CN203487235U - Full-automatic tank-type chemical plating equipment - Google Patents
Full-automatic tank-type chemical plating equipment Download PDFInfo
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- CN203487235U CN203487235U CN201320645301.0U CN201320645301U CN203487235U CN 203487235 U CN203487235 U CN 203487235U CN 201320645301 U CN201320645301 U CN 201320645301U CN 203487235 U CN203487235 U CN 203487235U
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Abstract
The utility model relates to full-automatic tank-type chemical plating equipment applied to production of a crystalline silicon photovoltaic cell, belonging to the technical field of chemical plating equipment for production of the crystalline silicon photovoltaic cell. The equipment adopts a chemical plating method and a tank-type technical scheme. A circulating system, a heating system and a filtering system are arranged on a process tank body of the equipment, wherein the heating system is arranged inside a reservoir tank which is independent outside the process tank body; the process tank adopts multi-pipe parallel feeding and porous uniform flow plates; a full-automatic liquid medicine supply system is arranged on the equipment; a slow lift drying device is arranged at the outlet end of the equipment; all components contacting a process solution are manufactured by engineering plastics; the full-automatic tank-type chemical plating equipment automatically loads materials and automatically unloads the materials, and adopts a full-automatic manipulator in intermediate transfer. The full-automatic tank-type chemical plating equipment has the characteristics that full automation is achieved, the tank type is adopted, the maintenance is easy, the circulating flow of a liquid medicine is uniform, the process temperature is uniform, the property of the liquid medicine is stable, dry feeding and dry discharging of a crystalline silicon battery are achieved, and the like.
Description
Technical field
The utility model relates to a kind of full-automatic slot type chemical plating plant, belongs to the chemical plating plant technical field of crystal silicon photovoltaic battery production.
Background technology
Sun power is the inexhaustible renewable energy sources of the mankind, and it does not produce any environmental pollution, is the energy cleaning completely.It is that development in recent years is the fastest that solar radiation can transform electric energy, one of most active research, and people develop and have developed dissimilar solar cell and also claim photovoltaic cell.Its unique advantage of photovoltaic cell, surpasses the resources such as wind energy, water energy, Geothermal energy, nuclear energy, is expected to become the main pillar of following supply of electric power.
Photovoltaic cell simply says to be exactly the power generating device of low voltage and high current.The crystal silicon photovoltaic cell that now large-scale industrialization is produced, conventional manufacturing process adopts silk screen printing sintering silver conductor as front electrode.The usage quantity of silver is very large in this case, and its cost accounts for 15% left and right of total manufacturing cost, is the second largest cost consumption except silicon chip.The New Nickel silicon alloy technology of current research and development, is to cancel traditional silk screen printing, makes metallic nickel substitute existing silver, to significantly reducing photovoltaic cell manufacturing cost and production loss.
Must research and develop thus chemical plating plant novel, that replace silk screen printing, the core technology of this technique is to use chemical process that the metallic reducing of ionic state orientation are plated on crystal silicon battery desired position, thus form metal electrode and realize metal and silicon between effective sticking power.By the use of the metals such as the price nickel that silver is lower relatively, copper, reduce the manufacturing cost of photovoltaic cell.The scheme forming by this novel electrode, promotes the raising of photovoltaic cell electricity conversion.
The scheme forming for this Novel crystal silicon electrode, is all abroad to adopt chain equipment substantially, and adopts plating or photoinduced scheme.And adopt the equipment of electroless plating, slot type scheme without any reference, must be based on independent research.
Once this novel battery manufacturing process realizes technological breakthrough, it will bring the huge advance made of whole crystal silicon photovoltaic battery manufacture industry, leads the new direction of crystal silicon photovoltaic battery development.And automatically slot type chemical plating plant is as one of nucleus equipment, its research and development become inevitable choice.
Summary of the invention
In order to overcome the deficiencies in the prior art, the utility model provides a kind of full-automatic slot type chemical plating plant.
