CN203510499U - Device for adjusting crystal orientation deviation degree of silicon rod - Google Patents
Device for adjusting crystal orientation deviation degree of silicon rod Download PDFInfo
- Publication number
- CN203510499U CN203510499U CN201320610618.0U CN201320610618U CN203510499U CN 203510499 U CN203510499 U CN 203510499U CN 201320610618 U CN201320610618 U CN 201320610618U CN 203510499 U CN203510499 U CN 203510499U
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- China
- Prior art keywords
- crystal orientation
- silicon rod
- base plate
- adjusting
- deviation degree
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- Expired - Fee Related
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- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The utility model provides a device for adjusting the crystal orientation deviation degree of a silicon rod and relates to the field of polycrystalline silicon equipment. The device for adjusting the crystal orientation deviation degree of the silicon rod is composed of a supporting mechanism and a rotary mechanism. Baffles (3) are arranged at the two ends of a bottom board (4) and rollers (2) are arranged between the two baffles (3), so that the purpose that the crystal orientation of the silicon rod is adjusted is achieved. The device for adjusting the crystal orientation deviation degree of the silicon rod is high in practicality, convenient to install, maintain and operate and capable of effectively solving the problem that the crystal orientation of the silicon rod (1) can not be adjusted by a multi-wire sawing machine, greatly facilitating following machining and use and satisfying the requirements of a client.
Description
[technical field]
The utility model relates to polysilicon equipment field, especially relates to a kind of device of adjusting silicon rod crystal orientation irrelevance.
[background technology]
Known, in the cutting of semi-conductor silicon chip, to control adjustment to the crystal orientation of silicon rod itself, make the silicon chip crystal orientation cutting out can meet the requirement of client to silicon chip crystal orientation, although but existing multi-line cutting machine piece rate in silicon chip cutting is more much higher than the piece rate of inner circle cutting machine, but multi-line cutting machine also has the weak point of self, it is exactly the function that does not regulate silicon rod crystal orientation, can only in sticky stick, to crystal orientation, adjust, but silicon rod and adhesive sheet are in bonding, silicon rod can only be done the swing of horizontal direction on adhesive sheet, and vertical direction is owing to can not swing by the restriction of adhesive sheet, therefore just caused multiline cut silicon chips cannot realize the adjusting in silicon rod crystal orientation, thereby cannot meet client's demand.
[summary of the invention]
In order to overcome the deficiency in background technology, the utility model discloses a kind of device of adjusting silicon rod crystal orientation irrelevance, the utility model arranges baffle plate by the two ends at base plate, and between two baffle plates, roller is set, and with this, reaches the object that regulates silicon rod crystal orientation.
In order to realize described utility model object, the utility model adopts following technical scheme:
A kind of device of adjusting silicon rod crystal orientation irrelevance, comprise supporting mechanism and rotating mechanism, supporting mechanism consists of baffle plate and base plate, rotating mechanism consists of roller, at the two ends of base plate, be respectively equipped with a baffle plate, two baffle plates are symmetrical structure and are arranged on base plate two ends, between two baffle plates, are provided with roller.
The bottom of described baffle plate is concordant with the bottom surface of base plate, and baffle plate and base plate are fixed together.
Described roller is two, and two rollers are set in parallel between two baffle plates, and two rollers are parallel to base plate.
Owing to having adopted technique scheme, the utlity model has following beneficial effect:
A kind of device of adjusting silicon rod crystal orientation irrelevance described in the utility model, comprises supporting mechanism and rotating mechanism, by the two ends at base plate, baffle plate is set, and between two baffle plates, roller is set, and with this, reaches the object that regulates silicon rod crystal orientation; The utility model is practical, and installation and maintenance is all more convenient, operates also more convenient, efficiently solves the problem that multi-line cutting machine cannot regulate silicon rod crystal orientation, has greatly facilitated follow-up processing and use, has met client's requirement.
[accompanying drawing explanation]
Fig. 1 is perspective view of the present utility model;
In figure: 1, silicon rod; 2, roller; 3, baffle plate; 4, base plate.
[specific embodiment]
Explanation the utility model that can be detailed by the following examples, open the purpose of this utility model is intended to protect all technological improvements within the scope of the utility model.
A kind of device of adjusting silicon rod crystal orientation irrelevance described in 1 by reference to the accompanying drawings, comprise supporting mechanism and rotating mechanism, supporting mechanism consists of baffle plate 3 and base plate 4, rotating mechanism consists of roller 2, at the two ends of base plate 4, be respectively equipped with a baffle plate 3, two baffle plates 3 are symmetrical structure and are arranged on base plate 4 two ends, are provided with roller 2 between two baffle plates 3; The bottom of described baffle plate 3 is concordant with the bottom surface of base plate 4, and baffle plate 3 is fixed together with base plate 4; Described roller 2 is two, and two rollers 2 are set in parallel between two baffle plates 3, and two rollers 2 are parallel to base plate 4.
Implement a kind of novel adjustment key described in the utility model, first silicon rod 1 is placed on two rollers 2 in use, then the rotating mechanism consisting of two rollers 2 finds the bonding plane of silicon rod 1, after finding bonding plane, by supporting mechanism, silicon rod 1 is carried out to the swing of horizontal direction again, measure again the number of degrees that silicon rod 1 crystal orientation swings in the horizontal direction, thus crystal orientation when convenient control silicon rod 1 is pasted.
The utility model does not describe part in detail for prior art.
Claims (3)
1. a device of adjusting silicon rod crystal orientation irrelevance, comprise supporting mechanism and rotating mechanism, supporting mechanism consists of baffle plate (3) and base plate (4), rotating mechanism consists of roller (2), it is characterized in that: at the two ends of base plate (4), be respectively equipped with a baffle plate (3), two baffle plates (3) are symmetrical structure and are arranged on base plate (4) two ends, are provided with roller (2) between two baffle plates (3).
2. a kind of device of adjusting silicon rod crystal orientation irrelevance according to claim 1, is characterized in that: the bottom of described baffle plate (3) is concordant with the bottom surface of base plate (4), and baffle plate (3) is fixed together with base plate (4).
3. a kind of device of adjusting silicon rod crystal orientation irrelevance according to claim 1, is characterized in that: described roller (2) is two, and two rollers (2) are set in parallel between two baffle plates (3), and two rollers (2) are parallel to base plate (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320610618.0U CN203510499U (en) | 2013-09-30 | 2013-09-30 | Device for adjusting crystal orientation deviation degree of silicon rod |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320610618.0U CN203510499U (en) | 2013-09-30 | 2013-09-30 | Device for adjusting crystal orientation deviation degree of silicon rod |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203510499U true CN203510499U (en) | 2014-04-02 |
Family
ID=50369481
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320610618.0U Expired - Fee Related CN203510499U (en) | 2013-09-30 | 2013-09-30 | Device for adjusting crystal orientation deviation degree of silicon rod |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203510499U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103552166A (en) * | 2013-09-30 | 2014-02-05 | 洛阳鸿泰半导体有限公司 | Device for adjusting crystal-orientation deviation degree of silicon rod |
| CN107848092A (en) * | 2015-07-27 | 2018-03-27 | 信越半导体株式会社 | The cutting-off method of work support and workpiece |
-
2013
- 2013-09-30 CN CN201320610618.0U patent/CN203510499U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103552166A (en) * | 2013-09-30 | 2014-02-05 | 洛阳鸿泰半导体有限公司 | Device for adjusting crystal-orientation deviation degree of silicon rod |
| CN107848092A (en) * | 2015-07-27 | 2018-03-27 | 信越半导体株式会社 | The cutting-off method of work support and workpiece |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140402 Termination date: 20210930 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |