CN203432678U - Acoustic surface wave sensor for resisting same frequency interference - Google Patents
Acoustic surface wave sensor for resisting same frequency interference Download PDFInfo
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- CN203432678U CN203432678U CN201320476249.0U CN201320476249U CN203432678U CN 203432678 U CN203432678 U CN 203432678U CN 201320476249 U CN201320476249 U CN 201320476249U CN 203432678 U CN203432678 U CN 203432678U
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Abstract
The utility model relates to an acoustic surface wave sensor for resisting same frequency interference, characterized by comprising a piezoelectric substrate and a plurality of acoustic surface wave resonators; the acoustic surface wave resonators are in parallel connection and parallelly arranged on the piezoelectric substrate; the resonant frequencies of the acoustic surface wave resonators are different and the frequency difference is controlled in a scope of 1 kHz- 1000 kHz; the number of the acoustic surface wave resonators is three or more than three. The acoustic surface wave sensor has a simple and compact structure and can improve the anti-interference capability.
Description
Technical field
The utility model is specifically related to a kind of surface acoustic wave sensor of resisting co-channel interference.
Background technology
Existing wireless sensor technology, to the detection of mobile object and at hazardous environment, as high temperature, has great application prospect in the measurement application in the scenes such as high electromagnetic radiation.Sensor based on SAW is complete passive (without battery), in many application, has high reliability.Coordinate with wireless echo read write line, the wireless information transfer scope of these passive sensors likely reaches the distance of 5 meters.
Due to the echoed signal of surface acoustic wave (SAW) sensor conventionally a little less than, also be difficult to adopt modulation system habitual in radio communication, therefore, when periphery exists the frequency of interference source and this interference source, just in time drop in the resonant frequency range in SAW working sensor interval, just cannot the correctly judge signal of which Frequency point of traditional detection mode is the echoed signal that belongs to SAW sensor.People also attempt first the frequency spectrum of ground unrest being carried out to record before detecting, and then the frequency spectrum of the signal spectrum detecting and ground unrest is contrasted to filter out the echo frequency that belongs to SAW sensor, but in some cases, the frequency spectrum of ground unrest is time to time change, thereby this mode according to frequency spectrum complete failure in this case.
Traditional SAW sensor uses a resonator, by detecting the resonance frequency of this resonator, obtain the physical quantity change information of institute's perception, because the echo of SAW resonator is the signal of non-modulated, therefore when periphery exists the interference source of same frequency, read write line just cannot correctly identify the echoed signal of SAW sensor, and this has brought very large restriction to the application of SAW sensor.
Existing people realize two SAW resonators that characteristic is different in same substrate, the missionary society of the resonance frequency of these two resonators changes along with the variation of external physical quantity (as temperature, pressure etc.), this variation relation is clear and definite and definite, the SAW sensor of the so-called differential type realized in this way can be eliminated the problem of the resonance frequency shift causing because of process consistency or device aging, but similarly, it also cannot work when having outside co-channel interference source.
Summary of the invention
The purpose of this utility model is: provide a kind of not only simple in structure, compact, and can improve the surface acoustic wave sensor of the opposing co-channel interference of antijamming capability, it utilizes the correlativity of a plurality of SAW (Surface Acoustic Wave) resonator in resonance frequency, improves the antijamming capability of surface acoustic wave sensor; In actual conditions, can select as required the resonator of varying number, number of resonators is more, and antijamming capability is stronger.To overcome the deficiencies in the prior art.
In order to achieve the above object, the technical solution of the utility model is: a kind of surface acoustic wave sensor of resisting co-channel interference, and its innovative point is:
A, comprise piezoelectric substrate and a plurality of SAW (Surface Acoustic Wave) resonator;
B, described a plurality of SAW (Surface Acoustic Wave) resonator are in parallel and be located in parallel to each other in piezoelectric substrate;
The resonance frequency of c, described a plurality of SAW (Surface Acoustic Wave) resonator is different, and the difference on the frequency between a plurality of SAW (Surface Acoustic Wave) resonator is controlled in the scope of 1KHz～1000KHz;
D, described a plurality of SAW (Surface Acoustic Wave) resonator are more than 3 or 3.
In technique scheme, also comprise housing and the cap of connection sealed to each other, described piezoelectric substrate and a plurality of SAW (Surface Acoustic Wave) resonator are all located in housing.
In technique scheme, described piezoelectric substrate is piezoelectric chip, and piezoelectric chip is quartzy, or lithium niobate, or lithium tantalate.
