of the present utility model, as shown in Figure 3, the angle theta of the hole wall in the evaporation hole of evaporation face and the plate face of mask plate body 22 is 30 °～60 °.
According to embodiment more of the present utility model, as shown in Figure 3, the hole wall in the evaporation hole of ito surface is vertical with the plate face of mask plate body 22.
According to embodiment more of the present utility model, as shown in Figure 4, the angle β of the hole wall in the evaporation hole of ito surface and the plate face of mask plate body 22 is 60 °～90 °.
According to embodiment more of the present utility model, as shown in Figure 3, the thickness t 2 of mask plate 22 evaporation faces is 10～50 μ m.
According to embodiment more of the present utility model, as shown in Figure 3, the thickness t 1 of mask plate ito surface is 2～30 μ m.
According to embodiment more of the present utility model, as shown in Figure 3, the total thickness t of mask plate is 12～80 μ m.
The utility model also provides a kind of method of making mask plate described above, as shown in Fig. 5～Figure 10, comprises electroforming step and laser cutting step, it is characterized in that:
Described electroforming step forms described mask plate body 22 and is formed on the through hole 90 on described mask plate body, and described laser cutting step is excised the neighboring area of described mask plate evaporation face through hole, forms described evaporation hole 21.
The concrete steps of describing mask plate making method below in detail, comprising:
S1, core step of membrane sticking: as shown in Figure 5, film 51 is overlayed or is coated to the one side of core 50;
S2, step of exposure: as shown in Figure 6, the one side of core 50 pad pastings is exposed by default exposing patterns, form exposed film 60 and unexposed diaphragm area;
S3, development step: as shown in Figure 7, remove the film of unexposed diaphragm area through development step, the core region 70 of corresponding unexposed diaphragm area is exposed, exposed film 60 continues to retain;
S4, electroforming step: as shown in Figure 8, through electroforming step, in the core region 70 of exposing, form electroformed layer 22(electroformed layer and be mask plate body), in exposed film 60 regions, form through hole 90;
S5, post-processing step: post-processing step comprises strip step, strip down electroformed layer (being mask plate body 22) through strip step, as shown in Figure 9 from core 50;
S6, laser cutting step: as shown in figure 10, the neighboring area by laser cutting step excision mask plate evaporation face through hole 90, forms evaporation hole 21.
In addition, according to a kind of disclosed method of making mask plate of the utility model, also there is following additional technical feature:
According to embodiment more of the present utility model, as shown in figure 10, the angle α setting range in laser cutting step between the Laser emission route of laser head 100 and mask plate body 22 plate faces is 30 °～60 °.
According to embodiment more of the present utility model, as shown in Fig. 8～Fig. 9, the thickness t of the mask plate body 22 forming in electroforming step is 12～80 μ m.
According to embodiment more of the present utility model, as shown in figure 10, the thickness t 2 of excision in laser cutting step (neighboring area of the through hole 90 of excision mask plate evaporation face) mask plate body 22 is 2～30 μ m.
Mask plate that the utility model provides and preparation method thereof, the precision of making mask plate evaporation hole 21 by electroforming process is high, by laser cutting parameter, make hole wall and the mask plate body in the evaporation hole of evaporation face there is the angle of 30 °～60 °, the evaporation hole 21 that combines and form by electroforming step and laser cutting step, the hole wall that can effectively reduce evaporation hole blocks deposition material, has solved well problems of the prior art.
Although embodiment of the present utility model is described in detail with reference to a plurality of illustrative examples of the present utility model, but it must be understood that, those skilled in the art can design multiple other improvement and embodiment, these improve and embodiment by within dropping on the spirit and scope of the utility model principle.Particularly, within the scope of aforementioned open, accompanying drawing and claim, can aspect the layout of component and/or subordinate composite configuration, make rational modification and improvement, and can not depart from spirit of the present utility model.Except modification and the improvement of component and/or layout aspect, its scope is limited by claims and equivalent thereof.
Claims (7)
1. a mask plate, comprise mask plate body and be formed on the evaporation hole on described mask plate body, described mask plate body is run through in described evaporation hole, it is characterized in that: described mask plate comprises evaporation face and ito surface, on the cross section at central axis place, described evaporation hole, the edge line in described evaporation hole is funnel-form.
2. mask plate according to claim 1, is characterized in that, the angle of the hole wall in the evaporation hole of described evaporation face and the plate face of described mask plate body is 30 °～60 °.
3. mask plate according to claim 1, is characterized in that, the hole wall in the evaporation hole of described ito surface is vertical with the plate face of described mask plate body.
4. mask plate according to claim 1, is characterized in that, the angle of the hole wall in the evaporation hole of described ito surface and the plate face of described mask plate body is 60 °～90 °.
5. mask plate according to claim 1, is characterized in that, the thickness of described mask plate evaporation face is 10～50 μ m.
6. mask plate according to claim 1, is characterized in that, the thickness of described mask plate ito surface is 2～30 μ m.
7. mask plate according to claim 1, is characterized in that, the total thickness of described mask plate is 12～80 μ m.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320675974.0U CN203569177U (en) | 2013-10-30 | 2013-10-30 | Mask plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320675974.0U CN203569177U (en) | 2013-10-30 | 2013-10-30 | Mask plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203569177U true CN203569177U (en) | 2014-04-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320675974.0U Expired - Fee Related CN203569177U (en) | 2013-10-30 | 2013-10-30 | Mask plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203569177U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104294214A (en) * | 2014-09-27 | 2015-01-21 | 昆山允升吉光电科技有限公司 | Metal mask plate component assembly center |
| CN106191768A (en) * | 2014-11-21 | 2016-12-07 | 三星显示有限公司 | Mask frame and manufacture method thereof |
-
2013
- 2013-10-30 CN CN201320675974.0U patent/CN203569177U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104294214A (en) * | 2014-09-27 | 2015-01-21 | 昆山允升吉光电科技有限公司 | Metal mask plate component assembly center |
| CN106191768A (en) * | 2014-11-21 | 2016-12-07 | 三星显示有限公司 | Mask frame and manufacture method thereof |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PP01 | Preservation of patent right | ||
| PP01 | Preservation of patent right |
Effective date of registration: 20190808 Granted publication date: 20140430 |
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| PD01 | Discharge of preservation of patent | ||
| PD01 | Discharge of preservation of patent |
Date of cancellation: 20220808 Granted publication date: 20140430 |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140430 Termination date: 20191030 |