A full-automatic slot type chemical plating plant, PP technique cell body is installed on device interior, is connected by pipeline with PP liquid-storing box, weigh tank, the liquid original liquid box of device external; Technique fluid temperature installation of sensors is in PP technology groove; Mounting heater in PP liquid-storing box, it is inner that liquid-storing box monitoring temperature sensor, pH value monitoring sensor are installed on PP liquid-storing box; Recycle pump extracts the technique liquid in PP liquid-storing box, and liquid enters technology groove by the 39 manually-operated gate, recycle pump, strainer, the 6th under meter, the 41 manually-operated gate successively; The input terminus of pump return water the 40 manually-operated gate connects recycle pump, and the output terminal of the 40 manually-operated gate passes into PP liquid-storing box; During the interior liquid discharge opeing of PP technique cell body, by the 49 manually-operated gate, be back in PP liquid-storing box; PP liquid-storing box bottom arranges discharge opeing the 38 manually-operated gate, and the overflow spout of PP liquid-storing box side is connected with the 38 manually-operated gate input aperture, and the 38 manually-operated gate delivery port is engaged in holding with factory and is connected; The 7th liquid level sensor of PP liquid-storing box, the 8th liquid level sensor, the 9th liquid level sensor are installed on PP liquid-storing box side;
Pneumatic pump AP0101 extracts former A liquid bucket liquid, and former A liquid bucket liquid inner chamber connects the 11 liquid level sensor LE0101, and the path by admixing medical solutions and two difference in functionalitys of supplementary liquid enters in PP liquid-storing box; In admixing medical solutions path, what liquid passed through successively is first-hand movable valve, the 6th manually-operated gate, first flow meter, the 4th operated pneumatic valve, the 13 manually-operated gate, PP liquid-storing box; Supplement in liquid path, what liquid passed through successively is first-hand movable valve, the 6th manually-operated gate, first flow meter, the first operated pneumatic valve, PP weigh tank A, the 17 manually-operated gate, the 4th under meter, the 6th operated pneumatic valve, the 19 manually-operated gate, PP liquid-storing box; The 4th liquid level sensor, the 5th liquid level sensor, the 6th liquid level sensor are installed on A-PP weigh tank outside;
Pneumatic pump extracts former B liquid bucket liquid, and former B liquid bucket liquid inner chamber connects the tenth liquid level sensor, and the path by admixing medical solutions and two difference in functionalitys of supplementary liquid enters in PP liquid-storing box; In admixing medical solutions path, what liquid passed through successively is second-hand's movable valve, the 7th manually-operated gate, the second under meter, the 3rd operated pneumatic valve, the 11 manually-operated gate, PP liquid-storing box; Supplement in liquid path, what liquid passed through successively is second-hand's movable valve, the 7th manually-operated gate, the second under meter, the second operated pneumatic valve, B-PP weigh tank, the 14 manually-operated gate, the 3rd under meter, the 5th operated pneumatic valve, the 16 manually-operated gate, PP liquid-storing box; The first liquid level sensor, the second liquid level sensor, the 3rd liquid level sensor are installed on B-PP weigh tank outside;
The outside DIW supplying with enters PP liquid-storing box by pure water pipeline, and what DIW passed through successively is A manually-operated gate, the 20 manually-operated gate, the 5th under meter, the 7th operated pneumatic valve, the 22 manually-operated gate; Water pressure transmitter is arranged on DIW inlet channel ingress;
A fluid infusion system connects B fluid infusion system by second-hand's movable valve, and the 12 manually-operated gate, the 15 manually-operated gate, the 18 manually-operated gate, the 21 manually-operated gate are sample cock and are connected with each pipeline.
