CN203455277U - Measuring device for optical homogeneity of optical glass - Google Patents
Measuring device for optical homogeneity of optical glass Download PDFInfo
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- CN203455277U CN203455277U CN201320587523.1U CN201320587523U CN203455277U CN 203455277 U CN203455277 U CN 203455277U CN 201320587523 U CN201320587523 U CN 201320587523U CN 203455277 U CN203455277 U CN 203455277U
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Abstract
The utility model belongs to the field of detection of optical glass and relates to a measuring device for the optical homogeneity of the optical glass having different refractive indexes due to the stress. The measuring device comprises a light source assembly, an interference color forming assembly, a phase compensator, a CCD (Charge Coupled Device) camera and a computer, wherein the light source assembly is used for providing polarized lights; the interference color forming assembly is used for enabling the polarized lights which are subjected to double refraction to form interference colors; the phase compensator is used for generating different optical path differences; the CCD camera is used for photographing interference color images; the computer is used for acquiring and processing the interference color images. According to the measuring device disclosed by the utility model, the difference values of the refractive indexes of various pixel points are obtained by virtue of the interference color images formed by the double refraction of the optical glass so as to obtain the optical homogeneity of the optical glass; devices utilized by the measuring device are relatively frequently-used optical devices, are simple and easily available and are low in cost; the surface of the optical glass does not need to be specially processed in a measuring process, so that the measurement procedure is simplified, and the cost is further saved.
Description
Technical field
The utility model relates to a kind of measurement mechanism of optical glass optical homogeneity, belongs to optical glass detection field, particularly relates to a kind of device and method of measuring the main optical homogeneity by the different optical glass of stress guide induced refractive index.
Background technology
The optical homogeneity of optical glass refers to the degree of irregularity of same inside glass refractive index.While there is the uneven distribution of element or chemical bond in optical glass, the chemical stress producing or structural stress can cause the refractive index on optical glass diverse location different, and the difference DELTA n that everybody is set up largest refractive index and minimum refractive index with optical glass conventionally represents the optical homogeneity of this optical glass.Optical homogeneity is the important parameter of reflection optical glass quality, has determined the usability of optical glass, is also to characterize a kind of inhomogeneity method of optical glass structure.In links such as the production of optical glass, checks, realize optical homogeneity low cost, quick, easy quantitative measurment can be enhanced productivity greatly.
At present, the method for testing of optical glass homogeneity mainly contains collimator method, asterism method, Knife-edge Shadow method and interferometric method.First three is planted method of testing and is method for qualitative analysis.Interferometric method is to use the method for interferometer quantitative measurment optical homogeneity.< < colouless optical glass method of testing optical homogeneity striking cable plane interferometric method > > (GBT7962.2-2010) is the method for testing of the optical glass homogeneity comparatively commonly used.The method adopts the optical homogeneity of striking cable plane interferometer measurement colouless optical glass, during measurement, part light is successively by optical parallel, testing sample, and returned by standard reflection mirror reflection Hou Youyuan road, another part light is directly reflected back by optical parallel, and the interference fringe forming after this two-way interference of light has comprised the optical homogeneity information of testing sample.
Inventor, in realizing process of the present invention, finds that prior art at least exists following defect:
Existing interferometer is expensive, measures cost high; While measuring by interferometric method, the surface of optical glass sample to be measured need to be carried out polishing, applies REFRACTIVE LIQUID or be pasted the processing such as making sheet, to avoid the coarse phenomenon that cannot form interference fringe causing of sample surfaces, measure complex process, measure cost and measure difficulty all higher.
Utility model content
The utility model provides a kind of measurement mechanism of optical glass optical homogeneity, and described optical glass is different by stress guide induced refractive index, and described measurement mechanism, comprising: light source assembly, for polarized light is provided; Interference color form assembly, for making that birefringent described polarized light occurs, form interference color; Phase compensator, for generation of different optical path differences; CCD camera, for taking interference color chart picture; And computing machine, for obtaining and process described interference color chart picture.
Preferably, described interference color form assembly, comprise analyzer; Described light source assembly, comprises; Light source; And the polarizer, between described light source and described analyzer, the polarization direction of the described polarizer and the polarization direction of described analyzer are orthogonal; Described light source, the described polarizer and described analyzer are arranged in same light path.
