CN203513786U - Evaporation furnace - Google Patents
Evaporation furnace Download PDFInfo
- Publication number
- CN203513786U CN203513786U CN201320583778.0U CN201320583778U CN203513786U CN 203513786 U CN203513786 U CN 203513786U CN 201320583778 U CN201320583778 U CN 201320583778U CN 203513786 U CN203513786 U CN 203513786U
- Authority
- CN
- China
- Prior art keywords
- electrode
- evaporation
- gear
- rotating shaft
- connection section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Electrostatic Separation (AREA)
Abstract
The utility model discloses an evaporation furnace. The evaporation furnace comprises an evaporation furnace body, wherein a material turntable is arranged at the bottom of a cavity of the evaporation furnace body along the horizontal direction; an evaporation furnace electrode is installed in the center of the material turntable along the vertical direction; a plurality of workpiece supports used for hanging workpieces are uniformly distributed on the outer edge of the material turntable along the vertical direction; each workpiece support comprises a rotating shaft; the rotating shafts are arranged at the outer edge of the material turntable along the vertical direction; the material turntable can drive the workpiece supports to rotate around the evaporation furnace electrode in a rotatable manner; a plurality of rotating mechanisms are also respectively arranged at the bottom of the material turntable; each workpiece support corresponds to each rotating mechanism; the material turntable drives the workpiece supports to rotate around the material turntable via the rotating mechanisms. The uniformity of workpiece evaporation can be effectively improved by using the evaporation furnace.
Description
Technical field
The utility model relates to a kind of technical field of evaporated device, relates in particular to a kind ofly can carry out to workpiece the evaporation stove of even evaporation.
Background technology
Evaporation is by evaporation stove, Coating Materials heating to be vaporized and to be deposited on matrix or workpiece, as handset shell, on its surface to form the technique of film or coating.Evaporation stove can be at metal, semi-conductor, the isolator film of alloy, compound and the part organic polymer etc. of metal refining, semi-conductor, isolator, heterogeneity ratio on plastics, paper, fabric face even in theory.
But existing evaporation stove is inhomogeneous to workpiece evaporation, and the situation of aberration appears in the product that easily causes evaporation to complete.
Utility model content
The purpose of this utility model is to provide a kind of evaporation stove, and inhomogeneous to workpiece evaporation to solve existing evaporation stove, the problem of aberration appears in the product that easily causes evaporation to complete.
To achieve these goals, the technical scheme that the utility model is taked is:
An evaporation stove, wherein, comprising: an evaporation furnace body, and the inside of described evaporation furnace body is cavity; The one evaporation furnace door being pivoted with described evaporation furnace body, the described cavity of described evaporation furnace body can be opened or seal to described evaporation furnace door; The described cavity bottom along continuous straight runs of described evaporation furnace body is provided with one and turns charging tray, an evaporation stove electrode is vertically installed by the described central authorities that turn charging tray, the described outer rim that turns charging tray is vertically uniform some for hanging the work support of workpiece, described in each, work support comprises a rotating shaft, described in described rotating shaft is vertically arranged on, turn the outer rim of charging tray, described in turn charging tray and drive rotationally described work support around described evaporation stove electrode rotary; The described bottom that turns charging tray also arranges respectively some described rotating mechanisms, and described in each, work support is corresponding one by one with rotating mechanism described in each, described in turn charging tray and drive described work support around himself rotation by described rotating mechanism.
Above-mentioned a kind of evaporation stove, wherein, described rotating shaft, near the position at upper and lower two ends connection section and connection section once on sheathed one respectively, sets firmly some hanger bar between described upper connection section and described lower connection section, and described in each, hanger bar is provided with some for hanging the suspender of workpiece from top to bottom.
Above-mentioned a kind of evaporation stove, wherein, described upper connection section and described lower connection section include some union levers, and some described union levers in the central position overlap, and form planeform, and meanwhile, the angle described in adjacent two between union lever is identical; The central authorities of some described union levers of described lower connection section are run through in the lower end of described rotating shaft, and the central authorities of some described union levers of described upper connection section are run through in the upper end of described rotating shaft.