A full-automatic chemical electroplating method that is applied to crystal silicon photovoltaic battery production, contains following steps;
In order to improve the sticking power between metal and crystal silicon cell, equipment has adopted electroless plating scheme, and metal deposition is chemical reaction completely, without passing into electric current or using photoinduction as electroplating;
In order to reduce crystal silicon battery fragmentation rate in process of production, equipment adopts slot type scheme, and silicon chip is all fixed in corresponding fixture in transhipment and technological reaction process;
Basic technique cell body puts in order as follows: acid pickling step; Water-washing step; Activate step; Nickel plating step; Drying step; Metallization step; Acid pickling step; Water-washing step; Nickel plating step; Water-washing step; Copper facing step; Drying step; Nickel plating (or silver-plated) step; Dry, the metal coating baths such as wherein activation, nickel, copper, silver, general designation electroless plating tank;
In order to improve the speed of chemical plating metal deposition, corresponding technique cell body has been equipped with the recycle system, to improve the flow rate of chemical liquid;
In order to improve the speed of chemical plating metal deposition, also configured heating system, can control fluid temperature;
In order to improve the homogeneity of temperature, heating system is arranged in the liquid-storing box being independent of outside technique cell body, pump is squeezed into the liquid after heating in technique cell body by the recycle system;
In order to reduce electroless plating flaw, in the recycle system, be equipped with strainer, the small precipitating metal in technique liquid can be stopped in strainer;
In order to ensure in technique cell body, each is to the homogeneity of flow rate of liquid, technology groove has adopted the parallel feed liquor of multitube and microporous even flow plate;
In order to ensure the continuous stability of technical process, equipment has configured full automatic chemical liguid supply system, by under meter, the interpolation of various liquids is carried out to delicate metering;
In order to facilitate the transhipment work of every segment process after completing, equipment exit end arranges and lifts slowly drying installation, and the crystalline silicon wafer that makes to enter is accomplished " dry enter to do ";
For reduce technique liquid produce or stopping production process in inefficacy effect, prevent that unnecessary metal from separating out, the strainer contacting with technique liquid, well heater, sensor, pump, pipeline, valve, cell body all adopt engineering plastics manufacture;
Equipment automatic charging, automatic blanking, middle transhipment adopts full-automatic mechanical hand;
Equipment adopts the control framework of touch panel+industrial computer+PLC, uses configuration software operating system;
Equipment can be monitored each under meter, temperature regulator, pump, valve, motor etc. by the operation interface of touch panel;
Operating system can provide polygamy side's operating method, and system can be used status data by storing device.
The utility model has the advantages that possessed full-automatic, chemical liquid circulation, circular flow is even, fluid temperature is even, chemical liquid automatic makeup to, crystal silicon battery dryly enter to do, the slot type chemical plating plant of the various features such as chemical liquid is stable, equipment manufacturing cost is low, easy to maintenance, be the unique slot type chemical plating plant that is applied to silicon nickel alloy electrode formation scheme in current crystal silicon photovoltaic battery production industry.
Accompanying drawing explanation
When considered in conjunction with the accompanying drawings, by the detailed description with reference to below, can more completely understand better the utility model and easily learn wherein many advantages of following, but accompanying drawing described herein is used to provide further understanding of the present utility model, form a part of the present utility model, schematic description and description of the present utility model is used for explaining the utility model, do not form improper restriction of the present utility model, as schemed wherein:
Fig. 1 is the utility model electroless plating cell body front view.
Fig. 2 is the utility model electroless plating cell body vertical view.
Fig. 3 is the circulation of the utility model electroless plating liquid and liquid supply principle figure.
Fig. 4 is the utility model equipment typical case global design conceptual scheme.
Each numbering explanation in figure:
Below in conjunction with drawings and Examples, the utility model is further illustrated.
Embodiment
Obviously, the many modifications and variations that those skilled in the art do based on aim of the present utility model belong to protection domain of the present utility model.
Embodiment 1: as shown in Figure 1, Figure 2, Figure 3, Figure 4, in order to adapt to the change of Novel crystal Silicon photrouics manufacturing process, realize novel nickel, copper electrode, the utility model provides a kind of full-automatic slot type chemical plating plant that is applied to crystal silicon photovoltaic battery production, possess full-automatic, chemical liquid circulation, circular flow is even, fluid temperature is even, chemical liquid automatic makeup to, crystal silicon battery dryly enter to do, the various features such as chemical liquid is stablized, equipment manufacturing cost is low, easy to maintenance.
Be applied to a chemical plating plant for crystal silicon photovoltaic battery production, be equipped with full-automatic mechanical hand and adopt slot type design;
Device interior possesses electroless plating, pickling, washing, activation, the several functions cell body such as dry; The chemical plating technology cell body top that it uses connects automatic tank cover 1; Rotary cylinder 7 connects automatic tank cover rotating shaft, and control flume lid opens and closes; Technique cell body bottom arranges three fluid inlets 4; Fluid inlet 4 tops arrange even flow plate 6; After technology groove side, bottom arranges two leakage fluid drams 3.
During equipment work, two standard gailys decorated basket 5 are positioned in gaily decorated basket basket 2; Equipment is controlled full-automatic mechanical hand 11 and is picked up gaily decorated basket basket 2 from feeding station, successively puts into the technique cell body of device interior; Last cell body position of device interior is for lifting slowly drying installation 12; After apparatus and process flow process, gaily decorated basket basket finally arrives blanking station 13; Equipment top arranges gas exhaust duct 10, the chemical reaction of device for transferring inside and vaporised gas.
Be applied to a chemical plating plant for crystal silicon photovoltaic battery production, be equipped with full-automatic mechanical hand and adopt slot type design;
Basic technique cell body puts in order as follows: acid pickling step; Water-washing step; Activate step; Nickel plating step; Drying step; Metallization step; Acid pickling step; Water-washing step; Nickel plating step; Water-washing step; Copper facing step; Drying step; Nickel plating (or silver-plated) step; Dry;
Crystal silicon photovoltaic battery is placed in the standard gaily decorated basket 5, and in order to improve equipment capacity, equipment provides gaily decorated basket basket 2, and each gaily decorated basket basket can hold 2 or 4 standard gailys decorated basket.
Full-automatic mechanical hand 11 is got gaily decorated basket basket 2 from feeding station 8, by sequence of control requirement, puts into corresponding cell body 9, completes one by one after the technique of each cell body, and mechanical manipulator is put into blanking station 13 by gaily decorated basket basket;
In order to prevent that the dissimilar liquid of each technology groove from the situation of string liquid occurring, many automatic stations of equipment configuration mechanical manipulator is alternately transported gaily decorated basket basket between dissimilar chemical liquid groove;
In order to reduce the dangerous of artificial interpolation liquid and to improve and add precision, equipment configuration full automatic liquid make up system;
Pump extracts liquid A, the medical liquid B at feed flow center, and liquid is squeezed into equipment weigh tank or liquid-storing box, by the under meter FM0101 in each liquor piping, under meter FM0102, measures;
In equipment use procedure, can there is trace consumption in liquid, and the weigh tank of now correcting one's mistakes carries out fluid infusion to liquid-storing box, by under meter FM0106, under meter FM0107, measures;
In order to improve the speed of electroless plating and the homogeneity of electroless plating, apparatus and process groove has been equipped with medicine liquid circulation, pump EP010 extracts process liquid out from liquid-storing box, by fluid inlet 4, squeeze into technology groove inside groove, liquid overflows to technology groove water jacket from technology groove inside groove, flows by gravity back to liquid-storing box afterwards from leakage fluid dram 3;
In order to ensure the stability of chemical liquid flow, at recycle pump main pipeline, be provided with under meter, under meter feedback electrical signal is to Controlling System, and Controlling System is sent instruction to the frequency transformer of control pump, to keep the stability of circular flow;
In order to improve the homogeneity of chemical liquid all directions flow in technology groove, cell body adopts three fluid inlets 4 design of feed liquor simultaneously, and is provided with even flow plate 6 on input duct top;
In order to improve the homogeneity of fluid temperature, equipment has configured liquid-storing box, and well heater is installed in liquid-storing box;
In order to keep the temperature in technology groove, reduce process liquid volatilization, technology groove has been equipped with automatic tank cover 1, and groove lid is by being used rotary cylinder 7 automatic shutters.
In order to keep the stability of chemical liquid, prevent that unnecessary metal from separating out, the strainer contacting with technique liquid, well heater, sensor, pump, pipeline, valve, cell body all adopt engineering plastics manufacture;
In order to reduce electroless plating flaw, in the recycle system, be equipped with filter F L0101, the small precipitating metal in technique liquid can be stopped in strainer;
In order to facilitate the transhipment of crystal silicon battery, after chemical plating technology completes, arrange and lift slowly drying installation 12, guarantee that battery can dryly enter to do;
For the corrosion that the liquid gas that reduces volatilization causes each machinery and electrical apparatus mechanism, equipment configuration gas exhaust duct 10, can be connected with factory's pipeline of being engaged in;
Equipment adopts the control framework of touch panel+industrial computer+PLC, uses configuration software operating system;
Equipment can be monitored each under meter, temperature regulator, pump, valve, motor etc. by the operation interface of touch panel;
Operating system can provide polygamy side's operating method, and system can be used status data by storing device.
