CN203498505U - Polycrystalline rod heat insulating device of zone melting furnace - Google Patents
Polycrystalline rod heat insulating device of zone melting furnace Download PDFInfo
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- CN203498505U CN203498505U CN201320504643.0U CN201320504643U CN203498505U CN 203498505 U CN203498505 U CN 203498505U CN 201320504643 U CN201320504643 U CN 201320504643U CN 203498505 U CN203498505 U CN 203498505U
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- polycrystalline rod
- auxiliary heater
- heater
- melting furnace
- zone melting
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Abstract
The utility model relates to the field of semiconductor manufacture and aims to provide a polycrystalline rod heat insulating device of a zone melting furnace. The polycrystalline rod heat insulating device comprises an auxiliary heater arranged outside a polycrystalline rod, wherein joints are arranged at two ends of the auxiliary heater respectively and are connected with an auxiliary heating power supply through cables; the auxiliary heating power supply is connected with a data analysis module and an infrared temperature measurer through signal lines in sequence. According to the polycrystalline rod heat insulating device, the polycrystalline rod is subjected to heat insulation, the processes of slowly cooling and preheating the polycrystalline rod are omitted, the production time can be saved by more than one hour each time, the electric energy is saved, and the cracking risk of the polycrystalline rod is lowered.
Description
Technical field
The utility model is about field of semiconductor manufacture, particularly zone melting furnace polycrystalline rod attemperator.
Background technology
Silicon materials are bases of advanced information society, and it is not only the major function material of the industries such as photovoltaic generation, are also semiconductor industries, particularly the base mateiral of power electronic devices.Zone melting method (FZ) manufacture order crystal silicon is a kind of novel method for monocrystal growth that is different from vertical pulling stove (CZ), it utilizes high-frequency induction heating coil by the local thawing of highly purified polycrystal, melting zone relies on the surface tension of molten silicon and magnetic supporting power that heater coil provides and in suspended state, then from the below in melting zone, utilizes seed crystal will melt silicon and is drawn into monocrystalline.Owing to not having crucible to pollute, the silicon single crystal purity of zone melting furnace growth is high, good uniformity, and low microdefect, its good electric property is applicable to making high back-pressure, large electric current, powerful power electronic devices very much.
The growth of zone-melted silicon single crystal adopts floating zone melting method, with high-frequency induction heating coil heats polycrystalline silicon material, makes its fusing, catches molten silicon grow continuously single crystal rod below coil with seed crystal.Normal zone melting furnace is produced processes such as comprising preparation work-preheating-welding-thin neck-expansions shoulder-isometrical-finish up-cooling, whole process was according to 6～12 hours approximately consuming time of isometrical asynchronism(-nization), if remove 3 hours approximately consuming time isometrical stage, be wherein about 30～60 minutes warm up time.Due to the complicacy of growing zone-melting monocrystal, the situation that causes single crystal growing surprisingly to stop because of disconnected stupefied, stream is molten etc. in zone melting furnace production process is not rarely seen, and probability of occurrence is not less than 20%, and now the interior polycrystalline rod of stove still remains longer.Traditional processing mode is: slowly reduces and is applied to the power on main heater coil, wait for polycrystalline rod cooling, and 30 minutes approximately consuming time of this process, as the too fast polycrystalline rod that may cause of lowering the temperature ftractures; Close afterwards high frequency electric source, open fire door and process accordingly, such as repairing coil, changing seed crystal etc.; Close fire door, open high frequency electric source, again to polycrystalline rod preheating, complete a new process of growth.Therefrom can find out, after surprisingly stopping, arrives one secondary growth next time new growth, 2 hours consuming time of minimum need, wherein polycrystalline rod Slow cooling and again preheating occupied the main time, a large amount of manpowers and electric energy have been expended during this period of time, and because polycrystalline rod fragility is large, cooling after again preheating easily cause polycrystalline rod cracking to cause the waste of raw material.
Utility model content
Main purpose of the present utility model is to overcome deficiency of the prior art, provides a kind of and can realize polycrystalline rod insulation, saves polycrystalline rod Slow cooling the polycrystalline rod attemperator of preheating again.
