CN203530127U - Device for manufacturing quartz tube with super-long thick wall - Google Patents
Device for manufacturing quartz tube with super-long thick wall Download PDFInfo
- Publication number
- CN203530127U CN203530127U CN201320622304.2U CN201320622304U CN203530127U CN 203530127 U CN203530127 U CN 203530127U CN 201320622304 U CN201320622304 U CN 201320622304U CN 203530127 U CN203530127 U CN 203530127U
- Authority
- CN
- China
- Prior art keywords
- plumbago crucible
- well heater
- silica tube
- smelting furnace
- heavy wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 69
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 239000010453 quartz Substances 0.000 title abstract description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 77
- 239000010439 graphite Substances 0.000 claims abstract description 77
- 238000003723 Smelting Methods 0.000 claims abstract description 29
- 238000009413 insulation Methods 0.000 claims abstract description 24
- 241000209456 Plumbago Species 0.000 claims description 68
- 239000000377 silicon dioxide Substances 0.000 claims description 28
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 229910002804 graphite Inorganic materials 0.000 abstract description 9
- 238000010438 heat treatment Methods 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 8
- 239000006004 Quartz sand Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000005086 pumping Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
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- Glass Melting And Manufacturing (AREA)
Abstract
The utility model discloses a device for manufacturing a quartz tube with a super-long thick wall. The device comprises a smelting furnace, a graphite crucible, a core pin, a heater and a heat insulation component, wherein the graphite crucible is arranged inside the smelting furnace; the core pin is arranged in the middle of the graphite crucible; the heater is arranged at the periphery of the graphite crucible; the heat insulation component is arranged between the smelting furnace and the heater. The device also comprises a lifting mechanism, wherein the lifting mechanism is arranged at the bottom of the graphite crucible, supports the graphite crucible and ensures that the graphite crucible can move up and down relatively to the heater, thus the heating length of the graphite crucible is increased under the condition that the length of the heater is constant, and the longer quartz tube can be manufactured.
Description
Technical field
The utility model relates to a kind of device of manufacturing heavy wall silica tube, is specifically related to a kind of device of manufacturing overlength heavy wall silica tube.
Background technology
Heavy wall silica tube is widely used in the manufacture fields such as semi-conductor and optical fiber.At present, in manufacturing the process of this heavy wall silica tube, conventionally the method adopting is: first quartz sand is joined in plumbago crucible, then in vacuum, or the rare gas element such as helium or hydrogen, or in reducing gas, plumbago crucible is heated, make quartz sand fusing, and the quartz after fusing is cooling, finally obtain the silica glass of tubulose.
In prior art, manufacture the device of heavy wall silica tube, comprise plumbago crucible, core bar, well heater, heat-insulation assembly and smelting furnace.Plumbago crucible is located at inside furnace, core bar is located in the middle of plumbago crucible, well heater is located at plumbago crucible periphery, so that plumbago crucible is heated, heat-insulation assembly is located at the periphery of plumbago crucible, core bar and well heater, plays insulation effect, smelting furnace is provided with inlet mouth and vacuum pumping opening, by inlet mouth, can, to injecting inert gas in smelting furnace or reducing gas, by vacuum pumping opening, inside furnace gas can be extracted out, thereby make it in vacuum state.Its advantage is: this device is realized the manufacture method of above-mentioned silica tube.Its shortcoming is: the plumbago crucible of this device can not move up and down with respect to well heater, make length that plumbago crucible is heated depend on the length of well heater, simultaneously, the length that plumbago crucible is heated is determining again to manufacture the maximum length of heavy wall silica tube, the maximum length of the heavy wall silica tube that like this, this device manufactures just depends on the length of well heater.And present well heater is mainly made by graphite, because limit by producing apparatus and the starting material length of well heater, it is very long that heater length cannot be done, thereby just cause this kind of device cannot produce the heavy wall silica tube that length is longer.
Summary of the invention
The purpose of this utility model is to solve the defect that cannot produce the heavy wall silica tube that length is longer in prior art, and a kind of device of manufacturing overlength heavy wall silica tube is provided.