Embodiment 2: as shown in Figure 1, Figure 2, Figure 3, Figure 4,
Be applied to a chemical plating plant for crystal silicon photovoltaic battery production, be equipped with full-automatic mechanical hand and adopt slot type design;
Basic technique cell body puts in order as follows: alkali cleaning step; Water-washing step; Activate step; Nickel plating step; Water-washing step; Nickel plating step; Water-washing step; Copper facing step; Drying step; Nickel plating (or silver-plated) step; Dry;
Crystal silicon photovoltaic battery is placed in the standard gaily decorated basket 5, and in order to improve equipment capacity, equipment provides gaily decorated basket basket 2, and each gaily decorated basket basket can hold 4 standard gailys decorated basket.
Full-automatic mechanical hand 11 is got gaily decorated basket basket 2 from feeding station 8, by sequence of control requirement, puts into corresponding cell body 9, completes one by one after the technique of each cell body, and mechanical manipulator is put into blanking station 13 by gaily decorated basket basket;
In order to prevent that the dissimilar liquid of each technology groove from the situation of string liquid occurring, many automatic stations of equipment configuration mechanical manipulator is alternately transported gaily decorated basket basket between dissimilar chemical liquid groove;
In order to reduce the dangerous of artificial interpolation liquid and to improve and add precision, equipment configuration full automatic liquid make up system;
Liquid A, medical liquid B, liquid C, liquid D that pump extracts feed flow center, squeeze into equipment weigh tank or liquid-storing box by liquid, by the under meter FM0101 in each liquor piping, under meter FM0102, under meter FM0103, under meter FM0104, measures;
In equipment use procedure, can there is trace consumption in liquid, and the weigh tank of now correcting one's mistakes carries out fluid infusion to liquid-storing box, by under meter FM0106, under meter FM0107, measures;
In order to improve the speed of electroless plating and the homogeneity of electroless plating, apparatus and process groove has been equipped with medicine liquid circulation, pump EP010 extracts process liquid out from liquid-storing box, by three fluid inlets 4, squeezes into technology groove inside groove, and liquid flows by gravity back to liquid-storing box from technology groove leakage fluid dram 3;
In order to ensure the stability of chemical liquid flow, at recycle pump main pipeline, be provided with pressure warning unit, pressure warning unit feedback electrical signal is to Controlling System, and Controlling System is sent instruction to the frequency transformer of control pump, to keep the stability of circular flow;
In order to improve the homogeneity of chemical liquid all directions flow in technology groove, cell body adopts multi-pipeline 4 design of feed liquor simultaneously;
In order to improve the homogeneity of fluid temperature, equipment has configured liquid-storing box, and well heater is installed in liquid-storing box;
In order to keep the stability of chemical liquid, prevent that unnecessary metal from separating out, the strainer contacting with technique liquid, well heater, sensor, pump, pipeline, valve, cell body all adopt engineering plastics manufacture;
In order to facilitate the transhipment of crystal silicon battery, after chemical plating technology completes, IPA drying installation is set, guarantee that battery can dryly enter to do;
For the corrosion that the liquid gas that reduces volatilization causes each machinery and electrical apparatus mechanism, equipment configuration gas exhaust duct 10, can be connected with factory's pipeline of being engaged in;
Equipment adopts the control framework of touch panel+PLC;
Equipment can be monitored each under meter, temperature regulator, pump, valve, motor etc. by the operation interface of touch panel;
Operating system can provide polygamy side's operating method, and system can be used status data by storing device.
Embodiment 3: as shown in Figure 1, Figure 2, Figure 3, Figure 4,
Be applied to a chemical plating plant for crystal silicon photovoltaic battery production, be equipped with full-automatic mechanical hand and adopt slot type design;
Basic technique cell body puts in order as follows: activate step; Nickel plating step; Water-washing step; Acid pickling step; Water-washing step; Nickel plating step; Water-washing step; Copper facing step; Drying step; Nickel plating (or silver-plated) step; Dry;
Crystal silicon photovoltaic battery is placed in the standard gaily decorated basket 5, and in order to improve equipment capacity, equipment provides gaily decorated basket basket 2, and each gaily decorated basket basket can hold 4 standard gailys decorated basket.