Further, described light source assembly, also comprises: the first convex lens, between described light source and the described polarizer; Scatter plate, between described the first convex lens and the described polarizer; Described light source, is positioned at described the first convex lens away from the focus place of described scatter plate one side.
Further, described interference color form assembly, also comprise: full slide, between the described polarizer and described analyzer; The second convex lens; Described analyzer, between described full slide and described the second convex lens; Described CCD camera, is positioned at described the second convex lens away from the focus place of described analyzer one side.
Further, described light source assembly, also comprises: the first casing, and it is provided with one first openend; Described light source, is positioned at described the first casing, and away from described the first openend; The described polarizer, is positioned at described the first openend; Described interference color form assembly, also comprise: the second casing, and it is provided with one second openend, and described the second openend is relative with described the first openend; Described analyzer, is positioned at described the second openend; Described CCD camera, is positioned at described the second casing, and away from described the second openend.
Further, the measurement mechanism of described optical glass optical homogeneity, also comprises: pedestal; Described light source assembly, is connected with described pedestal one end; Described interference color form assembly, are connected with one end relative with described light source assembly of described pedestal.
Further, the measurement mechanism of described optical glass optical homogeneity, also comprises: sample stage, at described light source assembly and described interference color, form between assembly, and for carrying described optical glass, by leading screw, be connected with described pedestal.
By technique scheme, the measurement mechanism of the utility model optical glass optical homogeneity at least has following advantages:
The measurement mechanism of the optical glass optical homogeneity that the utility model provides, by the interference color chart picture that utilizes optical glass birefringence to form, obtain the refractive index difference of each pixel, thereby obtain the optical homogeneity of optical glass, this installs device used is more conventional optical device, simple and easy to get and with low cost; Birefringent phenomenon is caused by optical glass internal stress, irrelevant with optical glass surface flatness, therefore, during measurement, without optical glass surface is carried out to special processing, has simplified measuring process and has further saved cost.
Above-mentioned explanation is only the general introduction of technical solutions of the utility model, in order to better understand technological means of the present utility model, and can be implemented according to the content of instructions, below with preferred embodiment of the present utility model and coordinate accompanying drawing to be described in detail as follows.
Accompanying drawing explanation
Fig. 1 is the measurement mechanism structural representation of the optical glass optical homogeneity that provides of the utility model embodiment;
Fig. 2 is the measurement mechanism internal structure schematic diagram of the optical glass optical homogeneity that provides of the utility model embodiment;
Fig. 3 makes the refractive index difference contour map of the utility model embodiment 3.
Embodiment
For further setting forth the utility model, be to reach technological means and the effect that predetermined goal of the invention is taked, below in conjunction with accompanying drawing and preferred embodiment, its embodiment of measurement mechanism, structure, feature and effect thereof to the optical glass optical homogeneity according to the utility model proposes, be described in detail as follows.In following explanation, the not necessarily same embodiment that different " embodiment " or " embodiment " refer to.In addition, special characteristic, structure or the feature in one or more embodiment can be combined by any suitable form.
Embodiment 1
As depicted in figs. 1 and 2, the measurement mechanism of a kind of optical glass optical homogeneity that the utility model embodiment proposes, measured optical glass is different by stress guide induced refractive index, and described measurement mechanism comprises that light source assembly 10, interference color form assembly 30, phase compensator (not shown), CCD camera 2 and computing machine 4.Light source assembly 10 consists of light source and the polarizer and/or other basic optical devices that can form polarized light, for making light source generation polarization so that polarized light to be provided; Interference color form assembly 30 and consist of analyzer or other optical device that can make this polarized light produce interference after birefringence, for making that birefringent described polarized light occurs, form interference color; Described phase compensator, for making described polarized light produce different optical path differences after birefringence, to obtain every kind of interference color that optical path difference is corresponding; CCD camera 2, for taking the interference color that form after described polarized light birefringence, obtains interference color chart picture; Computing machine 4 is connected with CCD camera 2, for obtaining, store and process described interference color chart picture.
The optical glass with stress, because each is to the same sex not, it is the same by some anisotropic crystal that light can produce light during by it, produces birefringent phenomenon, in having the glass of internal stress, light is broken down into two bundle light, the velocity of propagation of this two bundles light in glass is different is that refractive index is different, and a branch of refraction law of observing is called ordinary light, and a branch of refraction law of not observing is called non-ordinary light, because refractive index is different, two-beam produces certain optical path difference after optical glass.
