CN203301843U - Novel automatic plasma detector - Google Patents
Novel automatic plasma detector Download PDFInfo
- Publication number
- CN203301843U CN203301843U CN2013202553344U CN201320255334U CN203301843U CN 203301843 U CN203301843 U CN 203301843U CN 2013202553344 U CN2013202553344 U CN 2013202553344U CN 201320255334 U CN201320255334 U CN 201320255334U CN 203301843 U CN203301843 U CN 203301843U
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- fixed
- probe
- slide block
- mounting flange
- guide rod
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Abstract
The utility model discloses a novel automatic plasma detector which comprises a mounting flange. A probe fixing device is fixed on an end face of the mounting flange. The probe fixing device is provided with a probe head. A corrugated pipe is fixed on the other end face of the mounting flange. The mounting flange is fixed with a guide bar and a screw, wherein the guide bar and the screw are parallel to the corrugated pipe. A slide block is arranged on the thread on the screw in a matching manner. The slide block is provided with an unthreaded hole. The slide block is sleeved on the guide bar through the unthreaded hole. The other end of the corrugated pipe is fixed on the slide block. A limiting block, a corrugated pipe flange and a mounting plate are successively arranged from inner to outside on the end part of one end, which is away from the mounting flange, of the guide bar. The mounting plate is further provided with a through hole through which the mounting plate is sleeved on the screw. The mounting plate is fixed with a motor. The motor is in drive connection with a small gear. The end part of the screw is fixed with a shaft connection part. A large gear is fixedly arranged on the shaft connection part. The large gear is meshed with a small gear. According to the utility model, the novel automatic plasma detector can be flexibly connected with an experiment device; the moving distance is greater than 100mm; and the detected plasma beam current density is no less than 1*1022m-2S-1.
Description
Technical field
This novel practical relates to a kind of new type auto plasma probe, is mainly used in carrying out plasma density detection and evaluation work on various high/low density plasma producing apparatus and plasma application equipment.
Background technology
In all kinds of pilot plasma devices, comprise each Tokamak-like, straight line or peripheral plasma experimental provision.All need to study the fundamental property of plasma, namely utilize various transport processes, unsteadiness and the border physics etc. of various control and diagnostic means research plasma; The interactional underlying issue that research plasma and material also arranged, affect simulation etc. as hydrogen and helium delay/bubble problem in the physical sputtering of material and chemical etching, material, Plasma disruption on material.Research field can cover highdensity tokamak boundary plasma and material correlative study, and the research of low-density space plasma.These researchs all be unable to do without the plasma prospecting tools.
Electronics and neutral molecule in the partial ionized gas that is accelerated by extra electric field collide, and the energy that obtains from electric field is passed to gas.The elastic collision of electronics and neutral molecule causes molecular kinetic energy to increase, and shows as temperature and raises; Inelastic collision causes exciting (electronics in molecule or atom transits to high level by low-lying level), from separating (molecular breakdown is atom) or ionization (outer-shell electron of molecule or atom becomes free electron by bound state).High-temperature gas is passed to surrounding environment to energy by conduction, convection current and radiation, under Steady, equates for input energy and off-energy in constant volume.The speed that between electronics and heavy particle (ion, molecule and atom), energy transmits is directly proportional to collision frequency (number of times of collision in the unit interval).Under low air pressure condition, seldom, the energy that electronics obtains from electric field is not easy to pass to heavy particle in collision, and electron temperature, higher than gas temperature, is commonly referred to cold plasma or nonequilibrium plasma at this moment.The principle of plasma probe is exactly plasma current and the potential difference of ionization detection, thereby obtains each parameter of plasma.
The utility model content
For making up the deficiency of prior art, the purpose of this utility model is to provide a kind of new type auto plasma probe.
The technical solution adopted in the utility model is:
a kind of new type auto plasma probe, it is characterized in that: include mounting flange, on an end face of mounting flange, be fixed with the probe fixture, on the probe fixture, probe is installed, on another end face of described mounting flange, be fixed with bellows, on mounting flange, also be fixed with the guide rod parallel with bellows and leading screw, on leading screw, threaded engagement is equipped with slide block, on slide block, also have a unthreaded hole, slide block is sleeved on guide rod by unthreaded hole, the other end of bellows is fixed on slide block, guide rod is equipped with guide vane end stop from inside to outside successively away from the end of an end of mounting flange, the bellows flange, mounting panel, mounting panel also has through hole is set on leading screw it, on mounting panel, be fixed with a motor, motor-driven connects a pinion, the end of leading screw is fixed with a shaft coupling piece, on shaft coupling piece, be fixed with a gear wheel, described gear wheel and pinion engagement.