For solving the problems of the technologies described above, solution of the present utility model is:
Zone melting furnace polycrystalline rod attemperator is provided, polycrystalline rod is above the main heater coil of zone melting furnace, single crystal rod is below main heater coil, and polycrystalline rod and single crystal rod are by the circular hole phase welding at main heater coil center, zone melting furnace polycrystalline rod attemperator comprises that at least one is arranged on the auxiliary heater of polycrystalline rod outside, two ends of auxiliary heater are respectively equipped with interface, interface is connected with boosting power supply by cable, boosting power supply is for auxiliary heater is applied to electric current, and alive auxiliary heater can be realized insulation to polycrystalline rod; Boosting power supply is connected with data analysis module and infrared thermometer in turn by signal wire, infrared thermometer is for the temperature of Real-Time Monitoring polycrystalline rod lower end, and send the temperature data recording to data analysis module, the temperature data of data analysis module for sending by judgement infrared thermometer, controls boosting power supply and is applied to the size of current on auxiliary heater.
As a kind of improvement, in the auxiliary heater that described zone melting furnace polycrystalline rod attemperator is the auxiliary heater that adopts thermal radiation mode, make polycrystalline rod induction heating mode, the devices of any one auxiliary heater or two kinds of auxiliary heater combinations, realize polycrystalline rod are incubated.
As a kind of improvement, adopt the auxiliary heater of thermal radiation mode cylindrical, auxiliary heater is the well heater of graphite material.
As a kind of improvement, adopting and making the auxiliary heater of polycrystalline rod induction heating mode is the well heater of copper or silicon material, and auxiliary heater is the U-shaped strip well heater being alternately formed by connecting with inverted U, and strip well heater surrounds circular.
As a kind of improvement, the diameter span of the annulus that described strip well heater surrounds is 100mm～250mm, and the height span of the U-shaped and inverted U of described strip well heater is 50mm～20mm.
Compared with prior art, the beneficial effects of the utility model are:
Auxiliary heater can be realized the insulation to polycrystalline rod, when single crystal rod process of growth surprisingly stops, after carrying out necessary preparation work, can directly start process of growth next time, and save the Slow cooling of polycrystalline rod and warm, once can save the production time more than one hour, saves energy, and reduce the risk that polycrystalline rod ftractures.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Fig. 2 is structural representation of the present utility model
Fig. 3 is the implementation result comparison diagram of the utility model and prior art.
Reference numeral in figure is: 1 boosting power supply; 2 auxiliary heaters; 3 main heater coils; 4 data analysis modules; 5 infrared thermometers; 6 polycrystalline rods; 7 single crystal rod.
Embodiment
First it should be noted that, in the utility model implementation procedure, can relate to the utilization of automatic control technology and computer technology.Applicant thinks, as reading over application documents, accurate understanding is of the present utility model can realize the utility model completely after realizing principle and utility model object.For example data analysis module 4 can adopt PLC, optional model C J2M, and manufacturer is Omron.Therefore, this category of all genus that all the utility model application documents are mentioned, applicant will not enumerate.
Below in conjunction with accompanying drawing and embodiment, the utility model is described in further detail:
As shown in Figure 1, 2, polycrystalline rod 6 is above the main heater coil 3 of zone melting furnace, main heater coil 3 is for melting polycrystalline rod 6, single crystal rod 7 is below main heater coil 3, and polycrystalline rod 6 and single crystal rod 7 are by the circular hole phase welding at main heater coil 3 centers, and zone melting furnace polycrystalline rod attemperator comprises auxiliary heater 2, boosting power supply 1, data analysis module 4 and infrared thermometer 5.Auxiliary heater 2 is arranged on the outside of polycrystalline rod 6, two ends of auxiliary heater 2 are respectively equipped with interface, interface is connected with boosting power supply 1 by cable, and boosting power supply 1 is for auxiliary heater 2 is applied to electric current, and alive auxiliary heater 2 can be realized insulation to polycrystalline rod 6.Boosting power supply 1 is connected with data analysis module 4 and infrared thermometer 5 in turn by signal wire, infrared thermometer 5 is for the temperature of Real-Time Monitoring polycrystalline rod 6 lower ends, and send the temperature data recording to data analysis module 4, the temperature data of data analysis module 4 for sending by judgement infrared thermometer 5, controls the size of current that boosting power supply 1 is applied on auxiliary heater 2.
In the auxiliary heater 2 that zone melting furnace polycrystalline rod attemperator is the auxiliary heater 2 that adopts thermal radiation mode, make polycrystalline rod 6 induction heating mode, the devices of any one auxiliary heater or two kinds of auxiliary heater combinations, realize polycrystalline rod 6 insulations.Auxiliary heater 2 is as shown in Figure 1 cylindrical, and material is graphite, applies certain electric current and can cause auxiliary heater 2 heatings, thereby realize polycrystalline rod 6 insulations by thermal radiation mode on this kind of auxiliary heater 2.The material of auxiliary heater 2 is as shown in Figure 2 copper or silicon, auxiliary heater 2 is U-shaped strip well heaters that form with inverted U alternate combinations, and strip well heater surrounds circular, the height span of the U-shaped and inverted U of strip well heater is 50mm～20mm, the diameter span of the annulus that strip well heater surrounds is 100mm～250mm, on this kind of auxiliary heater 2, apply the exchange current of certain frequency, can near auxiliary heater 2, form the alternating magnetic field of same frequency, thereby polycrystalline rod 6 is realized insulation by direct sensed heating.Can be used in combination according to actual needs above-mentioned two kinds of auxiliary heaters 2, in order to make the zone melting furnace polycrystalline rod attemperator that can realize polycrystalline rod 6 insulations.
The utility model is idle under standard state, only have crystal pulling personnel according to on-the-spot crystal pulling situation, such as single crystal rod 7 process of growth surprisingly stop, and polycrystalline rod 6 is expected when more, crystal pulling personnel judgement need to be incubated polycrystalline rod 6, and zone melting furnace polycrystalline rod attemperator is just started working.
When zone melting furnace polycrystalline rod attemperator is incubated polycrystalline rod 6, boosting power supply 1 applies electric current for auxiliary heater 2, and 2 pairs of the auxiliary heaters within it polycrystalline rod 6 of portion are incubated; The temperature of infrared thermometer 5 Real-Time Monitoring polycrystalline rod 6 lower ends, it is the temperature within the scope of the polycrystalline rod 6 above 15mm～30mm in lower surface, and sending the temperature data recording to data analysis module 4, data analysis module 4 is controlled boosting power supply 1 by built-in judge module and is applied to the size of current on auxiliary heater 2.
Described judge module can be realized: when the temperature signal sending when infrared thermometer 5 is not more than 550 ℃, controls 1 pair of auxiliary heater 2 of boosting power supply and apply maximum current; When the temperature signal sending when infrared thermometer 5 is not less than 800 ℃, controls 1 pair of auxiliary heater 2 of boosting power supply and apply minimum current; When temperature signal that infrared thermometer 5 sends is between 550 ℃～800 ℃, controls the electric current that 1 pair of auxiliary heater 2 of boosting power supply applies and meet formula I=I
0-8.35 * (T
1-850)/(T
1-500), wherein I is the electric current that 1 pair of auxiliary heater 2 of boosting power supply applies, T
1for the temperature that infrared thermometer 5 sends, I
0for auxiliary heater 2 initial setting up value, i.e. I
0=(Imax+Imin)/2, wherein Imax is the maximum current that 1 pair of auxiliary heater 2 of boosting power supply applies, Imin is the minimum current that 1 pair of auxiliary heater 2 of boosting power supply applies.
In real work, use the utility model, when single crystal rod 7 process of growth surprisingly stop, after carrying out necessary preparation work, can directly start process of growth next time, and save the Slow cooling of polycrystalline rod 6 and warm.As shown in Figure 3, identical crystal pulling personnel adopt the technical solution of the utility model and adopt the prior art of Slow cooling and warm, carry out respectively the statistic data of 10 6 inches of silicon single-crystal production tests, adopt the silicon single-crystal output of technical solutions of the utility model to compare with the silicon single-crystal output of employing prior art, the average daily output of separate unit zone melting furnace silicon single-crystal improves 8.4%, with the obvious advantage.Adopt on the other hand the utility model also can save a large amount of power consumptions, because auxiliary heater 2 just plays insulation effect, power consumption only needs 3～6kw left and right, and the power applying on main heater coil 3 in warm will be up to more than 30kw, simultaneously because polycrystalline rod 6 self is more crisp, the temperature-rise period of lowering the temperature is easy to cause polycrystalline rod 6 crackings, and adopts the utility model can reduce the risk of polycrystalline rod 6 crackings, economizes in raw materials.
