CN203365844U - Maintenance detection device - Google Patents
Maintenance detection device Download PDFInfo
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- CN203365844U CN203365844U CN 201320446405 CN201320446405U CN203365844U CN 203365844 U CN203365844 U CN 203365844U CN 201320446405 CN201320446405 CN 201320446405 CN 201320446405 U CN201320446405 U CN 201320446405U CN 203365844 U CN203365844 U CN 203365844U
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Abstract
The embodiment of the utility model provides a maintenance detection device, and relates to the technical field of display panel production. The maintenance detection device can be used for effectively detecting a maintenance effect in the maintenance process of an array substrate, thus reducing unnecessary losses. The maintenance detection device comprises optical equipment, a reaction chamber and film thickness testing equipment, wherein the film thickness testing equipment is used for testing the thickness of a film to be maintained.
Description
Technical field
The utility model relates to the display panel production technical field, relates in particular to a kind of maintenance pick-up unit.
Background technology
Thin Film Transistor-LCD (Thin Film Transistor-Liquid Crystal Display, abbreviation TFT-LCD) array base palte need form array circuit in the preparation on glass substrate, after array circuit forms or in forming process, need to be detected forming technique, if testing result shows in product to exist bad for example disconnection (open) bad, or residual (remain) is bad, need bad place is keeped in repair.
For residual bad maintenance, the method for taking at present is: utilize laser that circuit redundance or short circuit are partly cut; For disconnecting bad maintenance, the method for taking at present is: by plated metal tungsten, reach the purpose that conducting is opened circuit.
The array base palte of take occurs that disconnecting bad is example, and the mode that can deposit by metal is keeped in repair.Specifically as shown in Figure 1; when there is gap 1a in metallic signal lines 1; first-selected protective seam 2 on the metallic signal lines at gap 1a two ends need being punctured; the first via hole 2a and the second via hole 2b of metallic signal lines exposed in formation; and at the first via hole 2a and the second via hole 2b place deposition tungsten powder; by the lateral deposition tungsten powder, the first via hole 2a is connected with the second via hole 2b again, forms fine and close maintenance film 3 under the effect of thermal effect, thereby gap 1a is connected.
Wherein, disconnect (open) bad maintenance, it mainly uses tungsten carbonyl as service material, tungsten carbonyl W (CO)
6for the no color or smell volatile solid, be at room temperature solid-state, distillation when being heated to 50～60 ℃.Be provided with the tungsten carbonyl storer in existing maintenance unit, the air intake opening of tungsten carbonyl storer is communicated with argon gas (Ar) ingress pipe, and gas outlet is communicated with the inlet end of reaction cavity by wireway; The tungsten carbonyl storer is heated to 50～60 ℃, and the air intake opening by the tungsten carbonyl storer passes into argon gas simultaneously, and argon gas is brought tungsten carbonyl into reaction cavity by conduit; Enter the tungsten carbonyl of reaction cavity through Ear Mucosa Treated by He Ne Laser Irradiation, under luminous effect and thermal effect effect, generate gradually simple substance tungsten and waste gas, simple substance tungsten is deposited on the position that needs maintenance in the circuit of array base palte, realizes the bad maintenance of circuit in the pair array substrate.
The corresponding optical device inside at it, the light path of laser roughly as shown in Figure 2, the laser that laser generator 10 is launched is after attenuator 11 decay, process prism 12 rears are to 90 ℃ of changes occur, after light beam expander 13, light beam is expanded as larger hot spot again, hot spot after expansion is separated the light of certain specific wavelength after wavelength selector 14, and carries out the adjustment of light spot shape through light path slit 15, thereby meets various technique needs; Afterwards, laser arrives camera lens 16, and the reaction cavity 17 that is positioned at below is carried out to Ear Mucosa Treated by He Ne Laser Irradiation.Realize that in pair array substrate 100, circuit disconnects bad maintenance.
When array base palte has keeped in repair, and, to after the box cutting, verify maintenance effect after lighting a lamp.Yet for keeping in repair failed product, can only do and scrap processing, like this can cause the waste of a large amount of materials, and cause the waste of the each side resources such as manpower.
The utility model content
Embodiment of the present utility model provides a kind of array base palte maintenance pick-up unit, can after array base palte has keeped in repair, effectively detect maintenance effect, thereby reduce unnecessary loss.
For achieving the above object, embodiment of the present utility model adopts following technical scheme:
A kind of maintenance pick-up unit is provided, comprises optical device and reaction cavity; Also comprise the thickness testing apparatus, described thickness testing apparatus is for the thickness of test and maintenance film.
Preferably, described thickness testing apparatus comprises the infrared thermal imaging sensor; Wherein, described thickness testing apparatus obtains the thickness of described maintenance film for the heat radiation of the described maintenance film according to described infrared thermal imaging sensor sensing.
Further preferred, described thickness testing apparatus also comprises the data handling system be connected with described infrared thermal imaging sensor; Wherein, described data handling system, for the thermal exposure of the described maintenance film according to described infrared thermal imaging sensor sensing, obtains the graphic images corresponding with the thickness of described maintenance film.
Further preferred, described data handling system comprises memory module, and described memory module stores the mapping table of different colours and thickness in described graphic images.
Further preferred, described data handling system also comprises alarm module, when described alarm module is greater than predetermined value for the thickness of the corresponding described maintenance film in the color of described graphic images, sends warning.
Optionally, described optical device comprises: laser generator, be distributed in attenuator, light beam expander, wavelength selector, light path slit and at least one camera lens on laser optical path; Wherein, the laser that described laser generator sends is from described camera lens outgoing to described reaction cavity.
Further preferred, described maintenance pick-up unit also comprises lens bracket; Wherein, described at least one camera lens of described optical device is arranged on described lens bracket; Described thickness testing apparatus is arranged on described lens bracket.
Further preferred, described maintenance pick-up unit also comprises the motor for driving described lens bracket to move along predetermined direction.
Optionally, described at least one camera lens comprises infrared light camera lens and ultraviolet lens, described infrared light camera lens outgoing infrared light laser, described ultraviolet lens outgoing ultraviolet laser.
Optionally, described laser generator comprises the laser generator of emitting ultraviolet light and the laser generator of emission infrared light.
Preferably, described optical device also comprises light source; Wherein, the light that described light source sends arrives the laser optical path between described light path slit and described camera lens through prism.
The utility model embodiment provides a kind of maintenance pick-up unit, and this maintenance pick-up unit comprises optical device, reaction cavity and for the thickness testing apparatus of test and maintenance film thickness; On the one hand, the hot spot that optical device sends is mapped to reaction cavity, thereby, treating on maintenance product to form the maintenance film, realizes disconnecting bad maintenance; On the other hand, owing to also being provided with the thickness testing apparatus, after the bad place of the disconnection for the treatment of maintenance product is keeped in repair, do not destroying on the basis for the treatment of maintenance product, use the thickness testing apparatus to carry out the thickness test to the maintenance film of deposition, thereby effectively detect maintenance effect, when test for thickness when unequal, can guarantee by suitable adjusting process parameter the consistance of thickness, and then guarantee the success ratio of maintenance.
The accompanying drawing explanation
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, below will the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described, apparently, accompanying drawing in the following describes is only embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
The pair array substrate that Fig. 1 provides for prior art disconnects the structural representation after bad maintenance;
The inner structure schematic diagram of the optical device that Fig. 2 provides for prior art;
A kind of structural representation that keeps in repair pick-up unit that Fig. 3 provides for the utility model embodiment;
A kind of structural representation that comprises the maintenance pick-up unit of motor that Fig. 4 provides for the utility model embodiment;
The structural representation that comprises a plurality of camera lenses and films test equipment on lens bracket that Fig. 5 provides for the utility model embodiment;
The another kind that Fig. 6 provides for the utility model embodiment comprises the structural representation of the maintenance pick-up unit of light source;
The structural representation of a kind of thickness testing apparatus that Fig. 7 provides for the utility model embodiment;
The structural representation one of a kind of data handling system that Fig. 8 provides for the utility model embodiment;
The structural representation two of a kind of data handling system that Fig. 9 provides for the utility model embodiment;
The schematic diagram of spectrum when the maintenance film thickness that Figure 10 provides for the utility model embodiment is different.
Reference numeral:
The 1-metallic signal lines; The 1a-gap; The 2-protective seam; 2a-the first via hole; 2b-the second via hole; 3-keeps in repair film; The 10-laser generator; The 11-attenuator; The 12-prism; 13-light beam expander; The 14-wavelength selector; 15-light path slit; The 16-camera lens; The 17-reaction cavity; 18-thickness testing apparatus; The 19-lens bracket; The 20-motor; The 21-light source; The 100-array base palte; 181-infrared thermal imaging sensor; The 182-data handling system; The 182a-memory module; The 182b-alarm module.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is clearly and completely described, obviously, described embodiment is only the utility model part embodiment, rather than whole embodiment.Embodiment based in the utility model, those of ordinary skills are not making under the creative work prerequisite the every other embodiment obtained, and all belong to the scope of the utility model protection.
The utility model embodiment provides a kind of maintenance pick-up unit, and this maintenance pick-up unit comprises optical device, reaction cavity 17 and thickness testing apparatus 18, and described thickness testing apparatus 18 is for the thickness of test and maintenance film 3.
Wherein, described optical device can comprise laser generator 10, be distributed in attenuator 11, light beam expander 13, wavelength selector 14, light path slit 15 and at least one camera lens 16 on laser optical path.The laser that described laser generator 10 sends after each device on being distributed in laser optical path arrives described camera lens 16, by described camera lens 16 outgoing to described reaction cavity 17.
Certainly, described optical device also comprises some prisms 12, and these prisms 12 can comprise total reflection prism, semi-transflective reflective prism etc.; On the one hand, for reflecting the laser light to laser optical path, on the other hand laser is offered to the device that needs laser.The quantity of prism 12 is not limited herein.
For maintenance film 3, the tungsten of deposition is due to technological reason or rete drop reason, thickness is also inhomogeneous, by SEM (scanning electron microscope, sweep electron microscope) analysis and a large amount of data statisticss, the thicknesses of layers of maintenance film 3 is one of topmost parameters of maintenance success.The maintenance film 3 of take after bad maintenance of opening circuit of pair array substrate is example, when thickness exists
the time, the success ratio of maintenance is the highest.
In addition, in the utility model embodiment, can form as required the maintenance film 3 of certain-length, to realize disconnecting bad maintenance.Here, length one timing when maintenance film 3, corresponding reaction cavity 17 should at least be greater than the length of maintenance film 3 along the length of optical device moving direction, the width of reaction cavity 17 also should be greater than the width of maintenance film 3, in the time of can guaranteeing like this to immobilize in the position of reaction cavity 17, by the movement of described optical device, at the maintenance film 3 for the treatment of to form on maintenance product certain-length and width.
It should be noted that, due to the restriction of technique, the thickness of described maintenance film 3 can not be in full accord, therefore, in the utility model embodiment, the thickness of described maintenance film 3 fluctuates within the specific limits, need be set according to actual conditions for this scope, at this, do not done restriction.
The utility model embodiment provides a kind of maintenance pick-up unit, this maintenance pick-up unit comprises optical device and reaction cavity 17, and described optical device comprises laser generator 10, is distributed in attenuator 11, light beam expander 13, wavelength selector 14, light path slit 15 and at least one camera lens 16 on laser optical path; Further comprise the thickness testing apparatus 18 for the test and maintenance film thickness; On the one hand, the laser of laser generator 10 emissions is after the attenuator 11 on being distributed in laser optical path, light beam expander 13, wavelength selector 14, light path slit 15, the laser facula that forms the specific wavelength characteristic shape arrives camera lens 16, after lens focus, this laser facula is mapped to reaction cavity, thereby, treating on maintenance product to form maintenance film 3, realize disconnecting bad maintenance; On the other hand, owing to also being provided with thickness testing apparatus 18, after the bad place of the disconnection for the treatment of maintenance product is keeped in repair, do not destroying on the basis for the treatment of maintenance product, use thickness testing apparatus 18 to carry out the thickness test to the maintenance film 3 of deposition, thereby effectively detect maintenance effect, when test for thickness when unequal, can guarantee by suitable adjusting process parameter the consistance of thickness, and then guarantee the success ratio of maintenance.
Preferably, as shown in Figure 3, described maintenance pick-up unit also comprises lens bracket 19; Wherein, described at least one camera lens 16 of described optical device is arranged on described lens bracket 19; Described thickness testing apparatus 18 is arranged on lens bracket 19.
, thickness testing apparatus 18 is arranged on lens bracket 19 herein, can takes full advantage of this lens bracket 19, simple.
Further preferred, as shown in Figure 4, described maintenance pick-up unit also comprises the motor 20 for driving described lens bracket 19 to move along predetermined direction.
Like this, while on lens bracket 19, being provided with a plurality of camera lens 16, can driving lens bracket 19 by control motor 20 and move, be arranged on light path with the camera lens 16 by needs.
Here, described motor 20 can be servo motor.Described servo motor can be converted into electric signal torque and rotational speed to control driven object.The advantages such as described servomotor rotor rotating speed is controlled by input signal, and the energy rapid reaction, in automatic control system, during as performance element, has kinematic accuracy high, fluctuates little, and running and comparing is steady, and the response time is shorter; It can convert received electric signal to angular displacement on electrode axis or angular velocity output, is widely used at present the equipment that industry mechanical arm etc. is higher to precision prescribeies such as position or moments of torsion.
Optionally, as shown in Figure 5, described at least one camera lens 16 be arranged on described lens bracket 19 can comprise infrared light camera lens and ultraviolet lens, described infrared light camera lens outgoing infrared light laser, described ultraviolet lens outgoing ultraviolet laser.
Here, due to the camera lenses of 50 times, containing the optical film that is improved light efficiency, therefore, in the utility model embodiment, described maintenance checkout equipment is preferably realized the residual bad maintenance bad with disconnection with this camera lens of 50 times 16.On this basis, described at least one camera lens 16 can comprise the camera lens 16 of two 50 times; Wherein, the camera lens 16 outgoing infrared light laser of 50 times, another camera lens of 50 times 16 outgoing ultraviolet lasers.
Wherein, the infrared light laser of camera lens 16 outgoing of infrared light laser can be realized Metal Cutting, so that this maintenance checkout equipment can compatiblely keep in repair the residual bad of array base palte; The ultraviolet light of camera lens 16 outgoing of ultraviolet laser can decomposition of chemical compounds, can be used for irradiating reaction cavity 17, so that tungsten carbonyl resolves into tungsten, thereby realizes disconnecting bad maintenance.
In addition, at least one camera lens 16 that is arranged on lens bracket 19 can also comprise the camera lens of for example 5 times, 10 times as required, for checking position for the treatment of helpdesk etc.
Here, for the shape of described lens bracket 19, it can be circle, can be also linear pattern, at this, does not do restriction.
In the situation that at least one camera lens be arranged on described lens bracket 19 comprises infrared light camera lens and ultraviolet lens, preferred, described laser generator 10 comprises the laser generator of emitting ultraviolet light and the laser generator of emission infrared light.To guarantee infrared light camera lens outgoing infrared light laser, ultraviolet lens outgoing ultraviolet laser.
Optionally, as shown in Figure 6, described optical device also comprises light source 21; Wherein, the laser optical path that the light that described light source 21 sends arrives between described light path slit 15 and described camera lens 16 through prism 12.
Like this, by visible ray that described light source 21 is sent and laser, together be transmitted into and treat maintenance product, can observe the forming process of maintenance film 3, in order to can take measures in time when abnormal generation is arranged.
Preferably, as shown in Figure 7, in the utility model, described thickness testing apparatus 18 comprises infrared thermal imaging sensor 181; Wherein, described thickness testing apparatus 18 obtains the thickness of described maintenance film 3 for the heat radiation of the described maintenance film 3 according to described infrared thermal imaging sensor 181 sensings.
Herein, because all objects of occurring in nature can infrared radiation, therefore, can carry out by described infrared thermal imaging sensor 181 the heat radiation energy of sensed object object, on this basis, for example can be by same substance when the uniform temp, the heat radiation energy of different thickness obtains the thickness of described target object, in the utility model embodiment, can obtain the thickness of described maintenance film 3.
Further, shown in figure 7, described thickness testing apparatus 18 also comprises the data handling system 182 be connected with described infrared thermal imaging sensor 181; Wherein, described data handling system 182, for the thermal exposure of the described maintenance film 3 according to described infrared thermal imaging sensor 181 sensings, obtains the graphic images corresponding with the thickness of described maintenance film 3.
Herein, data handling system 182 can be converted to temperature value by the thermal exposure of the described maintenance film 3 of described infrared thermal imaging sensor 181 sensings, indicates different temperature with different colours, and shows with the form of graphic images.Like this, the described maintenance film 3 different-thickness place heat radiation energy of described infrared thermal imaging sensor 181 sensing, described data handling system 182 can be converted into the heat radiation energy of the described maintenance film 3 of described infrared thermal imaging sensor 181 sensings the graphic images that uses different colours to indicate, the thickness of the maintenance film 3 that wherein the different colours correspondence is different.
Wherein, as shown in Figure 8, described data handling system 182 can comprise memory module 182a, and described memory module 182a stores the mapping table of different colours in described graphic images and the thickness of maintenance film 3.
Be for example: after can using the 181 sensing rete heat radiations of infrared thermal imaging sensor herein, through the PC(PC) be treated to the graphic images of the different colours of making by radiant quantity, sem analysis is done in the different colours position, thereby obtain the thicknesses of layers of this maintenance film 3, for example can draw
the thermal imaging color of the maintenance film 3 of left and right thickness when temperature is identical, and preserve the relation table of thicknesses of layers and corresponding color.
In addition, as shown in Figure 9, described data handling system 182 can also comprise alarm module 182b, and described alarm module 182b when the thickness of corresponding described maintenance film 3 is greater than predetermined value in the color of described graphic images, sends warning.
Here, after being keeped in repair in opening circuit of pair array substrate, the thickness that preferably keeps in repair film 3 is
the time, the thickness of the described maintenance film 3 that described alarm module 182b for example can be corresponding for the color at described graphic images subtracts
absolute value be greater than
predetermined value the time, send warning.
In the utility model embodiment, because the area of reaction cavity 17 is greater than the area of the maintenance film 3 that is positioned at below, and reaction cavity 17 temperature constant are for example 50 ℃, can make like this to be positioned at the thermally equivalent for the treatment of maintenance product of below, be also, make to keep in repair film 3 thermally equivalents, thereby the temperature that makes to keep in repair film 3 is identical, the heat radiation energy that can guarantee like this maintenance film 3 of infrared thermal imaging sensor 181 sensings is at the same temperature, keeps in repair the impact of the temperature difference of film 3 on maintenance film 3 thickness of test with eliminating.
On this basis, as shown in figure 10, due to its heat radiation difference of different thickness, the spectral color of formation is also different, that is, the maintenance film 3 of metal is when temperature is identical, and rete thick place heat radiation is larger, and the color of its graphic images is brighter; Rete thin place heat radiation is less, and the color of its graphic images is darker; Therefore, when the color of the graphic images of this maintenance film 3 is different, the maintenance pick-up unit is suitable adjusting process parameter just, adjusts maintenance film 3 thickness, thereby guarantees the success ratio of keeping in repair.
It should be noted that, in the utility model, institute's drawings attached is the simple schematic diagram of maintenance pick-up unit, only for the clear this programme of describing has embodied the structure relevant to inventive point, for other with the irrelevant structure of inventive point be existing structure, do not embody in the accompanying drawings or realizational portion only
The above; it is only embodiment of the present utility model; but protection domain of the present utility model is not limited to this; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; can expect easily changing or replacing, within all should being encompassed in protection domain of the present utility model.Therefore, protection domain of the present utility model should be as the criterion with the protection domain of described claim.
Claims (11)
1. a maintenance pick-up unit, comprise optical device and reaction cavity, it is characterized in that, described maintenance pick-up unit also comprises the thickness testing apparatus, and described thickness testing apparatus is for the thickness of test and maintenance film.
2. maintenance pick-up unit according to claim 1, is characterized in that, described thickness testing apparatus comprises the infrared thermal imaging sensor;
Wherein, described thickness testing apparatus obtains the thickness of described maintenance film for the heat radiation of the described maintenance film according to described infrared thermal imaging sensor sensing.