The inhomogeneity measurement mechanism of optics slide that the present embodiment provides, during work, first puts into phase compensator light source assembly 10 and interference color and forms between assembly 30, makes light source assembly 10, described phase compensator and interference color form assembly 30 and is arranged in same light path; Open light source assembly 10 and produce polarized light, described phase compensator makes described polarized light produce different optical path differences; Polarized light under different optical path differences forms the interference color that color is different after interference color form assembly 30, takes described interference color chart picture, and be transferred to computing machine 4 by CCD camera 2; Computing machine 4 obtains after described interference color chart picture, and optical path difference and particular color is corresponding associated; Then described phase compensator is taken out from light path, put into optical glass 100 to be measured, by CCD camera 2, take the interference color chart picture that polarized light forms after these optical glass 100 refractions, and interference color chart is looked like to be transferred to computing machine 4, computing machine 4 obtains after this interference color chart picture, according to acquired described optical path difference and particular color relation, draw the optical path difference δ of this each pixel of interference color chart picture, according to δ, calculate the described non-ordinary light of each pixel and the refractive index difference Δ n of ordinary light
i, Δ n
i=d δ, wherein, d is the thickness of this some place sample, δ is the optical path difference at this some place, Δ n
imaximal value and the difference of the minimum value optical homogeneity value that is described optical glass.
The measurement mechanism of the optical glass optical homogeneity that the present embodiment provides, by the interference color chart picture that utilizes optical glass birefringence to form, obtain the refractive index difference of each pixel, thereby obtain the optical homogeneity of optical glass, this installs device used is more conventional optical device, simple and easy to get and with low cost; Birefringent phenomenon is caused by optical glass internal stress, irrelevant with optical glass surface flatness, therefore, during measurement, without optical glass surface is carried out to special processing, has simplified measuring process and has further saved cost.
Preferably, as shown in Figure 2, light source assembly 10 comprises the first casing 11, light source 12 and the polarizer 13, the right side of the first casing 11 is provided with the first openend, light source 12 is positioned at the first casing 11, and away from described the first openend, the polarizer 13 is positioned at described the first openend, make the first casing 11 form the casing of a closure; Interference color form assembly 30 and comprise: the second casing 31 and analyzer 32, the second casing 31 left sides are provided with the second openend, and described the second openend is relative with described the first openend; Analyzer 32 is positioned at described the second openend, and the polarization direction of the polarization direction of analyzer 32 and the polarizer 13 is orthogonal; CCD camera 2 is positioned at the second casing 31, and away from described the second openend; Light source 10, the polarizer 13, analyzer 32 and CCD camera 2 are positioned in same light path.
Preferably, light source assembly 10 also comprises the first convex lens 14 and scatter plate 15.The first convex lens 14 are positioned at the first casing 11, and for making the light that light source 12 sends form directional light, light source 12 is positioned at the focus place in the left side of the first convex lens 14; Scatter plate 15 is between the first convex lens 14 and the polarizer 13, for obtaining uniform light.
By the first convex lens 14 and scatter plate 15 are set, light source 12 is sent and concentrate uniform light, be conducive to form uniform interference color.
Preferably, in the present embodiment, phase compensator used is standard quartz wedge, and brand is German Leitz, can produce the optical path difference of 0-1300nm; Quartz wedge from top to bottom thickness gradually changes, and the polarized light that sees through its diverse location forms different optical path differences, and the optical path difference that thinnest part produces is 0nm, and the optical path difference that thickness produces is 1300nm; Polarized light produces the interference color chart picture with its form fit after quartz wedge, and therefore, only need carry out one-shot measurement can determine the optical path difference that these interference color are corresponding according to the position of a certain interference color, has greatly saved Measuring Time.
Preferably, interference color formation assembly 30 also comprises full slide 34 and the second convex lens 33.Full slide 34 is positioned at described the second openend, make the second casing 31 form a seal case, analyzer 32 is between full slide 34 and the second convex lens 33, full slide 34 is for providing an additional optical path difference, full slide preferred light path difference is 565nm, when slide 34 entirely, phase compensator in the present embodiment can produce the optical path difference of 0-1300nm, after adding full slide 34, can produce the optical path difference of 565nm-1865nm, by inserting or take off full slide 34, expand the optical path difference scope that phase compensator can access; The second convex lens 33 are positioned at the second casing 31, and the CCD chip of CCD camera 2 is positioned at the focus place on its right side, and the second convex lens 33 are for focused ray, so that interference color chart picture is clearly arrived in 2 picked-ups of CCD camera.
