CN203474891U - Device for preventing air pipe from blocking - Google Patents
Device for preventing air pipe from blocking Download PDFInfo
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- CN203474891U CN203474891U CN201320588430.0U CN201320588430U CN203474891U CN 203474891 U CN203474891 U CN 203474891U CN 201320588430 U CN201320588430 U CN 201320588430U CN 203474891 U CN203474891 U CN 203474891U
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- tracheae
- exhaust line
- stopping
- reaction chamber
- prevents
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Abstract
The utility model provides a device for preventing an air pipe from blocking. The device comprises a reaction cavity, a first air pipe, an exhaust pipeline, a second air pipe and an isolating device, wherein the first air pipe is connected with the side wall of the reaction cavity, the exhaust pipeline is connected with the bottom of the reaction cavity, the second air pipe is connected with the side wall of the exhaust pipeline, and the isolating device is fixed on the exhaust pipeline; the isolating device is arranged on the exhaust pipeline, when gas in the second air pipe needs to be discharged, the isolating device does not need to act, and the gas in the second air pipe can be discharged from the exhaust pipeline; when the gas in the reaction cavity needs to be discharged, the isolating device acts, the second air pipe and the exhaust pipeline are isolated, the gas in the reaction cavity is prevented from entering the second air pipe to react with the residual gas in the second air pipe, and the powder is prevented from generation to block the second air pipe.
Description
Technical field
The utility model relates to field of semiconductor manufacture, relates in particular to a kind of device that prevents that tracheae from stopping up.
Background technology
Semi-conductor chip, in making processes, conventionally reacts and forms film in reaction chamber.The different films of general formation need two kinds or two or more reactant gasess, therefore need to use different gas pipings to transport different reactant gasess, avoid the different raw reactions of gas hybrid concurrency in pipeline.After reaction chamber stopped reaction, reaction gas cognition remains in gas piping, while again reacting, if directly pass into a certain amount of reactant gases so in gas piping residual reactant gases also can be passed into reaction chamber and participate in reaction, this will cause the reactant gases of participation reaction excessive, makes the film of formation undesirable.In order to control more accurately the amount that enters reaction chamber reaction gases; conventionally gas piping can be picked out to an arm; arm is connected with off-gas pump; before starting reaction, first use off-gas pump that the reactant gases remaining in gas piping is extracted out; while stablizing Deng reaction gas flow, close again arm, the reactant gases of regime flow is passed into reaction chamber and reacted.
Concrete, please refer to Fig. 1, Fig. 1 is the structural representation of reaction unit in prior art, described reaction unit comprises: reaction chamber 10, the exhaust line 20 being connected with described reaction chamber 10 bottoms, the arm 30 being connected with described exhaust line 20, the off-gas pump 40 being connected with described exhaust line 20.As mentioned above, before reacting, having a kind of reactant gases is for example B
2h
6from arm 30, discharge and extracted out by off-gas pump 40, arm 30 is closed afterwards, B
2h
6be passed into the interior participation reaction of reaction chamber 10, yet in arm 30, also remain part B
2h
6, when reaction chamber 40 completes reaction, another reactant gases is for example for clearing up the O of reaction chamber
2can in reaction chamber 10, by exhaust line 20, by described off-gas pump 40, be extracted out.Yet, have part O
2gas can flow in arm 30 and with the interior residual B of arm 30
2h
6react and generate the particle 31 of like powder shape.As time goes on, particle 31 is cumulative, finally can stop up described arm 30, this will cause device cannot Exhaust Gas pipeline in residual reactant gases, make the reactant gases that enters in reaction chamber 10 excessive, cause the film that forms undesirable.
For fear of the problems referred to above, in prior art, normally regularly arm 30 is cleared up or changed, yet this has reduced production efficiency on the one hand, also need on the other hand extra manpower.So how to avoid that arm is blocked just to be become those skilled in the art and be badly in need of the technical problem solving.
Utility model content
The purpose of this utility model is to provide a kind of device that prevents that tracheae from stopping up, and avoids reactant gases that mixed being incorporated in occurs and in tracheae, forms powder and stop up tracheae.
To achieve these goals, the present embodiment has proposed a kind of device that prevents that tracheae from stopping up, and described device comprises:
Reaction chamber, the first tracheae, the second tracheae, disrupter and exhaust line, wherein, described the first tracheae is connected with the sidewall of described reaction chamber, described the second tracheae is connected with the sidewall of described exhaust line, described exhaust line is connected with described reaction chamber bottom, and described disrupter and described exhaust line fix.
Further, described disrupter comprises spacer sleeve bucket, division board and cylinder, described spacer sleeve bucket one end is fixed in described exhaust line and keeps at a distance with the sidewall of exhaust line, and described division board one end is fixed on described exhaust line sidewall, and the other end and described cylinder fix.
Further, the fixing one end of described spacer sleeve bucket and described exhaust line is provided with sealing-ring.
Further, the described spacer sleeve bucket the other end is provided with rubber ring.
Further, the material of described spacer sleeve bucket is stainless steel.
Further, the material of described division board is stainless steel.
Further, the described device that prevents that tracheae from stopping up also comprises the first pneumavalve and the second pneumavalve, described the first pneumavalve is located on described the first tracheae, and the second pneumavalve is located on described the second tracheae, and described the first pneumavalve is all connected with described cylinder with the second pneumavalve.
Further, described in prevent that the device that tracheae stops up from also comprising the family of power and influence, the described family of power and influence is located between described reaction chamber and described exhaust line.
Further, the described family of power and influence is provided with sealing-ring with the position that described reaction chamber, exhaust line are connected.
Further, described exhaust line is elastic thread shape.
Further, the material of described exhaust line is stainless steel.
Further, described in prevent that the device that tracheae stops up from also comprising off-gas pump, described off-gas pump is connected with described exhaust line.
Compared with prior art, the beneficial effects of the utility model are mainly reflected in: disrupter is installed on exhaust line, when the gas in the second tracheae need to be discharged, disrupter is without action, gas in the second tracheae can be discharged by exhaust line, when the gas in reaction chamber need to be discharged, disrupter action, the second tracheae and exhaust line are kept apart, prevent that gas in reaction chamber from entering in the second tracheae and with the second tracheae in residual gas react, avoid forming powder and stop up the second tracheae in the second tracheae.
Accompanying drawing explanation
Fig. 1 is the structural representation of reaction unit in prior art;
Fig. 2 is the structural representation while preventing the second tracheae exhaust in device that tracheae stops up in the utility model one embodiment;
Fig. 3 is the structural representation while preventing reaction chamber exhaust in device that tracheae stops up in the utility model one embodiment.
Embodiment
Below in conjunction with schematic diagram, the device that prevents that tracheae from stopping up of the present utility model is described in more detail, wherein represented preferred embodiment of the present utility model, should be appreciated that those skilled in the art can revise the utility model described here, and still realize advantageous effects of the present utility model.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as to restriction of the present utility model.
For clear, whole features of practical embodiments are not described.They in the following description, are not described in detail known function and structure, because can make the utility model chaotic due to unnecessary details.Should recognize
In the following passage, with reference to accompanying drawing, with way of example, the utility model is more specifically described.According to the following describes and claims, advantage of the present utility model and feature will be clearer.It should be noted that, accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the object of aid illustration the utility model embodiment lucidly.
Please refer to Fig. 2 and Fig. 3, in the present embodiment, proposed a kind of device that prevents that tracheae from stopping up, described device comprises:
In the present embodiment, described disrupter comprises spacer sleeve bucket 600, division board 510 and cylinder 500, described spacer sleeve bucket 600 one end and described exhaust line 400 fix, described spacer sleeve bucket 600 is positioned at described exhaust line 400, and keep at a distance with the sidewall of exhaust line 400, the fixing one end of described spacer sleeve bucket 600 and described exhaust line 400 is provided with sealing-ring 620, play better sealing function, described spacer sleeve bucket 600 the other ends are provided with rubber ring 610, are convenient to better separation gas of follow-up division board 510 and spacer sleeve bucket 600; Described division board 510 one end are fixed on the sidewall of described exhaust line 400, and the other end and described cylinder 500 fix.
