CN203349807U - Device for measuring solid thin film thickness ranging from 10 to 100 mu m - Google Patents
Device for measuring solid thin film thickness ranging from 10 to 100 mu m Download PDFInfo
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- CN203349807U CN203349807U CN 201320483855 CN201320483855U CN203349807U CN 203349807 U CN203349807 U CN 203349807U CN 201320483855 CN201320483855 CN 201320483855 CN 201320483855 U CN201320483855 U CN 201320483855U CN 203349807 U CN203349807 U CN 203349807U
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- film
- aluminium oxide
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- thin film
- intermediate plate
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Abstract
The utility model discloses a device for measuring solid thin film thickness ranging from 10 to 100 mu m. The device comprises two pieces of alumina ceramic clamping plates clamped by a clamping device, wherein bare thin film or thin film coated on a substrate is clamped between the two pieces of alumina ceramic clamping plates, and the contrast of the thin film and the alumina ceramic clamping plates or the substrate are different. The device utilizes a micrometer head of a microscope for direct reading, is high in accuracy and simple in operation, and the measuring accuracy thereof can be up to 0.5-1 mu m. The device has simple solid thin film thickness measuring method, is easy to operate and high in accuracy, and can be used in industry or a laboratory.
Description
Technical field
The utility model relates to a kind of device of measuring solid film, is specifically related to the measurement mechanism of 10～100 μ m solid film thickness.
Background technology
The film of industry or laboratory applications, its thickness is a very important parameter." size effect " of film has influence on the character such as film resiativity, Hall coefficient, light reflectivity, and can be related to film work.
The measuring method of common 10～100 μ m film thicknesses has the optical meanss such as light transmission, interference, polarization, reflectometry, but, for solid film, the method is inapplicable; X-ray thickness gauge, but scanning electron microscope, step instrument, holography method testing film thickness and precision are high expensive, operate comparatively loaded down with trivial details; Supersonic thickness meter, eddy current thickness meter etc. need standard sample, increase and measure cost, and the instrument cost is higher.But expensive, method of testing bothers, and ordinary light source can't meet the thickness measuring condition of light absorbent.
For 10～100 μ m solid films, particularly be attached to the measured film thickness of substrate, need especially a kind of simple to operate, low cost, the higher measurement mechanism of accuracy.
Summary of the invention
The purpose of this utility model is for overcoming above-mentioned the deficiencies in the prior art, and the measurement mechanism of 10～100 μ m solid film thickness is provided.
For achieving the above object, the utility model adopts following technical proposals:
The measurement mechanism of 10～100 μ m solid film thickness, comprise the two piece aluminum oxide pottery intermediate plates by the fixture clamping, accompany exposed film or be coated on suprabasil film between described two piece aluminum oxide pottery intermediate plates, described film is different from the contrast of aluminium oxide ceramics intermediate plate or substrate.
The both sides of described two piece aluminum oxide pottery intermediate plates are fixed by relay or nd-fe-b magnet.
Described film is ferrous acid lanthanum film, lanthanum manganate film, Lanthanum Chromite film, LiMn2O4 film or PVC film, and the size of described film is less than or equal to 25mm * 50mm.
Described substrate is aluminium oxide, aluminium foil or silicon dioxide, and described substrate has a flat side, and this flat side contacts with film, and concordant with a slice aluminium oxide ceramics intermediate plate wherein.
Using method of the present utility model:
Utilize two piece aluminum oxide pottery intermediate plates to clamp exposed film or be coated on suprabasil film, with relay or the fixing aluminium oxide ceramics intermediate plate with the fixture clamping of nd-fe-b magnet, and be placed in the scleroscopic micro-Microscopic observation of dimension formula, the aluminium oxide ceramics intermediate plate is vertically placed, there is contrast difference between film and aluminium oxide ceramics intermediate plate or substrate, utilize microscopical differential head to read distance or the aluminium oxide ceramics intermediate plate of close film both sides and the distance between substrate one side between two piece aluminum oxide pottery intermediate plates, be film thickness.
