CN203521389U - Wafer fixing device - Google Patents

Wafer fixing device Download PDF

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Publication number
CN203521389U
CN203521389U CN201320568953.9U CN201320568953U CN203521389U CN 203521389 U CN203521389 U CN 203521389U CN 201320568953 U CN201320568953 U CN 201320568953U CN 203521389 U CN203521389 U CN 203521389U
Authority
CN
China
Prior art keywords
wafers
mounting apparatus
assembly
wafer mounting
connecting rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201320568953.9U
Other languages
Chinese (zh)
Inventor
陈柏维
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUN-GIEL ELECTRONICS AND TECHNOLOGY Co Ltd
Original Assignee
SUN-GIEL ELECTRONICS AND TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUN-GIEL ELECTRONICS AND TECHNOLOGY Co Ltd filed Critical SUN-GIEL ELECTRONICS AND TECHNOLOGY Co Ltd
Priority to CN201320568953.9U priority Critical patent/CN203521389U/en
Application granted granted Critical
Publication of CN203521389U publication Critical patent/CN203521389U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A wafer fixing device is disposed in an outer box body and used for fixing a plurality of wafers borne by a crystal boat, and is characterized in that the wafer fixing device is provided with a pedestal, and at least a connecting rod and two baffle rods, the connecting rod is connected on the pedestal and provided with a couple of buffer portions at a side surface in an extending manner, the two baffle rods are vertically connected to the couple of buffer portions respectively, and each baffle rod is formed by a first assembly and a second assembly; and the first assemblies are contacted with the wafers and used for fixing the wafers, and the second assemblies are used for fixing the baffle rods to the buffer portions and decreasing impact force on the wafers in cooperation with the buffer portions when the outer box body is carried. The two baffle rods are designed to decrease adsorption of dust or particulate and prevent the wafers from being polluted.

