CN203351563U - A semiconductor manufacturing system - Google Patents
A semiconductor manufacturing system Download PDFInfo
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- CN203351563U CN203351563U CN 201320361049 CN201320361049U CN203351563U CN 203351563 U CN203351563 U CN 203351563U CN 201320361049 CN201320361049 CN 201320361049 CN 201320361049 U CN201320361049 U CN 201320361049U CN 203351563 U CN203351563 U CN 203351563U
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- display device
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- module
- manufacturing system
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Abstract
The utility model provides a semiconductor manufacturing system comprising a control device and a semiconductor device. The control device is mutually connected with the semiconductor device so as to be communicated with the semiconductor device. The control device comprises a display device for displaying graphical icons and is used for controlling the operative state of the semiconductor device and/or acquiring the operative state of the semiconductor device when the graphical icons on the display device are triggered. Compared with a product in the prior art which presents taskbars to be selected in the form of words, the display device provided by the utility model is more visualized so as to facilitate manipulation and further to accurately control the semiconductor device.
Description
Technical field
The utility model relates to technical field of manufacturing semiconductors, particularly a kind of semi-conductor manufacturing system.
Background technology
Existing semiconductor equipment is that operating personnel input instruction to semiconductor equipment by display device, obtains the operating state of semiconductor equipment or control semiconductor equipment by display device to enter various operating states.Usually, be preset with a plurality of function buttons on display device, by selecting corresponding function button, can enter corresponding one-level task list, described one-level task list comprises a plurality of one-level tasks, each one-level task presents with the taskbar of written form, by selecting this taskbar, can realize the selection to this one-level task, each one-level task below can also arrange a plurality of second task lists, described second task list comprises a plurality of second tasks, each second task presents with the taskbar of written form, by selecting this taskbar, can realize the selection to this second task.Complicated semiconductor equipments for some may also be provided with three grades of task lists under second task, comprise a plurality of three grades of tasks, and each three grades of task presents with the taskbar of written form, by selecting this taskbar, can realize the selection to these three grades of tasks.
For example, for the MOCVD equipment that a plurality of reaction chambers are arranged, comprise the first reaction chamber, the second reaction chamber, the 3rd reaction chamber, and transmission chamber, if need to write new technical recipe (Recipe) for the first reaction chamber, the related personnel need to select the first reaction chamber in function button, then enter the one-level task list that the first reaction chamber is corresponding, comprise the heater taskbar, the in situ detection taskbar, the inlet duct taskbar, the menu editing taskbar, the chamber pressure taskbar, electrical control taskbar etc. is a plurality of, and the heater taskbar, the inlet duct taskbar, electrical control taskbar etc. may also comprise a plurality of second task lists.
Prior art is because the taskbar by presenting with written form is selected, directly perceived not, easily falsely drop, if need to be switched to the state of checking miscellaneous part in other taskbars or parameter etc. in the menu editing process, need to carry out repeatedly clicking of taskbar, the operation underaction.
The utility model content
The purpose of this utility model is to provide a kind of semi-conductor manufacturing system, and to solve in existing semi-conductor manufacturing system, display device is directly perceived not, the problem of operation underaction.
For solving the problems of the technologies described above, the utility model provides a kind of semi-conductor manufacturing system, described semi-conductor manufacturing system comprises: control device and semiconductor equipment, described control device and described semiconductor equipment interconnect, and make between described control device and described semiconductor equipment and can communicate by letter; Described control device comprises display device, display graphics icon on described display device; When described control device is triggered for graphical icon on described display device, controls the operating state of described semiconductor equipment and/or obtain the operating state of described semiconductor equipment.
Optionally, in described semi-conductor manufacturing system, the quantity of the graphical icon shown on described display device is one or more, the quantity of described semiconductor equipment is one or more, the graphical icon shown on corresponding one or more the described display device of each described semiconductor equipment.
Optionally, in described semi-conductor manufacturing system, described semiconductor equipment comprises a plurality of functional modules.
Optionally, in described semi-conductor manufacturing system, described graphical icon comprises graphical appliance icon and graphical module icon, wherein, when described graphical appliance icon triggers, described control device is controlled the operating state of described semiconductor equipment and/or is obtained the operating state of described semiconductor equipment; When described graphical module icon triggers, described control device is controlled the operating state of described functional module and/or is obtained the operating state of described functional module.
Optionally, in described semi-conductor manufacturing system, described display device comprises one or more filter key, and described filter key can make described display device show graphical appliance icon and/or the graphical module icon that meets screening conditions.
Optionally, in described semi-conductor manufacturing system, described filter key comprises full figure mark filter key, and described full figure mark filter key can make described display device show all graphical appliance icon and graphical module icon.
Optionally, in described semi-conductor manufacturing system, described display device comprises the home key, and described home bond energy is enough controlled described display device and entered main interface, on described main interface, based on user's request, shows a plurality of graphical appliance icon and/or graphical module icon.
Optionally, in described semi-conductor manufacturing system, described display device comprises and moves key and move down key, wherein, move bond energy on described and enough control on the interface of the current demonstration of described display device and move, the described bond energy that moves down is enough controlled the interface of the current demonstration of described display device and is moved down.
Optionally, in described semi-conductor manufacturing system, by operating described display device, a plurality of interfaces have been shown before and after described display device; Described display device comprises advance key and back spacer, and wherein, described back spacer can be controlled the last interface that described display device enters the interface of current demonstration, and the described bond energy that advances is enough controlled the Hou Yi interface, interface that described display device enters current demonstration.
Optionally, in described semi-conductor manufacturing system, described semiconductor equipment comprises MOCVD equipment.
Optionally, in described semi-conductor manufacturing system, described functional module comprises heating module, gas conveyor module, exhaust-gas treatment module, reaction chamber module or electric control module.
Optionally, in described semi-conductor manufacturing system, described display device is touch display screen, by touching described touch display screen, realizes triggering described graphical icon.
The semi-conductor manufacturing system provided at the utility model, it has comprised the display device with graphical icon, by triggering graphical icon on described display device, makes described control device control the operating state of described semiconductor equipment and/or obtains the operating state of described semiconductor equipment.With respect to of the prior art, by the taskbar presented with written form, selected, the display device that the utility model provides is more directly perceived, thus convenient operation, and then can accurately control semiconductor equipment.
The accompanying drawing explanation
Fig. 1 is the mount structure schematic diagram of the semi-conductor manufacturing system of the utility model embodiment;
Fig. 2 is the mount structure schematic diagram of the display device of the utility model embodiment.
Embodiment
Below in conjunction with the drawings and specific embodiments, the semi-conductor manufacturing system the utility model proposes is described in further detail.According to the following describes and claims, advantage of the present utility model and feature will be clearer.It should be noted that, accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the purpose of aid illustration the utility model embodiment lucidly.
Please refer to Fig. 1, the mount structure schematic diagram of its semi-conductor manufacturing system that is the utility model embodiment.As shown in Figure 1, described semi-conductor manufacturing system comprises: control device 1 and semiconductor equipment 2, and described control device 1 interconnects with described semiconductor equipment 2, makes between described control device 1 and described semiconductor equipment 2 and can communicate by letter; Described control device 1 comprises display device 3, display graphics icon (not shown in figure 1) on described display device 3; When described control device 1 is triggered for the graphical icon on described display device 3, controls the operating state of described semiconductor equipment 2 and/or obtain the operating state of described semiconductor equipment 2.Described display device is more directly perceived thus, thus convenient operation, and then can accurately control semiconductor equipment.In the present embodiment, described display device is touch display screen, by touching described touch display screen, realizes triggering described graphical icon.
Wherein, the quantity of the graphical icon shown on described display device 3 is one or more, the quantity of described semiconductor equipment 2 is one or more, the graphical icon shown on corresponding one or more the described display device 3 of each described semiconductor equipment 2.In the present embodiment, described graphical icon comprises graphical appliance icon and graphical module icon, described semiconductor equipment 2 comprises a plurality of functional modules, when described graphical appliance icon triggers, described control device 1 is controlled the operating state of described semiconductor equipment 2 and/or is obtained the operating state of described semiconductor equipment 2; When described graphical module icon triggers, described control device 1 is controlled the operating state of described functional module and/or is obtained the operating state of described functional module.
Concrete, please refer to Fig. 2, the mount structure schematic diagram of its display device that is the utility model embodiment.As shown in Figure 2, in the present embodiment, show a plurality of graphical icon 30 on described display device 3, wherein, a plurality of graphical icon 30 comprise graphical appliance icon and graphical module icon.Concrete, show 14 graphical icon 30 at this, be respectively graphical icon 30A, graphical icon 30B, graphical icon 30C, graphical icon 30D, graphical icon 30E, graphical icon 30F, graphical icon 30G, graphical icon 30H, graphical icon 30I, graphical icon 30J, graphical icon 30K, graphical icon 30L, graphical icon 30M, graphical icon 30N.Wherein, graphical icon 30A～30G is graphical appliance icon, and graphical icon 30H～30N is the graphical module icon.
In the present embodiment, corresponding the first semiconductor equipment of graphical icon 30A, corresponding the second semiconductor equipment of graphical icon 30B, corresponding the 3rd semiconductor equipment of graphical icon 30C, corresponding the 4th semiconductor equipment of graphical icon 30D, corresponding the 5th semiconductor equipment of graphical icon 30E, corresponding the 6th semiconductor equipment of graphical icon 30F, corresponding the 7th semiconductor equipment of graphical icon 30G.Wherein, the first semiconductor equipment, the second semiconductor equipment, the 3rd semiconductor equipment, the 4th semiconductor equipment, the 5th semiconductor equipment, the 6th semiconductor equipment and the 7th semiconductor equipment can be MOCVD equipment, PECVD equipment or PVD equipment etc.For example, the first semiconductor equipment and the second semiconductor equipment are MOCVD equipment, by graphical icon 30A, can control the operating state of a MOCVD equipment and/or obtain the operating state of described MOCVD equipment; Can control the operating state of another MOCVD equipment and/or obtain the operating state of described MOCVD equipment by graphical icon 30B.
In the present embodiment, corresponding the first functional module of graphical icon 30H, corresponding the second functional module of graphical icon 30I, corresponding the 3rd functional module of graphical icon 30J, corresponding the 4th functional module of graphical icon 30K, the corresponding five-function module of graphical icon 30L, corresponding the 6th functional module of graphical icon 30M, corresponding the 7th functional module of graphical icon 30N.Wherein, the first functional module, the second functional module, the 3rd functional module, the 4th functional module, five-function module, the 6th functional module and the 7th functional module can be drawn together heating module, gas conveyor module, exhaust-gas treatment module, reaction chamber module or electric control module etc. for Functional Module.Wherein, described heating module, gas conveyor module, exhaust-gas treatment module, reaction chamber module or electric control module can be under the jurisdiction of above-mentioned MOCVD equipment, PECVD equipment or PVD equipment.Thus, by controlling or obtain the operating state of described heating module, gas conveyor module, exhaust-gas treatment module, reaction chamber module or electric control module, can better control the operating state of described MOCVD equipment, PECVD equipment or PVD equipment, or obtain more accurately the operating state of described MOCVD equipment, PECVD equipment or PVD equipment.
In conjunction with Fig. 1, as an embodiment, described graphical icon 30C is corresponding to PECVD equipment, described graphical icon 30H, corresponding to the heating module of PECVD equipment, is graphical appliance icon by described graphical icon 30C() can be so that control device 1 be controlled the operating state and the operating state of obtaining this PECVD equipment of described PECVD equipment; By described graphical icon 30H(, be the graphical module icon) can so that described control device 1 control described PECVD equipment heating module operating state and/or obtain the operating state of the heating module of described PECVD equipment.For example, by triggering described graphical icon 30H to start the heating module work of described PECVD equipment, also started thus described PECVD work.In addition, in the present embodiment, described graphical icon can be also the combination (a block graphics appliance icon and graphical module icon in other words) of graphical appliance icon and graphical module icon, by triggering any in a block graphics appliance icon and graphical module icon, can make described control device control the operating state of described semiconductor equipment and/or obtain the operating state of described semiconductor equipment.
Further, described display device 1 comprises one or more filter key 31, and described filter key 31 can make described display device 3 show graphical appliance icon and/or the graphical module icon that meets screening conditions.Show seven filter keys 31 at this, be respectively the first filter key 31A, the second filter key 31B, three screening key 31C, the 4th filter key 31D, the 5th filter key 31E, the 6th filter key 31F and the 7th filter key 31G.In the present embodiment, described the first filter key 31A is full figure mark filter key, described the first filter key 31A(is full figure mark filter key) bond energy enough makes described display device 3 show all graphical appliance icon and graphical module icon, when using described the first filter key 31A, on described display device 3, can show all graphical icon 30.In the present embodiment, described the second filter key 31B, three screening key 31C, the 4th filter key 31D, the 5th filter key 31E, the 6th filter key 31F and the 7th filter key 31G can set other different screening functions.For example, it is relevant that described the second filter key 31B can be set as MOCVD equipment, if with the device-dependent icon of MOCVD, graphical icon 30A and graphical icon 30B are only arranged, when using described the second filter key 31B, by display graphics icon 30A and graphical icon 30B, play the function of screening on described display device 3.
Please continue to refer to Fig. 2, in the present embodiment, described display device also comprises home key 32, described home key 32 can be controlled described display device 3 and enter main interface, show a plurality of graphical appliance icon and/or graphical module icon based on user's request on described main interface, such as the graphical appliance icon that the user can be commonly used and/or graphical icon are presented on this main interface.For example, according to user's actual need, graphical icon 30C, graphical icon 30D, graphical icon 30E, graphical icon 30F, graphical icon 30G, graphical icon 30H, graphical icon 30I, graphical icon 30J and graphical icon 30K are set on main interface, by described home key 32, can switch to fast main interface, graphical appliance icon and/or graphical module icon that can be commonly used to it this main interface user carry out direct control, more convenient.
Further, described display device 3 also comprises and moves key 33 and move down key 34, wherein, moving key 33 on described can control on the interface of described display device 3 current demonstrations and move, the described key 34 that moves down can be controlled the interface of described display device 3 current demonstrations and moves down, can be convenient to thus search the graphical icon 30 on current interface, and then convenient operation/control semiconductor equipment.
In the present embodiment, by operating described display device 3, described display device 3 front and back have shown a plurality of interfaces, and for example, by triggering graphical icon 30A, described display device 3 has shown the correlation behavior interface of a MOCVD equipment; By triggering the home key, described display device 3 has shown main interface; By triggering the second filter key 31B, described display device 3 has shown graphical icon 30A and graphical icon 30B.Further, described display device 3 comprises advance key 35 and back spacer 36, wherein, described back spacer 36 can be controlled the last interface that described display device 3 enters the interface of current demonstration, and the described key 35 that advances can be controlled the Hou Yi interface, interface that described display device 3 enters current demonstration.Suppose that current affiliated interface, for after triggering the second filter key 31B, has shown graphical icon 30A and graphical icon 30B; Last interface, for after triggering the home key, has shown main interface.By back spacer 36, can control described display device 3 and enter main interface; Can control the correlation behavior interface (trigger graphical icon 30B after result) of the correlation behavior interface that described display device 3 shows MOCVD equipment (trigger graphical icon 30A after result) or another MOCVD equipment by the key 35 that advances.By described key 35 and the back spacer 36 of advancing, can further be convenient to switch between each display interface, and then convenient operation/control semiconductor equipment.
In summary, with respect to of the prior art, by the taskbar presented with written form, selected, the display device that the utility model provides is more directly perceived, thus convenient operation, and then can accurately control semiconductor equipment.
Foregoing description is only the description to the utility model preferred embodiment; it is not any restriction to the utility model scope; any change, modification that the those of ordinary skill in the utility model field is done according to above-mentioned disclosure, all belong to the protection range of claims.