Above-mentioned a kind of evaporation stove, wherein, described in each of described lower connection section the two ends of union lever respectively by hanger bar described in two and described upper connection section one described in the two ends of union lever be fixedly connected with; And described in each of described lower connection section, described in each of union lever and described upper connection section, union lever is all offered some for being connected the through hole of described hanger bar.
Above-mentioned a kind of evaporation stove, wherein, described evaporation stove electrode comprises some electrode supporting bars, electrodes base and electrode top plate; Some described electrode supporting bars are vertically fixedly arranged between described electrodes base and described electrode top plate, and described electrodes base turns the central authorities of charging tray described in being positioned at, described in turn charging tray and rotate around described electrodes base; Described in each, electrode supporting bar is provided with some electrode union levers from top to bottom, described in adjacent two, between every pair of electrodes union lever of electrode supporting bar, is provided with wire electrode.
Above-mentioned a kind of evaporation stove, wherein, the quantity of described electrode supporting bar is two, described in each electrode supporting bar from top to bottom along continuous straight runs be respectively equipped with the some described electrode union levers of two rows, the described electrode union lever of two rows is respectively towards back to direction, and the mutual close every a pair of described electrode union lever of electrode supporting bar is parallel to each other described in two, meanwhile, between every a pair of described electrode union lever, be positioned at sustained height.
Above-mentioned a kind of evaporation stove, wherein, described in two, described in mutual close each of electrode supporting bar, the head of electrode union lever is provided with erecting stage, and described in each, the both sides of wire electrode are positioned at the securement head of electrode union lever described in two; Described in each, the afterbody of electrode union lever is bent to form a kink, and described in each, electrode union lever is sheathed on described electrode supporting bar by described kink.
Above-mentioned a kind of evaporation stove, wherein, described in turn charging tray bottom also comprise one first gear, described the first gear with described in to turn charging tray concentric, and described the first gear drives and is connected with some described rotating mechanisms.
Above-mentioned a kind of evaporation stove, wherein, described in each, rotating mechanism comprises: one second gear and one the 3rd gear that is arranged on described the first rotating shaft upper end that are arranged on respectively one first rotating shaft lower end; Be arranged on the 4th gear in one second rotating shaft; Be arranged on the 5th gear in one the 3rd rotating shaft; Described the first rotating shaft, described the second rotating shaft and described the 3rd rotating shaft are fixedly connected with the described bottom that turns charging tray respectively, described the second gear and described the first gear are connected with a joggle, described the 3rd gear and described the 4th gear are connected with a joggle, and described the 4th gear and described the 5th gear are connected with a joggle.
Above-mentioned a kind of evaporation stove, wherein, described in each, described the 3rd rotating shaft of rotating mechanism is connected with the rotating shaft of work support described in each.
The utility model is owing to having adopted above-mentioned technology, and the positively effect that makes it compared with prior art to have is:
(1) each electrode supporting bar arranges some electrode union levers with same intervals from top to bottom, effectively improve the being uniformly distributed property that is arranged on the wire electrode on electrode union lever, make workpiece suspension in support, turn charging tray when evaporation stove rotates, workpiece is evaporation equably.
(2), by the use of rotating mechanism, while making to turn charging tray, work support not only can also can drive work support around self rotation by rotating mechanism around evaporation stove electrode rotary simultaneously, effectively improves the homogeneity of workpiece evaporation.
(3) work support, by the design of the hanger bar between the union lever of lower connection section and the union lever of upper connection section, can carry out uniform evaporation to workpiece effectively, avoids product that evaporation completes to occur the situation of aberration.
(4) in each hanger bar between lower connection section and upper connection section, some suspenders are installed respectively, are effectively improved the quantity of evaporation workpiece, be easy to large batch of evaporation.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of a kind of evaporation stove of the present utility model;
Fig. 2 is the schematic diagram of work support in Fig. 1;
Fig. 3 is the schematic diagram of electrode evaporation in Fig. 1;
Fig. 4 is the schematic diagram of electrode supporting bar and electrode union lever in Fig. 3;
Fig. 5 is the schematic diagram of rotating mechanism in Fig. 1;
Fig. 6 is the schematic diagram of another angle of rotating mechanism in Fig. 1.
