CN203521368U - Discrete carbon nanotube array discharging ionization source - Google Patents
Discrete carbon nanotube array discharging ionization source Download PDFInfo
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- CN203521368U CN203521368U CN201320622545.7U CN201320622545U CN203521368U CN 203521368 U CN203521368 U CN 203521368U CN 201320622545 U CN201320622545 U CN 201320622545U CN 203521368 U CN203521368 U CN 203521368U
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 57
- 239000002041 carbon nanotube Substances 0.000 title claims abstract description 29
- 229910021393 carbon nanotube Inorganic materials 0.000 title claims abstract description 29
- 238000007599 discharging Methods 0.000 title abstract 8
- 229910052799 carbon Inorganic materials 0.000 claims description 29
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 11
- 229910052710 silicon Inorganic materials 0.000 claims description 11
- 239000010703 silicon Substances 0.000 claims description 11
- 238000001020 plasma etching Methods 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 abstract description 11
- 239000002184 metal Substances 0.000 abstract description 11
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 230000007797 corrosion Effects 0.000 abstract 2
- 238000005260 corrosion Methods 0.000 abstract 2
- 150000002500 ions Chemical class 0.000 description 16
- 230000002285 radioactive effect Effects 0.000 description 7
- 238000001871 ion mobility spectroscopy Methods 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000009791 electrochemical migration reaction Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 230000005250 beta ray Effects 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- YZCKVEUIGOORGS-NJFSPNSNSA-N Tritium Chemical compound [3H] YZCKVEUIGOORGS-NJFSPNSNSA-N 0.000 description 1
- 230000005260 alpha ray Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000003064 anti-oxidating effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910052722 tritium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
The utility model relates to a discrete carbon nanotube array discharging ionization source, which comprises a power supply. One end of the power supply is connected with a carbon nanotube array discharging electrode, and the other end is connected with a counter electrode; a channel for enabling a sample to pass through is formed between the carbon nanotube array discharging electrode and the counter electrode; the carbon nanotube array discharging electrode comprises a base; a discrete tip array is arranged on the base; and one or more carbon nanotubes is grown vertically on the discrete tip array. According to the discrete carbon nanotube array discharging ionization source, as the carbon nanotube serves an electrode for corona discharge, the phenomena that the production difficulty is large, corrosion is likely to happen and stability of the ionization source is reduced as the discharging electrode of the corona discharge in the prior art is made of metal can be avoided. The discrete carbon nanotube array discharging ionization source has the advantages that the radius of curvature is small, the stability is good, and corrosion is not likely to happen.
Description
Technical field
The utility model relates to a kind of ionization source, and specifically a kind of discrete carbon nano pipe array discharge ionization source, belongs to ionization technique field.
Background technology
At present, Ion mobility spectrometry has become one of important method that in analysis field, trace chemistry material detects.Ion mobility spectrometry, without vacuum environment, can directly be worked under normal pressure, and power requirement is lower, and detection speed is fast, thereby is easy to make the instrument of small portable, is specially adapted to on-the-spot detection in real time and all kinds of on line real time.
Ion source is one of key technology of the analytical instrument such as ion mobility spectrometry.At present, the ion source being most widely used in Ion mobility spectrometry is radioactive source.Radioactive source mainly adopts radiation Beta-ray 63Ni source, and also having part is to adopt radiation Beta-ray tritium source and radiation Alpha-ray 241Am source.With radioactive source, as ion source major advantage, be that its job stability is high, good reliability, without outside power supply.But the specific safety measure needing due to its radioactivity makes it bring in actual applications many troubles, whole world every country is all strict management and control to the use of radioactive source, radioactive source use and keeping need to apply for a license and and through examining especially, this has limited popularization and the use of Ion mobility spectrometry greatly.In addition, the ion concentration producing as ion source with radioactive source is not high enough, causes traditional ion mobility spectrometry signal more weak, and the range of linearity is little.Therefore people start to try to explore on-radiation ion source.Wherein, corona discharge (Corona Discharge, CD) ion source is the more a kind of on-radiation ion source of research.Corona discharge corona discharge is a kind of gas discharge phenomenon that can produce under atmospheric environment, often occurs under extremely asymmetric electric field.Can adopt for the mode of face and discharge, be about to a termination sharp metal silk as an electrode, in its vicinity the metallic plate at 2-10 mm place, wire netting or quoit as it to electrode.Gap location in electric discharge, can generate the ion similar to adopting radioactive source.This ionization source is radiationless, and the ion current of generation is relatively high, and design and installation is fairly simple.