For achieving the above object, the technical scheme that the utility model adopts is as follows:
A kind of device of manufacturing overlength heavy wall silica tube, comprise smelting furnace, plumbago crucible, core bar, well heater and heat-insulation assembly, described plumbago crucible is located at inside furnace, described core bar is located in the middle of plumbago crucible, described well heater is located at the periphery of plumbago crucible, described heat-insulation assembly is located between smelting furnace and well heater, it is characterized in that: this device also comprises hoisting appliance, described hoisting appliance is located at the bottom of plumbago crucible, this hoisting appliance is supporting plumbago crucible, and plumbago crucible is moved up and down with respect to well heater.
Described hoisting appliance comprises lifting gantry, carriage release lever, support, guide rail slide block, guide rail, leading screw, feed screw nut and motor, described lifting gantry is fixedly connected with the top of described carriage release lever, described support is fixedly connected with the bottom of carriage release lever, described guide rail slide block is fixed on support, this guide rail slide block is sheathed on guide rail, described feed screw nut is fixed on the end of support, and this feed screw nut is sheathed on leading screw, and described leading screw is fixedly connected with by shaft coupling with motor.
Described lifting gantry top is provided with thermal insulation layer, and this thermal insulation layer contacts cooperation with plumbago crucible.
The length of described plumbago crucible is greater than the length of described well heater.
The bottom of described heat-insulation assembly is being provided with breach with plumbago crucible corresponding position.
The bottom of described smelting furnace is being provided with tightness system with carriage release lever combination section.
Compared with prior art, the utility model has the advantage of: hoisting appliance is supporting plumbago crucible, and plumbago crucible is moved up and down with respect to well heater, like this in the situation that heater length is certain, the plumbago crucible length of being heated is increased, thereby just can produce the silica tube that length is longer.
Accompanying drawing explanation
Fig. 1 is the longitudinal sectional view of the device of manufacture heavy wall silica tube of the prior art;
Fig. 2 is the one-piece construction schematic diagram of the utility model embodiment.
Embodiment
The improvement of having done with respect to prior art in order to understand better the utility model, before embodiment of the present utility model is described in detail, the prior art of first background technology part being mentioned is illustrated by reference to the accompanying drawings.
As shown in Figure 1, the device of manufacture heavy wall silica tube of the prior art, comprise smelting furnace 1, plumbago crucible 2, core bar 3, well heater 4 and heat-insulation assembly 5, plumbago crucible 2 is located at smelting furnace 1 inside, core bar 3 is located in the middle of plumbago crucible 2, well heater 4 is located at the periphery of plumbago crucible 2, and heat-insulation assembly 5 is located between smelting furnace 1 and well heater 4.The top of smelting furnace 1 is provided with inlet mouth 12, and the sidewall of smelting furnace 1 is provided with vacuum pumping opening 13, and the sidewall of smelting furnace 1 is provided with sealed insulation device 14 in the electrode combination section with well heater.
For this kind, manufacture the device of heavy wall silica tube, plumbago crucible 2 can not move up and down with respect to well heater 4, the length that plumbago crucible 2 is heated depends on the length of well heater 4, simultaneously, the length that plumbago crucible 2 is heated is determining again to manufacture the maximum length of heavy wall silica tube, the maximum length of the heavy wall silica tube that like this, this device manufactures just depends on the length of well heater 4.
A kind of embodiment of the present utility model, can not move up and down the improvement made from respect to well heater 4 for plumbago crucible 2 of the prior art exactly.Below in conjunction with accompanying drawing, a kind of embodiment of the present utility model is made to detailed description.
