CN203295665U - Double-layer quartz ampoule - Google Patents

Double-layer quartz ampoule Download PDF

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Publication number
CN203295665U
CN203295665U CN2013203657976U CN201320365797U CN203295665U CN 203295665 U CN203295665 U CN 203295665U CN 2013203657976 U CN2013203657976 U CN 2013203657976U CN 201320365797 U CN201320365797 U CN 201320365797U CN 203295665 U CN203295665 U CN 203295665U
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CN
China
Prior art keywords
quartz
quartz ampoule
quartzy
double
outer tube
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Expired - Lifetime
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CN2013203657976U
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Chinese (zh)
Inventor
周燕飞
任都迪
陈立东
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Shanghai Institute of Ceramics of CAS
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Shanghai Institute of Ceramics of CAS
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Abstract

The utility model relates to a double-layer quartz ampoule which is provided with a quartz ampoule outer pipe and a quartz crucible for accommodating material samples and arranged in the quartz ampoule outer pipe. The bottom of the quartz crucible is connected with a quartz short rod inserted into a concave graphite plug, a first quartz butting pipe for butting against the material samples tightly is arranged on top of the quartz crucible in a sealing mode, and a second quartz butting pipe for butting against the quartz crucible tightly is arranged on top of the quartz ampoule outer pipe in a sealing mode. The double-layer quartz ampoule is safe and reliable and suitable for special or common working experimenting environments, all components can be used normally at high temperature, and an application range of materials is wide.

Description

Double-layer quartz ampoule
Technical field
The utility model relates to a kind of quartz ampoule, particularly is applicable to carry out quartz ampoule prepared by multiple (solidifying and film take quartz as substrate etc. as the space of semi-conductor, multi-element metal alloy) material under microgravity environment.
Background technology
Under microgravity environment, carry out the preparation research of material, need a kind of device material can be placed on and wherein be prepared safely experiment, this device is commonly called ampoule.Carry out the required ampoule of microgravity material science experiment and need to carry out the environmental mechanics test, namely in certain range of frequency, stand Oscillation Amplitude and be the sine of universal gravity constant of several times and the shock test of random vibration test and several times universal gravity constant, with the safe reliability of check ampoule structure.The people such as Shen Jie (application number: CN98225116) the safe and reliable crystal growing ampoule complex structure of height of design, the ampoule manufacture difficulty is higher, Zhou Yan flies to wait the people, and (patent No.: ZL200720066563.6) a kind of biquartz ampoule that is applicable to the growth of thermoelectric semiconducter crystal of design, applicable material ranges is more single.For this reason, need a kind of new quartz ampoule structure, can adapt to the preparation of carrying out multiple material under microgravity environment.
The utility model content
Problem in the face of the prior art existence, the utility model purpose is to provide a kind of quartz ampoule structure of carrying out material experiment that is applicable under microgravity environment, the preparation experiment of carrying out multiple (as semi-conductor, multi-element metal alloy and film etc.) material that can be safe and reliable.
At this, the utility model provides a kind of double-layer quartz ampoule, described double-layer quartz ampoule has the quartz ampoule outer tube and is positioned at the inside of described quartz ampoule outer tube be used to holding the quartz crucible of material sample, the bottom of described quartz crucible is connected with the quartzy stub that is inserted into the concave graphite plug, the top of described quartz crucible is sealed be used to holding out against the first quartzy push pipe of described material sample, and the top of described quartz ampoule outer tube is sealed be used to holding out against the second quartzy push pipe of described quartz crucible.
The double-layer quartz ampoule that the utility model provides is safe and reliable, be applicable to special or common work experimental situation, wherein all parts can both be at comparatively high temps, for example normally use under 1200 ℃, be applicable to not produce with quartz the solidifying and the preparation of materials such as film take quartz as substrate of semiconductor material, multi-element metal alloy material of chemical reaction, widely applicable.In addition.Simply technique preparation of double-layer quartz ampoule of the present utility model, economic and practical.
Preferably, between the bottom of described quartz ampoule outer tube and concave graphite plug, can be provided with silica wool.Again, it is hemispherical that the bottom of described quartz ampoule outer tube can be, and can be provided with quartzy partition with holes.Further preferably, described silica wool can be arranged between described quartzy partition and concave graphite plug.
Preferably, between described material sample and the first quartzy push pipe, can be provided with silica wool.
Preferably, between described quartz crucible and the second quartzy push pipe, can be provided with silica wool.
Silica wool is set between all parts, can slows down the axial force that all parts is subject to.
Preferably, between the inwall of the outer wall at the top of described quartz crucible and described quartz ampoule outer tube, can be provided with carbon paper.
Between the inwall of the outer wall at the top of quartz crucible and quartz ampoule outer tube, carbon paper is set, can fills on the one hand between the two space well quartz crucible is radially limited, can slow down on the other hand the radial effect power that quartz crucible is subject to.
Preferably, the bottom of described the first quartzy push pipe is flat, and sidewall is provided with aperture, and top and described quartz crucible sealing-in are integral.
Preferably, the bottom of described the second quartzy push pipe is flat, and sidewall is provided with aperture, and upper end and the sealing-in of described quartz ampoule outer tube are integral.
At the first quartzy push pipe and/or the second quartz, aperture being set can be used to vacuumizing, thereby can make the inside of quartz crucible and/quartz ampoule outer tube be connected and adjust its vacuum tightness with vacuum system, so that whole quartz ampoule system can be remained the negative pressure (vacuum tightness) that is suitable for material sample.
Preferably, the bottom of described quartz crucible can be flat.
The accompanying drawing explanation
Fig. 1 illustrates the structural representation of double-layer quartz ampoule of the present utility model;
Fig. 2 illustrates the structural representation of quartz crucible in double-layer quartz ampoule of the present utility model;
Nomenclature:
1 material sample;
2 quartz crucibles;
3 quartzy stubs;
4,6,12 silica wools;
5 first quartzy push pipes;
7 quartz ampoule outer tubes;
8 concave graphite plugs;
9 second quartzy push pipes;
10 carbon papers;
Binding of 11 quartz crucibles;
13 quartzy partitions.
Embodiment
Below, with reference to accompanying drawing, and further illustrate with the following embodiments the utility model.Should be understood that only unrestricted the utility model be used to the utility model is described of accompanying drawing and/or embodiment.Below, for convenience of explanation, the diametric(al) of parts being called radially, length direction is called axially.
The utility model provides a kind of double-layer quartz ampoule.Referring to Fig. 1, double-layer quartz ampoule has bilayer structure, namely, quartz ampoule outer tube 7 and quartz crucible 2.Quartz crucible 2 is placed on the inside of quartz ampoule outer tube 7, the external diameter of quartz crucible 2 is than the little 0.1~0.2mm of the internal diameter of quartz ampoule outer tube 7, so that quartz crucible 2 can successfully push in quartz ampoule outer tube 7, the bottom of quartz crucible 2 is towards the bottom of quartz ampoule outer tube 7.
Referring to Fig. 2, specimen material 1 is placed on the bottom of quartz crucible 2, between the inwall of material sample 1 and quartz crucible 2, need to have the gap of 0.1~0.2mm, with the material that guarantees preparation, can slip into smoothly in quartz crucible 2 and in the heating preparation process certain expansion space is arranged.The top of quartz crucible 2 is provided with the first quartzy push pipe 5 near opening part, the bottom of the first silica tube 5 can be flat shape, the bottom of the first quartzy push pipe 5 holds out against specimen material 1, top can form the external diameter of 11, the first quartzy push pipes 5 that bind of quartz crucible than the little 0.1~0.2mm of the internal diameter of quartz crucible with sealing of quartz crucible 2.At the sidewall of the first quartzy push pipe 5, for example the place apart from bottom 10~20mm can arrange aperture (not shown) be used to vacuumizing, and like this, quartz crucible 2 can be communicated with vacuum system by the first quartzy push pipe 5, and the diameter of aperture can be the 2mm left and right.Silica wool 6 can be set for buffering between specimen material 1 and the first quartzy push pipe 5, the thickness of silica wool 6 can be 5~10mm.The bottom of quartz crucible 2 can be connected with quartzy stub 3, by quartzy stub 3, is inserted into the concave graphite plug 8 that is positioned at quartz ampoule outer tube 7 bottoms.The external diameter of concave graphite plug 8 is basic identical with the external diameter of quartz crucible 2, the diameter of quartzy stub 3 is complementary less than the external diameter of quartz crucible 2 and with the aperture of the shrinkage pool of concave graphite plug 8, particularly, the external diameter of quartz crucible 2 is than the little 0.1~0.2mm in the aperture of the shrinkage pool of concave graphite plug 8.Quartzy stub 3 preferably transparent quartz pushrods, and be sintered into one with the bottom of quartz crucible 2.The bottom of quartz crucible 2 can be flat shape, and so-called flat shape refers to substantially vertical with quartz crucible 2 length directions.Equally, the flat shape mentioned of the utility model all refers to the structure with bottom surface substantially vertical with the part length direction.
Referring to Fig. 1, the bottom of quartz ampoule outer tube 7 can be circular arc bottom, for example forms hemispherical again.The bottom of quartz ampoule outer tube 7 can be provided with quartzy partition 13, and quartzy partition 13 has hole and is sintered into one with quartz ampoule outer tube 7.Between the bottom of the bottom of quartz ampoule outer tube 7 and quartz crucible 2, can be provided with silica wool 4 for buffering, particularly, can between quartzy partition 13 and concave graphite plug 8, silica wool 4 be set, the thickness of silica wool 4 can be 5~10mm.The top of quartz ampoule outer tube 7 is provided with the second quartzy push pipe 9, the bottom of the second quartzy push pipe 9 can be flat shape, the bottom of the second quartzy push pipe 9 holds out against quartz crucible 2, upper end with the sealing of quartz ampoule outer tube 7, the external diameter of the second quartzy push pipe 9 is than the little 0.1~0.2mm of the internal diameter of quartz ampoule 7.The part that seals the close top that is interpreted as the second quartzy push pipe 9 of the upper end of the second quartzy push pipe 9 and quartz ampoule outer tube 7 can with the sealing of quartz ampoule outer tube 7, its top can be outstanding up from quartz ampoule outer tube 7.At the sidewall of the second quartzy push pipe 9, for example the place apart from bottom 10~20mm can arrange aperture (not shown) be used to vacuumizing, and like this, quartz ampoule outer tube 7 can be communicated with vacuum system by the second quartzy push pipe 9, and the diameter of aperture can be the 2mm left and right.Between the second quartzy push pipe 9 and quartz crucible 2, be provided with silica wool 12, the thickness of silica wool 12 can be 5~10mm.Carbon paper 10 can be wrapped up or be wound with to the top exterior walls of quartz ampoule 2, the thickness of carbon paper 10 can be 0.1~0.2mm, carbon paper 10 can be filled the space between the inside of the outer wall of quartz crucible 2 and quartz ampoule outer tube 7 on the one hand, can in vibration and impact process, cushion on the other hand to slow down the reactive force impact that quartz crucible 2 may be subject to diametrically.
Preparation and use procedure
Quartz crucible 2, quartzy stub 3, quartz ampoule outer tube 7, first, second quartzy push pipe 5,9 and quartzy partition 13 are all to be made by high purity quartz, before use, first with chloroazotic acid, soak, and then use washed with de-ionized water, dry stand-by.Silica wool 4,6,12 by high-purity with flexible by quartz make fibrous.Carbon paper 10 is approximately paper materials of 0.1~0.2mm, some toughness of thickness.Matrix graphite plug 8 is selected high-purity, high-strength graphite, is machined to the right cylinder with shrinkage pool, then 1000 ℃ of processing of heating in vacuum oven, and is cooling rear standby.
A flat end socket is burnt till in 2 ends of quartz crucible, form the structure with flat and upper end open.One end of the flat and quartzy stub 3 of quartz crucible 2 is burnt till to one.In quartz crucible 2, can put into the material sample 1 that needs preparation, the inwall of material sample 1 and quartz crucible 2 need to have the gap of 0.1~0.2mm, with the material sample 1 that guarantees preparation, can slip into smoothly in quartz crucible 2 and in the heating preparation process certain expansion space is arranged, material sample 1 can not produce with quartz the solidifying and materials such as film take quartz as substrate of semiconductor material, multi-element metal alloy material of chemical reaction.after putting into material sample 1, can above material sample 1, add approximately 5~10mm of high purity quartz cotton 6, then use the first quartzy push pipe 5 more smaller than quartz crucible internal diameter to hold out against material sample 1, the first quartzy push pipe 5 is to select high purity quartz, be fired into flat, the aperture of about Φ 2mm burns in 10mm~20mm place above flat, the first quartzy push pipe 5 is connected with vacuum system, the inside of quartz crucible 2 can be connected with vacuum system by the aperture on the first quartzy push pipe 5, after vacuumizing and making the interior negative pressure of quartz crucible 2 meet material vacuum tightness, at the head of quartz crucible 2, make the first quartzy push pipe 5 and quartz crucible 2 burn till one and bind 11 with what form quartz crucible, the complete quartz crucible 2 that forms as shown in Figure 2.
The bottom of quartz ampoule outer tube 7 is fired and is hemispherical, at the approximate diameter position of hemisphere, puts into porose quartzy partition 13 and burns till one with quartz ampoule outer tube 7.
To with the quartz crucible 2 of quartzy stub 3, be inserted in concave graphite plug 8, then it slowly be pushed on the quartzy partition 13 of bottom of quartz ampoule outer tube 7, on quartzy partition 13, can place in advance approximately 5~10mm of high purity quartz cotton 4.Head at quartz crucible 2 in the process that pushes can wrap up or be wrapped with carbon paper 10, carbon paper 10 is approximately paper materials of 0.1~0.2mm, some toughness of thickness, the external diameter that is enclosed with/is wrapped with the quartz crucible 2 of carbon paper 10 is slightly less than the internal diameter of quartz ampoule outer tube 7, like this, carbon paper 10 can be fine to radially the limiting of quartz crucible 2, can in vibration and impact process, slow down the radial effect power that quartz crucible 2 is subject to again.after quartz crucible 2 being pushed into to the bottom of quartz ampoule outer tube 7, at the head of quartz crucible 2, fill approximately 5~10mm of silica wool 12, then with the second quartzy push pipe 9 of the internal diameter that is slightly less than quartz ampoule outer tube 7, hold out against quartz crucible 2, the second quartzy push pipe 9 is also to select high purity quartz, be fired into flat, the aperture of about Φ 2mm burns in 10mm~20mm place above flat, the second quartzy push pipe 9 is connected with vacuum system, the inside of quartz ampoule outer tube 7 can be connected with vacuum system by the aperture on the second quartzy push pipe 9, after vacuumizing and making the interior negative pressure of quartz ampoule outer tube 7 meet material vacuum tightness, head at quartz ampoule outer tube 7 makes the second quartzy push pipe 9 burn till one with quartz ampoule outer tube 7, the complete double-layer quartz ampoule that forms as shown in Figure 2.
The utility model has following beneficial effect:
1, all parts in the utility model can be lower normal use of comparatively high temps (1200 ℃);
2, solidifying and the preparation of the materials such as film take quartz as substrate of the applicable and quartzy semiconductor material that does not produce chemical reaction of structure described in the utility model, multi-element metal alloy material, widely applicable;
3, ampoule structural safety described in the utility model is reliable, is applicable to special or general work experimental situation;
4, structure described in the utility model is the biquartz structure, and the quartz ampoule structure fabrication is simple, and is economic and practical.