3. maintenance pick-up unit according to claim 2, is characterized in that, described thickness testing apparatus also comprises the data handling system be connected with described infrared thermal imaging sensor;
Wherein, described data handling system, for the thermal exposure of the described maintenance film according to described infrared thermal imaging sensor sensing, obtains the graphic images corresponding with the thickness of described maintenance film.
4. maintenance pick-up unit according to claim 3, is characterized in that, described data handling system comprises memory module, and described memory module stores the mapping table of different colours and thickness in described graphic images.
5. maintenance pick-up unit according to claim 4, it is characterized in that, described data handling system also comprises alarm module, and described alarm module when the thickness of corresponding described maintenance film is greater than predetermined value in the color of described graphic images, sends warning.
6. maintenance pick-up unit according to claim 1, is characterized in that, described optical device comprises: laser generator, be distributed in attenuator, light beam expander, wavelength selector, light path slit and at least one camera lens on laser optical path; Wherein, the laser that described laser generator sends is from described camera lens outgoing to described reaction cavity.
7. maintenance pick-up unit according to claim 6, is characterized in that, described maintenance pick-up unit also comprises lens bracket;
Wherein, described at least one camera lens of described optical device is arranged on described lens bracket; Described thickness testing apparatus is arranged on described lens bracket.
8. maintenance pick-up unit according to claim 7, is characterized in that, described maintenance pick-up unit also comprises the motor for driving described lens bracket to move along predetermined direction.
9. maintenance checkout equipment according to claim 6, is characterized in that, described at least one camera lens comprises infrared light camera lens and ultraviolet lens, described infrared light camera lens outgoing infrared light laser, described ultraviolet lens outgoing ultraviolet laser.
10. maintenance pick-up unit according to claim 6, is characterized in that, described laser generator comprises the laser generator of emitting ultraviolet light and the laser generator of emission infrared light.
11. maintenance pick-up unit according to claim 6 is characterized in that described optical device also comprises light source; Wherein, the light that described light source sends arrives the laser optical path between described light path slit and described camera lens through prism.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201320446405 CN203365844U (en) | 2013-07-25 | 2013-07-25 | Maintenance detection device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201320446405 CN203365844U (en) | 2013-07-25 | 2013-07-25 | Maintenance detection device |
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| CN203365844U true CN203365844U (en) | 2013-12-25 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104503112A (en) * | 2014-12-16 | 2015-04-08 | 昆山国显光电有限公司 | Method and system for repairing array substrate |
| CN106514014A (en) * | 2017-01-17 | 2017-03-22 | 京东方科技集团股份有限公司 | Laser repair method of substrate and laser repair system thereof |
| CN110406266A (en) * | 2019-08-30 | 2019-11-05 | 昆山国显光电有限公司 | Inkjet-printing device and inkjet printing methods |
-
2013
- 2013-07-25 CN CN 201320446405 patent/CN203365844U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104503112A (en) * | 2014-12-16 | 2015-04-08 | 昆山国显光电有限公司 | Method and system for repairing array substrate |
| CN104503112B (en) * | 2014-12-16 | 2017-08-25 | 昆山国显光电有限公司 | The method for repairing and mending and its system of array base palte |
| CN106514014A (en) * | 2017-01-17 | 2017-03-22 | 京东方科技集团股份有限公司 | Laser repair method of substrate and laser repair system thereof |
| CN106514014B (en) * | 2017-01-17 | 2018-06-15 | 京东方科技集团股份有限公司 | The laser repair method and its laser repair system of a kind of substrate |
| CN110406266A (en) * | 2019-08-30 | 2019-11-05 | 昆山国显光电有限公司 | Inkjet-printing device and inkjet printing methods |
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Owner name: JINGDONGFANG SCIENCE AND TECHNOLOGY GROUP CO., LTD Free format text: FORMER OWNER: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY CO., LTD. Effective date: 20150702 Owner name: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY Effective date: 20150702 |
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Effective date of registration: 20150702 Address after: 100015 Jiuxianqiao Road, Beijing, No. 10, No. Patentee after: BOE TECHNOLOGY GROUP Co.,Ltd. Patentee after: BEIJING BOE OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Address before: 100176 Beijing city Daxing District economic and Technological Development Zone of Beijing Road No. 8 Patentee before: BEIJING BOE OPTOELECTRONICS TECHNOLOGY Co.,Ltd. |
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