Film is ferrous acid lanthanum film, lanthanum manganate film, Lanthanum Chromite film, LiMn2O4 film or PVC film, with the aluminium oxide ceramics intermediate plate, contrast difference is arranged under the microscope, as long as the interface that can find out aluminium oxide just can Thickness Measurement by Microwave; Substrate is the non-blacks such as aluminium oxide, aluminium foil or silicon dioxide, strong to the reflection of light effect, with film, forms contrast difference, examine under a microscope and can observe pattern, or reflective bright district.
The size of described film is less than or equal to 25mm * 50mm.
Described substrate has a flat side, and this flat side is concordant with a slice aluminium oxide ceramics intermediate plate wherein.
Described substrate has a flat side, and this flat face contacts with film.
Described microscopic fields of view has 100 and 400 times, and wherein, during by 100 times of visual field test, net result is 4 quilts of baseline results.
Described film thickness is shape thickness, is the average thickness of film; When film is clamped in two piece aluminum oxides potteries intermediate plates middle, two sides of film directly contact with the aluminium oxide ceramics intermediate plate, and the shape thickness of film is actual thickness.
Principle of work of the present utility model:
Film is extinction, present black, and the aluminium oxide ceramics intermediate plate is white, aluminium oxide ceramics intermediate plate of the present utility model border is straight, and corner angle are clearly demarcated, with the contrast of solid film material, differ greatly, with respect to solid film, the microstructure of aluminium oxide ceramics intermediate plate after 100 optical amplifiers be clear, be easy to differentiate, as Fig. 4, utilize microscopical differential head can read the distance between two piece aluminum oxide pottery intermediate plates, be film thickness.
Film is difficult for observing interface under the microscope, and the aluminium oxide ceramics intermediate plate can be observed border clearly, aluminium oxide ceramics intermediate plate of the present utility model border is straight, corner angle are clearly demarcated, with the contrast of membraneous material, differ greatly, with respect to film, the microstructure of aluminium oxide ceramics intermediate plate after 100 optical amplifiers be clear, be easy to differentiate, as Fig. 2, utilize microscopical differential head can read the distance between two piece aluminum oxide pottery intermediate plates, be film thickness.And, for the film that substrate is arranged, if base material also can be told the contact interface with film under the microscope clearly, the distance between this interface and alumina ceramic plate is film thickness so, as shown in Figure 4.
Aluminium oxide ceramics intermediate plate of the present utility model is vertically placed.Thickness measuring is not subject to the impact of film shape, and the test surfaces of film tilts or out-of-flatness affects the test nothing; But, for being coated on suprabasil film, substrate should have a flat side, and concordant with intermediate plate.
The shape thickness that the film thickness of the utility model test is film is the average thickness of film sample.As shown in Figure 3, film is clamped in the middle of the aluminium oxide ceramics intermediate plate, and two sides of film directly contact with the aluminium oxide ceramics intermediate plate, are similar to the interface of coincidence, and the distance between the aluminium oxide ceramics intermediate plate equals film thickness like this.
The beneficial effects of the utility model are, the direct reading of the utility model utilization dimension microscopical differential head of formula sclerometer, accuracy is high, simple to operate, the precision that its measuring accuracy can arrive 0.5～1 μ m(differential head is 0.01 μ m, actual when the test of film, the roughness of alumina wafer is 0.40～0.42 μ m, and thickness and precision is between 0.5～1 μ m).The utility model is simple for the solid film thickness measuring method, installs easy to operately, and degree of accuracy is high, but but both industrial application also use in laboratory.
The accompanying drawing explanation
The measurement mechanism figure that Fig. 1 is film, (a) front view (b) left view (c) vertical view;
Fig. 2 is the microstructure figure after the aluminium oxide ceramics intermediate plate amplifies under 100 optical microscopes;
Fig. 3 is the measurement mechanism vertical view that is coated on suprabasil film;
The scanning electron microscope (SEM) photograph that Fig. 4 is thickness measure;
1. aluminium oxide ceramics intermediate plates wherein, 2. exposed film, 3. relay or nd-fe-b magnet, 4. be coated on suprabasil film, 5. substrate, 6. fixture.
Embodiment
Below in conjunction with drawings and Examples, the utility model is further elaborated, should be noted that following explanation is only in order to explain the utility model, is not limited its content.
Embodiment 1:
Measurement mechanism of the present utility model, comprise between two piece aluminum oxide pottery intermediate plate 1, the two piece aluminum oxide pottery intermediate plates 1 by fixture 6 clampings and accompany exposed film 2.The both sides of two piece aluminum oxide pottery intermediate plates 1 are fixing by relay or nd-fe-b magnet 3.
As shown in Figure 1, utilize two piece aluminum oxide pottery intermediate plates 1 to clamp PVC film (being film 2 exposed in Fig. 1 (a)), exposed film 2 is of a size of 10mm * 10mm.With the fixing aluminium oxide ceramics intermediate plate 1 with fixture 6 clampings of relay, and be placed in the scleroscopic 400 times of optical microphotograph Microscopic observations of HV-100 dimension formula, aluminium oxide ceramics intermediate plate 1 is vertically placed, due to exposed film 2 and aluminium oxide ceramics intermediate plate 1 contrast difference, utilize microscopical differential head to read the distance between two aluminium oxide ceramics intermediate plates 1, be film thickness.Read 4 secondary data and then average, data are as shown in table 1.
Table 1
| Number of |
1 | 2 | 3 | 4 | Mean value | Variance |
| Thickness/μ m | 61.08 | 60.04 | 61.32 | 59.92 | 60.55 | 0.39 |
Above-mentioned PVC film is measured to its thickness with micrometer caliper, and test result is as shown in table 2.
Table 2
| Number of |
1 | 2 | 3 | 4 | Mean value | Variance |
| Thickness/μ m | 60 | 61 | 62 | 59 | 60.5 | 1.67 |
Embodiment 2:
Measurement mechanism of the present utility model, comprise between two piece aluminum oxide pottery intermediate plate 1, the two piece aluminum oxide pottery intermediate plates 1 by fixture 6 clampings and accompany and be coated on suprabasil film 4.The both sides of two piece aluminum oxide pottery intermediate plates 1 are fixing by relay or nd-fe-b magnet 3.
As shown in Figure 3, that utilizes two piece aluminum oxides potteries intermediate plates 1 to clamp to apply on alumina substrate 2 mixes strontium ferrous acid lanthanum film (being the suprabasil film 4 that is coated in Fig. 3), is coated on suprabasil film 4 and is of a size of 10mm * 10mm.With the fixing aluminium oxide ceramics intermediate plate 1 with fixture 6 clampings of nd-fe-b magnet, and be placed in the scleroscopic 100 times of optical microphotograph Microscopic observations of HV-100 dimension formula, wherein the metallographic pattern of aluminium oxide as shown in Figure 2.Aluminium oxide ceramics intermediate plate 1 is vertically placed, due to the contrast difference be coated between suprabasil film 4 and aluminium oxide ceramics intermediate plate 1 and substrate 5, utilize microscopical differential head to read near being coated on the aluminium oxide ceramics intermediate plate 1 of suprabasil film 4 both sides and the distance between substrate 5 one sides, be multiplied by 4 and be film thickness.Read 4 secondary data and then average, data are as shown in table 3.