Full-automatic mechanical hand 11 is got gaily decorated basket basket 2 from feeding station 8, by sequence of control requirement, puts into corresponding cell body 9, completes one by one after the technique of each cell body, and mechanical manipulator is put into blanking station 13 by gaily decorated basket basket;
In order to prevent that the dissimilar liquid of each technology groove from the situation of string liquid occurring, many automatic stations of equipment configuration mechanical manipulator is alternately transported gaily decorated basket basket between dissimilar chemical liquid groove;
In order to improve the speed of electroless plating and the homogeneity of electroless plating, apparatus and process groove has been equipped with medicine liquid circulation, pump EP010 extracts process liquid out from liquid-storing box, by fluid inlet 4, squeeze into technology groove inside groove, liquid overflows to technology groove water jacket from technology groove inside groove, flows by gravity back to liquid-storing box afterwards from leakage fluid dram 3;
In order to ensure the stability of chemical liquid flow, at recycle pump main pipeline, be provided with under meter, under meter feedback electrical signal is to Controlling System, and Controlling System is sent instruction to the frequency transformer of control pump, to keep the stability of circular flow;
In order to improve the homogeneity of chemical liquid all directions flow in technology groove, cell body input duct top is provided with even flow plate 6;
In order to improve the homogeneity of fluid temperature, equipment has configured liquid-storing box, and well heater is installed in liquid-storing box;
In order to keep the temperature in technology groove, reduce process liquid volatilization, technology groove has been equipped with automatic tank cover 1, and groove lid is by being used cylinder 7 automatic shutters.
In order to keep the stability of chemical liquid, prevent that unnecessary metal from separating out, the strainer contacting with technique liquid, well heater, sensor, pump, pipeline, valve, cell body all adopt engineering plastics manufacture;
In order to reduce electroless plating flaw, in the recycle system, be equipped with filter F L0101, the small precipitating metal in technique liquid can be stopped in strainer;
In order to facilitate the transhipment of crystal silicon battery, after chemical plating technology completes, arrange and lift slowly drying installation 12, guarantee that battery can dryly enter to do;
For the corrosion that the liquid gas that reduces volatilization causes each machinery and electrical apparatus mechanism, equipment configuration gas exhaust duct 10, can be connected with factory's pipeline of being engaged in;
Equipment adopts the control framework of industrial computer+PLC, uses configuration software operating system;
Equipment can be monitored each under meter, temperature regulator, pump, valve, motor etc. by the operation interface of touch panel;
Operating system can provide polygamy side's operating method, and system can be used status data by storing device.
Embodiment 4: as shown in the electroless plating liquid circulation of Fig. 3 and liquid supply principle figure,
Be applied to a chemical plating plant for crystal silicon photovoltaic battery production, PP technique cell body 3 is installed on device interior, is connected by pipeline with PP liquid-storing box 1, weigh tank, the liquid original liquid box of device external.Technique fluid temperature sensor temp0101 is installed in PP technology groove 3.The interior mounting heater 2 of PP liquid-storing box 1, liquid-storing box monitoring temperature sensor temp0102, pH value monitoring sensor PH0101 are installed on PP liquid-storing box 1 inside.Recycle pump EP0101 extracts the technique liquid in PP liquid-storing box 1, and liquid enters technology groove by the 39 manually-operated gate MV0139, recycle pump EP0101, filter F L0101, the 6th under meter FM0113, the 41 manually-operated gate MV0141 successively.The input terminus of pump return water the 40 manually-operated gate MV0140 connects recycle pump EP0101, and the output terminal of the 40 manually-operated gate MV0140 passes into PP liquid-storing box 1.During the 3 interior liquid discharge opeing of PP technique cell body, by the 49 manually-operated gate MV0149, be back in PP liquid-storing box 1.PP liquid-storing box 1 bottom arranges discharge opeing the 38 manually-operated gate MV0138, and the overflow spout of PP liquid-storing box 1 side is connected with the 38 manually-operated gate MV0138 input aperture, and the 38 manually-operated gate MV0138 delivery port is engaged in holding with factory and is connected.The 7th liquid level sensor LE0121 of PP liquid-storing box 1, the 8th liquid level sensor LE0122, the 9th liquid level sensor LE0123 are installed on PP liquid-storing box 1 side.