Claims (12)
1. a semi-conductor manufacturing system, is characterized in that, comprising: control device and semiconductor equipment, and described control device and described semiconductor equipment interconnect, and make between described control device and described semiconductor equipment and can communicate by letter; Described control device comprises display device, display graphics icon on described display device; When described control device is triggered for graphical icon on described display device, controls the operating state of described semiconductor equipment and/or obtain the operating state of described semiconductor equipment.
2. semi-conductor manufacturing system as claimed in claim 1, it is characterized in that, the quantity of the graphical icon shown on described display device is one or more, the quantity of described semiconductor equipment is one or more, the graphical icon shown on corresponding one or more the described display device of each described semiconductor equipment.
3. semi-conductor manufacturing system as claimed in claim 1, is characterized in that, described semiconductor equipment comprises a plurality of functional modules.
4. semi-conductor manufacturing system as claimed in claim 3, it is characterized in that, described graphical icon comprises graphical appliance icon and graphical module icon, wherein, when described graphical appliance icon triggers, described control device is controlled the operating state of described semiconductor equipment and/or is obtained the operating state of described semiconductor equipment; When described graphical module icon triggers, described control device is controlled the operating state of described functional module and/or is obtained the operating state of described functional module.
5. semi-conductor manufacturing system as claimed in claim 4, it is characterized in that, described display device comprises one or more filter key, and described filter key can make described display device show graphical appliance icon and/or the graphical module icon that meets screening conditions.
6. semi-conductor manufacturing system as claimed in claim 5, is characterized in that, described filter key comprises full figure mark filter key, and described full figure mark filter key can make described display device show all graphical appliance icon and graphical module icon.
7. semi-conductor manufacturing system as claimed in claim 4, it is characterized in that, described display device comprises the home key, and described home bond energy is enough controlled described display device and entered main interface, on described main interface, based on user's request, shows a plurality of graphical appliance icon and/or graphical module icon.
8. semi-conductor manufacturing system as described as any one in claim 1～7, it is characterized in that, described display device comprises and moves key and move down key, wherein, move bond energy on described and enough control on the interface of the current demonstration of described display device and move, the described bond energy that moves down is enough controlled the interface of the current demonstration of described display device and is moved down.
9. semi-conductor manufacturing system as described as any one in claim 1～7, is characterized in that, by operating described display device, shown a plurality of interfaces before and after described display device; Described display device comprises advance key and back spacer, and wherein, described back spacer can be controlled the last interface that described display device enters the interface of current demonstration, and the described bond energy that advances is enough controlled the Hou Yi interface, interface that described display device enters current demonstration.
10. semi-conductor manufacturing system as described as any one in claim 1～7, is characterized in that, described semiconductor equipment comprises MOCVD equipment.
11. semi-conductor manufacturing system as described as any one in claim 3～7, is characterized in that, described functional module comprises heating module, gas conveyor module, exhaust-gas treatment module, reaction chamber module or electric control module.
12. semi-conductor manufacturing system as described as any one in claim 1～7, is characterized in that, described display device is touch display screen, by touching described touch display screen, realizes triggering described graphical icon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320361049 CN203351563U (en) | 2013-06-21 | 2013-06-21 | A semiconductor manufacturing system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320361049 CN203351563U (en) | 2013-06-21 | 2013-06-21 | A semiconductor manufacturing system |
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| Publication Number | Publication Date |
|---|---|
| CN203351563U true CN203351563U (en) | 2013-12-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201320361049 Expired - Fee Related CN203351563U (en) | 2013-06-21 | 2013-06-21 | A semiconductor manufacturing system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107967556A (en) * | 2017-11-16 | 2018-04-27 | 上海华力微电子有限公司 | A kind of control method of technological process and partly lead equipment |
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2013
- 2013-06-21 CN CN 201320361049 patent/CN203351563U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107967556A (en) * | 2017-11-16 | 2018-04-27 | 上海华力微电子有限公司 | A kind of control method of technological process and partly lead equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131218 Termination date: 20150621 |
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| EXPY | Termination of patent right or utility model |