CN203485321U - Rotatable fixture and cutting tool for crystal bar cutting - Google Patents
Rotatable fixture and cutting tool for crystal bar cutting Download PDFInfo
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- CN203485321U CN203485321U CN201320387097.7U CN201320387097U CN203485321U CN 203485321 U CN203485321 U CN 203485321U CN 201320387097 U CN201320387097 U CN 201320387097U CN 203485321 U CN203485321 U CN 203485321U
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- crystal bar
- sleeve
- rotatable fixture
- cutting
- described sleeve
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Abstract
The utility model provides a rotatable fixture for crystal bar cutting, which comprises a sleeve comprising a hollow interior in order to store at least partial crystal bars to be processed; at least one first fastener which passes through the sleeve to fasten the crystal bars; a sleeve support, which is used to support the sleeve; at least one second fastener, which passes through the sleeve support to fasten the sleeve; a rotation shaft which connects the sleeve and the sleeve support and drives rotation of the sleeve; and a fixation base, which is fixed to a cutting tool. The rotatable fixture makes the crystal bars be cut at an arbitrary rotation angle. Errors in graphite bonding are eliminated and processing efficiency is increase greatly.
Description
Technical field
The utility model relates to a kind of jig, more specifically, relates to a kind of for processing the Rotatable fixture of crystal bar.
Background technology
Wafer (such as silicon wafer, GaAs wafer etc.) is widely used in semicon industry.In manufacturing the process of wafer, first utilize growing method to obtain crystal bar (also referred to as crystal ingot), then crystal bar is cut into wafer.After having cut, also need to experience grinding, etching and cleaning, and the operation such as polishing finally obtain can be for the wafer of manufacturing semiconductor devices.
Conventionally, two kinds of equipment of main application in the process that crystal bar is cut into wafer: interior annular saw and scroll saw, wherein in annular saw be mainly used in the directed end face of crystal bar and cut flatly, and scroll saw is that oriented crystal bar is cut into wafer.In addition, online according to needing before cutting, end face is cut to flat crystal bar and scroll saw workbench bonds together as medium by graphite, and during scroll saw cutting crystal bar, conventionally require the long limit of crystal bar (relevant with the internal structure of crystal, be parallel to crystal inside orientation) with horizontal plane or graphite at angle, for example, generally into about the angle of 45 °, 135 °, 225 ° or 315 °.If the long limit of crystal bar is parallel or perpendicular to horizontal plane, make possibly the wafer distortion of cutting.Therefore, in interior annular saw, by needs, use a kind of jig to fix crystal bar.
Referring to Fig. 1 and Fig. 2, a kind of typical jig for interior annular saw of the prior art is shown.Shown in jig comprise a holder 4, sleeve 3 and two screws 2; Bonding (for example, by epoxide-resin glue etc.) has the crystal bar 1 of graphite 5 to be placed at least in part in sleeve 3 to cut, by two screws 2, crystal bar 1 and sleeve 3 is fixing; Wherein the direction on the long limit 6 of crystal bar is fixed, or the angle of 135 ° at 45 ° with horizontal plane.
Yet there is in operation following defect in above-mentioned jig:
(1) crystal bar can only be fixed on the upper processing of an angle (for example 45 ° or 135 °);
(2) because graphite is bonding higher with the angle required precision on the long limit of crystal, while easily causing crystal bar to cut on interior annular saw, angle adjustment is inaccurate, and repeatedly adjust cutting, can cause waste of material, Efficiency Decreasing or cannot reach angle precision requirement;
(3) for guaranteeing the machining angle requirement of the long limit of crystal bar and graphite, graphite is conventionally bonding again after crystal bar has calculated long corner degree, and the process-cycle is extended, and working (machining) efficiency declines; And
(4) if graphite calculates long corner degree front attachment at crystal bar, calculating when the long corner of crystal bar is spent and need to calculate adjustment numerical value by bringing extraly again deflection formula after the numerical computations of planar survey on X-ray machine into, increased computing time, and there is the risk of operation mistake, make equally working (machining) efficiency decline.
Therefore, the utmost point needs a kind of improved jig to solve above-mentioned defect of the prior art.
Utility model content
The utility model provides a kind of Rotatable fixture of novelty, and it has solved above-mentioned defect of the prior art, makes crystal bar to eliminate the bonding error of graphite with any anglec of rotation cutting, and working (machining) efficiency improves greatly.