In technique scheme, described piezoelectric substrate comprises piezoelectric membrane and substrate, and piezoelectric membrane is located at the upper surface of substrate, and a plurality of SAW (Surface Acoustic Wave) resonator is located on piezoelectric membrane.
In technique scheme, described piezoelectric substrate is piezoelectric ceramics, and piezoelectric ceramics is lead zirconate titanate, or barium titanate, or lead titanates.
In technique scheme, described piezoelectric membrane is zinc paste or aluminium nitride, and described substrate is quartz or adamas.
In technique scheme, described housing and cap are respectively metal shell and metal cap, or are respectively ceramic shell and metal cap.
In technique scheme, the difference on the frequency between described a plurality of SAW (Surface Acoustic Wave) resonator can be identical, or different.
In technique scheme, the THICKNESS CONTROL of described piezoelectric membrane is within the scope of 1000-10000 dust.
The good effect that the utility model has is: owing to having adopted after above-mentioned sensor construction, during use, read write line, by antenna and the utility model radio communication, and is placed on to measured position by the utility model; The utility model is located in piezoelectric substrate by more than 3 or 3 SAW (Surface Acoustic Wave) resonator in parallel to each other, the signal spectrum that read write line collects comprises resonance frequency and the external disturbance frequency of a plurality of SAW (Surface Acoustic Wave) resonator, can analyze this signal spectrum, can separate the echoed signal of resonator in right area, even also can work while having outside co-channel interference source.The utility model is not only simple in structure, compact, and can improve antijamming capability.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model the first embodiment;
Fig. 2 is the vertical view of Fig. 1;
Fig. 3 is the structural representation of the utility model the second embodiment;
Fig. 4 is the structural representation of the third embodiment of the utility model;
Fig. 5 is the structural representation of the 4th kind of embodiment of the utility model;
Fig. 6 is the use constitutional diagram of the utility model the first embodiment, wherein, the 7th, read write line.
Embodiment
Below in conjunction with accompanying drawing and the embodiment that provides, the utility model is further described, but is not limited to this.
As shown in Figure 1, 2, a kind of surface acoustic wave sensor of resisting co-channel interference, comprises piezoelectric substrate 1 and a plurality of SAW (Surface Acoustic Wave) resonator 2; Described a plurality of SAW (Surface Acoustic Wave) resonator 2 is in parallel and be located in parallel to each other in piezoelectric substrate 1; The resonance frequency of described a plurality of SAW (Surface Acoustic Wave) resonator 2 is different, and the difference on the frequency between a plurality of SAW (Surface Acoustic Wave) resonator 2 is controlled in the scope of 1kHz～1000kHz; Described a plurality of SAW (Surface Acoustic Wave) resonator 2 is more than 3 or 3.
Difference on the frequency between a plurality of SAW (Surface Acoustic Wave) resonator 2 described in the utility model can be identical, or different.If the difference on the frequency between a plurality of SAW (Surface Acoustic Wave) resonator 2 is too small, accuracy of detection does not reach, if excessive, can band occupancy resource too many, causes frequency resource waste.
When external condition (as temperature, pressure etc.) changes, the difference of the frequency between SAW (Surface Acoustic Wave) resonator 2 of the present utility model is constant, can not be subject to external condition and changes and change.
As shown in Figure 3, be with the difference of embodiment 1: described piezoelectric substrate 1 comprises piezoelectric membrane 5 and substrate 6, and piezoelectric membrane 5 is located at the upper surface of substrate 6, and a plurality of SAW (Surface Acoustic Wave) resonator 2 is located on piezoelectric membrane 5.Described piezoelectric membrane 5 is zinc paste or aluminium nitride, and described substrate 6 is quartz or adamas.Other structure of embodiment 2 is identical with embodiment 1.And a plurality of SAW (Surface Acoustic Wave) resonator 2 are by the acting in conjunction of piezoelectric membrane 5 and substrate 6, to obtain certain acoustic surface wave propagation characteristic.
The THICKNESS CONTROL of piezoelectric membrane 5 described in the utility model is within the scope of 1000-10000 dust.Wherein, 1 dust=0.0000001mm.Certainly, the thickness of described piezoelectric membrane 5 is not limited to this, can design according to index request the thickness of piezoelectric membrane.
