CN203385662U - Mach-Zehnder interference type optical biochemical sensor with arch-shaped ring structure - Google Patents
Mach-Zehnder interference type optical biochemical sensor with arch-shaped ring structure Download PDFInfo
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- CN203385662U CN203385662U CN201320413519.3U CN201320413519U CN203385662U CN 203385662 U CN203385662 U CN 203385662U CN 201320413519 U CN201320413519 U CN 201320413519U CN 203385662 U CN203385662 U CN 203385662U
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Abstract
The utility model discloses a Mach-Zehnder interference type optical biochemical sensor with an arch-shaped ring structure. The Mach-Zehnder interference type optical biochemical sensor comprises an input-output straight waveguide and an annular resonant cavity, wherein the annular resonant cavity comprises a first straight waveguide, a left semicircular feedback ring waveguide, a right semicircular feedback ring waveguide, a second straight waveguide, an annular waveguide and a third straight waveguide; the input-output straight waveguide comprises an input end, a fourth straight waveguide, a fifth straight waveguide, a sixth straight waveguide and an output end in sequence. According to the Mach-Zehnder interference type optical biochemical sensor with the arch-shaped ring structure, a non-balanced Mach-Zehnder interferometer structure and one annular resonant cavity are adopted and transmission spectrums of the non-balanced Mach-Zehnder interferometer structure and the annular resonant cavity are overlapped based on a vernier effect so as to obtain a resonance peak with a large free spectral region and high sensitivity; the drifting of the resonance peak with the high sensitivity is measured to obtain the change of an effective refractive index in a waveguide internal schema, so as to further obtain the information of refractive indexes and concentrations of detected substances.
Description
Technical field
The utility model belongs to the photoproduction field of sensing technologies, is specifically related to a kind of design of Mach Zehnder interferometry type optics biochemical sensor of hogring structure.
Background technology
Along with the photonics technology reach its maturity and it in the continuous expansion of biological and chemical field application, the range of application of optics biochemical sensor has covered the numerous areas of biochemical sensor, becomes the important component part of current biochemical sensitive device.Biochemical sensor not only is widely used in traditional medical domain, but also has a wide range of applications at aspects such as environmental monitoring, crop protection, Homeland Securities.The optics biochemical sensor is a kind ofly to take certain biochemical composition as responsive primitive, take optical signalling as carrier, and the target detection thing is had to high selectivity and highly sensitive detection means.Biochemical sensor is normally detected microfluids such as gas, liquid, biomacromolecules, sample to be analyzed at least covers the upper area of whole waveguide device, the variation of concentration of specimens to be analyzed or immunoreactive generation all will change the refractive index of waveguide covering, this variation is responded to by the evanscent field component of light wave, thereby cause the change of light wave pattern effective refractive index, and make the transport property of light in ring change.Just can know the information of test substance by the variable quantity of measuring light field.Optical sensor mainly is divided into optical-fiber type and the large class of integrated waveguide type two.With the optical-fiber type sensor, compare, the integrated type optical waveguide optical sensor based on evanescent wave makes device greatly dwindle on physical dimension, particularly for the optical waveguide of high-contrast refraction materials.
In recent years, many researchers have proposed various sensing arrangements based on integrated type optical waveguide in order to realize large investigative range and high sensing sensitivity sensing.Wherein, Mach-Zehnder interferometers and micro-ring resonant cavity are two kinds of structures commonly used wherein.The biochemical sensor of Mach-Zehnder interferometers type (MZI) is because its sensor mechanism is simple, Free Spectral Range (FSR) is large, therefore be the structure that optics biochemical sensitive device is often selected, but traditional MZI structure must be by increasing the length of MZI two arms, realize large investigative range and high sensing sensitivity with the distance that increases light-matter interaction, device size just can't be accomplished miniaturization like this, also with regard to the more difficult sub-micron that realizes, so that the optics biochemical sensitive device of nanometer scale.And need to be to the wherein arm of MZI while making, i.e. pickup arm, the fixing large molecule of microfluidic channel or modified biological, and reference arm is not processed, so not only greatly increase the difficulty of element manufacturing but also be difficult to realize device miniaturization and portability.Although it is long that single micro-ring resonant cavity configuration can effectively increase chamber, make structure more compact, the Free Spectral Range of this structure is less, and tens nanometers are generally only arranged, therefore attainable investigative range is also just less.Therefore based on above two kinds of single modes more difficult wide-measuring range and highly sensitive optics biochemical sensitive devices realized all.