Pneumatic pump AP0101 extracts former A liquid bucket liquid 5, and former A liquid bucket liquid 5 inner chambers connect the 11 liquid level sensor LE0101, and the path by admixing medical solutions and two difference in functionalitys of supplementary liquid enters in PP liquid-storing box 1.In admixing medical solutions path, what liquid passed through successively is first-hand movable valve MV0101, the 6th manually-operated gate MV0106, first flow meter FM0101, the 4th operated pneumatic valve AV0104, the 13 manually-operated gate MV0113, PP liquid-storing box.Supplement in liquid path, what liquid passed through successively is first-hand movable valve MV0101, the 6th manually-operated gate MV0106, first flow meter FM0101, the first operated pneumatic valve AV0101, PP weigh tank A, the 17 manually-operated gate MV0117, the 4th under meter FM0107, the 6th operated pneumatic valve AV0112, the 19 manually-operated gate MV0119, PP liquid-storing box 1.The 4th liquid level sensor LE0109, the 5th liquid level sensor LE0110, the 6th liquid level sensor LE0111 are installed on A-PP weigh tank 7 outsides.
Pneumatic pump AP0102 extracts former B liquid bucket liquid 6, and former B liquid bucket liquid 6 inner chambers connect the tenth liquid level sensor LE0102, and the path by admixing medical solutions and two difference in functionalitys of supplementary liquid enters in PP liquid-storing box 1.In admixing medical solutions path, what liquid passed through successively is second-hand's movable valve MV0102, the 7th manually-operated gate MV0107, the second under meter FM0102, the 3rd operated pneumatic valve AV0103, the 11 manually-operated gate MV0111, PP liquid-storing box 1.Supplement in liquid path, what liquid passed through successively is second-hand's movable valve MV0102, the 7th manually-operated gate MV0107, the second under meter FM0102, the second operated pneumatic valve AV0102, B-PP weigh tank the 8, the 14 manually-operated gate MV0114, the 3rd under meter FM0106, the 5th operated pneumatic valve AV0111, the 16 manually-operated gate MV0116, PP liquid-storing box 1.The first liquid level sensor LE0106, the second liquid level sensor LE0107, the 3rd liquid level sensor LE0108 are installed on B-PP weigh tank 8 outsides.
The outside DIW supplying with enters PP liquid-storing box 1 by pure water pipeline, and that DIW passes through successively is A manually-operated gate MV0001, the 20 manually-operated gate MV0120, the 5th under meter FM0108, the 7th operated pneumatic valve AV0113, the 22 manually-operated gate MV0122.Water pressure transmitter is arranged on DIW inlet channel ingress.
A fluid infusion system 10 connects B fluid infusion system 9 by second-hand's movable valve MV0102,
The 12 manually-operated gate MV0112, the 15 manually-operated gate MV0115, the 18 manually-operated gate MV0118, the 21 manually-operated gate MV0121 are sample cock, are connected with each pipeline.
As mentioned above, embodiment of the present utility model is explained, but as long as not departing from fact inventive point of the present utility model and effect can have a lot of distortion, this will be readily apparent to persons skilled in the art.Therefore, within such variation is also all included in protection domain of the present utility model.