As shown in Figure 2, the utility model is manufactured the device of overlength heavy wall silica tube, comprises smelting furnace 1, plumbago crucible 2, core bar 3, well heater 4, heat-insulation assembly 5 and hoisting appliance 6.Plumbago crucible 2 is located in smelting furnace 1.Core bar 3 is located in the middle of plumbago crucible 2.Well heater 4 is located at the periphery of plumbago crucible 2, so that plumbago crucible 2 is heated.Heat-insulation assembly 5 is located between well heater 4 and smelting furnace 1, plays insulation effect.Hoisting appliance 6 is located at plumbago crucible 2 belows, hoisting appliance 6 supports plumbago crucible 2, and plumbago crucible 2 is moved up and down with respect to well heater 4, like this, plumbago crucible 2 is in the distance of being heated of its length direction, just be not subject to the limitation of length of well heater 4, the design length of plumbago crucible 2 is determined according to need of production.Hoisting appliance 6 comprises lifting gantry 61, carriage release lever 62, support 63, guide rail slide block 64, guide rail 65, leading screw 66, feed screw nut 67 and motor 68.Lifting gantry 61 is fixedly connected with the top of carriage release lever 62, and this lifting gantry 61 plays support plumbago crucible 2, and because plumbago crucible 2 is when being heated, it is very high that its temperature can reach, and for protection lifting gantry 61, at lifting gantry 61 tops, is provided with thermal insulation layer 611.Support 63 is fixedly connected with the bottom of carriage release lever 62.Guide rail slide block 64 is fixed on support 63, and guide rail slide block 64 is sheathed on guide rail 65 simultaneously, and this kind of design moves up and down in process at support 63, its guide effect.Feed screw nut 67 is fixed on the end of support 63, and this feed screw nut 67 is sheathed on leading screw 66, and leading screw 66 is fixedly connected with by shaft coupling with motor 68.By motor 68, drive leading screws 66 to rotate like this, because of the interaction between leading screw 66 and feed screw nut 67, make feed screw nut 67 and the support 63 that is fixedly connected with it moves up and down along guide rail 65.The bottom of heat-insulation assembly 5 is being provided with breach 51 with plumbago crucible 2 corresponding positions, to guarantee that plumbago crucible 2 moves freely in the vertical direction.The bottom of smelting furnace 1 is being provided with tightness system 11 with carriage release lever 62 combination sections, 11 effects of sealing device are in order to completely cut off with inside furnace extraneous, in addition, the top of smelting furnace 1 is provided with inlet mouth 12, the sidewall of smelting furnace 1 is provided with vacuum pumping opening 13, and the sidewall of smelting furnace 1 is provided with sealed insulation device 14 in the electrode combination section with well heater.
The specific works process of the device of the utility model manufacture overlength heavy wall silica tube is as follows: by vacuum pumping opening 13, whole smelting furnace 1 inside is vacuumized; or to smelting furnace 1 inside, inject protective gas by inlet mouth 12; by hoisting appliance 6, by the bottom of plumbago crucible 2, move to the position that the bottom with well heater 4 flushes.Protective gas comprises the rare gas elementes such as helium, argon, or the reducing gas such as hydrogen.Then heater 4, and heating and temperature control is at 1600 ℃ ~ 2000 ℃.At this moment, the quartz sand of plumbago crucible 2 bottoms is heated slowly fusing.After the quartz sand of plumbago crucible 2 bottoms all melts, restart motor, under the effect of hoisting appliance 6, plumbago crucible 2 slow decreasings.Like this, the quartz sand in plumbago crucible 2, in the process declining, will by lower and on progressively heated and melted.After the quartz sand of plumbago crucible 2 inside all melts, close well heater 4, stop plumbago crucible 2 heating.The quartz sand having melted, along with heating zone is left in the motion that plumbago crucible 2 is downward, cooling and be set in plumbago crucible 2 inside gradually.After the interior all fused quartzs of plumbago crucible 2 are cooling, from smelting furnace 1, take out plumbago crucible 2, last again by the silica glass taking-up in plumbago crucible 2, so just obtain required overlength heavy wall silica tube.
Below by reference to the accompanying drawings embodiment of the present utility model is explained in detail; but the utility model is not limited to above-mentioned embodiment; in the ken possessing those of ordinary skills; can also under the prerequisite that does not depart from the utility model aim, make various changes and modifications, these changes and improvements all fall in protection domain of the present utility model.
Claims (6)
1. a device of manufacturing overlength heavy wall silica tube, comprise smelting furnace (1), plumbago crucible (2), core bar (3), well heater (4) and heat-insulation assembly (5), described plumbago crucible (2) is located at smelting furnace (1) inside, described core bar (3) is located in the middle of plumbago crucible (2), described well heater (4) is located at the periphery of plumbago crucible (2), described heat-insulation assembly (5) is located between smelting furnace (1) and well heater (4), it is characterized in that: this device also comprises hoisting appliance (6), described hoisting appliance (6) is located at the bottom of plumbago crucible (2), this hoisting appliance (6) is supporting plumbago crucible (2), and plumbago crucible (2) is moved up and down with respect to well heater (4).
2. the device of manufacture overlength heavy wall silica tube according to claim 1, it is characterized in that: described hoisting appliance (6) comprises lifting gantry (61), carriage release lever (62), support (63), guide rail slide block (64), guide rail (65), leading screw (66), feed screw nut (67) and motor (68), described lifting gantry (61) is fixedly connected with the top of described carriage release lever (62), described support (63) is fixedly connected with the bottom of carriage release lever (62), described guide rail slide block (64) is fixed on support (63), this guide rail slide block (64) is sheathed on guide rail (65), described feed screw nut (67) is fixed on the end of support (63), this feed screw nut (67) is sheathed on leading screw (66), described leading screw (66) is fixedly connected with by shaft coupling with motor (68).
3. the device of manufacture overlength heavy wall silica tube according to claim 2, is characterized in that: described lifting gantry (61) top is provided with thermal insulation layer (611), and this thermal insulation layer (611) contacts cooperation with plumbago crucible (2).
4. the device of manufacture overlength heavy wall silica tube according to claim 1, is characterized in that: the length of described plumbago crucible (2) is greater than the length of described well heater (4).
5. the device of manufacture overlength heavy wall silica tube according to claim 1, is characterized in that: the bottom of described heat-insulation assembly (5) is being provided with breach (51) with plumbago crucible (2) corresponding position.
6. the device of manufacture overlength heavy wall silica tube according to claim 1, is characterized in that: the bottom of described smelting furnace (1) is being provided with tightness system (11) with carriage release lever (62) combination section.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201320622304.2U CN203530127U (en) | 2013-10-10 | 2013-10-10 | Device for manufacturing quartz tube with super-long thick wall |
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CN201320622304.2U CN203530127U (en) | 2013-10-10 | 2013-10-10 | Device for manufacturing quartz tube with super-long thick wall |
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CN203530127U true CN203530127U (en) | 2014-04-09 |
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CN201320622304.2U Expired - Lifetime CN203530127U (en) | 2013-10-10 | 2013-10-10 | Device for manufacturing quartz tube with super-long thick wall |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104266487A (en) * | 2014-09-26 | 2015-01-07 | 安庆美晶新材料有限公司 | Quick dismounting type sintering system of closed quartz tube |
CN113937259A (en) * | 2021-09-07 | 2022-01-14 | 惠州市贝特瑞新材料科技有限公司 | Preparation method and device of silicon monoxide for lithium ion battery and lithium ion battery |
CN114835385A (en) * | 2022-05-25 | 2022-08-02 | 安徽光智科技有限公司 | Quartz sealing bulb, quartz container, quartz tube sealing system and quartz tube sealing method |
-
2013
- 2013-10-10 CN CN201320622304.2U patent/CN203530127U/en not_active Expired - Lifetime
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104266487A (en) * | 2014-09-26 | 2015-01-07 | 安庆美晶新材料有限公司 | Quick dismounting type sintering system of closed quartz tube |
CN104266487B (en) * | 2014-09-26 | 2016-05-18 | 安庆美晶新材料有限公司 | A kind of fast disassembly type closed quartz tube sintering system |
CN113937259A (en) * | 2021-09-07 | 2022-01-14 | 惠州市贝特瑞新材料科技有限公司 | Preparation method and device of silicon monoxide for lithium ion battery and lithium ion battery |
CN114835385A (en) * | 2022-05-25 | 2022-08-02 | 安徽光智科技有限公司 | Quartz sealing bulb, quartz container, quartz tube sealing system and quartz tube sealing method |
CN114835385B (en) * | 2022-05-25 | 2023-08-18 | 安徽光智科技有限公司 | Quartz sealing bulb, quartz container, quartz tube sealing system and quartz tube sealing method |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CX01 | Expiry of patent term |
Granted publication date: 20140409 |
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CX01 | Expiry of patent term |