Embodiment
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail, but not as restriction of the present utility model.
Fig. 1 is the schematic diagram of a kind of evaporation stove of the present utility model, please participate in shown in Fig. 1.A kind of evaporation stove of the present utility model, includes an evaporation furnace body 1, and the inside of evaporation furnace body 1 is cavity 11.One evaporation furnace door 2, evaporation furnace door 2 is hubbed on a side of evaporation furnace body 1, makes when evaporation, can seal the cavity 11 of evaporation furnace body 1 by evaporation furnace door 2, when evaporation stove completes, by evaporation furnace door 2, open the cavity 11 of evaporation furnace body 1.The bottom along continuous straight runs of evaporation furnace body 1 cavity 11 is provided with one and turns charging tray 3, and evaporation stove electrode 4 is vertically installed by the central authorities that turn charging tray 3, and turning charging tray 3 can be around 4 rotation of evaporation stove electrode.The outer rim that turns charging tray 3 is uniform some work supports 5 vertically, and work support 5 is for hanging workpiece to be deposited, as handset shell.Each work support 5 includes a rotating shaft 51, and each rotating shaft 51 is vertically arranged on the outer rim that turns charging tray 3.The bottom that turns charging tray 3 is also respectively arranged with some rotating mechanisms, each work support 5 is corresponding one by one with each rotating mechanism, with this, turn charging tray 3 and can drive rotating shaft 51 rotations of work support 5 by rotating mechanism, make work support 5 around himself rotation, guarantee the even evaporation of workpiece in the process of rotation.
The utility model also has following embodiment on the basis of the above:
In further embodiment of the present utility model, Fig. 2 is the schematic diagram of work support in Fig. 1, refers to shown in Fig. 1 and Fig. 2.Rotating shaft 51, near the position at upper and lower two ends connection section and connection section once on sheathed one respectively, is provided with some hanger bar 52 between upper connection section and lower connection section, and the upper end of each hanger bar 52 is fixedly connected with lower connection section with upper connection section respectively.Each hanger bar 52 is provided with some suspenders 53 from top to bottom, with this, by suspender 53, hangs workpiece to be deposited.
In further embodiment of the present utility model, upper connection section and lower connection section include some union levers 54 and 55, some union levers 54 of upper connection section overlap in the central position of each union lever 54, and form planeform, be flakes, meanwhile, the angle between two adjacent union levers 54 is identical; Some union levers 55 of lower connection section overlap in the central position of each union lever 55, and form planeform, are flakes, and meanwhile, the angle between two adjacent union levers 55 is identical.The central authorities of some union levers 55 of lower connection section are run through in the lower end of rotating shaft 51, and the central authorities of some union levers 55 of connection section are run through in the upper end of rotating shaft 51.
In further embodiment of the present utility model, the two ends of each union lever 55 of lower connection section are fixedly connected with the two ends of a union lever 54 of upper connection section by two hanger bar 52 respectively.
In further embodiment of the present utility model, each union lever 54 of each union lever 55 of lower connection section and upper connection section is all offered some through holes 56, by the through hole 56 of lower connection section and the through hole 56 of upper connection section for being connected hanger bar 52.
In further embodiment of the present utility model, be positioned at through hole 56 on union lever 54 and arrange and form two rows along the long side direction of union lever 54.Being positioned at through hole 56 on union lever 55 arranges and forms two rows along the long side direction of union lever 55.
In further embodiment of the present utility model, through hole 56 be shaped as rectangle.
In further embodiment of the present utility model, the spacing between the some suspenders 53 in each hanger bar 52 is identical.
In further embodiment of the present utility model, the quantity of union lever 55 of lower connection section and the quantity of the union lever of upper connection section 54 are four, four union levers 54 of upper connection section overlap in the central position of each union lever 54, and four union levers 55 of lower connection section overlap in the central position of each union lever 55.