As shown in Figure 4, be with the difference of embodiment 1: also comprise the housing being connected 3 sealed to each other and cap 4, described piezoelectric substrate 1 and a plurality of SAW (Surface Acoustic Wave) resonator 2 are all located in housing 3, and piezoelectric substrate 1 is located at the bottom in housing 3.Other structure of embodiment 3 is identical with embodiment 1.
Described housing 3 and cap 4 are respectively metal shell and metal cap, or are respectively ceramic shell and metal cap.Described housing 3 and cap 4 can effectively be protected SAW (Surface Acoustic Wave) resonator 2, guarantee stability and the sensitivity of SAW (Surface Acoustic Wave) resonator 2 work, prevent from polluting.
Embodiment 4
As shown in Figure 5, be with the difference of embodiment 1: also comprise the housing being connected 3 sealed to each other and cap 4, described piezoelectric substrate 1 comprises piezoelectric membrane 5 and substrate 6, and piezoelectric membrane 5 is located at the upper surface of substrate 6, and a plurality of SAW (Surface Acoustic Wave) resonator 2 are located on piezoelectric membrane 5, described piezoelectric membrane 5, substrate 6 and a plurality of SAW (Surface Acoustic Wave) resonator 2 are all located in housing 3, and substrate 6 is located at the bottom in housing 3.
Described housing 3 and cap 4 are respectively metal shell and metal cap, or are respectively ceramic shell and metal cap.Described piezoelectric membrane 5 is zinc paste or aluminium nitride, and described substrate 6 is quartz or adamas.And a plurality of SAW (Surface Acoustic Wave) resonator 2 are by the acting in conjunction of piezoelectric membrane 5 and substrate 6, to obtain certain acoustic surface wave propagation characteristic.Described housing 3 and cap 4 can effectively be protected SAW (Surface Acoustic Wave) resonator 2, guarantee stability and the sensitivity of SAW (Surface Acoustic Wave) resonator 2 work, prevent from polluting.
As shown in Figure 6, when the utility model is used, pass through aerial radio communication with read write line 7, the utility model is placed on measured position, and read write line 7 with the electromagnetic wave that produces particular frequency range with the SAW (Surface Acoustic Wave) resonator 2 in stimulus sensor, the echo that receives SAW (Surface Acoustic Wave) resonator 2 is also resolved and is analyzed this time wave frequency.
As shown in Figure 6, read write line 7 can have two kinds of modes to encourage surface acoustic wave sensor of the present utility model and detect its echoed signal.
First kind of way is to adopt single-frequency point frequency sweep, in surface acoustic wave sensor is measured the corresponding frequency range of range, pass through and send the Excitation Electromagnetic Wave signal of a frequency at every turn and receive and detection of echoes signal according to certain frequency step, under normal circumstances, when having completed one, read write line takes turns after frequency sweep action, in its received signal spectrum, should comprise the Frequency point identical with SAW (Surface Acoustic Wave) resonator quantity in sensor and quantity interference source not etc., owing to belonging to the echo of SAW (Surface Acoustic Wave) resonator, in frequency, be correlated with, be between them, to have fixing difference on the frequency, therefore we are easy to them and undesired signal to distinguish.The number of resonators comprising in sensor is more, and its antijamming capability is stronger.
The second way is to adopt multifrequency point frequency sweep, in surface acoustic wave sensor is measured the corresponding frequency range of range, pass through and send the Excitation Electromagnetic Wave signal being synthesized by a plurality of frequencies at every turn and receive and detection of echoes signal according to certain frequency step.The signal of a plurality of frequencies of synthesized, relation between its frequency quantity and frequency is constraint not, but a kind of comparatively effectively mode is that the quantity of resonator in the frequency difference between the quantity of the frequency of this composite signal and each frequency and surface acoustic wave sensor and the difference of each resonator resonance frequency are mapped, our echoed signal of all SAW (Surface Acoustic Wave) resonator in synchronization obtains sensor simultaneously likely like this, and do not need whole working frequency range all to carry out taking turns frequency sweep.Another benefit is, compare with first kind of way (being single-frequency point frequency sweep), read write line do not need by frequency sweep process not in the same time detected signal spectrum superpose, greatly reduce the spurious correlation of the undesired signal causing due to spectral overlay, thereby improved antijamming capability.
Below anti-co-channel interference mechanism of the present utility model is described: supposition is fi(i=1～n with the resonance frequency of the SAW (Surface Acoustic Wave) resonator 2 in a piezoelectric substrate 1), external noise frequency is fnoise, difference on the frequency between each SAW (Surface Acoustic Wave) resonator 2 is Δ i(i=1～n-1), difference on the frequency is different, be Δ i ≠ Δ j (i, j=1～n, i ≠ j).