Wherein, the material of described spacer sleeve bucket 600 is stainless steel, and the material of described division board 510 is stainless steel.
In the present embodiment, the described device that prevents that tracheae from stopping up also comprises the family of power and influence 700, the described family of power and influence 700 is located between described reaction chamber 100 and described exhaust line 400, when the described family of power and influence 700 opens, between described reaction chamber 100 and exhaust line 400, be communicated with, be convenient to discharge the gas in described reaction chamber 100; When the described family of power and influence 700 closes, the gas in described reaction chamber 100 just cannot be discharged by described exhaust line 400; Preferably, the described family of power and influence 700, be provided with sealing-ring 710 with the position that described reaction chamber 100, exhaust line 400 are connected, play better sealing function; In order better to discharge the gas in described exhaust line 400, described in prevent that the device that tracheae stops up from also comprising off-gas pump 800, described off-gas pump 800 is connected with described exhaust line 400.
In the present embodiment, described the first pneumavalve 210 is all connected with described cylinder 500 with the second pneumavalve 310, when the second pneumavalve 310 is opened, i.e. and reactant gases B
2h
6in the time of need to discharging unnecessary amount through exhaust line 400, described cylinder 500 can obtain pneumatic singal by the second pneumavalve 310 equally, thereby make described division board 510 in low level, the one end that is not provided with rubber ring 610 with described spacer sleeve bucket 600 is close to, and facilitates reactant gases B
2h
6by described exhaust line 400, discharged, as shown in Figure 2; When the first pneumavalve 210 is opened, the O in the first tracheae 200
2the gas flowing in described reaction chamber 100 also can provide pneumatic singal for described cylinder 500, make described cylinder 500 actions, one end that described in jack-up, division board 510 makes itself and described spacer sleeve bucket 600 be provided with rubber ring 610 is close to, thereby described the second tracheae 300 can be opened with the gas barrier in described exhaust line 400, be avoided flowing in the second tracheae 300 and and B by the O2 of described reaction chamber 100 interior discharges
2h
6the generation powder that reacts, stops up the second tracheae 300, as shown in Figure 3.
For facilitate described cylinder 500 can jack-up described in division board 510, described exhaust line 400 can be elastic thread shape, has certain elasticity, its material can be stainless steel.
To sum up, in the device that prevents tracheae obstruction providing at the utility model embodiment, disrupter is installed on exhaust line, when the gas in the second tracheae need to be discharged, disrupter is without action, gas in the second tracheae can be discharged by exhaust line, when the gas in reaction chamber need to be discharged, disrupter action, the second tracheae and exhaust line are kept apart, prevent that gas in reaction chamber from entering in the second tracheae and with the second tracheae in residual gas react, avoid forming powder and stop up the second tracheae in the second tracheae.
Above are only preferred embodiment of the present utility model, the utility model is not played to any restriction.Any person of ordinary skill in the field; within not departing from the scope of the technical solution of the utility model; the technical scheme that the utility model is disclosed and technology contents are made any type of changes such as replacement or modification that are equal to; all belong to the content that does not depart from the technical solution of the utility model, within still belonging to protection domain of the present utility model.
Claims (12)
1. prevent the device that tracheae stops up, it is characterized in that, described device comprises:
Reaction chamber, the first tracheae, the second tracheae, disrupter and exhaust line, wherein, described the first tracheae is connected with the sidewall of described reaction chamber, described the second tracheae is connected with the sidewall of described exhaust line, described exhaust line is connected with described reaction chamber bottom, and described disrupter and described exhaust line fix.
2. the device that prevents that tracheae from stopping up as claimed in claim 1, it is characterized in that, described disrupter comprises spacer sleeve bucket, division board and cylinder, one end of described spacer sleeve bucket and described exhaust line fix, described spacer sleeve bucket is positioned at described exhaust line, and keep at a distance with the sidewall of exhaust line, one end of described division board is fixed on described exhaust line sidewall, and the other end and described cylinder fix.
3. the device that prevents that tracheae from stopping up as claimed in claim 2, is characterized in that, the fixing one end of described spacer sleeve bucket and described exhaust line is provided with sealing-ring.
