CN203337936U - Tunable double-layer metal optical grating polarizer - Google Patents

Tunable double-layer metal optical grating polarizer Download PDF

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Publication number
CN203337936U
CN203337936U CN2013203570686U CN201320357068U CN203337936U CN 203337936 U CN203337936 U CN 203337936U CN 2013203570686 U CN2013203570686 U CN 2013203570686U CN 201320357068 U CN201320357068 U CN 201320357068U CN 203337936 U CN203337936 U CN 203337936U
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metal
metal grating
polarizer
extinction ratio
double
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CN2013203570686U
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裴梓任
黄元申
胡艾青
王中飞
凌进中
王�琦
张大伟
庄松林
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University of Shanghai for Science and Technology
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University of Shanghai for Science and Technology
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Abstract

A tunable double-layer metal optical grating polarizer comprises two metal optical grating layers which directly face each other vertically and have the same structural parameters, a metal sheet used for fixing the distance between the two metal optical grating layers, and a temperature control unit connected with the metal sheet, wherein the two metal optical grating layers and the metal sheet form a sealing cavity. Under the condition of constant pressure, the temperature control unit controls the temperature of air in the sealing cavity to further adjust the refractive index of the air, and then the high transmittance and high extinction ratio are achieved, and the transmittance and high extinction ratio can also be adjusted accurately as needed. The tunable double-layer metal optical grating polarizer is high in transmittance and extinction ratio, easy to operate and adjust, and practical.