Description

Wafer mounting apparatus
Technical field
The utility model is about a kind of wafer mounting apparatus, especially can fix various size wafer, avoids wafer to be hit and produces the fixture of damage.
Background technology
The various sizes wafer of wafer factory output; due to its quality crisp fritter and be laid with precision circuit; therefore must be for a little fixing and protective device of its arranged outside when transporting; as those wafers are placed on brilliant boat; and Yu Jingzhou outside installs protection box additional, with guarantee those wafers not can because of clash into, rock or other factors impaired.
In general, brilliant boat is to see through a fixed mount to be fixed in this protection box, so as to preventing that brilliant boat from rocking.This fixed mount is arranged at a side of protection box more; and formed by two cross bars and a pressing plate of a support and upper setting thereof; this two cross bar is that level is installed on this support; and be vertical setting with this support; two ends of this two cross bar are to be arranged with a joint pin; to be fixed on this support; and be provided with a hole in these each cross bar central authorities; and be provided with a cylinder in a side of this hole; corresponding these holes in a side of this pressing plate extend and are provided with two buckling partss, during assembling, be by these buckling parts clips on these cylinders.After waiting to assemble; this fixed mount is vertically to insert in this protection box; and with this protection box Joint, brilliant boat is inserted in this protection box equally with those wafers that carry on it, and the periphery of those wafers and side contacts that this pressing plate is oppositely arranged these buckling partss are fixed.
Yet, due to wafer in when carrying easily because of the stressed phenomenons such as rocking movement that produces, though the groove on brilliant boat can slightly reach the effect of fixing those wafer position, but those wafers contact this pressing plate part, because this pressing plate does not have the design of any fixedly wafer, therefore those wafers are easily because rocking the situation that produces wearing and tearing.In addition, in carrying way, also can be to this pressing plate application of force when those wafers move, and oppress this pressing plate and this two cross bar thereafter, when the stressed excessive easy fracture that cannot support of this two cross bar damages, and cannot reach the effect that those wafers are fixed in protection.In addition, this pressing plate is plate-like structure, is not connected and fixed the part of those wafers, very easily adsorb and remain in the dust that when carrying produces, and the dust being adsorbed can drop in those crystal column surfaces because rocking the actions such as collision, and pollute those wafers.
Therefore the experience that the present utility model people utilizes it to be engaged in for many years relevant industries is integrated, conceive a kind of wafer mounting apparatus, hope and can solve above-mentioned disappearance, to obtain better effect.
Utility model content
An object of the present utility model; aim to provide a kind of wafer mounting apparatus; when wafer is because carrying stressed rocking; and extruding be connected with wafer two cross bars time; seeing through the buffer part arranging at least one connecting rod is effectively to slow down the stressed situation of this two connecting rod; and can reach the effect that limits this two pins displacement, lower wafer and be hit and promote protection effect.
Another object of the present utility model; aim to provide a kind of wafer mounting apparatus; compare traditional fixture; between this two cross bar, form space; the dust or the particulate that while reducing carrying friction, produce are adsorbed in; and can reduce the contamination that wafer is subject to dust or particulate and produce, and save its assembling more simple and easy of cost, and significantly promote the protective effect when transporting wafer.
For reaching above-mentioned purpose, wafer mounting apparatus of the present utility model, to be arranged in an outter box, the plural pieces wafer carrying in order to fix a brilliant boat, it is characterized in that: this wafer mounting apparatus is to have a pedestal, at least one connecting rod and two pins, this connecting rod is to be connected on this pedestal, and extend and be provided with a pair of buffer part in a side, this two pin is to be vertically connected at respectively this to buffer part, and by one first assembly and one second module composition, this first assembly is to contact with these wafers and in order to fix these wafers, this second assembly is in order to be fixed on this buffer part by this pin, and through this, buffer part is slowed down when moving this outter box, the impulsive force that these wafers bear.
Wherein, this each buffer part is a frame body, and be provided with a ring in a side of this frame body, this each second assembly is to be provided with at least one groove, this ring is to being provided with a rod member by groove, during assembling, be by this rod member clip in this groove, respectively this first assembly is combined to these pins are fixed on this connecting rod with this second assembly again, in order to reach, limit the moving displacement of this two pin after stressed, make these rings to the side of this connecting rod, extend and arrange respectively, and be folded with a spacing space with this corresponding buffer part, when this ring is stressed, limit its displacement.
In addition, this first assembly is to be provided with a plurality of grooves, and to fix respectively these wafers, and this pedestal is to should connecting rod being to be provided with at least two fixed parts, to fix two ends of this connecting rod.
The utility model also has second wheel, these first assemblies and these the second assemblies are after group connects mutually, to form a storage tank respectively at its bottom, this second wheel is arranged at respectively in this storage tank, so that this two pin closely engages with these wafers, and for this wafer mounting apparatus is fixed in this outter box, be to be to be provided with at least one locking holes in the top side of this pedestal, this outter box is to should locking holes being provided with at least one projection, to connect this wafer mounting apparatus and this outter box.
Accompanying drawing explanation
Fig. 1 is the three-dimensional exploded view of the utility model preferred embodiment;
Fig. 2 is the assembling schematic diagram of the utility model preferred embodiment;
Fig. 3 is the assembling upward view of the utility model preferred embodiment;
Fig. 4 is the application schematic diagram () of the utility model preferred embodiment;
Fig. 5 is the application schematic diagram (two) of the utility model preferred embodiment.
[primary clustering symbol description]
1 wafer mounting apparatus
10 pedestals
101 fixed parts
102 locking holes
11 connecting rods
111 buffer part
1111 rings
1112 rod members
112 fixed legs
113 spacing spaces
12 pins
121 first assemblies
1211 grooves
122 second assemblies
1221 grooves
123 storage tanks
13 rollers
2 outter box
20 projections
3 brilliant boats
4 wafers.
Embodiment