Preferably, the measurement mechanism of described optical glass optical homogeneity, also comprises pedestal 50, and as shown in Figure 2, light source assembly 10 is positioned at the left end of pedestal 50, and interference color form the right-hand member that assembly 30 is positioned at pedestal 50.
By pedestal is set, improved the globality of whole measurement mechanism, be convenient to mobile or transportation measurement mechanism.
Preferably, the measurement mechanism of described optical glass optical homogeneity, also comprise sample stage 20, sample stage 20 is positioned at the middle part of pedestal 50, it comprises pallet 21 and screw mandrel 22, pallet 21 is connected with pedestal 50 by leading screw 22, and pallet 21 is for bearing optical glass, and leading screw 22 is for regulating the height up and down of sample stage.By regulating sample stage 20 can regulate optical glass to be measured position in light path, to obtain best measurement position.
The utility model embodiment provides a kind of measuring method of optical glass optical homogeneity, and described method comprises:
Step 1: measure and record a polarized light and carry out after birefringence, the interference color chart picture under each optical path difference, specifically comprises:
The measurement mechanism that the method adopts above-described embodiment to provide is measured;
Whether normally before measurement, first detect measurement mechanism, measuring method is: open light source 12, light is successively by each optical device in light path, impinge upon on CCD camera 2, observe and on computing machine 40, whether demonstrate the interference color chart picture that CCD camera 2 is taken, if show image, indication device is normal, can test, if unrealistic, can finely tune each device in device, until demonstrate interference color chart picture on computing machine 40;
Then, first phase compensator is placed on sample stage 20, adjusts the height of sample stage 20, make light source assembly 10, described phase compensator and interference color form assembly 30 and be arranged in same light path; Open light source assembly 10 and produce polarized light, described phase compensator makes described polarized light produce different optical path differences, polarized light under different optical path differences forms the interference color that color is different after interference color form assembly 30, takes described interference color chart picture, and be transferred to computing machine 4 by CCD camera 2; Computing machine 4 obtains after described interference color chart picture, obtains the RGB data of interference color, and optical path difference is corresponding associated with the RGB data of its particular color, obtains optical path difference and the RGB data relationship table of comparisons; For a set of measurement mechanism, step above-mentioned steps only need be carried out once, and the optical path difference that it obtains and the RGB data relationship table of comparisons are reusable;
In the present embodiment, phase compensator used is standard quartz wedge, and brand is German Leitz, can produce the optical path difference of 0-1300nm;
Step 2: measure and record described polarized light by the interference color chart picture of optical glass to be measured with identical measurement mechanism, specifically comprise:
Described phase compensator is taken off from sample stage 20, optical glass to be measured is put on sample stage 20, regulate the height of sample stage 20, make the correct position of described optical glass in light path, adjust described optical glass, make its logical light face to be measured perpendicular to light path, by CCD camera 2, take the interference color chart picture that polarized light forms after this optical glass refraction, and interference color chart is looked like to be transferred to computing machine 4;
Step 3: the interference color chart under each pixel in the interference color chart picture of described optical glass and described each optical path difference is looked like to contrast, draw the optical path difference δ of described each pixel of optical glass, specifically comprise:
Step 4: the refractive index difference Δ n that obtains described each pixel of optical glass according to described optical path difference δ
i, Δ n
i=d δ, wherein d is the thickness that optical glass is stated in this place, δ is the optical path difference at this some place, Δ n
imaximal value and the difference of the minimum value optical homogeneity value that is described optical glass.
The measuring method that the utility model embodiment provides realizes the low cost of optical glass homogeneity, quick, easy measurement, has reduced detection processing cost, has simplified trace routine, has improved the checkability of optical glass.
Obtain the refractive index difference Δ n of described each pixel
iafter, by the Δ n of each point
imode with three-dimensional plot draws, and obtains the surface chart of index distribution, and the optical homogeneity that can evaluate more intuitively optical glass distributes.