As the ionic migration spectrometer of having announced a kind of corona discharge assembly and having there is this corona discharge assembly in Chinese CN 103137417A patent of invention, this invention provides a kind of corona discharge assembly, this corona discharge assembly comprises: the first electrode, described the first electrode comprises: the first inner chamber part of column roughly, with divide the second inner chamber part of the general conical being connected with the first inner cavity, described the second inner chamber part cross-sectional area in the direction away from described the first inner chamber part increases gradually.Also comprise: by the opening of described the first electrode, from the outside of described the first electrode, insert the second electrode of the inside of described the first electrode, this second electrode has needle-like shape.The second electrode 11 utilizes the anti-oxidation metals such as stainless steel, tungsten, nickel, platinum to make.The first electrode can form with common metal plating nickel on surface.But corona discharge is relevant with the radius of curvature of needle point, need that the radius of curvature of higher voltage or discharge tip is very little could obtain local high electric field, and the most advanced and sophisticated manufacture of metal needle point is difficult, its size can only be controlled at a few to tens of micron levels conventionally.In addition, adopt the electric discharge needle point of metal to be easy to be corroded, this can reduce the job stability of ionization source, and its life-span is limited.
Utility model content
Technical problem to be solved in the utility model is that the sparking electrode of corona discharge in prior art adopts metal to manufacture not only production difficulty to be corroded greatly and easily, reduce the problem of ionization source stability, thereby provide a kind of radius of curvature is little and good stability is difficult for being corroded employing carbon nano-tube to carry out the discrete carbon nano pipe array discharge ionization source of corona discharge.
For solving the problems of the technologies described above, the utility model is achieved through the following technical solutions:
A discrete carbon nano pipe array discharge ionization source, comprises power supply;
Carbon nano pipe array sparking electrode comprises basic unit, is provided with discrete pinpoint array in described basic unit, in described discrete pinpoint array, has vertically grown carbon nano-tube.
Described basic unit is silicon chip.
Described discrete pinpoint array, for to adopt the discrete pinpoint array perpendicular to described silicon chip forming after dark reactive ion etching on described silicon chip, vertically grows single or many carbon nano-tube in described discrete pinpoint array.
The radius of curvature of the end of described carbon nano-tube is 20-90nm.
The external diameter of described discrete pinpoint array is 0.5-5 μ m.
Distance between described pinpoint array is 1-20 μ m.
Described power supply provides the voltage of 1.5-5 kV.
Technique scheme of the present utility model has the following advantages compared to existing technology:
(1) discrete carbon nano pipe array discharge ionization source described in the utility model, the utility model adopts carbon nano-tube to carry out corona discharge as electrode, avoided the sparking electrode of corona discharge in prior art to adopt metal manufacture, not only production difficulty is corroded greatly and easily, and reduce ionization source stability, the discrete carbon nano pipe array discharge ionization source that provide the little and good stability of a kind of radius of curvature, is difficult for being corroded.
(2) discrete carbon nano pipe array discharge ionization source described in the utility model, adopt dark reactive ion etching on described silicon chip after, form the discrete pinpoint array perpendicular to silicon chip, then in described discrete pinpoint array, vertically grow single or many carbon nano-tube; The utility model adopts and on the silicon materials of discrete pinpoint array, vertically grows more tiny carbon nano-tube, than traditional employing metal little a lot of as the ionization source volume of sparking electrode, the utility model is taken up room less, range of application is wider, more convenient.
(3) discrete carbon nano pipe array discharge ionization source described in the utility model, the radius of curvature of the end of described carbon nano-tube is 20-90nm, radius of curvature within the scope of this reduces greatly than the metal needle point of the micron level in tradition, greatly improved internal field, the discharge inception voltage of corona discharge is reduced, make electric discharge more stable simultaneously.
Accompanying drawing explanation
For content of the present utility model is more likely to be clearly understood, below in conjunction with accompanying drawing, the utility model is described in further detail, wherein,
Fig. 1 is the structural representation of discrete carbon nano pipe array discharge ionization source described in the utility model;
Fig. 2 is the SEM figure of discrete carbon nano pipe array discharge ionization source described in the utility model;
Fig. 3 is that discrete carbon nano pipe array discharge ionization source described in the utility model is applied to the structural representation in ionic migration spectrometer;
In figure, Reference numeral is expressed as: 1-basic unit, 2-is to electrode, 3-discharge channel, 11-discrete pinpoint array, 12-carbon nano-tube.
Embodiment
The specific embodiment of discrete carbon nano pipe array discharge ionization source described in the utility model is provided below.
embodiment 1
The structure of discrete carbon nano pipe array discharge ionization source described in the utility model as shown in Figure 1, it comprises power supply, described power supply provides the voltage of 1.5-5 kV, described power supply one end connecting carbon nanotube array sparking electrode, the other end connects electrode, describedly to electrode, can adopt grid electrode or annular electrode, described carbon nano pipe array sparking electrode and the described passage passing through forming sample between electrode, carbon nano pipe array sparking electrode comprises basic unit, in described basic unit, be provided with discrete pinpoint array, vertical long single-root carbon nano-tube in described discrete pinpoint array.