Finally, it should be noted that above what enumerate is only specific embodiment of the utility model.Obviously, the utility model is not limited to above embodiment, can also have a lot of distortion.All distortion that those of ordinary skill in the art can directly derive or associate from the disclosed content of the utility model, all should think protection domain of the present utility model.
Claims (5)
1. zone melting furnace polycrystalline rod attemperator, polycrystalline rod is above the main heater coil of zone melting furnace, single crystal rod is below main heater coil, and polycrystalline rod and single crystal rod are by the circular hole phase welding at main heater coil center, it is characterized in that, zone melting furnace polycrystalline rod attemperator comprises that at least one is arranged on the auxiliary heater of polycrystalline rod outside, two ends of auxiliary heater are respectively equipped with interface, interface is connected with boosting power supply by cable, boosting power supply is for applying electric current to auxiliary heater, alive auxiliary heater can be realized insulation to polycrystalline rod, boosting power supply is connected with data analysis module and infrared thermometer in turn by signal wire, infrared thermometer is for the temperature of Real-Time Monitoring polycrystalline rod lower end, and send the temperature data recording to data analysis module, the temperature data of data analysis module for sending by judgement infrared thermometer, controls boosting power supply and is applied to the size of current on auxiliary heater.
2. zone melting furnace polycrystalline rod attemperator according to claim 1, it is characterized in that, in the auxiliary heater that described zone melting furnace polycrystalline rod attemperator is the auxiliary heater that adopts thermal radiation mode, make polycrystalline rod induction heating mode, the devices of any one auxiliary heater or two kinds of auxiliary heater combinations, realize polycrystalline rod are incubated.
3. zone melting furnace polycrystalline rod attemperator according to claim 2, is characterized in that, adopts the auxiliary heater of thermal radiation mode cylindrical, and auxiliary heater is the well heater of graphite material.
4. zone melting furnace polycrystalline rod attemperator according to claim 2, it is characterized in that, it is the well heater of copper or silicon material that employing makes the auxiliary heater of polycrystalline rod induction heating mode, auxiliary heater is the U-shaped strip well heater being alternately formed by connecting with inverted U, and strip well heater surrounds circular.
5. zone melting furnace polycrystalline rod attemperator according to claim 4, it is characterized in that, the diameter span of the annulus that described strip well heater surrounds is 100mm～250mm, and the height span of the U-shaped and inverted U of described strip well heater is 50mm～20mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320504643.0U CN203498505U (en) | 2013-08-19 | 2013-08-19 | Polycrystalline rod heat insulating device of zone melting furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320504643.0U CN203498505U (en) | 2013-08-19 | 2013-08-19 | Polycrystalline rod heat insulating device of zone melting furnace |
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| Publication Number | Publication Date |
|---|---|
| CN203498505U true CN203498505U (en) | 2014-03-26 |
Family
ID=50329500
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320504643.0U Withdrawn - After Issue CN203498505U (en) | 2013-08-19 | 2013-08-19 | Polycrystalline rod heat insulating device of zone melting furnace |
Country Status (1)
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|---|---|
| CN (1) | CN203498505U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103451727A (en) * | 2013-08-19 | 2013-12-18 | 浙江晶盛机电股份有限公司 | Zone melting furnace polycrystalline rod heat preservation device and heat preservation method thereof |
-
2013
- 2013-08-19 CN CN201320504643.0U patent/CN203498505U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103451727A (en) * | 2013-08-19 | 2013-12-18 | 浙江晶盛机电股份有限公司 | Zone melting furnace polycrystalline rod heat preservation device and heat preservation method thereof |
| CN103451727B (en) * | 2013-08-19 | 2016-10-12 | 浙江晶盛机电股份有限公司 | Zone melting furnace polycrystalline rod attemperator and heat preserving method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20140326 Effective date of abandoning: 20161012 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20140326 Effective date of abandoning: 20161012 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |