CN203419982U - Convenient-to-store graphite boat sheet for solar silicon chip - Google Patents

Convenient-to-store graphite boat sheet for solar silicon chip Download PDF

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Publication number
CN203419982U
CN203419982U CN201320563095.9U CN201320563095U CN203419982U CN 203419982 U CN203419982 U CN 203419982U CN 201320563095 U CN201320563095 U CN 201320563095U CN 203419982 U CN203419982 U CN 203419982U
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CN
China
Prior art keywords
silicon chip
technique
graphite boat
fixing point
boat sheet
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Expired - Fee Related
Application number
CN201320563095.9U
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Chinese (zh)
Inventor
梁海
毛仕平
何云海
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ZHEJIANG QIXIN NEW ENERGY TECHNOLOGY Co Ltd
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ZHEJIANG QIXIN NEW ENERGY TECHNOLOGY Co Ltd
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Priority to CN201320563095.9U priority Critical patent/CN203419982U/en
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Publication of CN203419982U publication Critical patent/CN203419982U/en
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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Abstract

The utility model discloses a convenient-to-store graphite boat sheet for a solar silicon chip. The convenient-to-store graphite boat sheet comprises a graphite boat sheet body and a plurality of silicon chip positioning cavities arranged on the graphite boat sheet body, wherein fixing process points for fixing of the silicon chip are arranged on the outer edge of each silicon chip positioning cavity, and the fixing process points include a first fixing process point, a second fixing process point and a third fixing process point; a clamping point for placing of the silicon chip is arranged on each fixing process point, a fourth fixing process point is further arranged above the third fixing process point, and the clamping points are rhombic clamping points. By adopting the structure, when the silicon chips of different specifications need to be placed, the positions of the silicon chips can be regulated by rotating the rhombic clamping points; if the silicon chip is too small and the accurate positioning can not be realized, the rhombic clamping points can be upwards moved onto the fourth fixing process points, and then the accurate positioning of the small silicon chip can be realized. Therefore, the graphite boat sheet disclosed by the utility model has the advantages of flexibility in regulation and a wide range of applications.

Description

Deposit solar silicon wafers graphite boat sheet easily
Technical field
The utility model relates to a kind of solar silicon wafers graphite boat sheet easily of depositing.
Background technology
Photovoltaic industrial chain is manufactured an assembly and photovoltaic generating system construction by polycrystalline silicon material manufacture-silicon ingot/polysilicon chip (monocrystalline silicon piece) production-polycrystalline (monocrystalline) solar battery sheet and is formed practical family and form by a plurality of industry links such as system or networked systems.Polycrystalline silicon material manufacture belongs to the upstream of industrial chain, and polysilicon chip or the monocrystalline silicon piece of manufacture are made baseplate material as manufacture of solar cells, manufactures polycrystalline silicon battery plate or monocrystalline silicon battery sheet and carries out component package.
Graphite boat is a kind of instrument using at solar silicon wafers PECVD coating process, and silicon chip is placed in graphite boat and is then placed under certain chemical reaction condition, realize and on silicon chip surface, plate a skim, thus the sun power transformation efficiency of raising silicon chip.
Graphite boat, generally comprises graphite boat sheet sheet, graphite rod, graphite nut, vitrified pipe, graphite open holes etc.; Graphite boat sheet sheet is interted and is connected side by side in graphite open holes by graphite rod; Graphite boat sheet sheet is indirectly spaced apart by being set in vitrified pipe on graphite rod etc. each other; Every described graphite boat sheet sheet is provided with silicon chip location cavity, and each external edge of silicon chip positioning chamber is provided with the fixedly technique for fixing point of silicon chip, is provided with circular stuck point above, for placing silicon chip.
Above-mentioned this graphite boat sheet, the silicon chip that general a kind of graphite boat sheet can only a kind of specification of fixed placement; To carry out plated film to the silicon chip of different size, just need to buy the graphite boat sheet of different size, cause production cost to improve, and deposit inconvenient shortcoming.
Utility model content
The utility model is for the above-mentioned deficiency of prior art, provide a kind of can flexible position of silicon wafer, that can suitable for various size silicon chip uses deposits solar silicon wafers graphite boat sheet easily.
In order to solve the problems of the technologies described above, the technical solution of the utility model is: a kind of solar silicon wafers graphite boat sheet easily of depositing, comprise graphite boat sheet body, and be arranged at the some silicon chips location cavity on graphite boat sheet body; Each described external edge of silicon chip positioning chamber is provided with the fixedly technique for fixing point of silicon chip, and described technique for fixing point comprises the first technique for fixing point, the second technique for fixing point and the 3rd technique for fixing point; On each technique for fixing point, be equipped with for placing the stuck point of silicon chip, it is characterized in that: the 3rd described technique for fixing point top is also provided with the 4th technique for fixing point, and described stuck point is rhombus stuck point.
Adopt said structure, in the time need to placing the silicon chip of different size, by rotation rhombus stuck point, realize the adjusting of position of silicon wafer; If silicon chip specification is too little, still cannot realize it and accurately locate, can also be upper by moving on to the 4th technique for fixing point on the rhombus stuck point being located on the 3rd technique for fixing point, thus the accurate location of realizing small dimension silicon chip.Therefore, above-mentioned graphite boat sheet of the present utility model has flexible adjustment, and suitability is wide, without the advantage of buying plurality of specifications graphite boat sheet, reducing production costs.And rhombus stuck point is less to the masked area of silicon chip than traditional circular stuck point, therefore, effectively guarantees the coating effects of silicon chip integral body.
As preferably, described graphite boat sheet outside surface is provided with the plated film that reduces specific refractory power (low-refraction), adopts said structure, in PECVD coating process, can further reduce the specific refractory power of silicon chip, thereby further improve the sun power transformation efficiency of silicon chip.
As preferably, the horizontal throw of the 3rd described technique for fixing point or the 4th technique for fixing point distance the first technique for fixing point or the second technique for fixing point is 62-78mm, and employing said structure can guarantee that the clamping of silicon chip is firm, can save space again.
Accompanying drawing explanation
Fig. 1 the utility model is deposited graphite boat chip architecture schematic diagram for solar silicon wafers easily.
Fig. 2 the utility model is deposited graphite boat sheet cross-sectional structure schematic diagram for solar silicon wafers easily.
As shown in the figure: 1, graphite boat sheet body, 1.1. the first technique for fixing point, 1.2. the second technique for fixing point, 1.3. the 3rd technique for fixing point, 1.4. the 4th technique for fixing point, 2, silicon chip location cavity, 3, stuck point, 4, silicon chip, 5. plated film.
Embodiment
Below in conjunction with the drawings and specific embodiments, further describe the utility model.
As shown in drawings, the solar silicon wafers graphite boat sheet easily of depositing of the present utility model,
A solar silicon wafers graphite boat sheet, comprises graphite boat sheet body 1 easily, is arranged at the some silicon chips location cavity 2 on graphite boat sheet body 1; Each described silicon chip location cavity 2 outward flange are provided with the fixedly technique for fixing point of silicon chip, and described technique for fixing point comprises the first technique for fixing point 1.1, the second technique for fixing point 1.2 and the 3rd technique for fixing point 1.3; On each technique for fixing point, be equipped with for placing the stuck point 3 of silicon chip 4, it is characterized in that: the 3rd described technique for fixing point top is also provided with the 4th technique for fixing point 1.4, and described stuck point 3 is rhombus stuck point.
Adopt said structure, in the time need to placing the silicon chip of different size, by rotation rhombus stuck point, realize the adjusting of position of silicon wafer; If silicon chip specification is too little, still cannot realize it and accurately locate, can also be upper by moving on to the 4th technique for fixing point on the rhombus stuck point being located on the 3rd technique for fixing point, thus the accurate location of realizing small dimension silicon chip.Therefore, above-mentioned graphite boat sheet of the present utility model has flexible adjustment, the advantage that suitability is wide.
The plated film 5(that graphite boat sheet outside surface described in the utility model is provided with minimizing specific refractory power also can be described as low-refraction plated film, as silicon nitride film, its specific refractory power is between 1.9---2.3), adopt said structure, in PECVD coating process, can further reduce the specific refractory power of silicon chip, thereby further improve the sun power transformation efficiency of silicon chip.
The horizontal throw of the 3rd technique for fixing point described in the utility model or the 4th technique for fixing point distance the first technique for fixing point or the second technique for fixing point is 62-78mm, adopts said structure can guarantee that the clamping of silicon chip is firm, can save space again.