Claims (1)
1. be applied to a full-automatic slot type chemical plating plant for crystal silicon photovoltaic battery production, it is characterized in that PP technique cell body is installed on device interior, be connected by pipeline with PP liquid-storing box, weigh tank, the liquid original liquid box of device external; Technique fluid temperature installation of sensors is in PP technology groove; Mounting heater in PP liquid-storing box, it is inner that liquid-storing box monitoring temperature sensor, pH value monitoring sensor are installed on PP liquid-storing box; Recycle pump extracts the technique liquid in PP liquid-storing box, and liquid enters technology groove by the 39 manually-operated gate, recycle pump, strainer, the 6th under meter, the 41 manually-operated gate successively; The input terminus of pump return water the 40 manually-operated gate connects recycle pump, and the output terminal of the 40 manually-operated gate passes into PP liquid-storing box; During the interior liquid discharge opeing of PP technique cell body, by the 49 manually-operated gate, be back in PP liquid-storing box; PP liquid-storing box bottom arranges discharge opeing the 38 manually-operated gate, and the overflow spout of PP liquid-storing box side is connected with the 38 manually-operated gate input aperture, and the 38 manually-operated gate delivery port is engaged in holding with factory and is connected; The 7th liquid level sensor of PP liquid-storing box, the 8th liquid level sensor, the 9th liquid level sensor are installed on PP liquid-storing box side;
Pneumatic pump AP0101 extracts former A liquid bucket liquid, and former A liquid bucket liquid inner chamber connects the 11 liquid level sensor LE0101, and the path by admixing medical solutions and two difference in functionalitys of supplementary liquid enters in PP liquid-storing box; In admixing medical solutions path, what liquid passed through successively is first-hand movable valve, the 6th manually-operated gate, first flow meter, the 4th operated pneumatic valve, the 13 manually-operated gate, PP liquid-storing box; Supplement in liquid path, what liquid passed through successively is first-hand movable valve, the 6th manually-operated gate, first flow meter, the first operated pneumatic valve, PP weigh tank A, the 17 manually-operated gate, the 4th under meter, the 6th operated pneumatic valve, the 19 manually-operated gate, PP liquid-storing box; The 4th liquid level sensor, the 5th liquid level sensor, the 6th liquid level sensor are installed on A-PP weigh tank outside;
Pneumatic pump extracts former B liquid bucket liquid, and former B liquid bucket liquid inner chamber connects the tenth liquid level sensor, and the path by admixing medical solutions and two difference in functionalitys of supplementary liquid enters in PP liquid-storing box; In admixing medical solutions path, what liquid passed through successively is second-hand's movable valve, the 7th manually-operated gate, the second under meter, the 3rd operated pneumatic valve, the 11 manually-operated gate, PP liquid-storing box; Supplement in liquid path, what liquid passed through successively is second-hand's movable valve, the 7th manually-operated gate, the second under meter, the second operated pneumatic valve, B-PP weigh tank, the 14 manually-operated gate, the 3rd under meter, the 5th operated pneumatic valve, the 16 manually-operated gate, PP liquid-storing box; The first liquid level sensor, the second liquid level sensor, the 3rd liquid level sensor are installed on B-PP weigh tank outside;
The outside DIW supplying with enters PP liquid-storing box by pure water pipeline, and what DIW passed through successively is A manually-operated gate, the 20 manually-operated gate, the 5th under meter, the 7th operated pneumatic valve, the 22 manually-operated gate; Water pressure transmitter is arranged on DIW inlet channel ingress;
A fluid infusion system connects B fluid infusion system by second-hand's movable valve, and the 12 manually-operated gate, the 15 manually-operated gate, the 18 manually-operated gate, the 21 manually-operated gate are sample cock and are connected with each pipeline.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320645301.0U CN203487235U (en) | 2013-10-18 | 2013-10-18 | Full-automatic tank-type chemical plating equipment |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201320645301.0U CN203487235U (en) | 2013-10-18 | 2013-10-18 | Full-automatic tank-type chemical plating equipment |
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| CN203487235U true CN203487235U (en) | 2014-03-19 |
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| CN201320645301.0U Withdrawn - After Issue CN203487235U (en) | 2013-10-18 | 2013-10-18 | Full-automatic tank-type chemical plating equipment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103498134A (en) * | 2013-10-18 | 2014-01-08 | 北京吉阳技术股份有限公司 | Full-automatic tank type chemical plating equipment and chemical plating method |
| CN110106497A (en) * | 2019-06-19 | 2019-08-09 | 宁波中科纬诚新材料科技有限公司 | Chemical plating automatic liquid supply method |
-
2013
- 2013-10-18 CN CN201320645301.0U patent/CN203487235U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103498134A (en) * | 2013-10-18 | 2014-01-08 | 北京吉阳技术股份有限公司 | Full-automatic tank type chemical plating equipment and chemical plating method |
| CN103498134B (en) * | 2013-10-18 | 2015-11-18 | 北京吉阳技术股份有限公司 | A kind of full-automatic slot type chemical plating plant and chemical plating method |
| CN110106497A (en) * | 2019-06-19 | 2019-08-09 | 宁波中科纬诚新材料科技有限公司 | Chemical plating automatic liquid supply method |
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