CN203277951U - Whole frame of laser - Google Patents
Whole frame of laser Download PDFInfo
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- CN203277951U CN203277951U CN 201320219992 CN201320219992U CN203277951U CN 203277951 U CN203277951 U CN 203277951U CN 201320219992 CN201320219992 CN 201320219992 CN 201320219992 U CN201320219992 U CN 201320219992U CN 203277951 U CN203277951 U CN 203277951U
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Abstract
The utility model discloses a whole frame of a laser. The laser comprises a discharge cavity and an optical system related to the discharge cavity. The whole frame comprises a mounting pedestal (1), a basin frame (2), an optical system frame (3) and a discharge cavity frame (4). The mounting pedestal (1) is a pedestal of the whole frame and is used for supporting all parts of the whole frame. The basin frame (2) is directly fixed on the mounting pedestal (1). The optical system frame (3) is used for mounting the optical system and is isolated from the discharge cavity frame (4). The discharge cavity frame (4) is disposed on the mounting pedestal (1) and is used for supporting the discharge cavity. The whole frame helps to reduce influence of the discharge cavity upon the optical system.
Description
Technical field
The utility model relates to a kind of complete machine framework of laser, is applicable to the general assembly of various lasers and integrated.
Background technology
Laser is when general assembly is integrated, and system is comparatively complicated.During laser works, the vibration isolation between each parts seems particularly important.
Both comprised Optical system module under the laser complete machine system, and comprised again discharge cavity, the accurate location of the relative position between each parts seems particularly important.In actual mechanical process, under the prerequisite that optical system has been adjusted, make discharge cavity possess the repeatability of installation and seem particularly important, because the weight of discharge cavity is heavier, useful life is limited, needs discharge cavity accurately to locate when equipment replacement like this.This has caused difficulty with regard to the integrated design for the complete machine structure system.
The utility model content
The technical problem that (one) will solve
Technology to be solved in the utility model asks it is the vibration isolation of various piece in working order time of laser.
(2) technical scheme
For solving the problems of the technologies described above, the utility model provides a kind of complete machine framework of laser, described laser includes discharge cavity and optical system, described framework comprises mounting base, basic framework, optical system framework and discharge cavity framework, wherein, described mounting base is the pedestal of this complete machine framework, is used for the parts of all complete machine frameworks of carrying; Described basic framework directly is fixedly mounted on described mounting base; Described optical system framework is used for installing described optical system, and with described discharge cavity lframe cross piece from; Described discharge cavity frame installation is used for carrying described discharge cavity on described mounting base.
According to a kind of embodiment of the present utility model, described basic framework is installed on described mounting base by screwed hole, and it is inner that described optical system framework and discharge cavity framework are arranged on this basic framework successively.
According to a kind of embodiment of the present utility model, described laser also comprises one or more in system controller, industrial computer, charhing unit, solid switch, control panel, touch-screen, and they are installed on described basic framework.
According to a kind of embodiment of the present utility model, described laser also comprises power amplification chamber pulse shortener and/or main oscillations discharge cavity magnetic pulse compressor, both is arranged on the discharge cavity framework.
According to a kind of embodiment of the present utility model, described discharge cavity framework comprises fixed head and the discharging chamber guide rail of threaded installing hole, the fixed head of described threaded installing hole is the installation carrier of described power amplification chamber and described power amplification chamber magnetic pulse compressor, and the screwed hole of arranging on described fixed head is used for installing described discharging chamber guide rail.
According to a kind of embodiment of the present utility model, described optical system comprises at least one in following modules: power amplification chamber front end output optical module, power amplification cavity rear end reflecting module, main oscillations discharge cavity front end output optical module, main oscillations discharge cavity rear end live width is pressed narrow module.
According to a kind of embodiment of the present utility model, described mounting base comprises that floor installation is dull and stereotyped, have discharge cavity frame mounting hole, basic framework installing hole on this floor installation flat board, dull and stereotyped installing hole is installed, the mobile universal wheel with feet is housed in the bottom of described floor installation flat board.
According to a kind of embodiment of the present utility model, comprise the panel beating bound edge in the surrounding of described floor installation flat board.
According to a kind of embodiment of the present utility model, be provided with vibration absorber between described basic framework, optical system framework and discharge cavity frame.
According to a kind of embodiment of the present utility model, described vibration absorber comprises the discharge cavity vibration isolator between power amplification chamber, main oscillations discharge cavity and discharge cavity framework, and the cushion blocking between discharge cavity framework and mounting seat.
(3) beneficial effect
The laser that the utility model was suitable for can be realized the Laser output of high repetition, macro-energy, by realizing the isolation of complete machine discharge cavity and optical system, and adopts double-layer vibration isolating system can reduce discharge cavity to the impact of optical system on discharge cavity.
Description of drawings
Fig. 1 is the structural representation of the complete machine framework of the utility model laser;
Fig. 2 is the scheme of installation of the complete machine framework of an embodiment laser of the utility model;
Fig. 3 is the structural representation of mounting base of the complete machine framework of an embodiment laser of the utility model;
Fig. 4 is the structural representation of basic framework of the complete machine framework of an embodiment laser of the utility model;
Fig. 5 is the structural representation of optical system framework of the complete machine framework of an embodiment laser of the utility model;
Fig. 6 is the structural representation of discharge cavity framework of the complete machine framework of an embodiment laser of the utility model;
Fig. 7 is the installation and positioning structure schematic diagram of discharge cavity of the complete machine framework of an embodiment laser of the utility model;
Fig. 8 is the guide rail of the installation and positioning structure of the discharge cavity of the complete machine framework of an embodiment laser of the utility model and the detailed structure view of fixed head;
Fig. 9 is the vibration absorber schematic diagram between each framework of complete machine framework of an embodiment laser of the utility model.
Embodiment
For making the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the utility model is described in further detail.
1, the topology layout of the complete machine framework of laser
The complete machine framework of laser of the present utility model is suitable for various lasers, for example, the two-chamber excimer laser includes main oscillations discharge cavity and power amplification chamber, also comprise and two functional module element that cavity is relevant, press narrow module etc. as the rear end live width in the rear end reflecting module in the front end in each chamber output optical module, pulse shortener, power amplification chamber, main oscillations chamber.In addition, the two-chamber excimer laser also includes system controller, is used for controlling the operating state of laser.
The isolated design of employing ray machine of the complete machine framework of laser of the present utility model, its integral arrangement as shown in Figure 1, it comprises mounting base 1, basic framework 2, optical system framework 3 and discharge cavity framework 4.Wherein basic framework 2, optical system framework 3 and discharge cavity framework 4 are arranged on mounting base 1, and basic framework 2, optical system framework 3 and discharge cavity framework 4 envelope successively from outside to inside.
Parcel and encapsulation that outermost basic framework 2 is used for complete machine make the complete machine framework of whole two-chamber excimer laser become an Organic unity body.Basic framework 2 directly is fixedly mounted on mounting base 1.According to preferred implementation of the present utility model, basic framework 2 also be used for the system controller, charhing unit, solid switch of carrying two-chamber excimer laser etc. to distribution, control each relevant functional module, play the effect of an electrical control cubicles.Preferably, user interaction device such as controlling touch-screen also can be installed, so that the user can control the operation of two-chamber excimer laser in the outside of this basic framework 2.
The optical system that optical system framework 3 is used for installing laser, and isolate with discharge cavity framework 4.Optical system framework 3 is arranged on mounting base 1.The optics of whole laser is installed on this framework, optical system is had a style of one's own, and the module of optical system comprises that the rear end live width in front end output optical module, the main oscillations chamber in front end output optical module, the power amplification chamber in main oscillations chamber presses the rear end reflecting module in narrow module, power amplification chamber, optical detecting module etc.
As from the foregoing, the utility model has mainly adopted the isolated structural design of ray machine, with the isolation of the vibration sources such as each accurate module of optical system and discharge cavity, realizes the high stable demand of each module of optical system, to guarantee the spectral characteristic of Laser output.This isolation method is that discharge cavity is by adopting vibration isolator and discharge cavity framework once to isolate, adopt vibration-damped component to carry out secondary isolation discharge cavity framework and mounting base simultaneously, avoid laser to transfer vibrations to installation base plate when work, and then be delivered to optical system framework and optical module.