Between described probe fixture and probe, be provided with the probe insulation assembly.
Described mounting panel is fixed on guide rod by the locking nut that coordinates with guide rod.
On described mounting panel inner side end and outside end face, be installed with respectively vacuum receptacle terminal, vacuum socket.
The utlity model has following advantage:
The utility model can flexibly connect with experimental provision, and displacement is greater than 100mm; The plasma beam current density that detects >=1 * 1022m-2s-1; Detectable plasma density scope 109 ~ 1013cm-3; Detectable plasma temperature scope 5 ~ 20ev; Can be connected with all size vacuum plant flange more than CF35; This device has ultrahigh vacuum seal.
The accompanying drawing explanation
Fig. 1 is front view of the present utility model.
In figure, 1 is probe, and 2 is the probe insulation assembly, 3 is the probe fixture, and 4 is mounting flange, and 5 is guide rod, 6 is leading screw, and 7 is slide block, and 8 is bellows, 9 is guide vane end stop, and 10 is the bellows flange, and 11 is the vacuum receptacle terminal, 12 is the vacuum socket, and 13 is gear wheel, and 14 is shaft coupling piece, 15 is pinion, and 16 is mounting panel, and 17 is motor.
Embodiment
referring to Fig. 1, a kind of new type auto plasma probe, include mounting flange 4, on an end face of mounting flange 4, be fixed with probe fixture 3, probe 1 is installed on probe fixture 3, on another end face of mounting flange 4, be fixed with bellows 8, on mounting flange 4, also be fixed with the guide rod parallel with bellows 85 and leading screw 6, on leading screw 6, threaded engagement is equipped with slide block 7, on slide block 7, also have a unthreaded hole, slide block 7 is sleeved on guide rod 5 by unthreaded hole, the other end of bellows 8 is fixed on slide block 7, guide rod 5 is equipped with guide vane end stop 9 from inside to outside successively away from the end of an end of mounting flange 4, bellows flange 10, mounting panel 16, mounting panel 16 also has through hole is set on leading screw 6 it, on mounting panel 16, be fixed with a motor 17, motor 17 pinion 15 that is in transmission connection, the end of leading screw 6 is fixed with a shaft coupling piece 14, on shaft coupling piece 14, be fixed with a gear wheel 13, gear wheel 13 and pinion 15 engagements.
Between probe fixture 3 and probe 1, be provided with probe insulation assembly 2.
Mounting panel 16 is fixed on guide rod 5 by the locking nut that coordinates with guide rod 5.
On mounting panel 16 inner side ends and outside end face, be installed with respectively vacuum receptacle terminal 11, vacuum socket 12.
Probe 1 is installed, probe insulation assembly 2, probe fixture 3, and special joining line.Mounting flange 4 is arranged on vacuum equipment to be tested.The screw slider assembly is installed, and adjusting slider 7 is to correct position, mounting limit piece 9, bellows flange 10 and vacuum receptacle terminal 11, mounting plate 16.Installation shaft connector 14, pinion 13, gear wheel 15, motor 17 is to mounting plate 16.Connect grid bias power supply and electric machine controller.
During use, it is detectable plasma density that the starter motor controller is controlled the motor removing probe.
Claims (4)
1. new type auto plasma probe, it is characterized in that: include mounting flange, on an end face of mounting flange, be fixed with the probe fixture, on the probe fixture, probe is installed, on another end face of described mounting flange, be fixed with bellows, on mounting flange, also be fixed with the guide rod parallel with bellows and leading screw, on leading screw, threaded engagement is equipped with slide block, on slide block, also have a unthreaded hole, slide block is sleeved on guide rod by unthreaded hole, the other end of bellows is fixed on slide block, guide rod is equipped with guide vane end stop from inside to outside successively away from the end of an end of mounting flange, the bellows flange, mounting panel, mounting panel also has through hole is set on leading screw it, on mounting panel, be fixed with a motor, motor-driven connects a pinion, the end of leading screw is fixed with a shaft coupling piece, on shaft coupling piece, be fixed with a gear wheel, described gear wheel and pinion engagement.
2. new type auto plasma probe according to claim 1, is characterized in that: between described probe fixture and probe, be provided with the probe insulation assembly.
3. new type auto plasma probe according to claim 1, it is characterized in that: described mounting panel is fixed on guide rod by the locking nut that coordinates with guide rod.