Claims (3)

1. deposit a solar silicon wafers graphite boat sheet easily, comprise graphite boat sheet body (1), be arranged at the some silicon chips location cavity (2) on graphite boat sheet body (1); Each described silicon chip location cavity (2) outward flange is provided with the fixedly technique for fixing point of silicon chip (4), and described technique for fixing point comprises the first technique for fixing point (1.1), the second technique for fixing point (1.2) and the 3rd technique for fixing point (1.3); On each technique for fixing point, be equipped with the stuck point (3) for placing silicon chip (4), it is characterized in that: the 3rd described technique for fixing point (1.3) top is also provided with the 4th technique for fixing point (1.4), and described stuck point (3) is rhombus stuck point.
2. the solar silicon wafers graphite boat sheet easily of depositing according to claim 1, is characterized in that: described graphite boat sheet outside surface is provided with the plated film (5) that reduces specific refractory power.
3. the solar silicon wafers graphite boat sheet easily of depositing according to claim 1, is characterized in that: the horizontal throw of the 3rd described technique for fixing point (1.3) or the 4th technique for fixing point (1.4) distance the first technique for fixing point (1.1) or the second technique for fixing point (1.2) is 62-78mm.
CN201320563095.9U 2013-09-11 2013-09-11 Convenient-to-store graphite boat sheet for solar silicon chip Expired - Fee Related CN203419982U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201320563095.9U CN203419982U (en) 2013-09-11 2013-09-11 Convenient-to-store graphite boat sheet for solar silicon chip

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201320563095.9U CN203419982U (en) 2013-09-11 2013-09-11 Convenient-to-store graphite boat sheet for solar silicon chip

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CN203419982U true CN203419982U (en) 2014-02-05

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106191817A (en) * 2016-09-23 2016-12-07 国家电投集团西安太阳能电力有限公司 Solar silicon wafers plated film graphite boat piece and graphite boat

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106191817A (en) * 2016-09-23 2016-12-07 国家电投集团西安太阳能电力有限公司 Solar silicon wafers plated film graphite boat piece and graphite boat
CN106191817B (en) * 2016-09-23 2018-10-16 国家电投集团西安太阳能电力有限公司 Solar silicon wafers plated film graphite boat piece and graphite boat

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CF01 Termination of patent right due to non-payment of annual fee
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Granted publication date: 20140205

Termination date: 20180911