Suppose in the working range of SAW (Surface Acoustic Wave) resonator, from Fstart to Fend, there is an interference source at this frequency separation in the variation range of the resonance frequency fi of SAW (Surface Acoustic Wave) resonator simultaneously,
When SAW (Surface Acoustic Wave) resonator quantity is 1, in the signal spectrum that read write line collects, there are two points of fnoise and f1, wherein:
Fstart ≤ fnoise ≤ Fend
Fstart ≤ f1 ≤ Fend
Therefore, read write line cannot distinguish f1 and fnoise.
When the quantity of SAW (Surface Acoustic Wave) resonator is 2, in the signal spectrum that read write line collects, there are tri-points of fnoise, f1 and f2, wherein:
Fstart ≤ fnoise ≤ Fend
Fstart ≤ f1 ≤ Fend
Fstart ≤ f2 ≤ Fend
f2 - f1 = Δ1
When the difference of fnoise and f1 or f2 also equals Δ 1, read write line cannot be distinguished the echoed signal of noise signal and resonator.
When the quantity of SAW (Surface Acoustic Wave) resonator is 3, in the signal spectrum that read write line collects, there are fnoise, f1, f2 and tetra-points of f3, wherein:
Fstart ≤ fnoise ≤ Fend
Fstart ≤ f1 ≤ Fend
Fstart ≤ f2 ≤ Fend
Fstart ≤ f3 ≤ Fend
f3 - f2 = Δ2 （1）
f2 - f1 = Δ1 （2）
Δ2 ≠Δ1 （3）
No matter how fnoise changes, and read write line can both right area separates the echoed signal of SAW (Surface Acoustic Wave) resonator according to the relation of above-mentioned (1), (2), (3) three formulas.
If there are two interference sources in the frequency range of above-mentioned Fstart～Fend, only have when the difference of the frequency of these two interference sources just in time equals Δ 1 or Δ 2, just likely there is erroneous judgement in read write line, but the probability that this situation occurs is in actual applications lower.The bandwidth of supposing working frequency range is 1MHz, and the frequency resolution of read write line is 1kHz, and we can calculate simply and occur that the probability of erroneous judgement is 0.2%.
The quantity of SAW (Surface Acoustic Wave) resonator is increased to 4, can greatly reduce the probability of miscarriage of justice in many interference sources situation, hypothesis based on same and calculating, the probability that we can estimate erroneous judgement is less than 100,000/, and the probability of its erroneous judgement when the number of interference source increases is only linear and increases.
Owing to increasing, the quantity of SAW (Surface Acoustic Wave) resonator is very little on the impact of manufacturing cost, so we can realize 4,5 even more SAW (Surface Acoustic Wave) resonator easily in piezoelectric substrate, to obtain stronger anti-co-channel interference ability.The utility model, according to actual conditions and technical requirement, select the number of SAW (Surface Acoustic Wave) resonator, and the number of SAW (Surface Acoustic Wave) resonator is more than 3 or 3.
The utility model is not only simple in structure, compact, and can improve antijamming capability.
Claims (9)
1. a surface acoustic wave sensor of resisting co-channel interference, is characterized in that:
A, comprise piezoelectric substrate (1) and a plurality of SAW (Surface Acoustic Wave) resonator (2);
B, described a plurality of SAW (Surface Acoustic Wave) resonator (2) are in parallel and be located in parallel to each other in piezoelectric substrate (1);
The resonance frequency of c, described a plurality of SAW (Surface Acoustic Wave) resonator (2) is different, and the difference on the frequency between a plurality of SAW (Surface Acoustic Wave) resonator (2) is controlled in the scope of 1kHz～1000kHz;
D, described a plurality of SAW (Surface Acoustic Wave) resonator (2) are more than 3 or 3.
2. the surface acoustic wave sensor of opposing co-channel interference according to claim 1, it is characterized in that: also comprise housing (3) and the cap (4) of connection sealed to each other, described piezoelectric substrate (1) and a plurality of SAW (Surface Acoustic Wave) resonator (2) are all located in housing (3).
3. the surface acoustic wave sensor of opposing co-channel interference according to claim 1 and 2, is characterized in that: described piezoelectric substrate (1) is piezoelectric chip, and piezoelectric chip is quartzy, or lithium niobate, or lithium tantalate.