2, specific embodiment
Illustrate structure of the present utility model below by an embodiment.
(1) overall structure general introduction
Fig. 2 is the scheme of installation of an embodiment of the complete machine framework of laser of the present utility model, and this figure is front view.
As shown in Figure 2, in this embodiment, two-chamber excimer laser main functional modules comprises that system controller 6, power amplification chamber 8, main oscillations discharge cavity 13, power amplification chamber pulse shortener 7, power amplification chamber front end output optical module 9, power amplification cavity rear end reflecting module 10, main oscillations discharge cavity magnetic pulse compressor 11, main oscillations discharge cavity front end output optical module 12, main oscillations discharge cavity rear end live width presses narrow module 14, industrial computer 17, charhing unit 18, solid switch 19, control panel 20, touch-screen 21 etc.
The complete machine framework of laser of the present utility model is the carrier of above-mentioned functions module, different to the demand of installation environment according to each functional module, be arranged on respectively on different frameworks, and all frameworks are arranged on mounting base 1, as shown in the figure, these frameworks comprise: basic framework 2, optical system framework 3 and discharge cavity framework 4.Wherein:
Power amplification chamber front end output optical module 9, power amplification cavity rear end reflecting module 10, main oscillations discharge cavity front end output optical module 12, main oscillations discharge cavity rear end live width presses narrow module 14 to be arranged on optical system framework 3, independently become an optical system frame module, and isolate with discharge cavity framework 4.
(2) mounting base
Discharge cavity frame mounting hole 80 is positioned at installs the more inboard of flat board 83, is used for being bolted discharge cavity framework 4; Basic framework installing hole 82 is positioned at installs dull and stereotyped 83 peripheries, is used for installing basic framework; Dull and stereotyped installing hole 84 is installed is positioned at the periphery that flat board is installed, by this position, hole, flat board will be installed and be fixed on mounting base.
Described mobile universal wheel 15 can be six quiet deflecting rollers of evenly arranging.Each deflecting roller is integrated with the feet of an adjustment height.When the complete machine framework is moved to riding position, regulate the feet height of shifting roller 15, make the liftoff rise of deflecting roller, thus the fixing service position of complete machine framework, so that excimer laser works.
Surrounding at floor installation flat board 83 also can comprise panel beating bound edge 81, for the protection of the periphery of mounting base, and plays the standardized effect of overall appearance.
(3) basic framework
Fig. 4 is the structural representation of the basic framework of described embodiment.As shown in Figure 4, the basis of basic framework is the sheet metal structural of a square steel skeleton, comprises front side top panel 55, top apparatus mounting plate 56, back package board 57, left plate 58, square steel skeleton 59, front door 60, electric cabinet door-plate 61, right plate 62, automatically controlled postnotum 63, upper postnotum 64 etc.
Basic framework is the carrier of electricity, control system simultaneously, and system controller 6, industrial computer 17, charhing unit 18, solid switch 19, control panel 20, touch-screen 21 are installed on basic frame structure, and they adopt traditional rack pattern.
(4) optical system framework
Fig. 5 is the structural representation of the optical system framework of embodiment.As shown in Figure 5, the optical system framework comprises that the left riser 65 of optical system framework, power amplification chamber front end output optical module installing rack 66, optical system framework upper reinforcement 67, main oscillations chamber front end output optical module installing rack 68, discharge cavity frame strengthening hornblock 69, optical system framework bottom reinforcement 70, right angle reinforce riser 73 after adaptor 31, linewidth narrowing module mounting frame 33, power amplification cavity rear end reflecting module mounting bracket 71, the right riser 72 of optical system framework, optical system framework.
Wherein the left riser 65 of optical system framework, optical system framework upper reinforcement 67, discharge cavity frame strengthening hornblock 69, optical system framework bottom reinforcement 70, right angle reinforce the common skeleton structure that forms the optical system framework of riser 73 after adaptor 31, the right riser 72 of optical system framework, optical system framework.
