CN203359525U - Substrate adsorption device and cutting machine - Google Patents

Substrate adsorption device and cutting machine Download PDF

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Publication number
CN203359525U
CN203359525U CN 201320318364 CN201320318364U CN203359525U CN 203359525 U CN203359525 U CN 203359525U CN 201320318364 CN201320318364 CN 201320318364 CN 201320318364 U CN201320318364 U CN 201320318364U CN 203359525 U CN203359525 U CN 203359525U
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CN
China
Prior art keywords
substrate
sucker
absorption device
removable plate
air discharge
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Expired - Lifetime
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CN 201320318364
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Chinese (zh)
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顾天筑
陆续
张颀
王礼强
汪平川
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InfoVision Optoelectronics Kunshan Co Ltd
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InfoVision Optoelectronics Kunshan Co Ltd
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Abstract

A substrate adsorption device comprise a movably plate, a plurality of suction disks and an absorption air pressure source. The movably plate comprises a first surface and a second surface opposite to the first surface. The suction disks are fixed on the second surface, and all the suction disks are communicated with the absorption air pressure source. The substrate adsorption device further comprise a plurality of auxiliary gaskets which are fixed on the second surface, and the thickness of each auxiliary gasket is larger than or equal to the distance between the substrate and the movably plate when the suction disks are adsorbed on the substrate. The utility model further provides a cutting machine with the substrate adsorption device. According to the substrate adsorption device and the cutting machine, the phenomenon that the substrate becomes black due to too large partial pressure intensity can be effectively avoided, poor appearance of the substrate is prevented, and yield of the substrate is improved.

Description

Substrate absorption device and cutting machine
Technical field
The utility model relates to display panels and manufactures field, particularly relates to substrate absorption device and cutting machine.
Background technology
In the manufacturing process of display panels, display panels need to be through repeatedly carrying, for example, need to be to TFT(Thin Film Transistor, thin film transistor) glass substrate and CF(Color Filter, colored filter) glass substrate injection liquid crystal the rear formed substrate of having fitted are carried, and can adopt substrate absorption device that the substrate after laminating is picked up, and then the moving substrate adsorption plant can be realized the carrying to substrate.
Figure 1 shows that a kind of schematic diagram of existing substrate absorption device.Figure 2 shows that the schematic diagram of arranging of the sucker of substrate absorption device in Fig. 1.Refer to Fig. 1 and Fig. 2, existing substrate absorption device 10 can be applicable on cutting machine, during the substrate of fitting with the CF glass substrate at cutting machine cutting TFT glass substrate, need be carried with 10 pairs of substrates of substrate absorption device, substrate absorption device 10 comprises removable plate 12 and a plurality of sucker 13, removable plate 12 can be metal sheet, and it can be connected with the actuating device of cutting machine and can move under the drive of actuating device.Removable plate 12 has first surface 122 and the second surface 123 relative with first surface 122, offers a plurality of the first suction hole 12a on removable plate 12, and the first suction hole 12a extends to second surface 123 from first surface 122.
A plurality of suckers 13 are the ranks matrix and evenly are arranged on removable plate 12.Each sucker 13 comprise bottom 132 and from bottom 132 the extended sidewall 133 of edge-perpendicular, sidewall 133 be annular.Offer the second suction hole 132a on bottom 132, the second suction hole 132a is identical with the diameter of the first suction hole 12a, and each second suction hole 132a is corresponding with one first suction hole 12a.Bottom 132 is attached on the second surface 123 of removable plate 12, and each second suction hole 132a connects with the first corresponding suction hole 12a, and the first suction hole 12a passes through a pipeline (not shown) and is connected with attraction pneumatic supply (not shown).
While needing carrying substrate, the actuating device of cutting machine drives removable plate 12 to move, first make sidewall 133 and the substrate contacts of sucker 13, then start and attract pneumatic supply, gas sucking-off in the space that attracts pneumatic supply that sucker 13 and substrate are surrounded, make to form negative pressure between sucker 13 and substrate, sucker 13 picks up substrate tightly, drives removable plate 12 substrate can be moved to desired position.