Description

A kind of tunable double-level-metal grating polarizer
Technical field
The utility model is specifically related to a kind of double-level-metal grating polarizer of tunable High Extinction Ratio high permeability.
Background technology
Polarizer is important optical element in the systems such as optical information processing, optical measurement, optical communication, be in optical device, use the earliest, one of most widely used device.Traditional polarizer mainly utilizes the polarization selectivity of birefringence effect or the multi-layer film structure of mineral crystal.The natural birefringence crystal causes the crystal polarizer volume larger, can't realize microminiaturized and integrated; The polarizer of multi-layer film structure is made needs the film number of plies of accumulation a lot, the manufacturing process relative complex, and the polarization selectivity of this multi-layer film structure only just has large extinction ratio in a less wavelength coverage He in angular range, so the application of these two kinds of polarizers all is limited by very large.
The metal grating polarizer is a kind of emerging polarizer based on micro-nano structure, there is the advantages such as volume is little, slice, thin piece is thin, compact conformation, easy of integration, polarizability is good than traditional polarizer, therefore be widely used in the fields such as optical fiber communication, liquid crystal display, optical projection, Photoelectric Detection.Along with the development of the micro fabrications such as electron beam exposure, nanometer embossing, reactive ion etching, researchers have produced the sub-wave length metal grating polarizer of number of different types.When incident light arrives the metal grating surface, the TE component (transverse electric wave) that direction of an electric field is parallel to the grating cutting can excite the electronics of metal grating and generation current reflects the polarized light of this component; Direction of an electric field can't excite the electronics in metal perpendicular to the TM component (transverse magnetic wave) of grating cutting direction, therefore can not be reflected, except a small amount of absorption, major part can be passed through grating layer, form transmitted light, therefore in the transmitted light of metal grating, the TM component, far more than the TE component, has very strong polarization spectro characteristic.
The leading indicator of weighing polarization beam apparatus has extinction ratio Ex and transmitance T tM.Wherein extinction ratio is defined as the ratio of TM component transmissivity and TE component transmitance, so numerical value is the bigger the better; T tMrefer to the transmitance of TM component, reflected the capacity usage ratio of polarizer, it is 1 better more to approach; T tErefer to the transmitance of TE component.Yet with regard to the single-layer metal optical grating construction, extinction ratio Ex and transmitance T tMbe the amount of conflict, improve the extinction ratio that the methods such as dutycycle, the metal grating degree of depth can improve polarizer, but will sacrifice the transmitance of TM component.As document: Guo Chucai, Ye Weimin, Yuan Xiaodong, Zeng Chun, season man's Rong, the research of sub-wave length grating polarization beam apparatus, the photon journal, 2010,30(9), studied transmitance and the extinction ratio of individual layer grating polarizer under infrared band, its transmitance is very high, but extinction ratio only has 100 left and right, so single layer structure is difficult to realize High Extinction Ratio and high permeability simultaneously.
Fig. 1 is single-layer metal grating polarizer structural representation.
The transmitance T that Fig. 2 is the single-layer metal optical grating construction tMand T tEperformance diagram.
The extinction ratio Ex performance diagram that Fig. 3 is the single-layer metal optical grating construction.
The structure of single-layer metal grating polarizer as shown in Figure 1, its structural parameters have metal grating periods lambda, metal live width d and grating depth h.If metal material is aluminium, the grating flute profile is the rectangle flute profile, and substrate is quartz glass, and its thickness is 1mm, and the grating cycle is 100nm, and the metal live width is 50nm, and grating depth is 50nm.According to above parameter, can calculate the polarization characteristic of this structure, be illustrated in figure 2 single-layer metal grating polarizer transmitance T in 400nm arrives the 800nm wave band tMwith transmitance T tEchange curve, the change curve that Fig. 3 is extinction ratio Ex.From these two figure, can find out, along with the increase of wavelength, T tMwith Ex, fluctuating is clearly arranged, wherein at wavelength 720nm, go out to have the highest extinction ratio (being about 150) and larger TM component transmitance (being about 88%).
The double-level-metal grating polarizer that patent of invention [publication number: 102929000A] proposes has proposed method very ingenious for realize High Extinction Ratio and high permeability simultaneously, yet control the retractable material precision in nanometer scale by driving voltage, wayward, and do not provide the relational expression between driving voltage U and material Extensible Δ h in patent, so be difficult to accurately control by driving voltage the change amount of retractable material in practical operation, thereby wayward transmitance and extinction ratio.
The utility model content
The utility model provides a kind of tunable double-level-metal grating polarizer, it adopts sheet metal to be fixed between upper and lower double layer of metal grating layer to form annular seal space, under constant-pressure conditions, thereby the temperature of accurately controlling air in annular seal space by the control temperature unit be connected with sheet metal changes air refraction, when obtaining high permeability and High Extinction Ratio, all right fine adjustment transmitance and extinction ratio are a kind of double-level-metal grating polarizers of tunable High Extinction Ratio high permeability.
The utility model is on the basis of this invention [publication number: 102929000A], design apparatus to be improved, control the size of the air refraction between the double-level-metal grating with control temperature unit, and having provided the relational expression between temperature and air refraction, the precision of its air refraction is up to 1 * 10 -6.
In order to achieve the above object, the utility model has adopted following technical scheme:
A kind of tunable double-level-metal grating polarizer, there is such feature, comprise: have the same structure parameter up and down over against two metal grating layers, fix a plurality of sheet metals of two metal grating interlamellar spacings and the control temperature unit of connection metal sheet, two metal grating layers and a plurality of sheet metal form an annular seal space, the refractive index that control temperature unit is regulated air by the temperature of controlling the air in annular seal space.
Further, tunable double-level-metal grating polarizer of the present utility model can also have such feature: the range of adjustment of sealing cavity temperature is 18 ℃-52 ℃, and the pressure in described annular seal space is constant voltage.
In addition, tunable double-level-metal grating polarizer of the present utility model can also have such feature: the precision of refractive index is 1 * 10 -6.
The effect of utility model and effect
The tunable double-level-metal grating polarizer related to according to the utility model, its simple in structure, easy realization, adopt sheet metal to be fixed between upper and lower two metal grating layers and form annular seal space.Relational expression according to temperature and air refraction, under constant pressure adjust, control temperature unit can accurately be controlled the temperature of air in annular seal space, thereby change air refraction, and then transmitance and the extinction ratio of regulating incident wave, be a kind of polarizer of tunable High Extinction Ratio high permeability, compare with the single-layer metal grating polarizer, not only can obtain higher extinction ratio Ex and transmitance T simultaneously tM, and operation and regulate easilier, there is practicality.
The accompanying drawing explanation
Fig. 1 is the single-layer metal grating polarizer structural representation in background technology;
The transmitance T that Fig. 2 is the single-layer metal optical grating construction in background technology tMand T tEperformance diagram;
The extinction ratio Ex performance diagram that Fig. 3 is the single-layer metal optical grating construction in background technology;
The tunable double-level-metal grating polarizer structural representation that Fig. 4 is the present embodiment;
The transmitance T that Fig. 5 is untunable double-level-metal grating polarizer tMand T tEperformance diagram;
The extinction ratio Ex performance diagram that Fig. 6 is untunable double-level-metal grating polarizer;
Fig. 7 be in the present embodiment under a normal atmosphere performance diagram of air refraction degree and temperature variation;