Power amplification chamber front end output optical module installing rack 66 is used for installation power enlarged cavity front end output optical module, main oscillations chamber front end output optical module installing rack 68 and is used for installing main oscillations chamber front end output optical module, linewidth narrowing module mounting frame 33 and is used for installing live width and presses narrow module, power amplification cavity rear end reflecting module mounting bracket 71 to be used for installation power enlarged cavity rear end reflecting module mounting bracket.
The optical system framework connects firmly with the mounting base rigidity by the right angle reinforcing adaptor 31 of bottom, realizes the installation of optical system framework.This framework inner space is the discharge cavity framework simultaneously, isolates between two frameworks.
(5) discharge cavity framework
Fig. 6 is the structural representation of the discharge cavity framework of described embodiment.As shown in Figure 6, the discharge cavity framework comprises riser 78 after moving guide rail 73, the left riser 74 of discharge cavity framework, discharge cavity framework square steel skeleton 75, discharge cavity framework lower installation board 76, mobile pulley 30, the right riser 77 of discharge cavity framework, discharge cavity framework, vibration isolator 27, discharge cavity framework upper mounting plate 79 etc.
Discharge cavity framework major function is the parts of carrying laser main cavity.Because its weight that will load is larger, so its structural strength is large than other parts.Discharge cavity framework square steel skeleton 75 is welded by square steel, and after the left riser 74 of discharge cavity framework, the right riser 77 of discharge cavity framework and discharge cavity framework, riser 78 is the hollow out aluminium alloy plate, has both alleviated weight, has guaranteed again rigidity and the intensity of structure.
The two-layer installation dividing plate in up and down is installed: discharge cavity framework upper mounting plate 79 and discharge cavity framework lower installation board 76 on vertically, all join the M6 bolt hole that is drilled with 25 * 25mm standard hole pitch on every block of plate, install and regulate laser discharge cavity mounted thereto with convenient.
The discharge cavity framework is fixed by vibration absorber and the mounting base of bottom, and by envelope in the optical system framework.The vibration absorber introduction that specifically sees below.
(6) installation of discharge cavity and position adjustment structure
Main oscillations chamber, power amplification chamber and complete machine frame size and weight are all bigger than normal, and all can introduce error in processing and manufacturing, Installation and Debugging, therefore, can not one-time-reach-place for the installation and debugging of discharging chamber, this just requires to install additional convenient structure of installing with position adjustments in design.
Fig. 7 is the scheme of installation of the discharge cavity of embodiment of the present utility model, and the below describes with the installation in power amplification chamber.as shown in Figure 7, wherein discharge cavity framework 4 comprises the bellows 22 and 34 that the power amplification chamber is connected with optical module, the fixed head 35 of threaded installing hole, power amplification chamber front end output optical module 9, power amplification chamber drive motors 24, discharging chamber guide rail 29, discharge cavity mobile pulley 30, discharge cavity vibration isolator 27, square steel framework 36, power amplification chamber 8, vibration isolator is installed adjusting bolt group 36, guide rails assembling plate 37 with adjustment hole, light pipe 38, power amplification cavity rear end reflecting module 10, power amplification chamber magnetic pulse compressor 7, power amplification chamber magnetic pulse compressor is installed leg 39.
Wherein the fixed head 35 of threaded installing hole is the installation carrier of power amplification chamber 8 with power amplification chamber magnetic pulse compressor 7, and the screwed hole of arranging on fixed head 35 is used for discharging chamber guide rail 29 is installed, and is convenient to the dismounting of discharge cavity.
The installation of discharge cavity realizes in the following manner with adjusting: at first discharge cavity framework 4 is slipped into via guide rail 29 in the power amplification chamber, regulate the height of vibration isolator 27, make pulley lift away from guide rail 29, and guide rail is shifted out, regulate at last height and the position of 27 vibration isolators, by the different threaded adjusting hole of mobile discharge cavity to mounting plate 35, come the position of regulation enlarged cavity in horizontal plane.
The detailed construction of guide rail 29 and fixed head 35 as shown in Figure 8, concrete structure comprises: left back vibration isolator 40, left rail 41, guide rail regulate slotted hole 42, left back mobile pulley 43, left front mobile pulley 44, left front vibration isolator 45, square steel framework 46, threaded adjusting hole 47, right front vibration isolator 48, right front mobile pulley 48, right back mobile pulley 50, right back vibration isolator 51, right rail 52, install dull and stereotyped 53 etc.