In further embodiment of the present utility model, Fig. 3 is the schematic diagram of electrode evaporation in Fig. 1, and Fig. 4 is the schematic diagram of electrode supporting bar and electrode union lever in Fig. 3, refers to shown in Fig. 1, Fig. 3 and Fig. 4.Evaporation stove electrode 4 includes some electrode supporting bars 41, and each electrode supporting bar 41 is provided with some electrode union levers 42 from top to bottom, and is provided with wire electrode 43 between the electrode union lever 42 of two adjacent electrode supporting bars 41.Evaporation stove electrode 4 also includes electrodes base 44 and electrode top plate 45, some electrode supporting bars 41 are vertically between electrodes base 44 and electrode top plate 45, and the two ends of each electrode supporting bar 41 are fixedly connected with electrodes base 44 and electrode top plate 45 respectively.Meanwhile, the electrodes base 44 of evaporation stove electrode 4 is positioned at the central authorities that turn charging tray 3, and making to turn charging tray 3 can be around electrodes base 44 rotation.
In further embodiment of the present utility model, the quantity of electrode supporting bar 41 is two, and two electrode supporting bars 41 are fixedly arranged between electrodes base 44 and electrode top plate 45.Each electrode supporting bar 41 from top to bottom along continuous straight runs to be respectively equipped with two row amounts be some electrode union levers 42, two rows' electrode union levers 42 respectively towards mutually back to direction, and be parallel to each other between mutual close every pair of electrodes union lever 42 of two electrode supporting bars 41.
In further embodiment of the present utility model, between mutual close every pair of electrodes union lever 42 of two electrode supporting bars 41, be positioned at sustained height.
In further embodiment of the present utility model, the spacing between some electrode union levers 42 that each electrode supporting bar 41 arranges is from top to bottom identical.
In further embodiment of the present utility model, the head of each mutual close electrode union lever 42 of two electrode supporting bars 41 is provided with erecting stage 421, and the both sides of each wire electrode 43 are positioned on the erecting stage 421 of mutual close every pair of electrodes union lever 42 of two electrode supporting bars 41.
In further embodiment of the present utility model, the fastening nut 422 that has also been threaded on each erecting stage 421, tightens processing by the wire electrode 43 on 422 pairs of erecting stages 421 of fastening nut.
In further embodiment of the present utility model, the afterbody of each electrode union lever 42 is bent to form a kink 423, each electrode union lever 42 is set on electrode supporting bar 41 by kink 423, and the kink 423 of each electrode union lever 42 is fixed by a screw 424.
In further embodiment of the present utility model, electrodes base 44 and electrode top plate 42 be shaped as circle.
In further embodiment of the present utility model, Fig. 5 is the schematic diagram of rotating mechanism in Fig. 1, and Fig. 6 is the schematic diagram of another angle of rotating mechanism in Fig. 1, refers to shown in Fig. 1, Fig. 5 and Fig. 6.The bottom that turns charging tray 3 is also provided with one first gear 31, the first gear 31 is with to turn charging tray 3 concentric, and the first gear 3 mutually drives and is connected with some rotating mechanisms, make to turn charging tray 3 by rotation and can drive the first gear 31 rotations, with this, by the first gear 31 driven rotary mechanisms, rotate.
In further embodiment of the present utility model, each rotating mechanism includes one second gear 61 that is arranged on respectively one first rotating shaft 65 lower ends and one the 3rd gear 62 that is arranged on the first rotating shaft 65 upper ends; Be arranged on the 4th gear 63 in one second rotating shaft 66, and be arranged on the 5th gear 64 in one the 3rd rotating shaft 67.The first rotating shaft 65, the second rotating shaft 66 are fixedly connected with the bottom that turns charging tray 3 respectively with the 3rd rotating shaft 67, and the second gear 61 and the first gear 31 are connected with a joggle, and the 3rd gear 62 and the 4th gear 63 are connected with a joggle, and the 4th gear 63 and the 5th gear 64 are connected with a joggle.
In further embodiment of the present utility model, the 3rd rotating shaft 67 of each rotating mechanism is connected with the rotating shaft 51 of each work support 5.Rotation turns charging tray 3 and drives the first gear 31 rotations, the first gear 31 drives the second gear 61 rotations of engagement, the second gear 61 drives the 3rd gear 62 rotations by the first rotating shaft 65, the 3rd gear 62 drives the 4th gear 63 rotations of engagement, the 4th gear 63 drives the 5th gear 64 rotations of engagement, the 5th gear 64 drives the 3rd rotating shaft 67 rotations, and the 3rd rotating shaft 67 drives rotating shaft 51 around self rotation.
In further embodiment of the present utility model, the shape approximation surrounding between the 3rd gear 62, the 4th gear 63 and the 5th gear 64 is trilateral.
In sum, use a kind of evaporation stove of the utility model, can effectively improve the homogeneity of workpiece evaporation.
The foregoing is only the utility model preferred embodiment; not thereby limit embodiment of the present utility model and protection domain; to those skilled in the art; should recognize that being equal to that all utilization the utility model specification sheetss and diagramatic content done replace and the resulting scheme of apparent variation, all should be included in protection domain of the present utility model.
Claims (8)
1. an evaporation stove, is characterized in that, comprising:
One evaporation furnace body, the inside of described evaporation furnace body is cavity;
The one evaporation furnace door being pivoted with described evaporation furnace body, the described cavity of described evaporation furnace body can be opened or seal to described evaporation furnace door;
The described cavity bottom along continuous straight runs of described evaporation furnace body is provided with one and turns charging tray, an evaporation stove electrode is vertically installed by the described central authorities that turn charging tray, the described outer rim that turns charging tray is vertically uniform some for hanging the work support of workpiece, described in each, work support comprises a rotating shaft, described in described rotating shaft is vertically arranged on, turn the outer rim of charging tray, described in turn charging tray and drive rotationally described work support around described evaporation stove electrode rotary;
The described bottom that turns charging tray also arranges respectively some described rotating mechanisms, and described in each, work support is corresponding one by one with rotating mechanism described in each, described in turn charging tray and drive described work support around himself rotation by described rotating mechanism;
Described evaporation stove electrode comprises some electrode supporting bars, electrodes base and electrode top plate; Some described electrode supporting bars are vertically fixedly arranged between described electrodes base and described electrode top plate, and described electrodes base turns the central authorities of charging tray described in being positioned at, described in turn charging tray and rotate around described electrodes base; Described in each, electrode supporting bar is provided with some electrode union levers from top to bottom, described in adjacent two, between every pair of electrodes union lever of electrode supporting bar, is provided with wire electrode;
The quantity of described electrode supporting bar is two, described in each electrode supporting bar from top to bottom along continuous straight runs be respectively equipped with the some described electrode union levers of two rows, the described electrode union lever of two rows is respectively towards back to direction, and described in two, the mutual close every a pair of described electrode union lever of electrode supporting bar is parallel to each other, meanwhile, between every a pair of described electrode union lever, be positioned at sustained height.
2. evaporation stove according to claim 1, it is characterized in that, described rotating shaft is near the position at upper and lower two ends connection section and connection section once on sheathed one respectively, between described upper connection section and described lower connection section, set firmly some hanger bar, described in each, hanger bar is provided with some for hanging the suspender of workpiece from top to bottom.
3. evaporation stove according to claim 2, is characterized in that, described upper connection section and described lower connection section include some union levers, some described union levers in the central position overlap, and form planeform, meanwhile, the angle described in adjacent two between union lever is identical; The central authorities of some described union levers of described lower connection section are run through in the lower end of described rotating shaft, and the central authorities of some described union levers of described upper connection section are run through in the upper end of described rotating shaft.
4. evaporation stove according to claim 3, is characterized in that, described in each of described lower connection section the two ends of union lever respectively by hanger bar described in two and described upper connection section one described in the two ends of union lever be fixedly connected with; And described in each of described lower connection section, described in each of union lever and described upper connection section, union lever is all offered some for being connected the through hole of described hanger bar.
5. evaporation stove according to claim 1, is characterized in that, described in two, described in mutual close each of electrode supporting bar, the head of electrode union lever is provided with erecting stage, and described in each, the both sides of wire electrode are positioned at the securement head of electrode union lever described in two; Described in each, the afterbody of electrode union lever is bent to form a kink, and described in each, electrode union lever is sheathed on described electrode supporting bar by described kink.