Transmitance T during refraction index changing in the tunable double-level-metal grating polarizer chamber that Fig. 8 is the present embodiment tMperformance diagram;
Transmitance T during refraction index changing in the tunable double-level-metal grating polarizer chamber that Fig. 9 is the present embodiment tEperformance diagram;
Extinction ratio Ex performance diagram during refraction index changing in the tunable double-level-metal grating polarizer chamber that Figure 10 is the present embodiment.
Embodiment
Following examples are specifically addressed the utility model by reference to the accompanying drawings.
Metal grating layer 1 in the present embodiment is comprised of substrate and metal grating.The visible waveband metallic aluminium has polarization property preferably, so the metal material in the present embodiment adopts aluminium.The grating flute profile is the rectangle flute profile, and substrate is quartz glass, and its thickness is 1mm, and the grating cycle is 100nm, and the metal live width is 50nm, and grating depth is 50nm.Method for making is at first at the substrate surface metal-coated films, then plate again one deck photoresist as mask plate, adopt the mode of electron-beam direct writing to form optical grating construction on the photoresist surface, then adopt ion beam milling technique, flute profile on photoresist is transferred on metallic film, form metal grating, completed the making of metal grating polarizer template.Adopt nanometer embossing, stencil duplicating can be gone out to the metal grating layer 1 that more structure is identical, parameter is identical.The groove parameters of upper and lower two metal grating layers 1, grating flute profile direction are consistent.
The transmitance T that Fig. 5 is untunable double-level-metal grating polarizer tMand T tEperformance diagram.
The extinction ratio Ex performance diagram that Fig. 6 is untunable double-level-metal grating polarizer.
When not adopting sheet metal 2, the double-level-metal grating polarizer do not form annular seal space, only fixedly the spacing of double layer of metal grating layer 1 is 5mm, air refraction between two-layer gets 1, while forming untunable double-level-metal grating polarizer, and the transmitance T of untunable double-level-metal grating polarizer now tMand T tEfamily curve as shown in Figure 5.Compared with the single-layer metal grating polarizer, the TM polarization transmitance of untunable double-level-metal grating polarizer is not obviously improved, and shake more obvious with wavelength variations, but TE polarization transmitance declines to a great extent, make extinction ratio greatly improve, the High Extinction Ratio metal grating polarizer extinction ratio Ex performance diagram of metal grating spacing as shown in Figure 6 fixedly the time, can find out, with Fig. 3, compare, this extinction ratio Ex is very high, but now untunable double-level-metal grating polarizer at the transmitance T of visible light wave range tMmore much lower than individual layer grating, the shortcoming of the structure of this untunable bilayer is that double-decker has formed similar F-P chamber, therefore wavelength is had to very large selectivity, and faint wavelength difference causes the very big gap of extinction ratio apart from meeting.Therefore, needing, by improving polarizer structure, increases temperature variation in the control temperature unit control chamber, regulates air refraction, thereby but makes the polarizer harmony.
The tunable metal grating polarizer structure of the tunable bilayer schematic diagram that Fig. 4 is the present embodiment.
Bilayer as shown in Figure 4 is tunable metal grating polarizer, comprise: have the same structure parameter up and down over against two metal grating layers 1, fix the sheet metal 2 of two metal grating layers 1 and the control temperature unit 3 of connection metal sheet 2, two metal grating layer 1 keeping parallelisms, its constant spacing is 5mm.Two metal grating layers 1 and sheet metal 2 form an annular seal space, the refractive index that control temperature unit 3 is regulated air by the temperature of controlling the air in annular seal space.After sheet metal 2 is connected control temperature units 3, when the sealing cavity temperature raises, and when in holding chamber, pressure is constant,, the refractive index of air reduces in the chamber in, otherwise, when the reduction of sealing cavity temperature, in chamber, air refraction can increase.
Fig. 7 be in the present embodiment under a normal atmosphere performance diagram of air refraction degree and temperature variation.
Distance in double-level-metal grating polarizer in the present embodiment between two metal grating layers 1 is fixed, and has increased control temperature unit 3, can control temperature variation in annular seal space, and then the air refraction in annular seal space is changed.Due to the fraction part of air refraction rate score generally 1 * 10 -6with interior variation, thus calculating and the analysis that specific refraction is very easy to air refraction introduced, numerically, and specific refraction=refractive index-1, the order of magnitude is ppm (part-per-million), 10 -6.As air refraction is 1.000273, specific refraction is 273ppm.Remain on 10 according to the precision to air refraction in patent -6in scope, select the air refraction formula of Edlen: n = 1 + p ( n s - 1 ) 96095.43 × 1 + 10 - 8 ( 0.613 - 0.00998 t ) p 1 + 0.003661 t Can meet accuracy requirement, wherein n srefractive index during for the next standard atmospheric pressure p=101325pa of normal air, n s = 1 + ( 83.4213 + 24060.3 130 - 1 λ 2 + 159.97 38.9 - 1 λ 2 ) × 10 - 6 , λ is wavelength, if value 0.56 μ m, and specific refraction n d=n-1, therefore according to relational expression, can draw the performance diagram of air refraction degree and temperature variation, and as shown in Figure 7, when in chamber, pressure is constantly equal to standard atmospheric pressure, along with the rising of temperature, the air refraction degree descends gradually.
Transmitance T during refraction index changing in the tunable double-level-metal grating polarizer chamber that Fig. 8 is the present embodiment tMperformance diagram.
Transmitance T during refraction index changing in the tunable double-level-metal grating polarizer chamber that Fig. 9 is the present embodiment tEperformance diagram.
Extinction ratio Ex performance diagram during refraction index changing in the tunable double-level-metal grating polarizer chamber that Figure 10 is the present embodiment.
The transmitance T of the tunable double-level-metal grating polarizer as shown in Fig. 8～10 tM, T tEwith extinction ratio Ex performance diagram, 5 complete cycles have appearred in refractive index TM in 0.0003 variation range, and 5 complete cycles have appearred in the TE transmission, but just stagger in transmission peak value position each other, 5 complete cycles also appear in extinction ratio Ex simultaneously, and the peak value extinction ratio can reach 33000.As can be seen here, for the incident wavelength of 560nm, in chamber, the air refraction value is 1.000106,1.000163,1.000217,1.000274,1.000331 and 1.000388 o'clock, and double-decker has best T tMand Ex, transmitance T tMup to more than 92%, extinction ratio Ex is up to 33000, performance diagram according to air refraction degree and temperature variation under the normal atmosphere of Fig. 7, when the sealing cavity temperature while being 18.7 ℃ and 95.1 ℃, in its corresponding annular seal space, air refraction is respectively 1.000274 and 1.000217, meets with this understanding the requirement of High Extinction Ratio high permeability.Also can select in any half period according to different requirements, can realize that extinction ratio and transmitance are tuning between maximal value and minimum value.In Fig. 8 and Figure 10, selecting air refraction corresponding to one of them extinction ratio and transmitance maximal value is 1.000274, air refraction corresponding to one of them adjacent minimum value is 1.000247, air themperature scope corresponding in this ranges of indices of refraction is 18.7～50.6 ℃, therefore regulate temperature in this scope, can realize that extinction ratio and transmitance are tuning between maximal value and minimum value.
The effect of embodiment and effect
The tunable double-level-metal grating polarizer related to according to the present embodiment, its simple in structure, easy realization, adopt sheet metal to be fixed between upper and lower double layer of metal grating and form annular seal space.Relational expression according to temperature and air refraction, accurately control the temperature of air in annular seal space by the control temperature unit be connected with sheet metal, thereby change air refraction, and then transmitance and the extinction ratio of regulating incident wave, it is a kind of polarizer of tunable High Extinction Ratio high permeability, compare with the conventional metals grating polarizer, not only can obtain higher extinction ratio Ex and transmitance T simultaneously tM, and operation and regulate easilier, there is practicality.

Claims (3)

1. a tunable double-level-metal grating polarizer, is characterized in that, comprises:
Have the same structure parameter up and down over against two metal grating layers, a plurality of sheet metals of fixing described two metal grating interlamellar spacings and the control temperature unit that connects described sheet metal,
Wherein, described two metal grating layers and described a plurality of sheet metal form an annular seal space,
Described control temperature unit is regulated the refractive index of described air by the temperature of controlling the air in described annular seal space.
2. tunable double-level-metal grating polarizer according to claim 1 is characterized in that:
Wherein, the range of adjustment of described sealing cavity temperature is 18 ℃-52 ℃,
Pressure in described annular seal space is constant voltage.
3. tunable double-level-metal grating polarizer according to claim 1 is characterized in that:
Wherein, the precision of described refractive index is 1 * 10 -6.
CN2013203570686U 2013-06-21 2013-06-21 Tunable double-layer metal optical grating polarizer Expired - Fee Related CN203337936U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104793277A (en) * 2015-04-29 2015-07-22 东南大学 Transmission type filter based on surface plasmon polaritons
CN108181678A (en) * 2017-12-29 2018-06-19 深圳市华星光电技术有限公司 Metal polaroid and the display device for including the metal polaroid

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104793277A (en) * 2015-04-29 2015-07-22 东南大学 Transmission type filter based on surface plasmon polaritons
CN104793277B (en) * 2015-04-29 2017-10-31 东南大学 Transmission-type wave filter based on surface plasma excimer
CN108181678A (en) * 2017-12-29 2018-06-19 深圳市华星光电技术有限公司 Metal polaroid and the display device for including the metal polaroid

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