Comparatively speaking, adopt whole device all to be coated with the mode of extraneous surrounding material to be detected, replace the traditional only arm of MZI being modified, effectively reduction of device size, reduce the complexity of element manufacturing, but this mode for traditional balanced type MZI can't for detection of because adopt whole device to cover this mode of material to be analyzed, two interfere the phase place of arm perception to change equates, the phase differential perseverance is zero, therefore can't be for surveying.
The utility model content
The purpose of this utility model be adopt in order to overcome optics biochemical sensor of the prior art that single armed detects that its manufacture craft is difficult, the large shortcoming of device size and a kind of Mach Zehnder interferometry type optics biochemical sensor of hogring structure is provided.
The technical scheme that the utility model solves its technical matters employing is: the Mach Zehnder interferometry type optics biochemical sensor of hogring structure, comprise an input and output straight wave guide, a ring resonator, described ring resonator comprises: the first straight wave guide, the waveguide of left semicircle feedback loop, the waveguide of right semi-circle feedback loop, the second straight wave guide, disc waveguide and the 3rd straight wave guide, described the second straight wave guide and the 3rd straight wave guide conllinear, described input and output straight wave guide, the first straight wave guide is parallel with the 3rd straight wave guide with the second straight wave guide, the first end of the first straight wave guide and the first end of the second straight wave guide are extended respectively in the two ends of left semicircle feedback loop waveguide, the second end of the first straight wave guide and the second end of the 3rd straight wave guide are extended respectively in the two ends of right semi-circle feedback loop waveguide, the second end of the second straight wave guide and the first end of the 3rd straight wave guide are extended respectively in the two ends of disc waveguide,
The input and output straight wave guide comprises input end, the 4th straight wave guide, the 5th straight wave guide, the 6th straight wave guide and output terminal successively; Described the second straight wave guide and the 4th straight wave guide form the first direction coupling mechanism, described the 3rd straight wave guide and the 6th straight wave guide form the second direction coupling mechanism, described disc waveguide and the 5th straight wave guide form the Mach-Zehnder interferometers structure, described disc waveguide is as the bend arm of Mach-Zehnder interferometers structure, and described the 5th straight wave guide is as the straight-arm of Mach-Zehnder interferometers structure.
Further, described disc waveguide comprises first
left annulus, the second semicircular ring, first
right annulus, first
the second end of the second straight wave guide and the first end of the second semicircular ring, first are extended respectively in the two ends of left annulus
the second end of the second semicircular ring and the first end of the 3rd straight wave guide, described first are extended respectively in the two ends of right annulus
left annulus, first
the internal diameter of the internal diameter of right annulus and the second semicircular ring is tangent, and first
left annulus, the second semicircular ring, first
junction between right annulus is smooth connection.
Further, described first
left annulus and first
the internal diameter of right annulus is R2, and the internal diameter of the second semicircular ring is R3, and described R2 and R3 equate.
Further, the radius of described left semicircle feedback loop and right semi-circle feedback loop is R1, and described R1 is greater than R2, R3.
Further, the coupling between described input and output straight wave guide and described disc waveguide realizes by first direction coupling mechanism and second direction coupling mechanism.
Further, described waveguide is passive ridge waveguide or slab waveguide.
The beneficial effects of the utility model: the Mach Zehnder interferometry type optics biochemical sensor of a kind of hogring structure of the utility model is by adopting a non-equilibrium Mach-Zehnder interferometers structure and a ring resonator, based on cursor effect, make the transmission spectrum of the two superimposed, acquisition has larger Free Spectral Range and the harmonic peak of higher sensitivity, by measuring this drift with highly sensitive harmonic peak, thereby record the variation of waveguide internal schema effective refractive index, further obtain the information of measured matter refractive index and concentration, it has not only overcome the employing single armed and has done detection manufacture craft difficulty, the shortcomings such as device size is large, also solved balanced type MZI traditional while adopting whole device all to be coated with surrounding material to be detected can't for detection of problem, simultaneously, it has also taken into account the two advantage of micro-ring resonant cavity and MZI interferometer, utilize the resonance effect of resonator cavity and the large characteristics of FSR of MZI, not only increase the length of light-matter interaction but also increased its Free Spectral Range, dwindled device size, increased the making tolerance, have more practicality.
The accompanying drawing explanation
The structural representation of the Mach Zehnder interferometry type optics biochemical sensor of the hogring structure that Fig. 1 is the utility model embodiment;
Fig. 2 is single Mach-Zehnder interferometers structural transmission spectrum schematic diagram in the utility model background technology;
Fig. 3 is single micro-ring resonant cavity transmission spectrum schematic diagram in the utility model background technology;
Fig. 4 is the transmission spectrum schematic diagram of Mach Zehnder interferometry type optics biochemical sensor of the hogring structure of the utility model embodiment;
Wherein: 1-input and output straight wave guide, 2-ring resonator, the waveguide of 20-left semicircle feedback loop, 21-the first straight wave guide, the waveguide of 22-right semi-circle feedback loop, 23 second straight wave guides, 24-disc waveguide, 240-first
left annulus, 241-the second semicircular ring, 242-first
right annulus, 25-the 3rd straight wave guide, 10-input end, 11-the 4th straight wave guide, 12-the 5th straight wave guide, 13-the 6th straight wave guide, 14-output terminal, 4-Mach-Zehnder interferometers structure, 30-first direction coupling mechanism, 31-second direction coupling mechanism, 22-21-20 feed back waveguide loop.
Embodiment
Below in conjunction with accompanying drawing and specific embodiment, the utility model is further elaborated.
Be illustrated in figure 1 the structural representation of Mach Zehnder interferometry type optics biochemical sensor of the hogring structure of the utility model embodiment, comprise an input and output straight wave guide 1, a ring resonator 2, described ring resonator comprises: the first straight wave guide 21, left semicircle feedback loop waveguide 20, right semi-circle feedback loop waveguide 22, the second straight wave guide 23, disc waveguide 24 and the 3rd straight wave guide 25, described the second straight wave guide 23 and the 3rd straight wave guide 25 conllinear, described input and output straight wave guide 1, the first straight wave guide 21 is parallel with the 3rd straight wave guide 25 with the second straight wave guide 23, the first end of the first straight wave guide 21 and the first end of the second straight wave guide 23 are extended respectively in the two ends of left semicircle feedback loop waveguide 20, the second end of the first straight wave guide 21 and the second end of the 3rd straight wave guide 23 are extended respectively in the two ends of right semi-circle feedback loop waveguide 22, the second end of the second straight wave guide 23 and the first end of the 3rd straight wave guide 25 are extended respectively in the two ends of disc waveguide 24, input and output straight wave guide 1 comprises input end 10, the 4th straight wave guide 11, the 5th straight wave guide 12, the 6th straight wave guide 13 and output terminal 14 successively, described the second straight wave guide 23 and the 4th straight wave guide 11 form first direction coupling mechanism 30, described the 3rd straight wave guide 25 and the 6th straight wave guide 13 form second direction coupling mechanism 31, described disc waveguide 24 and the 5th straight wave guide 12 form Mach-Zehnder interferometers structure 4, described disc waveguide 24 is as the bend arm of Mach-Zehnder interferometers structure 4, and described the 5th straight wave guide 12 is as the straight-arm of Mach-Zehnder interferometers structure 4.Wherein, in the application's scheme, described input and output straight wave guide 1 is an integrated integral device, for convenience, and here by artificial input end 10, the 4th straight wave guide 11, the 5th straight wave guide 12, the 6th straight wave guide 13 and the output terminal 14 of being defined as; Same, described ring resonator 2 is also as an integrated integral device.