4. the surface acoustic wave sensor of opposing co-channel interference according to claim 1 and 2, it is characterized in that: described piezoelectric substrate (1) comprises piezoelectric membrane (5) and substrate (6), and piezoelectric membrane (5) is located at the upper surface of substrate (6), and a plurality of SAW (Surface Acoustic Wave) resonator (2) is located on piezoelectric membrane (5).
5. the surface acoustic wave sensor of opposing co-channel interference according to claim 1 and 2, is characterized in that: described piezoelectric substrate (1) is piezoelectric ceramics, and piezoelectric ceramics is lead zirconate titanate, or barium titanate, or lead titanates.
6. the surface acoustic wave sensor of opposing co-channel interference according to claim 4, is characterized in that: described piezoelectric membrane (5) is zinc paste or aluminium nitride, and described substrate (6) is quartz or adamas.
7. the surface acoustic wave sensor of opposing co-channel interference according to claim 2, is characterized in that: described housing (3) and cap (4) are respectively metal shell and metal cap, or is respectively ceramic shell and metal cap.
8. the surface acoustic wave sensor of opposing co-channel interference according to claim 1, is characterized in that: the difference on the frequency between described a plurality of SAW (Surface Acoustic Wave) resonator (2) can be identical, or different.
9. the surface acoustic wave sensor of opposing co-channel interference according to claim 4, is characterized in that: the THICKNESS CONTROL of described piezoelectric membrane (5) is within the scope of 1000-10000 dust.
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| CN201320476249.0U CN203432678U (en) | 2013-08-06 | 2013-08-06 | Acoustic surface wave sensor for resisting same frequency interference |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103398773A (en) * | 2013-08-06 | 2013-11-20 | 常州智梭传感科技有限公司 | Same-frequency-interference-resistant surface acoustic wave sensor |
| CN106034276A (en) * | 2014-08-13 | 2016-10-19 | 三星电子株式会社 | Audio sensing device and device for acquiring frequency information with respect to audio signal |
| CN110068400A (en) * | 2019-04-26 | 2019-07-30 | 中北大学 | Aerospace flight vehicle multi-parameter monitoring system based on surface acoustic wave techniques |
| CN113447053A (en) * | 2021-08-09 | 2021-09-28 | 北京国声智能科技有限公司 | Self-checking type surface acoustic wave sensor and checking method thereof |
-
2013
- 2013-08-06 CN CN201320476249.0U patent/CN203432678U/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103398773A (en) * | 2013-08-06 | 2013-11-20 | 常州智梭传感科技有限公司 | Same-frequency-interference-resistant surface acoustic wave sensor |
| CN106034276A (en) * | 2014-08-13 | 2016-10-19 | 三星电子株式会社 | Audio sensing device and device for acquiring frequency information with respect to audio signal |
| US10225662B2 (en) | 2014-08-13 | 2019-03-05 | Samsung Electronics Co., Ltd. | Audio sensing device and method of acquiring frequency information |
| CN106034276B (en) * | 2014-08-13 | 2019-09-27 | 三星电子株式会社 | Audio sensing device and device for obtaining the frequency domain information about audio signal |
| CN110068400A (en) * | 2019-04-26 | 2019-07-30 | 中北大学 | Aerospace flight vehicle multi-parameter monitoring system based on surface acoustic wave techniques |
| CN110068400B (en) * | 2019-04-26 | 2020-05-29 | 中北大学 | Aerospace craft multi-parameter monitoring system based on surface acoustic wave technology |
| CN113447053A (en) * | 2021-08-09 | 2021-09-28 | 北京国声智能科技有限公司 | Self-checking type surface acoustic wave sensor and checking method thereof |
| CN113447053B (en) * | 2021-08-09 | 2022-04-26 | 北京国声智能科技有限公司 | Self-checking type surface acoustic wave sensor and checking method thereof |
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Effective date of registration: 20181017 Address after: 311200 room 1104, Yi Peng Ke Chuang, 888 Ching six middle road, Yi Peng street, Xiaoshan District, Hangzhou, Zhejiang, China Patentee after: Hangzhou silicon Star Electronics Technology Co., Ltd. Address before: 213164 Building 8, science and Education City, Wujin District, Changzhou, Jiangsu. Patentee before: Changzhou SmartSaw Sensing Technology Co., Ltd. |
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| TR01 | Transfer of patent right |