4. the device that prevents that tracheae from stopping up as claimed in claim 2, is characterized in that, the other end of described spacer sleeve bucket is provided with rubber ring.
5. the device that prevents that tracheae from stopping up as claimed in claim 2, is characterized in that, the material of described spacer sleeve bucket is stainless steel.
6. the device that prevents that tracheae from stopping up as claimed in claim 2, is characterized in that, the material of described division board is stainless steel.
7. the device that prevents that tracheae from stopping up as claimed in claim 2, it is characterized in that, the described device that prevents that tracheae from stopping up also comprises the first pneumavalve and the second pneumavalve, described the first pneumavalve is located on described the first tracheae, the second pneumavalve is located on described the second tracheae, and described the first pneumavalve is all connected with described cylinder with the second pneumavalve.
8. the device that prevents that tracheae from stopping up as claimed in claim 1, is characterized in that, described in prevent that the device that tracheae stops up from also comprising the family of power and influence, the described family of power and influence is located between described reaction chamber and described exhaust line.
9. the device that prevents that tracheae from stopping up as claimed in claim 8, is characterized in that, the described family of power and influence is provided with sealing-ring with the position that described reaction chamber, exhaust line are connected.
10. the device that prevents that tracheae from stopping up as claimed in claim 1, is characterized in that, described exhaust line is elastic thread shape.
11. devices that prevent that tracheae from stopping up as claimed in claim 10, is characterized in that, the material of described exhaust line is stainless steel.
12. devices that prevent that tracheae from stopping up as claimed in claim 1, is characterized in that, described in prevent that the device that tracheae stops up from also comprising off-gas pump, described off-gas pump is connected with described exhaust line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320588430.0U CN203474891U (en) | 2013-09-23 | 2013-09-23 | Device for preventing air pipe from blocking |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320588430.0U CN203474891U (en) | 2013-09-23 | 2013-09-23 | Device for preventing air pipe from blocking |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203474891U true CN203474891U (en) | 2014-03-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320588430.0U Expired - Fee Related CN203474891U (en) | 2013-09-23 | 2013-09-23 | Device for preventing air pipe from blocking |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203474891U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104863857A (en) * | 2015-04-15 | 2015-08-26 | 武汉新芯集成电路制造有限公司 | Air extracting system of air extracting pump and air extracting pump |
| CN109402608A (en) * | 2017-08-16 | 2019-03-01 | 北京北方华创微电子装备有限公司 | A kind of air-channel system and its control method of atomic layer deposition apparatus |
| WO2020006956A1 (en) * | 2018-07-04 | 2020-01-09 | 惠科股份有限公司 | Method for preventing clogging of vacuum pump pipeline and chemical vapor deposition machine |
| CN110886020A (en) * | 2018-09-07 | 2020-03-17 | 商先创国际股份有限公司 | Plug for a process tube and process unit |
-
2013
- 2013-09-23 CN CN201320588430.0U patent/CN203474891U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104863857A (en) * | 2015-04-15 | 2015-08-26 | 武汉新芯集成电路制造有限公司 | Air extracting system of air extracting pump and air extracting pump |
| CN109402608A (en) * | 2017-08-16 | 2019-03-01 | 北京北方华创微电子装备有限公司 | A kind of air-channel system and its control method of atomic layer deposition apparatus |
| CN109402608B (en) * | 2017-08-16 | 2020-12-08 | 北京北方华创微电子装备有限公司 | Gas path system of atomic layer deposition equipment and control method thereof |
| WO2020006956A1 (en) * | 2018-07-04 | 2020-01-09 | 惠科股份有限公司 | Method for preventing clogging of vacuum pump pipeline and chemical vapor deposition machine |
| US11028475B2 (en) | 2018-07-04 | 2021-06-08 | HKC Corporation Limited | Method for preventing vacuum pump pipeline from blockage, and chemical vapor deposition machine |
| CN110886020A (en) * | 2018-09-07 | 2020-03-17 | 商先创国际股份有限公司 | Plug for a process tube and process unit |
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Legal Events
| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140312 Termination date: 20190923 |
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| CF01 | Termination of patent right due to non-payment of annual fee |