CN203346292U - Silicon carbide reaction-sintering cantilever paddle surface impurity removal device - Google Patents
Silicon carbide reaction-sintering cantilever paddle surface impurity removal device Download PDFInfo
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- CN203346292U CN203346292U CN 201320388312 CN201320388312U CN203346292U CN 203346292 U CN203346292 U CN 203346292U CN 201320388312 CN201320388312 CN 201320388312 CN 201320388312 U CN201320388312 U CN 201320388312U CN 203346292 U CN203346292 U CN 203346292U
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- silicon carbide
- cantilever paddle
- rinse bath
- carbide reaction
- sintered
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Abstract
The utility model discloses a silicon carbide reaction-sintering cantilever paddle surface impurity removal device, and belongs to the technical field of silicon carbide reaction-sintering cantilever paddle production equipment. The silicon carbide reaction-sintering cantilever paddle surface impurity removal device comprises a rinsing tank, wherein a liquid inlet pipe is arranged above the rinsing tank correspondingly, a liquid inlet valve is arranged on the liquid inlet pipe, an impurity discharge pipe is arranged at the bottom of the rinsing tank, an impurity discharge valve is arranged on the impurity discharge pipe, a pore plate used for placing a silicon carbide cantilever paddle is arranged in the rinsing tank and comprises a plurality of placing areas; sliders driven by a power device are arranged at the top of the two side walls of the rinsing tank, a connecting beam is arranged between the two sliders, the connecting beam is provided with a brush corresponding to each placing area, and the shape of each brush corresponds to that of a load area of the silicon carbide cantilever paddle. The silicon carbide reaction-sintered cantilever paddle surface impurity removal device is simple in structure, capable of automatically brushing and rinsing impurities on the surface of the silicon carbide cantilever paddle, replacing the manual brushing and rinsing and avoiding the influence on the health of operators.
Description
Technical field
The utility model belongs to silicon carbide reaction-sintered cantilever paddle production unit technical field, relates in particular to a kind of silicon carbide reaction-sintered cantilever paddle surface knot screen.
Background technology
In solar-energy photo-voltaic cell PN junction diffusing, doping equipment-diffusion furnace and semiconductor manufacturing industry, silicon wafer is carried out in the high temperature oxidation diffusion furnace of heat growth oxidation, cantilever paddle is the key part of wafer load system in equipment, can guarantee the concentricity of wafer and boiler tube, so make diffusion, oxidation is more even.Particularly silicon carbide reaction-sintered matter cantilever paddle has the characteristics such as anti-thermal shock stability, weight-carrying capacity pollution-free, indeformable and good under high strength, high purity, high heat conduction, pore-free, acid-alkali-corrosive-resisting, high temperature are large, avoided contacting with the direct of boiler tube, extended the work-ing life of boiler tube, solved other material cantilever paddle easy fracture, weight-carrying capacity is little, the problem that cost is high.
In the making processes of silicon carbide reaction-sintered cantilever paddle, after sintering completes, the remained on surface of silicon carbide cantilever paddle has the impurity such as calcining matter, due to cantilever paddle when loading wafer, it is clean that its load region need keep, pollution-free to guarantee under high temperature, the impurity on the silicon carbide cantilever paddle surface that therefore need complete sintering is removed, existing silicon carbide reaction-sintered cantilever paddle surface knot screen is to adopt the mode of manually scrubbing in rinse bath, because the scavenging solution of silicon carbide cantilever paddle is acidic solution, there is certain corrodibility, prolonged operation has a strong impact on the healthy of operator.
The utility model content
Technical problem to be solved in the utility model is: a kind of silicon carbide reaction-sintered cantilever paddle surface knot screen is provided, to solve the knot screen employing of existing silicon carbide reaction-sintered cantilever paddle surface, manually scrubs the technical problem that affects operator's health in rinse bath.
For solving the problems of the technologies described above, the technical solution of the utility model is: silicon carbide reaction-sintered cantilever paddle surface knot screen, comprise rinse bath, corresponding described rinse bath top is provided with liquid-inlet pipe, described liquid-inlet pipe is provided with liquid feed valve, and described bottom of rinse bath is provided with impurity-discharging pipe, and described impurity-discharging pipe is provided with eduction valve, in described rinse bath, be equipped with for placing the orifice plate of described silicon carbide cantilever paddle, described orifice plate comprises several rest areas; The top, two side of described rinse bath is provided with the slide block driven by power set, between two described slide blocks, tie-beam is installed, on described tie-beam, corresponding each described rest area is equipped with hairbrush, and the shape of described hairbrush is corresponding with the load region shape of described silicon carbide cantilever paddle.
As a kind of improvement, be provided with circulating line between described liquid feed valve and eduction valve, described circulating line is provided with recycle pump, and the both ends of described circulating line are equipped with recycle valve.
As further improvement, described rest area is provided with three side by side, and corresponding, described hairbrush is provided with three.
As further improvement, described power set comprises cylinder, and the cylinder body of described cylinder is fixedly mounted on described top side wall, and the piston rod of described cylinder is fixedly connected with described slide block.
After having adopted technique scheme, the beneficial effects of the utility model are: because silicon carbide reaction-sintered cantilever paddle surface knot screen comprises rinse bath, corresponding described rinse bath top is provided with liquid-inlet pipe and liquid feed valve, described bottom of rinse bath is provided with impurity-discharging pipe and eduction valve, designed orifice plate in described rinse bath, described orifice plate comprises several rest areas; The two side top design of described rinse bath the slide block driven by power set, between two described slide blocks, tie-beam is installed, on described tie-beam, corresponding each described rest area is equipped with hairbrush, silicon carbide cantilever paddle after sintering is put into to the rest area on orifice plate, power set drives the load region of hairbrush automatic brushing silicon carbide cantilever paddle, the impurity such as the lip-deep residual calcining matter of silicon carbide cantilever paddle enter described bottom of rinse bath by the aperture on orifice plate, by impurity-discharging pipe, discharge; The utility model is simple in structure, but the impurity on automatic brushing silicon carbide cantilever paddle surface substituted manually and scrubbed, avoid affecting the healthy of operator.
Owing between described liquid feed valve and eduction valve, being provided with circulating line, described circulating line is provided with recycle pump, the both ends of described circulating line are equipped with recycle valve, when closing liquid feed valve and eduction valve, two recycle valves of ON cycle pipeline, realized that rinsing liquid recycles, and has saved production cost.
The accompanying drawing explanation
Fig. 1 is the structural representation of the utility model embodiment mono-;
Fig. 2 is the vertical view of Fig. 1;
Fig. 3 is the structural representation of the utility model embodiment bis-;
In figure: 1, rinse bath, 2, liquid-inlet pipe, 3, liquid feed valve, 4, impurity-discharging pipe, 5, eduction valve, 6, orifice plate, 7, rest area, 8, sidewall, 9, power set, 10, slide block, 11, cylinder, 12, cylinder body, 13, piston rod, 14, tie-beam, 15, hairbrush, 16, aperture, 17, circulating line, 18, recycle pump, 19, recycle valve.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein is only in order to explain the utility model, and be not used in restriction the utility model.
Embodiment mono-:
As shown in Fig. 1 and Fig. 2 are common, silicon carbide reaction-sintered cantilever paddle surface knot screen, comprise rinse bath 1, corresponding rinse bath 1 top is provided with liquid-inlet pipe 2, and liquid-inlet pipe 2 is provided with liquid feed valve 3, rinse bath 1 bottom is provided with impurity-discharging pipe 4, impurity-discharging pipe 4 is provided with eduction valve 5, and the orifice plate 6 for placing the silicon carbide cantilever paddle is installed in rinse bath 1, and orifice plate 6 comprises several rest areas 7, preferably, rest area 7 is provided with three side by side; 8 tops, two side of rinse bath 1 are provided with the slide block 10 driven by power set 9, power set 9 comprises cylinder 11, the cylinder body 12 of cylinder 11 is fixedly mounted on sidewall 8 tops, the piston rod 13 of cylinder 11 is fixedly connected with slide block 10, certainly, power set 9 can be also screw mechanism, and leading screw is threaded with slide block 10, those skilled in the art can specifically select according to practical situation, do not repeat them here; Between two slide blocks 10, tie-beam 14 is installed, on tie-beam 14, corresponding each rest area 7 is equipped with hairbrush 15, and hairbrush 15 is provided with three, and the shape of hairbrush 15 is corresponding with the load region shape of silicon carbide cantilever paddle.
During use, rest area 7 at orifice plate 6 is placed the silicon carbide cantilever paddle, open liquid feed valve 3, to the dilute hydrochloric acid solution that adds HCl:H2O=1:7 in rinse bath 1, close liquid feed valve 3, power set 9 drives the load region of hairbrush 15 automatic brushing silicon carbide cantilever paddles, after scrubbing, soak 5 hours, the impurity such as the lip-deep residual calcining matter of silicon carbide cantilever paddle enter rinse bath 1 bottom by the aperture 16 on orifice plate 6, now open eduction valve 5, dilute hydrochloric acid solution and impurity are discharged by impurity-discharging pipe 4; And then open liquid feed valve 3 add rinsing liquid in rinse bath 1, rinsing liquid is selected deionized water usually, and the silicon carbide cantilever paddle after soaking is carried out to rinsing, and the time is 4 hours.
Embodiment bis-:
The present embodiment and embodiment mono-are basic identical, and its difference is, as shown in Figure 3, between liquid feed valve 3 and eduction valve 5, is provided with circulating line 17, and circulating line 17 is provided with recycle pump 18, and the both ends of circulating line 17 are equipped with recycle valve 19.
When the present embodiment is used and embodiment mono-basic identical, its difference is, when again opening liquid feed valve 3 when adding deionized water in rinse bath 1, after for some time, close liquid feed valve 3 and eduction valve 5, the recycle valve 19 at the both ends of ON cycle pipeline 17, under the effect of recycle pump 18, silicon carbide cantilever paddle after soaking is carried out to rinsing, realized recycling of deionized water, saved production cost.
The silicon carbide reaction-sintered cantilever paddle surface knot screen that the utility model provides, owing to comprising rinse bath 1, corresponding rinse bath 1 top is provided with liquid-inlet pipe 2 and liquid feed valve 3, and rinse bath 1 bottom is provided with impurity-discharging pipe 4 and eduction valve 5, the interior orifice plate 6 that designed of rinse bath 1, orifice plate 6 comprises several rest areas 7; Two side 8 top design of rinse bath 1 slide block 10 driven by power set 9, between two slide blocks 10, tie-beam 14 is installed, on tie-beam 14, corresponding each rest area 7 is equipped with hairbrush 15, silicon carbide cantilever paddle after sintering is put into to the rest area 7 on orifice plate 6, power set 9 drives the load region of hairbrush 15 automatic brushing silicon carbide cantilever paddles, the impurity such as the lip-deep residual calcining matter of silicon carbide cantilever paddle enter rinse bath 1 bottom by the aperture 16 on orifice plate 6, by impurity-discharging pipe 4, discharge; The utility model is simple in structure, but the impurity on automatic brushing silicon carbide cantilever paddle surface substituted manually and scrubbed, avoid affecting the healthy of operator.
The foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all any modifications of doing within spirit of the present utility model and principle, be equal to and replace and improvement etc., within all should being included in protection domain of the present utility model.
Claims (4)
1. silicon carbide reaction-sintered cantilever paddle surface knot screen, comprise rinse bath, corresponding described rinse bath top is provided with liquid-inlet pipe, described liquid-inlet pipe is provided with liquid feed valve, described bottom of rinse bath is provided with impurity-discharging pipe, and described impurity-discharging pipe is provided with eduction valve, it is characterized in that, in described rinse bath, be equipped with for placing the orifice plate of described silicon carbide cantilever paddle, described orifice plate comprises several rest areas; The top, two side of described rinse bath is provided with the slide block driven by power set, between two described slide blocks, tie-beam is installed, on described tie-beam, corresponding each described rest area is equipped with hairbrush, and the shape of described hairbrush is corresponding with the load region shape of described silicon carbide cantilever paddle.
2. silicon carbide reaction-sintered cantilever paddle according to claim 1 surface knot screen, is characterized in that, be provided with circulating line between described liquid feed valve and eduction valve, described circulating line is provided with recycle pump, and the both ends of described circulating line are equipped with recycle valve.
3. silicon carbide reaction-sintered cantilever paddle according to claim 2 surface knot screen, is characterized in that, described rest area is provided with three side by side, and corresponding, described hairbrush is provided with three.
4. silicon carbide reaction-sintered cantilever paddle according to claim 3 surface knot screen, is characterized in that, described power set comprises cylinder, and the cylinder body of described cylinder is fixedly mounted on described top side wall, and the piston rod of described cylinder is fixedly connected with described slide block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320388312 CN203346292U (en) | 2013-07-01 | 2013-07-01 | Silicon carbide reaction-sintering cantilever paddle surface impurity removal device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320388312 CN203346292U (en) | 2013-07-01 | 2013-07-01 | Silicon carbide reaction-sintering cantilever paddle surface impurity removal device |
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| Publication Number | Publication Date |
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| CN203346292U true CN203346292U (en) | 2013-12-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201320388312 Expired - Lifetime CN203346292U (en) | 2013-07-01 | 2013-07-01 | Silicon carbide reaction-sintering cantilever paddle surface impurity removal device |
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| CN (1) | CN203346292U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105598051A (en) * | 2015-12-29 | 2016-05-25 | 天津市天鹏建筑器材有限公司 | Building material cleaning equipment |
| CN108480262A (en) * | 2018-04-14 | 2018-09-04 | 马鞍山市润玛机械制造有限公司 | A kind of lubrication fatty oil part cleaning device and its application method |
-
2013
- 2013-07-01 CN CN 201320388312 patent/CN203346292U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105598051A (en) * | 2015-12-29 | 2016-05-25 | 天津市天鹏建筑器材有限公司 | Building material cleaning equipment |
| CN108480262A (en) * | 2018-04-14 | 2018-09-04 | 马鞍山市润玛机械制造有限公司 | A kind of lubrication fatty oil part cleaning device and its application method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: WEIFANG HUAMEI FINE TECHNICAL CERAMICS CO., LTD. Free format text: FORMER NAME: WEIFANG HUAMEI FINE TECHNICAL CERAMIC CO., LTD. |
|
| CP01 | Change in the name or title of a patent holder |
Address after: 261200 Shandong Province, Weifang city Fangzi District Beidaying Street No. 3 hospital Patentee after: WEIFANG HUAMEI FINE TECHNICAL CERAMICS Co.,Ltd. Address before: 261200 Shandong Province, Weifang city Fangzi District Beidaying Street No. 3 hospital Patentee before: Weifang Huamei Fine Technology Porcelain Co.,Ltd. |
|
| CX01 | Expiry of patent term |
Granted publication date: 20131218 |
|
| CX01 | Expiry of patent term |