Table 3
| Number of |
1 | 2 | 3 | 4 | Mean value | Variance |
| Thickness/μ m | 63.00 | 62.16 | 59.40 | 59.92 | 60.7 | 2.8 |
And by JEOLJSM-6380LA sweep electron microscopic measure thickness detailed process be: sample thickness face metal spraying is observed sample thickness face clearly after processing under scanning electron microscope, photographic images then, as shown in Figure 4.The thickness of three point measurement films in survey sheet (A in Fig. 4, B, C), get the mean value of measuring for three times
the length of surveying again 20 μ m scales is that 15.88(is as the D in Fig. 4), the recycling formula
calculate the thickness of film, what draw the results are shown in Table shown in 4.
Table 4
Although above-mentioned, by reference to the accompanying drawings embodiment of the present utility model is described; but be not the restriction to the utility model protection domain; on the basis of the technical solution of the utility model, those skilled in the art do not need to pay various modifications that creative work can make or distortion still in protection domain of the present utility model.
Claims (4)
1.10 the measurement mechanism of～100 μ m solid film thickness, it is characterized in that, comprise the two piece aluminum oxide pottery intermediate plates by the fixture clamping, accompany exposed film or be coated on suprabasil film between described two piece aluminum oxide pottery intermediate plates, described film is different from the contrast of aluminium oxide ceramics intermediate plate or substrate.
2. measurement mechanism according to claim 1, is characterized in that, the both sides of described two piece aluminum oxide pottery intermediate plates are fixed by relay or nd-fe-b magnet.
3. measurement mechanism according to claim 1, is characterized in that, described film is ferrous acid lanthanum film, lanthanum manganate film, Lanthanum Chromite film, LiMn2O4 film or PVC film, and the size of described film is less than or equal to 25mm * 50mm.
4. measurement mechanism according to claim 1, is characterized in that, described substrate is aluminium oxide, aluminium foil or silicon dioxide, and described substrate has a flat side, and this flat side contacts with film, and concordant with a slice aluminium oxide ceramics intermediate plate wherein.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320483855 CN203349807U (en) | 2013-08-09 | 2013-08-09 | Device for measuring solid thin film thickness ranging from 10 to 100 mu m |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320483855 CN203349807U (en) | 2013-08-09 | 2013-08-09 | Device for measuring solid thin film thickness ranging from 10 to 100 mu m |
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|---|---|
| CN203349807U true CN203349807U (en) | 2013-12-18 |
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| CN 201320483855 Withdrawn - After Issue CN203349807U (en) | 2013-08-09 | 2013-08-09 | Device for measuring solid thin film thickness ranging from 10 to 100 mu m |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103398662A (en) * | 2013-08-09 | 2013-11-20 | 山东大学 | Method and device for measuring thickness of 10 to 100 Mum solid thin films |
| CN104729397A (en) * | 2013-12-24 | 2015-06-24 | 厦门三维丝环保股份有限公司 | Measuring method for thickness of PTFE micro-porous membrane |
| CN104748712A (en) * | 2015-04-03 | 2015-07-01 | 天津市计划生育药具管理中心 | Female condom thickness detection method |
| CN109084694A (en) * | 2018-09-20 | 2018-12-25 | 王顺 | A kind of film thickness detection method |
-
2013
- 2013-08-09 CN CN 201320483855 patent/CN203349807U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103398662A (en) * | 2013-08-09 | 2013-11-20 | 山东大学 | Method and device for measuring thickness of 10 to 100 Mum solid thin films |
| CN103398662B (en) * | 2013-08-09 | 2016-04-06 | 山东大学 | The measuring method of 10 ~ 100 μm of solid film thickness and device |
| CN104729397A (en) * | 2013-12-24 | 2015-06-24 | 厦门三维丝环保股份有限公司 | Measuring method for thickness of PTFE micro-porous membrane |
| CN104748712A (en) * | 2015-04-03 | 2015-07-01 | 天津市计划生育药具管理中心 | Female condom thickness detection method |
| CN109084694A (en) * | 2018-09-20 | 2018-12-25 | 王顺 | A kind of film thickness detection method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20131218 Effective date of abandoning: 20160406 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |