CN203562411U - 一种扩散石英舟结构 - Google Patents
一种扩散石英舟结构 Download PDFInfo
- Publication number
- CN203562411U CN203562411U CN201320629905.6U CN201320629905U CN203562411U CN 203562411 U CN203562411 U CN 203562411U CN 201320629905 U CN201320629905 U CN 201320629905U CN 203562411 U CN203562411 U CN 203562411U
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- Prior art keywords
- quartz boat
- diffusion
- screens
- quartz
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- 239000010453 quartz Substances 0.000 title claims abstract description 32
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 32
- 238000009792 diffusion process Methods 0.000 title abstract description 10
- 230000003247 decreasing effect Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
Images
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
Description
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201320629905.6U CN203562411U (zh) | 2013-10-14 | 2013-10-14 | 一种扩散石英舟结构 |
Applications Claiming Priority (1)
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CN201320629905.6U CN203562411U (zh) | 2013-10-14 | 2013-10-14 | 一种扩散石英舟结构 |
Publications (1)
Publication Number | Publication Date |
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CN203562411U true CN203562411U (zh) | 2014-04-23 |
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Family Applications (1)
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CN201320629905.6U Expired - Lifetime CN203562411U (zh) | 2013-10-14 | 2013-10-14 | 一种扩散石英舟结构 |
Country Status (1)
Country | Link |
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CN (1) | CN203562411U (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104733360A (zh) * | 2013-12-24 | 2015-06-24 | 上海华虹宏力半导体制造有限公司 | 步进石英舟 |
CN106935535A (zh) * | 2015-12-31 | 2017-07-07 | 无锡华润华晶微电子有限公司 | 一种石英推拉舟 |
-
2013
- 2013-10-14 CN CN201320629905.6U patent/CN203562411U/zh not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104733360A (zh) * | 2013-12-24 | 2015-06-24 | 上海华虹宏力半导体制造有限公司 | 步进石英舟 |
CN106935535A (zh) * | 2015-12-31 | 2017-07-07 | 无锡华润华晶微电子有限公司 | 一种石英推拉舟 |
CN106935535B (zh) * | 2015-12-31 | 2020-06-19 | 无锡华润华晶微电子有限公司 | 一种石英推拉舟 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: ZHEJIANG HONGXI ENERGY CO., LTD. Free format text: FORMER NAME: ZHEJIANG FORTUNE PHOTOVOLTAIC CO.,LTD. |
|
CP01 | Change in the name or title of a patent holder |
Address after: Jiaxing City, Zhejiang province 314206 xingcang carriage road Patentee after: ZHEJIANG FORTUNE ENERGY Co.,Ltd. Address before: Jiaxing City, Zhejiang province 314206 xingcang carriage road Patentee before: Zhejiang Fortune Photovoltaic Co.,Ltd. |
|
C56 | Change in the name or address of the patentee | ||
CP02 | Change in the address of a patent holder |
Address after: 314205 Zhejiang city in Pinghu Province, the new warehouse Town wide alliance No. 283 line Patentee after: ZHEJIANG FORTUNE ENERGY Co.,Ltd. Address before: Jiaxing City, Zhejiang province 314206 xingcang carriage road Patentee before: ZHEJIANG FORTUNE ENERGY Co.,Ltd. |
|
CX01 | Expiry of patent term |
Granted publication date: 20140423 |
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CX01 | Expiry of patent term |