Claims (10)

1. double-layer quartz ampoule, it is characterized in that, the inside that described double-layer quartz ampoule has quartz ampoule outer tube (7) and is positioned at described quartz ampoule outer tube (7) is for holding the quartz crucible (2) of material sample (1), the bottom of described quartz crucible (2) is connected with the quartzy stub (3) that is inserted into concave graphite plug (8), the top of described quartz crucible (2) is sealed be used to holding out against the first quartzy push pipe (5) of described material sample (1), the top of described quartz ampoule outer tube (7) is sealed be used to holding out against the second quartzy push pipe (9) of described quartz crucible (2).
2. double-layer quartz ampoule according to claim 1, is characterized in that, between the bottom of described quartz ampoule outer tube (7) and concave graphite plug (8), is provided with silica wool (4).
3. double-layer quartz ampoule according to claim 2, is characterized in that, the bottom of described quartz ampoule outer tube (7) is hemispherical, and be provided with quartzy partition (13) with holes.
4. double-layer quartz ampoule according to claim 3, is characterized in that, described silica wool (4) is arranged between described quartzy partition (13) and concave graphite plug (8).
5. double-layer quartz ampoule according to claim 1, is characterized in that, between described material sample (1) and the first quartzy push pipe (5), is provided with silica wool (6).
6. double-layer quartz ampoule according to claim 1, is characterized in that, between described quartz crucible (2) and the second quartzy push pipe (9), is provided with silica wool (12).
7. double-layer quartz ampoule according to claim 1, is characterized in that, between the inwall of the outer wall at the top of described quartz crucible (2) and described quartz ampoule outer tube (7), is provided with carbon paper (10).
8. double-layer quartz ampoule according to claim 1, is characterized in that, the bottom of the described first quartzy push pipe (5) is flat, and sidewall is provided with aperture, and top and described quartz crucible (2) sealing-in are integral.
9. double-layer quartz ampoule according to claim 1, is characterized in that, the bottom of the described second quartzy push pipe (9) is flat, and sidewall is provided with aperture, and upper end and described quartz ampoule outer tube (7) sealing-in are integral.
10. double-layer quartz ampoule according to claim 1, is characterized in that, the bottom of described quartz crucible (2) is flat.
CN2013203657976U 2013-06-25 2013-06-25 Double-layer quartz ampoule Expired - Lifetime CN203295665U (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103849935A (en) * 2014-01-17 2014-06-11 中国科学院上海技术物理研究所 Quartz ampoule for zinc telluride crystal space growth
CN105908254A (en) * 2016-06-12 2016-08-31 中国科学院上海技术物理研究所 Casing pipe type cavity structure for preparing semiconductor material
CN106435718A (en) * 2016-11-25 2017-02-22 中国科学院上海技术物理研究所 Quartz sleeve for high-airtightness tellurium cadmium mercury vapor phase epitaxy
CN107344129A (en) * 2017-08-31 2017-11-14 中国科学院金属研究所 A kind of universal sample ampoules for space-orbit Experiment of Material Science
CN109338474A (en) * 2018-10-16 2019-02-15 中国电子科技集团公司第十研究所 A kind of heat-treatment furnace waving synthesis for cadmium-zinc-teiluride polycrystal material

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103849935A (en) * 2014-01-17 2014-06-11 中国科学院上海技术物理研究所 Quartz ampoule for zinc telluride crystal space growth
CN105908254A (en) * 2016-06-12 2016-08-31 中国科学院上海技术物理研究所 Casing pipe type cavity structure for preparing semiconductor material
CN105908254B (en) * 2016-06-12 2018-07-06 中国科学院上海技术物理研究所 A kind of bushing type cavity body structure for being used to prepare semi-conducting material
CN106435718A (en) * 2016-11-25 2017-02-22 中国科学院上海技术物理研究所 Quartz sleeve for high-airtightness tellurium cadmium mercury vapor phase epitaxy
CN107344129A (en) * 2017-08-31 2017-11-14 中国科学院金属研究所 A kind of universal sample ampoules for space-orbit Experiment of Material Science
CN107344129B (en) * 2017-08-31 2022-07-22 中国科学院金属研究所 Universal sample ampoule for space on-orbit material scientific experiment
CN109338474A (en) * 2018-10-16 2019-02-15 中国电子科技集团公司第十研究所 A kind of heat-treatment furnace waving synthesis for cadmium-zinc-teiluride polycrystal material

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Granted publication date: 20131120

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Number: 28-01

Volume: 39

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