CN203274688U

CN203274688U - Thickness and refractive index measuring device of an AR anti-reflection film

Info

Publication number: CN203274688U
Application number: CN 201320307355
Authority: CN
Inventors: 朱峥嵘; 埃德加·吉尼奥; 赵连芳
Original assignee: KUNSHAN SHENGZE PHOTOELECTRIC TECHNOLOGY Co Ltd
Current assignee: KUNSHAN SHENGZE PHOTOELECTRIC TECHNOLOGY Co Ltd
Priority date: 2013-05-31
Filing date: 2013-05-31
Publication date: 2013-11-06
Anticipated expiration: 2023-05-31

Abstract

The utility model discloses a thickness and refractive index measuring device of an AR anti-reflection film. The measuring device comprises at least two lights, a calculating device, optical systems corresponding to the at least two lights, light ray receivers and spectrum analysis devices; light rays with an angle of incidence which is larger than 0 degree and less than 90 degrees of the lights irradiate the same point of the same side of a film face of the AR anti-reflection film via the corresponding optical systems; reflected light rays are received by the corresponding light ray receivers; each of the light ray receivers is connected with a corresponding spectrum analysis device via a light path or an optical fiber; and the spectrum analysis devices are connected with the calculating device via data lines. The thickness and refractive index measuring device of the AR anti-reflection film is characterized by simple structure, fast detection speed and precision measurement; and compared with an ellipsometer, the thickness and refractive index measuring device of the AR anti-reflection film has no movable parts, so running reliability is very high, and signal acquisition speed is very fast. Therefore, the thickness and refractive index measuring device of the AR anti-reflection film can be used for on-line measurement.

Description

Measure the device of AR antireflective film thickness and refractive index

Technical field

The utility model relates to a kind of optical measuring device, particularly a kind of device of measuring AR antireflective film thickness and refractive index.

Background technology

The AR antireflective film is plated in the light face of very white rolled glass usually, can effectively improve the transmitance of photovoltaic glass.The main method of measuring at present the AR antireflective film is to use ellipsometer.The ellipsometer precision is higher, but complex structure, and price is more expensive, and measuring speed is slow, can not be used for on-line measurement.

Summary of the invention

In order to overcome defects, it is a kind of simple in structure that the utility model provides, and measuring speed is fast, measures the device of Measurement accuracy AR antireflective film thickness and refractive index.

the utility model for the technical scheme that solves its technical matters and adopt is: the device of a kind of AR of measurement antireflective film thickness and refractive index, comprise at least two light sources and a calculation element, and the optical system of corresponding each light source, light receiver and spectral analysis device, the optical system of the light of described each light source by correspondence is with greater than 0 degree and expose to the same point of AR antireflective film face the same side less than the pitch angle of 90 degree, and the light after reflection is received by the light receiver of correspondence, described each light receiver connects corresponding spectral analysis device by optical fiber or light path, and each spectral analysis device all connects calculation element by data line.

As further improvement of the utility model, described each optical system is positioned at same plane with corresponding each light receiver, and their angles of inclination of becoming with AR antireflective film vertical direction are identical and do not overlap.

As further improvement of the utility model, described light source is the light source of wide spectrum, and the light of light source after by optical system is polarized light or nonpolarized light.

As further improvement of the utility model, transmission type optical system, reflective optical system or optical fiber that described optical system forms for one or more optical elements.

The beneficial effects of the utility model are: AR antireflective film measurement mechanism of the present utility model has simple in structure, measuring speed is fast, measure characteristics accurately, compare with ellipsometer, this device no-movable part, so reliability of operation is very high, the synchronous signal picking rate is also very high, so can be used for on-line measurement.

Description of drawings

Fig. 1 is the utility model structural representation;

Indicate in figure: the 1-light source; The 2-calculation element; The 3-optical system; The 4-light receiver; The 5-spectral analysis device; The 6-AR antireflective film.

Embodiment

In order to deepen understanding of the present utility model, the utility model is described in further detail below in conjunction with embodiment and accompanying drawing, and this embodiment only is used for explaining the utility model, does not consist of the restriction to the utility model protection domain.

Fig. 1 shows a kind of embodiment of the device of the utility model a kind of AR of measurement antireflective film thickness and refractive index, take two light sources and a calculation element as example, and two corresponding optical systems 3, two light receivers 4 and two spectral analysis devices 5, spectral analysis device 5 can be spectrometer, but be not limited to spectrometer, it can be the spectrometric instrument of other kind, the optical system 2 of the light of described each light source 1 by correspondence is with greater than 0 degree and expose to the same point of AR antireflective film 6 faces less than the pitch angle of 90 degree, and the light after reflection is received by the light receiver 4 of correspondence, described each light receiver 4 connects corresponding spectral analysis device 5 by optical fiber or light path, and each spectral analysis device 5 all finally connects calculation element 2 by data line, data line can be various data lines, port also can be various port, described each optical system 3 is positioned at same plane with corresponding each light receiver 4, and the angle of inclination that they become with AR antireflective film 6 vertical direction is identical and do not overlap, described light source 1 is the light source of wide spectrum, and light source 1 is nonpolarized light by the light after optical system, and described optical system 3 is the transmission type optical system that multiple optical element forms.

As shown in Figure 1, the wide spectrum oblique incident ray that two light sources (or two above light sources) 1 are got is got to the same point of AR antireflective film 6 faces, light receiver 4 obtains reflected light and imports in spectral analysis device 5 by optical fiber or other optical systems, spectral analysis device 5 passes to calculation element 2 the insides to the spectral signal of each wave band by data line, calculation element 2 can calculate the face of AR antireflective film 6 at the reflectance curve with respect to wavelength of two (or more than two, not comprising zero degree) angles by spectral signal.

Calculation element 2 is the program by storing in advance again, two reflectance curves are analyzed, calculating at thickness is a, when refractive index is the function of certain wavelength or certain constant, the reflectance curve of face and the reflectance curve of measurement are the most approaching, thereby the thickness of film and refractive index are recorded simultaneously, when measurement data is analyzed, do not limit optimized algorithm.

This device is mainly used in thickness and the detecting refractive index of AR antireflective film, also can be used for measuring thickness or the refractive index of other film.

Claims

1. device of measuring AR antireflective film thickness and refractive index, it is characterized in that: comprise at least two light sources (1) and a calculation element (2), and the optical system (3) of corresponding each light source (1), light receiver (4) and spectral analysis device (5), the light of described each light source (1) by corresponding optical system (2) with greater than 0 degree and expose to the same point of AR antireflective film (6) face the same side less than the pitch angle of 90 degree, and the light after reflection is received by the light receiver of correspondence (4), described each light receiver (4) connects corresponding spectral analysis device (5) by optical fiber or light path, and each spectral analysis device (5) all finally connects calculation element (2) by data line.

2. the device of measurement according to claim 1 AR antireflective film thickness and refractive index, it is characterized in that: described each optical system (3) and corresponding each light receiver (4) are positioned at the same plane of face the same side, and their angles of inclination of becoming with AR antireflective film (6) vertical direction are identical and do not overlap.

3. the device of measurement according to claim 1 AR antireflective film thickness and refractive index, it is characterized in that: described light source (1) is the light source of wide spectrum, and light source (1) is polarized light or nonpolarized light by the light after optical system.

4. the device of measurement AR antireflective film thickness according to claim 1 and refractive index, is characterized in that: transmission type optical system, reflective optical system or optical fiber that described optical system (3) forms for one or more optical elements.