Wherein, described ring resonator 2 and Mach-Zehnder interferometers structure 4 are as the main part of whole senser element, by adopting unbalanced Mach-Zehnder interferometers structure, due to its two arm existing initial phase difference when not adding material to be analyzed, when the external analysis substance change, the phase place of the two arm perception that do not wait changes different, and phase differential changes, therefore can be used for surveying the variation of material to be analyzed, the Mach Zehnder interferometry type optics biochemical sensor of described hogring structure has not only overcome the employing single armed and has done detection manufacture craft difficulty, the shortcomings such as device size is large, also solved balanced type MZI traditional while adopting whole device all to be coated with surrounding material to be detected can't for detection of problem, simultaneously, it has also taken into account the two advantage of micro-ring resonant cavity and MZI interferometer, utilize the resonance effect of resonator cavity and the large characteristics of FSR of MZI, not only increase the length of light-matter interaction but also increased its Free Spectral Range, dwindled device size, increased the making tolerance.
Wherein, described disc waveguide comprises first
left annulus 240, the second semicircular ring 241, first
right annulus 242, the first
the second end of the second straight wave guide 23 and the first end of the second semicircular ring 241, first are extended respectively in the two ends of left annulus 240
the second end of the second semicircular ring 241 and the first end of the 3rd straight wave guide 25, described first are extended respectively in the two ends of right annulus 242
left annulus 240, first
the internal diameter of the internal diameter of right annulus 242 and the second semicircular ring 241 is tangent; Described first
left annulus 240 and first
the internal diameter of right annulus 242 is R2, and the internal diameter of the second semicircular ring 241 is R3, and wherein said R2 and R3 equate or be approximate; The radius of described left semicircle feedback loop 20 and right semi-circle feedback loop 22 is R1, and described R1 is greater than R2, R3.
Below, for those skilled in the art can understand and implement technical solutions of the utility model, the Mach Zehnder interferometry type optics biochemical sensor in connection with the concrete course of work to a kind of hogring structure elaborates:
At first, the light of outside incident is injected in whole device by the input end 10 of input and output waveguide 1, and propagate to output terminal 14 directions, through first direction coupling mechanism 30, by evanescent wave, be coupled, side-coupled having entered in ring resonator 2 of light of a part, another part light continues to propagate forward along input and output straight wave guide 1, this two parts light passes through respectively bend arm and the straight-arm of Mach-Zehnder interferometers structure 4, the 5th straight wave guide 12 of disc waveguide 24 parts of ring resonator and input and output straight wave guide namely, these two same frequencys are with the light of initial phase, when experience first direction coupling mechanism 30, can produce the phase hit of a π, two different arms of two-beam experience light path, in Mach-Zehnder interferometers structure 4, interfere, caused redistributing of light intensity, meet and interfere the light wave of phase elongate member to obtain enhancing, the light wave that does not meet interference condition is suppressed.Simultaneously the output terminal of Mach-Zehnder interferometers structure 4 is again as the input end of second direction coupling mechanism 31, by evanescent wave, be coupled, part light feeds back to the top of first direction coupling mechanism 30 by the end of the 3rd straight wave guide 25 through backfeed loop 22-21-20, the waveguide of described right semi-circle feedback loop, the first straight wave guide and the waveguide of left semicircle feedback loop form backfeed loop 22-21-20, such one or several complete cycles of experience produce resonance effect after reaching steady state (SS) in whole ring resonator 2, another part light is directly exported by the output terminal 14 of input and output straight wave guide 1.
The output spectra of Mach-Zehnder interferometers is the quadratic form of sine function, and it will form a set of interference fringe, as shown in Figure 2, and to Mach-Zehnder interferometers, when the optical path difference of its two arm meets
wherein, the refractive index that described n is the external environment material, m is order of interference, λ
mZIfor lambda1-wavelength, Δ L=L
1-L
2=(π-2) (R
2+ R
3), described L
1, L
2be respectively bend arm and the straight-arm length of Mach-Zehnder interferometers structure, R
2, R
3difference first
left annulus, first
the radius of right annular radii and the second semicircular ring, select suitable interference arm lengths, Δ L met and have a series of like this integer order of interference m, the mutually long wavelength value λ of corresponding a series of corresponding interference
mZI.The cycle of the Sine-squared spectrum of single Mach-Zehnder interferometers output is depended on the length difference Δ L that interferes arm, can find out (R from above formula
2+ R
3) larger, its cycle is less, namely the FSR of single Mach-Zehnder interferometers is less, the optical path difference that can be understood as Mach-Zehnder interferometers is larger, its FSR is less, therefore under the condition of the bending loss that meets ring, the annulus that should select reduced size as the bend arm of Mach-Zehnder interferometers structure to realize large FSR.