Yet, when 10 pairs of substrates of substrate absorption device adsorb carrying, because the sucker 13 in substrate absorption device 10 first is pressed onto on substrate, the Action of Gravity Field of the element (comprising substrate absorption device 10) of substrate top is on substrate, certain pressure that substrate is produced, and sucker 13 is too small with the area of contact of substrate, cause the local pressure of contact surface of substrate and sucker 13 excessive, the easy blackening in the surface that substrate is adsorbed by sucker 13, cause the bad order of substrate, thereby reduced the production yield of substrate.
The utility model content
The utility model purpose is to provide a kind of substrate absorption device and cutting machine, can effectively avoid substrate because the situation of the excessive blackening of local pressure occurs, and prevents that exterior substrate is bad, is conducive to improve the yield of substrate.
For reaching above-mentioned advantage, the utility model provides a kind of substrate absorption device, and it comprises removable plate, a plurality of sucker and attracts pneumatic supply.Described removable plate has first surface and the second surface relative with described first surface, and described sucker is fixed on described second surface, and each sucker is communicated with described attraction pneumatic supply.Described substrate absorption device also comprises a plurality of auxiliary spacers, and described auxiliary spacer is fixed on described second surface, and the spacing of the thickness of described auxiliary spacer described substrate and described removable plate when being more than or equal to described sucker and being adsorbed in substrate.
In an embodiment of the present utility model, the height of described sucker is 3.8~4.0 millimeters, and the thickness of described auxiliary spacer is 3.6~3.8 millimeters.
In an embodiment of the present utility model, on the surface away from removable plate of described auxiliary spacer, offer a plurality of air discharge ducts.
In an embodiment of the present utility model, between described a plurality of air discharge ducts, be interconnected, when the surface away from removable plate of described auxiliary spacer and described substrate contacts, described a plurality of air discharge ducts at least one of them is in communication with the outside.
In an embodiment of the present utility model, the quantity of described a plurality of air discharge ducts is four, comprise first row air drain, second row air drain, the 3rd air discharge duct and the 4th air discharge duct, described first row air drain and described second row air drain are the wire cell body radially extended along described auxiliary spacer, described the 3rd air discharge duct is the different ring-type cell body of maximum gauge with described the 4th air discharge duct, and described first row air drain, described second row air drain, described the 3rd air discharge duct and described the 4th air discharge duct are interconnected.
In an embodiment of the present utility model, described auxiliary spacer and described sucker all invest on the described second surface of described removable plate by adhesive plaster.
In an embodiment of the present utility model, described a plurality of suckers and described a plurality of auxiliary spacer evenly are arranged on the described second surface of described removable plate.
In an embodiment of the present utility model, offer a plurality of the first suction holes on described removable plate, each sucker comprises that bottom reaches from the extended sidewall in the edge of described bottom, offer the second suction hole on described bottom, each second suction hole is corresponding with one first suction hole, described bottom is fixed on the described second surface of described removable plate, and each second suction hole connects with the first corresponding suction hole.
In an embodiment of the present utility model, described sucker comprises adsorption section, penetration portions and the sleeved part of connection successively and hollow, offer a plurality of the first suction holes on described removable plate, described attraction pneumatic supply has a plurality of pipelines, described adsorption site is on described second surface, described penetration portions is interspersed in corresponding described the first suction hole, and described sleeved part is sheathed on corresponding described pipeline.The utility model also proposes a kind of cutting machine, and it comprises any one above-mentioned substrate absorption device.
In substrate absorption device of the present utility model and cutting machine, owing on removable plate, increasing a plurality of auxiliary spacers are set, when sucker absorption substrate, auxiliary spacer can with substrate contacts, increased the area of contact with substrate, because the pressure of sucker to substrate remains unchanged, the local pressure acted on substrate reduces, thereby can effectively avoid substrate because the situation of the excessive blackening of local pressure occurs, prevent that exterior substrate is bad, be conducive to improve the yield of substrate.In addition, only need auxiliary spacer is fixed on the second surface of substrate, and, without increasing pipeline and attracting pneumatic supply, can simplify the structure of cutting machine, meet the minimized design requirement of cutting machine.
Above-mentioned explanation is only the general introduction of technical solutions of the utility model, in order to better understand technological means of the present utility model, and can be implemented according to the content of specification sheets, and for above-mentioned and other objects, features and advantages of the present utility model can be become apparent, below especially exemplified by preferred embodiment, and the cooperation accompanying drawing, be described in detail as follows.