For making your juror can have a clear understanding of content of the present utility model, only arrange in pairs or groups in the following instructions graphic, please consult.
Refer to Fig. 1,2,3 and 4~5 figure, it is three-dimensional exploded view, assembling schematic diagram, assembling upward view and each application schematic diagram of the utility model preferred embodiment.Wafer mounting apparatus 1 of the present utility model is to be arranged in an outter box 2, in order to the plural pieces wafer 4 of fixing a brilliant boat 3 and carrying.
This wafer mounting apparatus 1 is characterised in that, it is to have a pedestal 10, at least one connecting rod 11 and two pins 12, this connecting rod 11 is to be connected and fixed on this pedestal 10 and in a side to extend and be provided with a pair of buffer part 111, and this pedestal 10 is that corresponding these connecting rods 11 are provided with at least two fixed parts 101, in the present embodiment, this wafer mounting apparatus 1 is to have two these connecting rods 11, and be divided into top side and the bottom side that approaches this pedestal 10, therefore the quantity of these fixed parts 101 is four, and two end settings of corresponding these connecting rods 11, these connecting rods 11 can be fixedly arranged on respectively on this pedestal 10.Wherein, preferably, these fixed parts 101 are to be respectively an open-work, and are that corresponding these fixed parts 101 are provided with a fixed leg 112 in two ends of this each connecting rod 11, are in these fixed parts 101 when group is established by these fixed leg 112 clips.This two pin 12 is to be vertically connected at respectively this to buffer part 111, and consists of one first assembly 121 and one second assembly 122.This first assembly 121 is to contact with these wafers 4, and in order to fix these wafers 4, wherein, a side of this first assembly 121 is to be provided with a plurality of grooves 1211, is provided with fixing these wafer 4 edges, coordinates this crystalline substance boat 3 to fix the position of these wafers 4.This second assembly 122 is in order to these pins 12 are fixed on to these buffer part 111, and the impulsive force that these wafers 4 bear when seeing through these buffer part 111 and slowing down this outter box 2 of carrying, avoids these wafers 4 to cause damage.
Wherein, this each buffer part 111 is a frame body, and be provided with a ring 1111 in a side of this frame body, this each second assembly 122 is to be provided with at least one groove 1221, in the present embodiment, the quantity of this groove 1221 is two, and this each ring 1111 is to being provided with a rod member 1112 by groove, when installing, first these rod members 1112 of these rings 1111 to be distinguished to clips in this each groove 1221 of correspondence, these second assemblies 122 are individually fixed on these connecting rods 11, again these these the first assembly 121 is installed on respectively on this second assembly 122, making these rod members 1112 is to be fixed between this first assembly 121 and this second assembly 122.
Special one carry be, in order to limit these pins 12 when carrying, stressed and oppress these rings 1111 and the displacement that produces, avoid excessive these wafers 4 that cause of its displacement to be shifted, to make these rings 111 to these connecting rod 11 sides of correspondence, extend and arrange respectively, and be folded with a spacing space 113 with this corresponding buffer part 111, when this outter box 2 of carrying, this crystalline substance boat 3 and these wafers 4 rock the pressure causing, that these pins 12 are moved thereupon, see through the displacement that these buffer part 111 slow down impulsive force and limit these rings 1111, can effectively reach to slow down impact and avoid these wafers 4 excessively to move and damage.In addition, in these crystalline substance boat 3 bottoms, be to be generally provided with a chassis (not indicating in figure), to support this crystalline substance boat 3, see through these buffer part 111, in the time of can slowing down this outter box 2 and be covered on this chassis, this chassis makes progress this crystalline substance boat 3 of contact and grants the impulsive force of this wafer mounting apparatus 1, can avoid friction simultaneously or clash into dust and the particulate producing, and can extend the useful life on this chassis.
In addition, the utility model also has second wheel 13, these first assemblies 121 are mounted on after these second assemblies 122, to form a storage tank 123 in these pin 12 bottoms, this second wheel 13 is to be located at respectively in these storage tanks 123, after these wafers 4 are installed in this crystalline substance boat 3, these pins 12 be see through these roller 13 trim locations with the tight closing of these wafers 4.
For this wafer mounting apparatus 1 is fixedly arranged in this outter box 2, the top side of this pedestal 10 is to be provided with at least one locking holes 102,2 of this outter box are to should locking holes 102 being provided with at least one projection 20, this projection 20 is to be locked in this corresponding locking holes 102, to connect this wafer mounting apparatus 1 and this outter box 2, and in the present embodiment, the quantity of this locking holes 102 is two, and also corresponding these locking holes 102 and be two of the quantity of this projection 20, but the utility model is not limited to this.
As shown in Fig. 4 and 5, this wafer mounting apparatus 1 is to be installed in this outter box 2, and be connected and fixed with these projections 20 through these locking holes 102, these wafers 4 are installed in this crystalline substance boat 3, and its lateral margin is these grooves of engaging and this first assembly 121, position with firm these wafers 4, in carrying way, these wafers 4 may produce the situation of rocking with mobile because of external force with this crystalline substance boat 3, 12 of these pins produce pressurized situations because of these wafers 4 and this crystalline substance boat 3, and move towards the direction of these pins 12, now, seeing through these buffer part 111 is effectively to prevent that these pin 12 displacements are excessive, avoid these wafers 4 to be impacted.
See through the design of these connecting rods 11 of the present utility model and this two lever 12, to simplify overall process escapable cost, in addition, see through these rod members 1112 of these rings 1111, these connecting rods 11 can closely be fixed with these second assemblies 122, strengthen the integral rigidity of this wafer mounting apparatus 1, and the stability that promotes these wafers 4.In addition, the situation that the dust that when design of this two pin 12 is minimizing carrying, friction produces and particulate are adsorbed occurs, because being to there is a gap between this two pin 12, therefore compare traditional wafer fixation clip, the area that can stick for dust significantly reduces, and therefore can keep the clean of these wafers 4 and prevent that the usefulness of those wafers 4 from reducing.
Only, as described above, be only preferred embodiment of the present utility model, the scope of not implementing in order to limit the utility model; Therefore not departing from the equalization variation and modification of doing under spirit of the present utility model and scope, all should be covered by the scope of the claims of the present utility model.

Claims (7)

1. a wafer mounting apparatus, is arranged in an outter box, and the plural pieces wafer carrying in order to fix a brilliant boat, is characterized in that:
This wafer mounting apparatus is to have a pedestal, at least one connecting rod and two pins, this connecting rod is to be connected on this pedestal, and extend and be provided with a pair of buffer part in a side, this two pin is to be vertically connected at respectively this to buffer part, and by one first assembly and one second module composition, this first assembly is to contact with these wafers and in order to fix these wafers, this second assembly is in order to be fixed on this buffer part by this pin, and through this, buffer part is slowed down when moving this outter box the impulsive force that these wafers bear.
2. wafer mounting apparatus as claimed in claim 1, it is characterized in that, this each buffer part is a frame body, and be provided with a ring in a side of this frame body, this each second assembly is to be provided with at least one groove, this ring be to being provided with a rod member by groove, during assembling, be by this rod member clip in this groove, more respectively this first assembly is combined to these pins are fixed on this connecting rod with this second assembly.
3. wafer mounting apparatus as claimed in claim 2, is characterized in that, these rings are to the side of this connecting rod, to extend and arrange respectively, and are folded with a spacing space with this corresponding buffer part, limit its displacement when this ring is stressed.
4. wafer mounting apparatus as claimed in claim 2 or claim 3, is characterized in that, this first assembly is to be provided with a plurality of grooves, to fix respectively these wafers.
5. wafer mounting apparatus as claimed in claim 4, it is characterized in that, also there is second wheel, these first assemblies and these the second assemblies are after group connects mutually, to form a storage tank respectively at its bottom, this second wheel is arranged at respectively in this storage tank, so that this two pin closely engages with these wafers.
6. wafer mounting apparatus as claimed in claim 1, is characterized in that, this pedestal is to should connecting rod being to be provided with at least two fixed parts, to fix two ends of this connecting rod.
7. wafer mounting apparatus as claimed in claim 1, is characterized in that, the top side of this pedestal is to be provided with at least one locking holes, and this outter box is to should locking holes being provided with at least one projection, to connect this wafer mounting apparatus and this outter box.
CN201320568953.9U 2013-09-13 2013-09-13 Wafer fixing device Expired - Fee Related CN203521389U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201320568953.9U CN203521389U (en) 2013-09-13 2013-09-13 Wafer fixing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201320568953.9U CN203521389U (en) 2013-09-13 2013-09-13 Wafer fixing device

Publications (1)

Publication Number Publication Date
CN203521389U true CN203521389U (en) 2014-04-02

Family

ID=50380279

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201320568953.9U Expired - Fee Related CN203521389U (en) 2013-09-13 2013-09-13 Wafer fixing device

Country Status (1)

Country Link
CN (1) CN203521389U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9576831B2 (en) 2014-09-05 2017-02-21 SCREEN Holdings Co., Ltd. Substrate container, a load port apparatus, and a substrate treating apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9576831B2 (en) 2014-09-05 2017-02-21 SCREEN Holdings Co., Ltd. Substrate container, a load port apparatus, and a substrate treating apparatus
TWI574903B (en) * 2014-09-05 2017-03-21 思可林集團股份有限公司 Substrate container, a load port apparatus, and a substrate treating apparatus

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C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20140402

Termination date: 20200913