The output spectra of ring resonator is equally spaced comb spectrum, and as shown in Figure 3, the girth C of ring cavity meets following condition of resonance, nC=m λ
mRR, wherein, the refractive index that described n is the external environment material, the girth that C is ring cavity, m is order of interference, λ
mRRfor lambda1-wavelength; Resonance effect due to ring, only have when the light path of ring resonator equals the integral multiple of optical wavelength, the light of some wavelength could be enhanced in ring, and from the light that is coupled out in ring resonator and input and output straight wave guide directly the interference of light of transmission disappear mutually, the form of output spectra be and ring in the form of the complementary comb spectrum in resonance peaks decline of spectrum.Due to cursor effect, only have when the light wave of some specific wavelength meets the condition of resonance of Mach-Zehnder interferometers structure and annular resonance cavity configuration simultaneously, the harmonic peak of the two is overlapping at those wavelength places, this wavelength is strengthened, be called resonance wavelength, and other adjacent harmonic peak is not due to overlapping and remitted its fury is suppressed.But due to the interference of Mach-Zehnder interferometers structure mutually long effect to make in resonance wave strong point exit ports light intensity perseverance be 1, ring resonator interferes the harmonic peak decline caused to be covered by the interference of Mach-Zehnder interferometers structure long effect mutually, therefore this resonance peaks can't for detection of, still in the wavelength X of Mach-Zehnder interferometers structure
mZIwavelength X with ring resonator
mRRbetween introduce a small side-play amount ε, the frequency spectrum of Mach-Zehnder interferometers structure is moved right slightly, so just can eliminate the interference of Mach-Zehnder interferometers structure and grow mutually the resonance wave strong point effect of covering in the decline of resonance wave strong point harmonic peak to ring resonator that acts on, obtain High Extinction Ratio, high Q value can for detection of harmonic peak, wherein the Q value is higher, and the sensitivity of device is higher.
The concrete course of work of the Mach Zehnder interferometry type optics biochemical sensor of a kind of hogring structure of the utility model is: whole device all contacts with extraneous surrounding material to be monitored, when the external environment substance change, the waveguide top covering is experienced the changes delta n of extraneous refractive index, change the distribution of luminous energy in optical waveguide, thereby caused the changes delta N of waveguide internal schema effective refractive index
eff, finally changing the phase place of light through this optical waveguide, its phase change amount is
and phase information generally can not obtain by direct detection, need to be converted into wavelength, amplitude, polarization state and indirectly survey, here we adopt and utilize resonance to be converted into the capable detection of probing wave journey by raft down the Yangtze River shift-in.When external substance concentration changes, the variation of waveguide internal schema effective refractive index, show as the drift of whole device transmission spectrum harmonic peak, and there is following relation in the change amount Δ n of the change amount Δ λ of resonance wavelength and external substance refractive index: Δ λ/λ=Δ N
eff/ N
eff=Δ n/n, wherein Δ N
efffor the effective refractive index of waveguide internal schema, the refractive index that n is the external environment material, λ is lambda1-wavelength; Can measure the change amount Δ n of external substance refractive index by the change amount Δ λ that measures resonance wavelength, also just obtain the information such as the refractive index of measured matter and concentration, realize sensing detection, be illustrated in figure 4 the transmission spectrum schematic diagram of the Mach Zehnder interferometry type optics biochemical sensor of a kind of hogring structure that adopts the utility model embodiment.
In the utility model application scheme, described waveguide is all to adopt the method for microfabrication etching on the SOI wafer to obtain.