The accompanying drawing explanation
Figure 1 shows that a kind of schematic diagram of existing substrate absorption device.
Figure 2 shows that the schematic diagram of arranging of the sucker of substrate absorption device in Fig. 1.
Figure 3 shows that schematic diagram when substrate absorption device of the present utility model is applied to cutting machine.
Figure 4 shows that the sucker of substrate absorption device in Fig. 3 and the schematic diagram of arranging of auxiliary spacer.
Figure 5 shows that the schematic perspective view of sucker of the substrate absorption device of Fig. 3.
Figure 6 shows that the schematic perspective view of the sucker of the another kind of embodiment of substrate absorption device of the present utility model.
Figure 7 shows that the schematic diagram of the another kind of fixed form of the sucker of substrate absorption device of the present utility model and removable plate.
Figure 8 shows that the schematic perspective view of auxiliary spacer of the substrate absorption device of Fig. 3.
The specific embodiment
For further setting forth the utility model, be to reach technological means and the effect that predetermined utility model purpose is taked, below in conjunction with accompanying drawing and preferred embodiment, the specific embodiment, structure, feature and effect thereof to according to the utility model proposes, be described in detail as follows.
Figure 3 shows that schematic diagram when substrate absorption device of the present utility model is applied to cutting machine.Figure 4 shows that the sucker of substrate absorption device in Fig. 3 and the schematic diagram of arranging of auxiliary spacer.Refer to Fig. 3 and Fig. 4, the substrate absorption device 20 of the present embodiment can be applicable on cutting machine, but not as limit.In the present embodiment, substrate absorption device 20 is for adsorbing substrate 201, and substrate 201 is for example TFT glass substrate and CF glass substrate injection liquid crystal the rear formed substrate of having fitted, but not as limit.Substrate absorption device 20 comprises removable plate 22, a plurality of sucker 23, a plurality of auxiliary spacer 24 and attraction pneumatic supply 25, and sucker 23 and auxiliary spacer 24 all are arranged on removable plate 22.
Removable plate 22 can be metal sheet, is for example aluminium alloy plate, but, not as limit, removable plate 22 can be connected with the actuating device of cutting machine and can move under the drive of actuating device.Removable plate 22 has first surface 222 and the second surface 223 relative with first surface 222, offers a plurality of the first suction hole 22a on removable plate 22, and the first suction hole 22a extends to second surface 223 from first surface 222.
Figure 5 shows that the schematic perspective view of sucker of the substrate absorption device of Fig. 3.Please, in the lump referring to Fig. 5, sucker 23 can be rubber suction cups, but not as limit.A plurality of suckers 23 are the ranks matrix evenly arranges and is fixed on the second surface 223 of removable plate 22, and each sucker 23 all is communicated with attracting pneumatic supply 25.Each sucker 23 comprise bottom 232 and from bottom 232 the extended sidewall 233 in edge, sidewall 233 is roughly loop configuration, and sidewall 233 is approximately perpendicular to bottom 232.Offer the second suction hole 232a on bottom 232, each second suction hole 232a is identical with the diameter of each the first suction hole 22a, and each second suction hole 232a is corresponding with one first suction hole 22a.The bottom 232 of sucker 23 is fixed on the second surface 223 of removable plate 22, and each second suction hole 232a connects with the first corresponding suction hole 22a, each first suction hole 22a is connected with attracting pneumatic supply 25 by pipeline 252, and wherein the diameter of pipeline 252 can be set arbitrarily according to actual demand.The distance on bottom to the top that the height H 1 of sucker 23 is sidewall 233.
It should be noted that, in substrate absorption device 20, the structure of sucker 23 is not limited with Fig. 5, Figure 6 shows that the schematic perspective view of the sucker of the another kind of embodiment of substrate absorption device of the present utility model.As shown in Figure 6, in another preferred embodiment, sucker 33 also can be applicable in substrate absorption device 20, sucker 33 and sucker 23 are similar, difference is, the sidewall 333 of sucker 33 comprises the first side wall 333a and extended the second sidewall 333b from the top of the first side wall 333a, wherein, bottom the 332 and second sidewall 333b lays respectively at bottom and the top of the first side wall 333a, the first side wall 333a is roughly loop configuration, and be approximately perpendicular to bottom 332, the second sidewall 333b is roughly horn-like structure, its diameter increases gradually along the direction away from the first side wall 333a, the maximum gauge of the second sidewall 333b is greater than the diameter of the first side wall 333a.The structure of sucker 33 more is conducive to contact with substrate 201, and sucker 33 and substrate 201 surround a space closely under pressure.The distance on the top of bottom to the second sidewall 333b that the height H 2 of sucker 33 is the first side wall 333a.
In the present embodiment, viscose glue can be passed through in the bottom 232 of sucker 23, as double faced adhesive tape invests on the second surface 223 of removable plate 22, but the fixed form of sucker 23 and removable plate 22 is not as limit, for example, Figure 7 shows that the schematic diagram of the another kind of fixed form of the sucker of substrate absorption device of the present utility model and removable plate.As shown in Figure 7, sucker 43 can intert and is arranged on removable plate 42, and the part of sucker 43, through the first suction hole on removable plate 42, is set on the pipeline 452 that attracts pneumatic supply 45, and so sheathed mode can be strengthened the steadiness of sucker 43.Particularly, sucker 43 comprises adsorption section 432, penetration portions 433 and the sleeved part 434 of connection successively and hollow, the axis of adsorption section 432, penetration portions 433 and sleeved part 434 is identical, wherein, adsorption section 432 shapes identical with the shape of sucker 23 (referring to Fig. 5), adsorption section 432 is positioned on the second surface 423 of removable plate 42.Offer a plurality of the first suction hole 42a on removable plate 42, penetration portions 433 is interspersed in the first corresponding suction hole 42a.The maximum gauge of sleeved part 434 is between the maximum gauge of the maximum gauge of penetration portions 433 and adsorption section 432.Attract pneumatic supply 45 to have a plurality of pipelines 452, sleeved part 434 is sheathed on corresponding pipeline 452.During installation, sleeved part 434 is got final product through being sheathed on pipeline 452 after the first suction hole 42a.The height H 3 of sucker 43 refers to the height of the adsorption section 432 of sucker 43.
Figure 8 shows that the schematic perspective view of auxiliary spacer of the substrate absorption device of Fig. 3.Refer to Fig. 3, Fig. 4 and Fig. 8, auxiliary spacer 24 can be the rubber auxiliary spacer, but not as limit.A plurality of auxiliary spacers 24 are the ranks matrix and evenly arrange and be fixed on the second surface 223 of removable plate 22.In the present embodiment, a plurality of auxiliary spacers 24 are two row four lines and arrange, a plurality of suckers 23 are the three row five-element and arrange, the surrounding of each auxiliary spacer 24 is placed with four suckers 23, on the evenly distributed second surface in removable plate 22 223 of auxiliary spacer 24 and sucker 23, but not as limit, in other embodiments, the arrangement mode of sucker 23 and auxiliary spacer 24 can be set arbitrarily according to actual demand, when sucker 23 and auxiliary spacer 24 are evenly distributed, the adsorption effect of 20 pairs of substrates 201 of substrate absorption device is better.
Auxiliary spacer 24 is fixed on the second surface 223 of removable plate 22, in the present embodiment, auxiliary spacer 24 can pass through viscose glue, and as double faced adhesive tape invests on the second surface 223 of removable plate 22, but the utility model does not limit the fixed form of auxiliary spacer 24 and removable plate 22.Auxiliary spacer 24 is roughly circular discoid, offer a plurality of air discharge ducts on the surface away from removable plate 22 242 of auxiliary spacer 24, in the present embodiment, the quantity of a plurality of air discharge ducts is four, comprises first row air drain 24a, second row air drain 24b, the 3rd air discharge duct 24c and the 4th air discharge duct 24d.First row air drain 24a and second row air drain 24b are the wire cell body radially extended along auxiliary spacer 24, and first row air drain 24a is perpendicular to second row air drain 24b; The 3rd air discharge duct 24c is the different ring-type cell body of maximum gauge with the 4th air discharge duct 24d, and the 3rd air discharge duct 24c is positioned at the inboard of the 4th air discharge duct 24d, and the 3rd air discharge duct 24c is identical with the central axis of the 4th air discharge duct 24d.First row air drain 24a, second row air drain 24b, the 3rd air discharge duct 24c and the 4th air discharge duct 24d are interconnected, so, when auxiliary spacer 24 contacts with substrate 201, the gas that auxiliary spacer 24 and substrate are 201 can be in communication with the outside by air discharge duct 24a, 24b, 24c, 24d, to prevent that auxiliary spacer 24 is too tight with substrate 201 laminatings, when putting down substrate 201, the setting of a plurality of air discharge ducts also is beneficial to and promotes separating of sucker and substrate 201.
The utility model does not limit the set-up mode of air discharge duct, in other embodiments, between a plurality of air discharge ducts, be interconnected, when the surface away from removable plate 22 242 of auxiliary spacer 24 contacts with substrate 201, a plurality of air discharge ducts at least one of them is in communication with the outside, can realize preventing that auxiliary spacer 24 is too tight with substrate 201 laminatings, when putting down substrate 201, auxiliary spacer 24 also can separate smoothly with the gas of 201 of substrates, but is not limited to this.
It should be noted that, the thickness of auxiliary spacer 24 is slightly less than the height H 1 of sucker 23, and in the present embodiment, the height H 1 of sucker 23 is than the thickness of auxiliary spacer 24 about thick 0.2 millimeter (mm), the height H 1 of sucker 23 is 3.8~4.0 millimeters, and the thickness of auxiliary spacer 24 is 3.6~3.8 millimeters.Like this, at sucker 23, with substrate 201, contact, after approximately producing the elastic deformation of 0~0.4 millimeter, when sucker 23 successfully is adsorbed in substrate 201, auxiliary spacer 24 also contacts with substrate 201, and auxiliary spacer 24 does not affect the adsorption affinity of 23 pairs of substrates 201 of sucker.The spacing of substrate 201 and removable plate 22 when in other words, the thickness of auxiliary spacer 24 is more than or equal to sucker 23 and is adsorbed in substrate 201; When the thickness of auxiliary spacer 24 is slightly larger than sucker 23 and is adsorbed in substrate 201 during the spacing of substrate 201 and removable plate 22, when sucker 23 is adsorbed in substrate 201, auxiliary spacer 24 can produce slight deformation, and sucker 23 and auxiliary spacer 24 can keep close contact with substrate 201 equally.
You need to add is that, the value of the height H 2 of sucker 33 and the height H 3 of sucker 43 can be identical with the value of the height H 1 of sucker 23.
Attract pneumatic supply 25 for extracting the gas between sucker 23 and substrate 201, so that 201 of sucker 23 and substrates form vacuum, thereby the barometric pressure of sucker 23 outsides is higher than the air pressure of sucker 23 inside, substrate 201 is externally picked up under the effect of pressure, the degree of vacuum of sucker 23 inside is higher, and that between sucker 23 and substrate 201, inhales is tighter.
Refer to Fig. 3 and Fig. 4, while needing carrying substrate 201, start the actuating device of cutting machine, removable plate 22 moves under the drive of actuating device, sucker 23 contacts with substrate 201, the Action of Gravity Field of the element of substrate 201 tops (comprising substrate absorption device 20) is on substrate 201, substrate 201 is produced to certain pressure, after sucker 23 produces certain deformation, surround a space to be vacuumized between sucker 23 and substrate 201, then, start and attract pneumatic supply 25, under the adsorption that attracts pneumatic supply 25, air stream in the space to be vacuumized that 201 of sucker 23 and substrates surround is through the second suction hole 232a and the first suction hole 22a and be sucked out, thereby produce negative pressure of vacuum and adsorb substrate 201, meanwhile, auxiliary spacer 24 is under the effect of the adsorption affinity of 201 of sucker 23 and substrates, also with substrate 201, contact, the surface away from removable plate 22 242 of auxiliary spacer 24 tightly is attached at substrate 201, air between auxiliary spacer 24 and substrate 201 can be in communication with the outside by air discharge duct 24a, 24b, 24c, 24d, too tight with auxiliary spacer 24 laminatings to prevent substrate 201.Simultaneously, the setting of a plurality of air discharge ducts is conducive to separating of auxiliary spacer 24 and substrate 201 more, and thus, compared to the situation that only is provided with sucker 23, the setting of auxiliary spacer 24 has increased the area of contact of substrate 201 with interambulacrum greatly.Because sucker acts on the local pressure P=F/S on substrate 201, wherein, F is for to act on substrate 201 pressure by sucker 23, and S is substrate 201 and the area of contact of sucker 23 and auxiliary spacer 24.The setting of auxiliary spacer 24 can increase area of contact S, and it is constant to act on the pressure F of substrate 201 by sucker 23, so the local pressure P acted on substrate 201 reduces, the situation that can avoid substrate 201 to be adsorbed surface stain occurs.
The utility model also proposes a kind of cutting machine, and it comprises above-mentioned substrate absorption device 20, and the concrete structure of substrate absorption device 20 does not repeat them here.
In sum, in substrate absorption device of the present utility model and cutting machine, owing to increasing, a plurality of auxiliary spacers are set on removable plate, when sucker absorption substrate, auxiliary spacer can with substrate contacts, increased the area of contact with substrate, because the pressure that acts on substrate by sucker remains unchanged, the local pressure acted on substrate reduces, thereby can effectively avoid substrate to occur because of the situation of the excessive blackening of local pressure, prevent that exterior substrate is bad, be conducive to improve the yield of substrate.In addition, only need auxiliary spacer is fixed on the second surface of removable plate, and, without increasing pipeline and attracting pneumatic supply, can simplify the structure of cutting machine, meet the minimized design requirement of cutting machine.
The above, it is only preferred embodiment of the present utility model, not the utility model is done to any pro forma restriction, although the utility model discloses as above with preferred embodiment, yet not in order to limit the utility model, any those skilled in the art, within not breaking away from the technical solutions of the utility model scope, when the technology contents that can utilize above-mentioned announcement is made a little change or is modified to the equivalent embodiment of equivalent variations, in every case be not break away from the technical solutions of the utility model content, any simple modification of above embodiment being done according to technical spirit of the present utility model, equivalent variations and modification, all still belong in the scope of technical solutions of the utility model.

Claims (10)

1. a substrate absorption device, it comprises removable plate, a plurality of sucker and attracts pneumatic supply, described removable plate has first surface and the second surface relative with described first surface, described sucker is fixed on described second surface, and each sucker is communicated with described attraction pneumatic supply, it is characterized in that: described substrate absorption device also comprises a plurality of auxiliary spacers, described auxiliary spacer is fixed on described second surface, and the spacing of the thickness of described auxiliary spacer described substrate and described removable plate when being more than or equal to described sucker and being adsorbed in substrate.
2. substrate absorption device as claimed in claim 1, it is characterized in that: the height of described sucker is 3.8~4.0 millimeters, the thickness of described auxiliary spacer is 3.6~3.8 millimeters.
3. substrate absorption device as claimed in claim 1, is characterized in that: on the surface away from removable plate of described auxiliary spacer, offer a plurality of air discharge ducts.
4. substrate absorption device as claimed in claim 3, it is characterized in that: between described a plurality of air discharge ducts, be interconnected, when the surface away from removable plate of described auxiliary spacer and described substrate contacts, described a plurality of air discharge ducts at least one of them is in communication with the outside.
5. substrate absorption device as claimed in claim 3, it is characterized in that: the quantity of described a plurality of air discharge ducts is four, comprise first row air drain, second row air drain, the 3rd air discharge duct and the 4th air discharge duct, described first row air drain and described second row air drain are the wire cell body radially extended along described auxiliary spacer, described the 3rd air discharge duct is the different ring-type cell body of maximum gauge with described the 4th air discharge duct, and described first row air drain, described second row air drain, described the 3rd air discharge duct and described the 4th air discharge duct are interconnected.
6. substrate absorption device as claimed in claim 1, it is characterized in that: described auxiliary spacer and described sucker all invest on the described second surface of described removable plate by adhesive plaster.
7. substrate absorption device as claimed in claim 1, it is characterized in that: described a plurality of suckers and described a plurality of auxiliary spacer evenly are arranged on the described second surface of described removable plate.
8. substrate absorption device as claimed in claim 1, it is characterized in that: offer a plurality of the first suction holes on described removable plate, each sucker comprises that bottom reaches from the extended sidewall in the edge of described bottom, offer the second suction hole on described bottom, each second suction hole is corresponding with one first suction hole, described bottom is fixed on the described second surface of described removable plate, and each second suction hole connects with the first corresponding suction hole.
9. substrate absorption device as claimed in claim 1, it is characterized in that: described sucker comprises adsorption section, penetration portions and the sleeved part of connection successively and hollow, offer a plurality of the first suction holes on described removable plate, described attraction pneumatic supply has a plurality of pipelines, described adsorption site is on described second surface, described penetration portions is interspersed in corresponding described the first suction hole, and described sleeved part is sheathed on corresponding described pipeline.
10. a cutting machine, is characterized in that, described cutting machine comprises the described substrate absorption device of claim 1 to 9 any one.
CN 201320318364 2013-06-04 2013-06-04 Substrate adsorption device and cutting machine Expired - Lifetime CN203359525U (en)

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104386491A (en) * 2014-10-17 2015-03-04 汤坤 Vacuum cup assembly
CN105109772A (en) * 2015-08-06 2015-12-02 深圳市华星光电技术有限公司 Liquid crystal display panel isolation device
CN105383928A (en) * 2014-08-29 2016-03-09 株式会社太星技研 Adsorption equipment for display panel
CN105537028A (en) * 2015-11-30 2016-05-04 东莞酷派软件技术有限公司 Adsorption component and preparation method of adsorption component
CN106183579A (en) * 2016-07-08 2016-12-07 青岛理工大学 Trigger type double-sided vacuum adsorption device, system and method
CN106269355A (en) * 2016-09-22 2017-01-04 东莞市联洲知识产权运营管理有限公司 A kind of SMT laser template spray coating operations platform of structure optimization
CN106903631A (en) * 2017-04-27 2017-06-30 武汉科技大学 A kind of MDF cuts uses sucker clamp
CN111348430A (en) * 2020-03-11 2020-06-30 深圳市华星光电半导体显示技术有限公司 Transport platform and conveyer
CN114056933A (en) * 2021-12-17 2022-02-18 广东海拓创新精密设备科技有限公司 High molecular weight modified siliconized polyurethane rubber physical adhesion sucker and preparation method thereof

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105383928A (en) * 2014-08-29 2016-03-09 株式会社太星技研 Adsorption equipment for display panel
CN104386491A (en) * 2014-10-17 2015-03-04 汤坤 Vacuum cup assembly
CN105109772B (en) * 2015-08-06 2018-02-16 深圳市华星光电技术有限公司 A kind of liquid crystal panel isolating device
CN105109772A (en) * 2015-08-06 2015-12-02 深圳市华星光电技术有限公司 Liquid crystal display panel isolation device
CN105537028A (en) * 2015-11-30 2016-05-04 东莞酷派软件技术有限公司 Adsorption component and preparation method of adsorption component
CN105537028B (en) * 2015-11-30 2018-12-25 东莞酷派软件技术有限公司 A kind of preparation method of adsorption piece and adsorption piece
CN106183579B (en) * 2016-07-08 2018-12-04 青岛理工大学 Trigger type double-sided vacuum adsorption device, system and method
CN106183579A (en) * 2016-07-08 2016-12-07 青岛理工大学 Trigger type double-sided vacuum adsorption device, system and method
CN106269355B (en) * 2016-09-22 2018-11-16 南京不老村旅游开发有限公司 A kind of SMT laser template spray coating operations platform of structure optimization
CN106269355A (en) * 2016-09-22 2017-01-04 东莞市联洲知识产权运营管理有限公司 A kind of SMT laser template spray coating operations platform of structure optimization
CN106903631A (en) * 2017-04-27 2017-06-30 武汉科技大学 A kind of MDF cuts uses sucker clamp
CN111348430A (en) * 2020-03-11 2020-06-30 深圳市华星光电半导体显示技术有限公司 Transport platform and conveyer
CN114056933A (en) * 2021-12-17 2022-02-18 广东海拓创新精密设备科技有限公司 High molecular weight modified siliconized polyurethane rubber physical adhesion sucker and preparation method thereof
CN114056933B (en) * 2021-12-17 2023-10-20 广东海拓创新精密设备科技有限公司 High molecular weight modified siliconized polyurethane rubber physical adhesion sucking disc

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