Particularly, it is a kind of for cutting the Rotatable fixture of crystal bar that the utility model provides, and this Rotatable fixture comprises:
A sleeve, has the inside of hollow to hold at least part of crystal bar to be processed;
At least one first securing member, through the fastening described crystal bar of described sleeve;
A bush support, supports described sleeve;
At least one second securing member, through the fastening described sleeve of described bush support; And
A rotating shaft, is connected described sleeve and drives described sleeve rotating with described bush support.
In a preferred embodiment of the present utility model, described Rotatable fixture can 360 ° of rotations.
In a preferred embodiment of the present utility model, described sleeve has columnar external shape.
In a preferred embodiment of the present utility model, described bush support has a recess, to hold described sleeve and to provide support.
In a preferred embodiment of the present utility model, the bottom shape of described recess and described sleeve is adaptive.
In a preferred embodiment of the present utility model, the inside of the hollow of described sleeve has the shape with crystal bar adaptation, and has a recessed structure in inner bottom side.
In a preferred embodiment of the present utility model, described the first securing member and described the second securing member are penetration screws.
In a preferred embodiment of the present utility model, described Rotatable fixture also comprises a holder, is fixedly attached to a cutter sweep.
In a preferred embodiment of the present utility model, described cutter sweep is interior annular saw.
The utility model also provides a kind of cutting tool, and it comprises according to above-mentioned Rotatable fixture and interior annular saw.
Rotatable fixture of the present utility model has following advantage:
(1) crystal bar can be with any anglec of rotation cutting;
(2) eliminate the bonding error of graphite, on interior annular saw cutting angle accurately, shorten cutting times, reduce waste of material and improve working (machining) efficiency;
(3) graphite needn't carry out bondingly after finishing the long corner of crystal bar degree, can shift to an earlier date bonding graphite, saves time, and improves working (machining) efficiency;
(4) when calculating the long limit of crystal bar, the numerical value that only need measure by X-ray machine directly calculates adjustment numerical value, no longer needs to bring into extraly deflection formula and carries out secondary calculating, has saved computing time, has also reduced the error of calculation, makes equally working (machining) efficiency improve.
Accompanying drawing explanation
With reference to the following drawings, in conjunction with unrestriced exemplary below, can understand better the utility model.Should be understood that these accompanying drawings are nonrestrictive, may not draw in proportion, and for the sake of clarity, some feature may be not shown.In the accompanying drawings:
Fig. 1 illustrates the side cross-sectional, view of a kind of jig of the prior art (with the crystal bar of bonding graphite);
Fig. 2 illustrates the view in transverse section of the jig of Fig. 1;
Fig. 3 illustrates the side cross-sectional, view of the Rotatable fixture (with the crystal bar of bonding graphite) of an embodiment of the present utility model; And
Fig. 4 illustrates the view in transverse section of the jig of Fig. 3.
The specific embodiment
Should be understood that following embodiment is only illustrative, and be not restricted to the utility model.Protection domain of the present utility model is defined by the claims.Should also be understood that in implementing process of the present utility model, needn't comprise all technical characterictics in following all embodiments, these technical characterictics can have multiple combination.
Referring to Fig. 3 and Fig. 4, the Rotatable fixture of an embodiment of the present utility model is shown.
Rotatable fixture of the present utility model comprises: a sleeve 23, has the inside of hollow to hold at least part of crystal bar to be processed 21; Two the first securing members (according to actual conditions, can be also one or more securing member) 22, through the fastening described crystal bar 21 of described sleeve 23; A bush support 26, supports described sleeve 23; Four the second securing members (according to actual conditions, can be also one or more securing member) 28, through the fastening described sleeve 23 of described bush support 26; And a rotating shaft 27, is connected described sleeve 23 and drives described sleeve 23 to rotate with described bush support 26
Preferably, described Rotatable fixture can 360 ° of rotations, particularly rotating shaft 27 can be with moving sleeve 23 to carry out 360 ° of rotations.
As shown in Figure 4, described sleeve 23 preferably has columnar external shape, can being more advantageously rotated.In addition, the inside of the hollow of described sleeve 23 has the shape with crystal bar 21 adaptations, and has a recessed structure in inner bottom side, to hold graphite 25.
Preferably, described bush support 26 has a recess, and to hold described sleeve 23 and to provide support, and the bottom shape of described recess and described sleeve 23 is adaptive, as shown in Figure 4.
Preferably, described the first securing member 22 and described the second securing member 28 are penetration screws, so that Rotatable fixture can be reused.Therefore, the disposable securing member such as rivet or pin is not suitable for the utility model.
Preferably, described Rotatable fixture also comprises a holder 24, is fixedly attached to a cutter sweep (not shown), for example, can be fixedly attached to interior annular saw.