Its operation principle is as follows: sample gas enters described between electrode and described carbon nano pipe array sparking electrode from described discharge channel, at power supply, reach after 2kV, carbon nano-tube starts to carry out stable corona discharge, at region of discharge, form plasma, sample gas molecule bumps with electronics or gas ion after entering region of discharge, ionizes.
Described in discrete carbon nano pipe array discharge ionization source described in the utility model, basic unit preferably adopts silicon chip, adopt dark reactive ion etching on described silicon chip after, form the discrete pinpoint array perpendicular to silicon chip, the external diameter of described discrete pinpoint array is 2 μ m preferably, distance between described pinpoint array is 6 μ m preferably, in described discrete pinpoint array, vertically grow again single or many carbon nano-tube, be illustrated in figure 2 the single-root carbon nano-tube vertically growing; The radius of curvature of the end of described carbon nano-tube is 60nm preferably.
The execution mode that can convert as other, described basic unit can also select other semi-conducting materials, the radius of curvature of the end of described carbon nano-tube can also be selected between 20-90nm, radius of curvature within the scope of this reduces greatly than the metal needle point of the micron level in tradition, greatly improved internal field, the discharge inception voltage of corona discharge is reduced, make electric discharge more stable simultaneously; The external diameter of described discrete pinpoint array can also be selected between 0.5-5 μ m, and the distance between described pinpoint array can also be selected between 1-20 μ m.
Fig. 3 is the structure chart that discrete carbon nano pipe array discharge ionization source described in the utility model applies to ionic migration spectrometer, and its principle is as follows:
Sample gas enters described discrete carbon nano pipe array discharge ionization source from gas access, ionize, form ion, sample ions enters into before ion gate under electric field action, when ion gate is opened, different types of ion is beaten successively on Detection electrode according to the difference of its ionic mobility under electric field action, and detector, by signal being amplified to processing, obtains sample spectrogram.
Obviously, above-described embodiment is only for example is clearly described, and the not restriction to execution mode.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here exhaustive without also giving all execution modes.And among the protection range that the apparent variation of being extended out thus or change are still created in the utility model.
Claims (7)
1. a discrete carbon nano pipe array discharge ionization source, comprises power supply;
Described power supply one end connecting carbon nanotube array sparking electrode, the other end connects electrode, described carbon nano pipe array sparking electrode and the described passage passing through forming sample between electrode, it is characterized in that: described carbon nano pipe array sparking electrode comprises basic unit, in described basic unit, be provided with discrete pinpoint array, in described discrete pinpoint array, vertically grown carbon nano-tube.
2. discrete carbon nano pipe array discharge ionization source according to claim 1, is characterized in that: described basic unit is silicon chip.
3. discrete carbon nano pipe array discharge ionization source according to claim 2, it is characterized in that: on described silicon chip, adopt dark reactive ion etching to form the discrete pinpoint array perpendicular to described silicon chip, in described discrete pinpoint array, vertically grow single or many carbon nano-tube.
4. discrete carbon nano pipe array discharge ionization source according to claim 3, is characterized in that: the radius of curvature of the end of described carbon nano-tube is 20-90nm.
5. discrete carbon nano pipe array discharge ionization source according to claim 4, is characterized in that: the external diameter of described discrete pinpoint array is 0.5-5 μ m.
6. discrete carbon nano pipe array discharge ionization source according to claim 5, is characterized in that: the distance between described pinpoint array is 1-20 μ m.
7. discrete carbon nano pipe array discharge ionization source according to claim 6, is characterized in that: described power supply provides the voltage of 1.5-5 kV.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320622545.7U CN203521368U (en) | 2013-10-10 | 2013-10-10 | Discrete carbon nanotube array discharging ionization source |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320622545.7U CN203521368U (en) | 2013-10-10 | 2013-10-10 | Discrete carbon nanotube array discharging ionization source |
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| CN203521368U true CN203521368U (en) | 2014-04-02 |
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| CN201320622545.7U Expired - Lifetime CN203521368U (en) | 2013-10-10 | 2013-10-10 | Discrete carbon nanotube array discharging ionization source |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103578908A (en) * | 2013-10-10 | 2014-02-12 | 浙江大学 | Discrete carbon nano-tube array discharge ionization source |
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2013
- 2013-10-10 CN CN201320622545.7U patent/CN203521368U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103578908A (en) * | 2013-10-10 | 2014-02-12 | 浙江大学 | Discrete carbon nano-tube array discharge ionization source |
| CN103578908B (en) * | 2013-10-10 | 2016-05-11 | 浙江大学 | Discrete carbon nano pipe array discharge ionization source |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140402 |