Wherein vibration isolator 40,45,48,51 is arranged on respectively under four stagger angles of discharge cavity, realize the isolation of discharge cavity vibration, and mobile pulley 43,44,48,50 is arranged on respectively two surveys of discharge cavity, realizes moving in and out and regulating of discharge cavity.
(7) vibration absorber between framework
The isolated excimer laser core component of ray machine is lasing discharging chamber, i.e. main oscillations discharge cavity and power amplification two, chamber cavity and complete machine optical system components.
In order to isolate the vibration of each discharge cavity and functional part, be provided with vibration absorber between described basic framework 2 of the present utility model and discharge cavity frame 3.As shown in Figure 9, vibration absorber comprises the discharge cavity vibration isolator 27 of 4 of power amplification chamber 8, main oscillations discharge cavity 28 and discharge cavity frameworks, the cushion blocking 25 that discharge cavity framework 4 and mounting seat are 1.
The cushion blocking 25 of 1 of discharge cavity framework 4 and mounting seat wherein is in order to realize the vibration isolation between discharge cavity framework 4 and optical system framework 3; Install at each base angle of discharging chamber vibration isolator 27 respectively one, and each discharging chamber has four, totally eight of two discharging chambers, the vibration that produces when isolating thus the inner blower fan system of discharge cavity and discharge work.
The utility model has been isolated discharge cavity due to the vibration that blower fan rotates and discharge process produces with the discharge cavity supporting construction of laser and the supporting construction apart arrangement of optical system, has effectively guaranteed the normal operation of complete machine optical system.Simultaneously, the supporting construction of discharge cavity supporting construction and optical system be set up at space cloth be divided into inside and outside two-layerly, consists of the nested version of a kind of envelope, this structure effectively reduce complete machine the appearance profile size and take up space, make the complete machine structure layer function clearly demarcated, compact conformation.
Mounting base is the installation basis of three-decker, and wherein the discharge cavity framework adopts the vibration damping isolation to be connected with the bottom mounting base, and optical system framework and basic framework adopt and be rigidly connected.For guaranteeing the rigidity of complete machine structure, structure also adopts the square steel Welding Structure, and outer surface is formed by the sheet metal component parcel, to realize the bearing capacity of pedestal.
Triple Frame of the present utility model is realized respectively function separately, junction at discharge cavity framework and bottom mounting base, adopt the flexible anti-vibration material to realize the vibration isolation, because needs carry out sealing protection to whole light path system, the discharge cavity that so just requires to be installed on inner frame is connected with the optical module that is arranged on outside framework, for realizing the vibration isolation between them, adopt seal bellows to connect between them.
For the main weight of carrying and produce the discharge cavity framework of innermost layer of the discharge cavity of main vibration source, it is the discharging chamber installation frame, carry main oscillations discharge cavity and power amplification two, chamber cavity on it, two discharge cavities are namely the sources that laser produces, it is also the vibration source of whole Optical Maser System, or the most concentrated parts of weight in complete machine so layer structure adopts the square steel Welding Structure, make this structure have high rigidity, high strength, good dynamic characteristic.
Optical system framework of the present utility model institute load capacity is lighter, adopts aluminium alloy extrusions and hollow out aluminum alloy plate materials to connect and compose, to realize the loss of weight of machine system.The optical module of whole Optical Maser System all carries on optical system framework 3, to realize the isolation fully of optical system and discharge cavity, guarantees the normal operation of optical system.
Basic framework envelope of the present utility model is realized the outward appearance function of complete machine at outermost layer, and all the other modules can be arranged in the framework that adopts sheet metal structural simultaneously, realize the convenience of electricity and control module dismounting.
Above-described specific embodiment; the purpose of this utility model, technical scheme and beneficial effect are further described; be understood that; the above is only specific embodiment of the utility model; be not limited to the utility model; all within spirit of the present utility model and principle, any modification of making, be equal to replacement, improvement etc., within all should being included in protection range of the present utility model.
Claims (10)
1. the complete machine framework of a laser, described laser comprises discharge cavity and the optical system relevant to discharge cavity, it is characterized in that, described framework comprises mounting base (1), basic framework (2), optical system framework (3) and discharge cavity framework (4), wherein
Described mounting base (1) is the pedestal of this complete machine framework, is used for the parts of all complete machine frameworks of carrying;
Described basic framework (2) directly is fixedly mounted on described mounting base (1);
Described optical system framework (3) is used for described optical system is installed, and isolates with described discharge cavity framework (4);
Described discharge cavity framework (4) is arranged on described mounting base (1), is used for carrying described discharge cavity.
2. the complete machine framework of laser as claimed in claim 1, it is characterized in that, described basic framework (2) is installed on described mounting base (1) by screwed hole, and described optical system framework (3) and discharge cavity framework (4) are arranged on this basic framework (2) inside successively.
3. the complete machine framework of laser as claimed in claim 2, it is characterized in that, described laser also comprises one or more in system controller (6), industrial computer (17), charhing unit (18), solid switch (19), control panel (20), touch-screen (21), and they are installed on described basic framework (2).
4. the complete machine framework of laser as claimed in claim 1, it is characterized in that, described laser also comprises power amplification chamber pulse shortener (7) and/or main oscillations discharge cavity magnetic pulse compressor (11), both is arranged on discharge cavity framework (4).
5. the complete machine framework of laser as claimed in claim 4, it is characterized in that, described discharge cavity framework (4) comprises fixed head (35) and the discharging chamber guide rail (29) of threaded installing hole, the fixed head of described threaded installing hole (35) is the installation carrier of described power amplification chamber (8) and described power amplification chamber magnetic pulse compressor (7), and the upper screwed hole of arranging of described fixed head (35) is used for installing described discharging chamber guide rail (29).
6. the complete machine framework of laser as claimed in claim 1, it is characterized in that, described optical system comprises at least one in following modules: power amplification chamber front end output optical module (9), power amplification cavity rear end reflecting module (10), main oscillations discharge cavity front end output optical module (12), main oscillations discharge cavity rear end live width is pressed narrow module (14).
7. the complete machine framework of laser as claimed in claim 1, it is characterized in that, described mounting base (1) comprises floor installation dull and stereotyped (83), have discharge cavity frame mounting hole (80), basic framework installing hole (82) on this floor installation flat board, dull and stereotyped installing hole (84) is installed, the mobile universal wheel (15) with feet is housed in the bottom of described floor installation dull and stereotyped (83).
8. the complete machine framework of laser as claimed in claim 7, is characterized in that, comprises panel beating bound edge (81) in the surrounding of described floor installation dull and stereotyped (83).
9. as the complete machine framework of the described laser of any one in claim 1～8, it is characterized in that, be provided with vibration absorber between described basic framework (2), optical system framework (3) and discharge cavity framework (4).
10. the complete machine framework of laser as claimed in claim 9, it is characterized in that, described vibration absorber comprises the discharge cavity vibration isolator (27) that is positioned between power amplification chamber (8), main oscillations discharge cavity (28) and discharge cavity framework (4), and is positioned at the cushion blocking (25) between discharge cavity framework (4) and mounting seat (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320219992 CN203277951U (en) | 2013-04-26 | 2013-04-26 | Whole frame of laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320219992 CN203277951U (en) | 2013-04-26 | 2013-04-26 | Whole frame of laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203277951U true CN203277951U (en) | 2013-11-06 |
Family
ID=49508279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320219992 Expired - Fee Related CN203277951U (en) | 2013-04-26 | 2013-04-26 | Whole frame of laser |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203277951U (en) |
-
2013
- 2013-04-26 CN CN 201320219992 patent/CN203277951U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200901 Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee after: Research Institute of aerospace information innovation, Chinese Academy of Sciences Address before: 9 Dengzhuang South Road, Haidian District, Beijing 100094 Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences Effective date of registration: 20200901 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee after: Institute of Microelectronics, Chinese Academy of Sciences Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee before: Research Institute of aerospace information innovation, Chinese Academy of Sciences |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131106 |