Next, in conjunction with Fig. 3 and Fig. 4, further set forth the concrete steps of using Rotatable fixture cutting crystal bar of the present utility model:
(1) at crystal bar 21(, there is the long limit 29 of crystal bar) the bonding graphite 25 in bottom, for example by epoxide-resin glue, realize;
(2) by least a portion of the crystal bar of bonding graphite 25 21 (for example, 20mm at least) be placed on the inside of the hollow of sleeve 23, the shape of the hollow inside of the shape of crystal bar 21 and sleeve 23 is adaptive, and graphite 25 is contained in the recessed structure of inner bottom side;
(3) crystal bar 21, graphite 25, sleeve 23 are put into the recess of bush support 26;
(4) by rotating shaft 27, be with moving sleeve 23, graphite 25, crystal bar 21 rotations, for example, to realize the arbitrarily angled of the long limit 29 of desired crystal bar and horizontal plane, 45 °, 135 ° or 225 ° of equal angles;
(5) confirm to reach after the angle of processing request, through sleeve 23, crystal bar 21 is fastening by penetration screw 22, and through bush support 26, carry out fastening sleeve 23 by penetration screw 28; And
(6) this Rotatable fixture is fixedly attached to interior annular saw, processes.
Can find out, by using Rotatable fixture of the present utility model, crystal bar can be cut with any anglec of rotation, eliminate the bonding error of graphite, working (machining) efficiency improves greatly.
Should be understood that in the situation that not departing from connotation of the present utility model, any for improvement of the present utility model, modification or modification, within being all intended to be included in the protection domain of the utility model appending claims.
Claims (10)
1. for cutting a Rotatable fixture for crystal bar, it is characterized in that, this Rotatable fixture comprises:
A sleeve, has the inside of hollow to hold at least part of crystal bar to be processed;
At least one first securing member, through the fastening described crystal bar of described sleeve;
A bush support, supports described sleeve;
At least one second securing member, through the fastening described sleeve of described bush support; And
A rotating shaft, is connected described sleeve and drives described sleeve rotating with described bush support.
2. according to claim 1ly for cutting the Rotatable fixture of crystal bar, it is characterized in that, described Rotatable fixture can 360 ° of rotations.
3. according to claim 1ly for cutting the Rotatable fixture of crystal bar, it is characterized in that, described sleeve has columnar external shape.
4. according to claim 1ly for cutting the Rotatable fixture of crystal bar, it is characterized in that, described bush support has a recess, to hold described sleeve and to provide support.
5. according to claim 4ly for cutting the Rotatable fixture of crystal bar, it is characterized in that, the bottom shape of described recess and described sleeve is adaptive.
6. according to claim 1ly for cutting the Rotatable fixture of crystal bar, it is characterized in that, the inside of the hollow of described sleeve has the shape with crystal bar adaptation, and has a recessed structure in inner bottom side.
7. according to claim 1ly for cutting the Rotatable fixture of crystal bar, it is characterized in that, described the first securing member and described the second securing member are penetration screws.
8. according to claim 1ly for cutting the Rotatable fixture of crystal bar, it is characterized in that, described Rotatable fixture also comprises a holder, is fixedly attached to a cutter sweep.
9. according to claim 8ly for cutting the Rotatable fixture of crystal bar, it is characterized in that, described cutter sweep is interior annular saw.
10. a cutting tool, is characterized in that, comprises according to the Rotatable fixture described in claim 1-9 and interior annular saw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320387097.7U CN203485321U (en) | 2013-07-01 | 2013-07-01 | Rotatable fixture and cutting tool for crystal bar cutting |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320387097.7U CN203485321U (en) | 2013-07-01 | 2013-07-01 | Rotatable fixture and cutting tool for crystal bar cutting |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203485321U true CN203485321U (en) | 2014-03-19 |
Family
ID=50256176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320387097.7U Expired - Lifetime CN203485321U (en) | 2013-07-01 | 2013-07-01 | Rotatable fixture and cutting tool for crystal bar cutting |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203485321U (en) |
-
2013
- 2013-07-01 CN CN201320387097.7U patent/CN203485321U/en not_active Expired - Lifetime
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Legal Events
| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No. 101113, Tongzhou East Industrial Street, Tongzhou Development Zone, Beijing Patentee after: Beijing Tongmei Crystal Technology Co.,Ltd. Address before: No. 101113, Tongzhou East Industrial Street, Tongzhou Development Zone, Beijing Patentee before: BEIJING TONGMEI XTAL TECHNOLOGY Co.,Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140319 |