4. new type auto plasma probe according to claim 1, is characterized in that: on described mounting panel inner side end and outside end face, be installed with respectively vacuum receptacle terminal, vacuum socket.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013202553344U CN203301843U (en) | 2013-05-10 | 2013-05-10 | Novel automatic plasma detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013202553344U CN203301843U (en) | 2013-05-10 | 2013-05-10 | Novel automatic plasma detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203301843U true CN203301843U (en) | 2013-11-20 |
Family
ID=49577819
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013202553344U Expired - Fee Related CN203301843U (en) | 2013-05-10 | 2013-05-10 | Novel automatic plasma detector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203301843U (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106582914A (en) * | 2016-12-31 | 2017-04-26 | 合肥优亿科机电科技有限公司 | Electrode probing device for super clean bench |
| CN106604512A (en) * | 2016-12-07 | 2017-04-26 | 兰州空间技术物理研究所 | Ion thruster plasma parameter diagnosis electrostatic probe positioning system and positioning method |
| CN106582915A (en) * | 2016-12-31 | 2017-04-26 | 合肥优亿科机电科技有限公司 | Automatic electrode probing device of super clean bench |
| CN106714433A (en) * | 2017-01-04 | 2017-05-24 | 中国工程物理研究院激光聚变研究中心 | Plasma space characteristic diagnostic device |
| CN106767973A (en) * | 2017-01-09 | 2017-05-31 | 华中科技大学 | A kind of vacuum chamber interface structure installed for fusion reactor TBM test modules |
| CN107680897A (en) * | 2017-10-10 | 2018-02-09 | 中国科学技术大学 | A kind of accurate movement and the insertion type diagnostic device of side lead |
| CN109502246A (en) * | 2018-10-30 | 2019-03-22 | 中国科学院合肥物质科学研究院 | The target plate delivery device of fusion reactor plasma and material interaction test platform |
| CN110753436A (en) * | 2019-10-18 | 2020-02-04 | 合肥聚能电物理高技术开发有限公司 | Plasma density real-time measuring mechanism for plasma device |
| CN111308540A (en) * | 2019-10-15 | 2020-06-19 | 北京烁科中科信电子装备有限公司 | Telescopic device for transmitting Faraday cylinder probe |
-
2013
- 2013-05-10 CN CN2013202553344U patent/CN203301843U/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106604512A (en) * | 2016-12-07 | 2017-04-26 | 兰州空间技术物理研究所 | Ion thruster plasma parameter diagnosis electrostatic probe positioning system and positioning method |
| CN106582914A (en) * | 2016-12-31 | 2017-04-26 | 合肥优亿科机电科技有限公司 | Electrode probing device for super clean bench |
| CN106582915A (en) * | 2016-12-31 | 2017-04-26 | 合肥优亿科机电科技有限公司 | Automatic electrode probing device of super clean bench |
| CN106714433A (en) * | 2017-01-04 | 2017-05-24 | 中国工程物理研究院激光聚变研究中心 | Plasma space characteristic diagnostic device |
| CN106714433B (en) * | 2017-01-04 | 2023-09-15 | 中国工程物理研究院激光聚变研究中心 | Plasma space characteristic diagnostic device |
| CN106767973A (en) * | 2017-01-09 | 2017-05-31 | 华中科技大学 | A kind of vacuum chamber interface structure installed for fusion reactor TBM test modules |
| CN106767973B (en) * | 2017-01-09 | 2020-07-10 | 华中科技大学 | Vacuum chamber interface structure for installing fusion reactor TBM test module |
| CN107680897A (en) * | 2017-10-10 | 2018-02-09 | 中国科学技术大学 | A kind of accurate movement and the insertion type diagnostic device of side lead |
| CN107680897B (en) * | 2017-10-10 | 2024-02-09 | 中国科学技术大学 | Interventional diagnosis device capable of precisely moving and laterally guiding wires |
| CN109502246A (en) * | 2018-10-30 | 2019-03-22 | 中国科学院合肥物质科学研究院 | The target plate delivery device of fusion reactor plasma and material interaction test platform |
| CN111308540A (en) * | 2019-10-15 | 2020-06-19 | 北京烁科中科信电子装备有限公司 | Telescopic device for transmitting Faraday cylinder probe |
| CN110753436A (en) * | 2019-10-18 | 2020-02-04 | 合肥聚能电物理高技术开发有限公司 | Plasma density real-time measuring mechanism for plasma device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131120 Termination date: 20180510 |