Claims (6)
1. the Mach Zehnder interferometry type optics biochemical sensor of hogring structure, it is characterized in that, comprise an input and output straight wave guide, a ring resonator, described ring resonator comprises: the first straight wave guide, the waveguide of left semicircle feedback loop, the waveguide of right semi-circle feedback loop, the second straight wave guide, disc waveguide and the 3rd straight wave guide, described the second straight wave guide and the 3rd straight wave guide conllinear, described input and output straight wave guide, the first straight wave guide is parallel with the 3rd straight wave guide with the second straight wave guide, the first end of the first straight wave guide and the first end of the second straight wave guide are extended respectively in the two ends of left semicircle feedback loop waveguide, the second end of the first straight wave guide and the second end of the 3rd straight wave guide are extended respectively in the two ends of right semi-circle feedback loop waveguide, the second end of the second straight wave guide and the first end of the 3rd straight wave guide are extended respectively in the two ends of disc waveguide,
The input and output straight wave guide comprises input end, the 4th straight wave guide, the 5th straight wave guide, the 6th straight wave guide and output terminal successively; Described the second straight wave guide and the 4th straight wave guide form the first direction coupling mechanism, described the 3rd straight wave guide and the 6th straight wave guide form the second direction coupling mechanism, described disc waveguide and the 5th straight wave guide form the Mach-Zehnder interferometers structure, described disc waveguide is as the bend arm of Mach-Zehnder interferometers structure, and described the 5th straight wave guide is as the straight-arm of Mach-Zehnder interferometers structure.
2. the Mach Zehnder interferometry type optics biochemical sensor of hogring structure as claimed in claim 1, is characterized in that, described disc waveguide comprises first
left annulus, the second semicircular ring, first
right annulus, first
the second end of the second straight wave guide and the first end of the second semicircular ring, first are extended respectively in the two ends of left annulus
the second end of the second semicircular ring and the first end of the 3rd straight wave guide, described first are extended respectively in the two ends of right annulus
left annulus, first
the internal diameter of the internal diameter of right annulus and the second semicircular ring is tangent, and first
left annulus, the second semicircular ring, first
junction between right annulus is smooth connection.
3. the Mach Zehnder interferometry type optics biochemical sensor of hogring structure as claimed in claim 2, is characterized in that described first
left annulus and first
the internal diameter of right annulus is R2, and the internal diameter of the second semicircular ring is R3, and described R2 and R3 equate.
4. the Mach Zehnder interferometry type optics biochemical sensor of hogring structure as claimed in claim 3, is characterized in that, the radius of described left semicircle feedback loop and right semi-circle feedback loop is R1, and described R1 is greater than R2, R3.
5. as the Mach Zehnder interferometry type optics biochemical sensor of the described hogring structure of claim 1 to 4 any one claim, it is characterized in that, the coupling between described input and output straight wave guide and described disc waveguide realizes by first direction coupling mechanism and second direction coupling mechanism.
6. as the Mach Zehnder interferometry type optics biochemical sensor of the described hogring structure of claim 1 to 4 any one claim, it is characterized in that, described waveguide is passive ridge waveguide or slab waveguide.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103411926A (en) * | 2013-07-12 | 2013-11-27 | 电子科技大学 | Mach-Zehnder interference type optical biochemical sensor with arch-shaped ring structure |
| CN104375354A (en) * | 2014-11-06 | 2015-02-25 | 上海交通大学 | Dimmable differential equation solver based on interference couplers and silica-based micro-ring resonant cavity |
| CN104949938A (en) * | 2015-06-16 | 2015-09-30 | 电子科技大学 | Mach-Zehnder modulation type resonant cavity sensor based on vernier effect |
-
2013
- 2013-07-12 CN CN201320413519.3U patent/CN203385662U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103411926A (en) * | 2013-07-12 | 2013-11-27 | 电子科技大学 | Mach-Zehnder interference type optical biochemical sensor with arch-shaped ring structure |
| CN103411926B (en) * | 2013-07-12 | 2015-09-30 | 电子科技大学 | The Mach-Zehnder interference type optical biochemical sensor of hogring structure |
| CN104375354A (en) * | 2014-11-06 | 2015-02-25 | 上海交通大学 | Dimmable differential equation solver based on interference couplers and silica-based micro-ring resonant cavity |
| CN104949938A (en) * | 2015-06-16 | 2015-09-30 | 电子科技大学 | Mach-Zehnder modulation type resonant cavity sensor based on vernier effect |
| CN104949938B (en) * | 2015-06-16 | 2017-08-01 | 电子科技大学 | A kind of Mach based on cursor effect once moral modulation type resonator sensor |
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