6. evaporation stove according to claim 1, is characterized in that, described in turn charging tray bottom also comprise one first gear, described the first gear with described in to turn charging tray concentric, and described the first gear drives and is connected with some described rotating mechanisms.
7. evaporation stove according to claim 6, is characterized in that, described in each, rotating mechanism comprises: be arranged on respectively one second gear of one first rotating shaft lower end and be arranged on one the 3rd gear of described the first rotating shaft upper end; Be arranged on the 4th gear in one second rotating shaft; Be arranged on the 5th gear in one the 3rd rotating shaft; Described the first rotating shaft, described the second rotating shaft and described the 3rd rotating shaft are fixedly connected with the described bottom that turns charging tray respectively, described the second gear and described the first gear are connected with a joggle, described the 3rd gear and described the 4th gear are connected with a joggle, and described the 4th gear and described the 5th gear are connected with a joggle.
8. evaporation stove according to claim 7, is characterized in that, described in each, described the 3rd rotating shaft of rotating mechanism is connected with the rotating shaft of work support described in each.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320583778.0U CN203513786U (en) | 2013-09-22 | 2013-09-22 | Evaporation furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320583778.0U CN203513786U (en) | 2013-09-22 | 2013-09-22 | Evaporation furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203513786U true CN203513786U (en) | 2014-04-02 |
Family
ID=50372743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320583778.0U Expired - Fee Related CN203513786U (en) | 2013-09-22 | 2013-09-22 | Evaporation furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203513786U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111218661A (en) * | 2019-12-31 | 2020-06-02 | 四川荣塑管业集团有限责任公司 | Vacuum coating machine |
| CN114260155A (en) * | 2021-12-24 | 2022-04-01 | 深圳市山禾乐科技开发有限公司 | Process for improving adhesive force of coating layer |
-
2013
- 2013-09-22 CN CN201320583778.0U patent/CN203513786U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111218661A (en) * | 2019-12-31 | 2020-06-02 | 四川荣塑管业集团有限责任公司 | Vacuum coating machine |
| CN111218661B (en) * | 2019-12-31 | 2022-04-29 | 四川荣塑管业集团有限责任公司 | Vacuum coating machine |
| CN114260155A (en) * | 2021-12-24 | 2022-04-01 | 深圳市山禾乐科技开发有限公司 | Process for improving adhesive force of coating layer |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105543792B (en) | Magnetic control sputtering device and magnetically controlled sputter method | |
| CN203513786U (en) | Evaporation furnace | |
| CN203513787U (en) | Evaporation furnace | |
| CN102021522B (en) | Sputtering-type film coating device | |
| CN102560432A (en) | Substrate loading device and substrate processing device applying same | |
| CN107287562A (en) | Evaporation coating device and evaporation coating method | |
| CN202766611U (en) | Coating machine | |
| CN206279282U (en) | Straight pull type single crystal furnace silicon material continuous charging and acceleration material device | |
| CN204263415U (en) | Die turnover apparatus | |
| CN203513783U (en) | Evaporation furnace electrode | |
| CN203513784U (en) | Workpiece support of evaporation furnace | |
| CN107043915B (en) | The system that magnetron sputtering prepares ito thin film | |
| CN204982037U (en) | Rotation type coating machine | |
| CN203923275U (en) | A kind of steel ball quenching device | |
| CN104818468A (en) | Three-shaft rotation base frame device in vacuum film plating cavity | |
| CN208920777U (en) | One kind having hydronic baker | |
| CN204513948U (en) | A kind of drying baker | |
| CN208701195U (en) | Vacuum sputtering coating equipment | |
| CN203513785U (en) | Rotating plate rotating mechanism of evaporation furnace | |
| CN208201119U (en) | A kind of the substrate support device and matrix rotation drive device of chemical vapor deposition stove | |
| CN207388139U (en) | A kind of new five roll calendar | |
| CN208688126U (en) | One kind can anti-scald drying box | |
| CN202272926U (en) | Charging basket for heat treatment of long rod shaped part | |
| CN201890924U (en) | Plasma vacuum ceramic coating device | |
| CN204434500U (en) | A kind of evaporation support plate and evaporation coating device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140402 Termination date: 20170922 |