Embodiment 3
The method providing with embodiment 2, measures the homogeneity of an optical glass, and described optical glass to be measured is different by stress guide induced refractive index, this optical glass is of a size of 54mm * 19mm, thickness is 20mm, and Fig. 3 is the refractive index difference contour map that records this sample, from measurement data, can obtain Δ n
imaximal value is 4.9 * 10
-6, Δ n
iminimum value is-5.8 * 10
-6, the difference of the two is 1.17 * 10
-5therefore, the optical homogeneity of this sample is 1.17 * 10
-5.In addition, Δ n as can be seen from Figure 3
idistribution gradient, the position that the homogeneity that can visually see is like this poor.
The above, it is only preferred embodiment of the present utility model, not the utility model is done to any pro forma restriction, although the utility model discloses as above with preferred embodiment, yet not in order to limit the utility model, any those skilled in the art, do not departing within the scope of technical solutions of the utility model, when can utilizing the technology contents of above-mentioned announcement to make a little change or being modified to the equivalent embodiment of equivalent variations, in every case be the content that does not depart from technical solutions of the utility model, any simple modification of above embodiment being done according to technical spirit of the present utility model, equivalent variations and modification, all still belong in the scope of technical solutions of the utility model.
Claims (7)
1. a measurement mechanism for optical glass optical homogeneity, described optical glass is different by stress guide induced refractive index, it is characterized in that, and described measurement mechanism, comprising:
Light source assembly, for providing polarized light;
Interference color form assembly, for making that birefringent described polarized light occurs, form interference color;
Phase compensator, for generation of different optical path differences;
CCD camera, for taking interference color chart picture; And
Computing machine, for obtaining and process described interference color chart picture.
2. the measurement mechanism of optical glass optical homogeneity according to claim 1, is characterized in that:
Described interference color form assembly, comprise analyzer;
Described light source assembly, comprises;
Light source; And
The polarizer, between described light source and described analyzer, the polarization direction of the described polarizer and the polarization direction of described analyzer are orthogonal;
Described light source, the described polarizer and described analyzer are arranged in same light path.
3. the measurement mechanism of optical glass optical homogeneity according to claim 2, is characterized in that, described light source assembly, also comprises:
The first convex lens, between described light source and the described polarizer;
Scatter plate, between described the first convex lens and the described polarizer;
Described light source, is positioned at described the first convex lens away from the focus place of described scatter plate one side.
4. the measurement mechanism of optical glass optical homogeneity according to claim 2, is characterized in that, described interference color form assembly, also comprise:
Full slide, between the described polarizer and described analyzer;
The second convex lens;
Described analyzer, between described full slide and described the second convex lens;
Described CCD camera, is positioned at described the second convex lens away from the focus place of described analyzer one side.
5. the measurement mechanism of optical glass optical homogeneity according to claim 2, is characterized in that:
Described light source assembly, also comprises:
The first casing, it is provided with one first openend;
Described light source, is positioned at described the first casing, and away from described the first openend;
The described polarizer, is positioned at described the first openend; And/or
Described interference color form assembly, also comprise:
The second casing, it is provided with one second openend, and described the second openend is relative with described the first openend;
Described analyzer, is positioned at described the second openend;
Described CCD camera, is positioned at described the second casing, and away from described the second openend.
6. according to the measurement mechanism of the optical glass optical homogeneity described in claim 1-5 any one, it is characterized in that, also comprise:
Pedestal;
Described light source assembly, is connected with described pedestal one end;
Described interference color form assembly, are connected with one end relative with described light source assembly of described pedestal.
7. the measurement mechanism of optical glass optical homogeneity according to claim 6, is characterized in that, also comprises:
Sample stage, forms between assembly at described light source assembly and described interference color, for carrying described optical glass, by leading screw, is connected with described pedestal.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103543129A (en) * | 2013-09-23 | 2014-01-29 | 中国建筑材料科学研究总院 | Device and method for measuring optical uniformity of optical glass |
| CN110687075A (en) * | 2019-10-28 | 2020-01-14 | 华中科技大学 | Optical workpiece uniformity interference detection method |
-
2013
- 2013-09-23 CN CN201320587523.1U patent/CN203455277U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103543129A (en) * | 2013-09-23 | 2014-01-29 | 中国建筑材料科学研究总院 | Device and method for measuring optical uniformity of optical glass |
| CN103543129B (en) * | 2013-09-23 | 2016-08-10 | 中国建筑材料科学研究总院 | The measurement apparatus of optical glass optical homogeneity and measuring method |
| CN110687075A (en) * | 2019-10-28 | 2020-01-14 | 华中科技大学 | Optical workpiece uniformity interference detection method |
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