CN203212644U - Linear air distribution mechanism - Google Patents
Linear air distribution mechanism Download PDFInfo
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- CN203212644U CN203212644U CN 201320139229 CN201320139229U CN203212644U CN 203212644 U CN203212644 U CN 203212644U CN 201320139229 CN201320139229 CN 201320139229 CN 201320139229 U CN201320139229 U CN 201320139229U CN 203212644 U CN203212644 U CN 203212644U
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Abstract
The utility model discloses a linear air distribution mechanism which comprises an upper pressure plate, an air inflation plate and a lower pressure plate which are sequentially connected from top to bottom, wherein multiple levels of air inflation slots are distributed in the air inflation plate; two adjacent levels of air inflation slots are communicated through an air hole; and the first-level air inflation slot is externally connected with an air source. The linear air distribution mechanism disclosed by the utility model adopts central air introduction and distributes air to the two ends of the air inflation plate through multiple layers of air inflation slots layer by layer; the air distribution is uniform, and the product quality can be guaranteed better; by adopting a platy structure, the linear air distribution mechanism realizes seal through cooperation among the upper pressure plate, the air inflation plate and the lower pressure plate, and ensures uniform air distribution; the structure is simple and more convenient and quicker to assemble/disassemble, clean and maintain, and the phenomenon of a traditional air distribution mechanism that 'a film layer is hard to clean after entering a pipe and the exhaust rate of the equipment is influenced' can be effectively avoided; and the linear air distribution mechanism can be formed by machining, guarantees the quality and can ensure stable and consistent air inflation.
Description
Technical field
The utility model relates to the filming equipment field of TCO nesa coating, particularly a kind of linear gas distribution mechanism.
Background technology
In the present filming equipment, the distribution device structure of vacuum chamber is: an end is introduced the internal layer tubule, and skin is inserted in bassoon again, and little breather hole evenly is set on the tubule, and source of the gas is introduced from tubule one end, by little breather hole in bassoon from dredging to the close gas distribution that carries out.There is following defective in the distribution device of this structure:
(1) end is introduced in the gas distribution pipe, makes gas even by the density hole in the bassoon, and effect is difficult to reach, and in actual applications, inflates inhomogeneously, causes that easily plated film is inhomogeneous;
When (2) this device was made, aperture can't adopt drilling machine processing on the tubule, needs to use electrospark machining, long processing time and expense height;
(3) this installs in use, and rete is difficult to clean up after entering in the pipe, influences the equipment pumping speed.
The utility model content
The purpose of this utility model is to overcome the deficiencies in the prior art, provides a kind of simple in structure, the uniform linear gas distribution of gas distribution mechanism.
The technical solution of the utility model is: a kind of linear gas distribution mechanism, comprise the top board, gas panel and the press table that connect successively from top to bottom, be distributed with the multi-stage inflatable groove on the gas panel, be communicated with the external source of the gas of first step aeration tank between the adjacent dual-stage inflators groove by pore.
Described multi-stage inflatable groove has 2 groups, is symmetrically set in the upper and lower surface of gas panel, and the opening surface of each aeration tank is positioned at upper surface or the lower surface of gas panel.
As a kind of preferred version, described aeration tank has level Four, and pore also should have level Four mutually;
First step aeration tank has 1, and on the center line that is centered close to gas panel of first step aeration tank, the two ends of first step aeration tank arrange first step pore respectively, and first step pore is 1/4 of gas panel total length to the distance of gas panel respective end;
Second stage aeration tank has 2, the junction of each second stage aeration tank and corresponding first step pore is the center of second stage aeration tank, the two ends of each second stage aeration tank arrange second stage pore respectively, and the second stage pore outside being positioned at is 1/8 of gas panel total length to the distance of gas panel respective end;
Third stage aeration tank has 4, the junction of each third stage aeration tank and corresponding second stage pore is the center of third stage aeration tank, the two ends of each third stage aeration tank arrange third stage pore respectively, and the third stage pore outside being positioned at is 1/16 of gas panel total length to the distance of gas panel respective end;
Fourth stage aeration tank has 8, and the junction of each fourth stage aeration tank and corresponding third stage pore is the center of fourth stage aeration tank, and the two ends of each fourth stage aeration tank arrange fourth stage pore respectively, and each fourth stage pore is the qi-emitting hole of gas panel.
The width of described first step aeration tank is 3mm, and the width of second stage aeration tank is 2mm, and the width of third stage aeration tank is 1mm, and the width of fourth stage aeration tank is 1mm.
Be respectively equipped with gas on described top board and the press table and introduce seat, the air outlet that gas is introduced seat is connected with the first step aeration tank of gas panel, and gas is introduced the external source of the gas of seat.
When the linear gas distribution of basis mechanism uses, its gas distribution principle is: introduce seat behind source of the gas introducing gas by gas, gas enters first step aeration tank, pass through first step gas cell distribution then to second stage aeration tank, pass through second stage gas cell distribution more successively to third stage aeration tank,, evenly distribute from fourth stage pore at last to fourth stage aeration tank by third stage gas cell distribution, successively distribute by aeration tanks at different levels, make gas distribution more even.
When the linear gas distribution of basis mechanism made, wherein the processing of gas panel was as follows: to the groove milling respectively of gas panel upper and lower surface; By the gas panel center begin toward two side milling width be the groove of 3mm to apart from 1/4th places, gas panel end, formation first step aeration tank; Again by 1/4th places begin toward two side milling width be the groove of 2mm to apart from 1/8th places, gas panel end, formation second stage aeration tank; Again by 1/8th places begin toward two side milling width be the groove of 1mm to apart from ten sixth places, gas panel end, formation third stage aeration tank; Last begin at ten sixth places toward the both sides branch mill width be the groove of 1mm outside gas panel, formation fourth stage aeration tank.According to the practical situation of gas panel, the progression of aeration tank can be adjusted.
The utility model has following beneficial effect with respect to prior art:
Gas is gone in the employing center by the linear gas distribution of basis mechanism, passes through the multilayer aeration tank more successively to gas panel two ends gas distribution, and gas distribution is even, can ensure quality product preferably.
The linear gas distribution of basis mechanism adopts platy structure, cooperation by top board, gas panel and press table realizes sealing and even gas distribution, it is simple in structure, load and unload, clean and safeguard more convenient and quicker, can effectively avoid the phenomenon of traditional gas distribution mechanism " rete is difficult to clean up after entering in the pipe, influences the equipment pumping speed ".
The linear gas distribution of basis mechanism can be by the machining moulding, and quality-guarantee can guarantee to inflate stable and consistent.
Description of drawings
Fig. 1 is the structural representation of this linear gas distribution mechanism.
Fig. 2 is the structural representation of gas panel in this linear gas distribution mechanism.
Embodiment
Below in conjunction with embodiment and accompanying drawing, the utility model is described in further detail, but embodiment of the present utility model is not limited thereto.
Embodiment
A kind of linear gas distribution of present embodiment mechanism as shown in Figure 1, comprises the top board 2, gas panel 1 and the press table 3 that connect successively from top to bottom, as shown in Figure 2, be distributed with the multi-stage inflatable groove on the gas panel 1, be communicated with the external source of the gas of first step aeration tank between the adjacent dual-stage inflators groove by pore.
The multi-stage inflatable groove has 2 groups, is symmetrically set in the upper and lower surface of gas panel, and the opening surface of each aeration tank is positioned at upper surface or the lower surface of gas panel.
Present embodiment is as a kind of preferred version, and aeration tank has level Four, and pore also should have level Four mutually, as shown in Figure 2,
First step aeration tank 1-1 has 1, and on the center line that is centered close to gas panel of first step aeration tank, the two ends of first step aeration tank arrange first step pore 1-5 respectively, and first step pore is 1/4 of gas panel total length to the distance of gas panel respective end;
Second stage aeration tank 1-2 has 2, the junction of each second stage aeration tank and corresponding first step pore is the center of second stage aeration tank, the two ends of each second stage aeration tank arrange second stage pore 1-6 respectively, and the second stage pore outside being positioned at is 1/8 of gas panel total length to the distance of gas panel respective end;
Third stage aeration tank 1-3 has 4, the junction of each third stage aeration tank and corresponding second stage pore is the center of third stage aeration tank, the two ends of each third stage aeration tank arrange third stage pore 1-7 respectively, and the third stage pore outside being positioned at is 1/16 of gas panel total length to the distance of gas panel respective end;
Fourth stage aeration tank 1-4 has 8, and the junction of each fourth stage aeration tank and corresponding third stage pore is the center of fourth stage aeration tank, and the two ends of each fourth stage aeration tank arrange fourth stage pore 1-8 respectively, and each fourth stage pore is the qi-emitting hole of gas panel.
The width of first step aeration tank is 3mm, and the width of second stage aeration tank is 2mm, and the width of third stage aeration tank is 1mm, and the width of fourth stage aeration tank is 1mm.
As shown in Figure 1, be respectively equipped with gas on top board and the press table and introduce seat 4, the air outlet that gas is introduced seat is connected with the first step aeration tank of gas panel, and gas is introduced the external source of the gas of seat.
When the linear gas distribution of basis mechanism uses, its gas distribution principle is: introduce seat behind source of the gas introducing gas by gas, gas enters first step aeration tank, pass through first step gas cell distribution then to second stage aeration tank, pass through second stage gas cell distribution more successively to third stage aeration tank,, evenly distribute from fourth stage pore at last to fourth stage aeration tank by third stage gas cell distribution, successively distribute by aeration tanks at different levels, make gas distribution more even.
When the linear gas distribution of basis mechanism made, wherein the processing of gas panel was as follows: to the groove milling respectively of gas panel upper and lower surface; By the gas panel center begin toward two side milling width be the groove of 3mm to apart from 1/4th places, gas panel end, formation first step aeration tank; Again by 1/4th places begin toward two side milling width be the groove of 2mm to apart from 1/8th places, gas panel end, formation second stage aeration tank; Again by 1/8th places begin toward two side milling width be the groove of 1mm to apart from ten sixth places, gas panel end, formation third stage aeration tank; Last begin at ten sixth places toward the both sides branch mill width be the groove of 1mm outside gas panel, formation fourth stage aeration tank.According to the practical situation of gas panel, the progression of aeration tank can be adjusted.
As mentioned above, just can realize the utility model preferably, above-described embodiment is preferred embodiment of the present utility model only, is not to limit practical range of the present utility model; Be that all equalizations of doing according to the utility model content change and modification, all contained by the utility model claim scope required for protection.
Claims (5)
1. linear gas distribution mechanism is characterized in that, comprises the top board, gas panel and the press table that connect successively from top to bottom, is distributed with the multi-stage inflatable groove on the gas panel, is communicated with the external source of the gas of first step aeration tank between the adjacent dual-stage inflators groove by pore.
2. linear gas distribution according to claim 1 mechanism is characterized in that described multi-stage inflatable groove has 2 groups, is symmetrically set in the upper and lower surface of gas panel, and the opening surface of each aeration tank is positioned at upper surface or the lower surface of gas panel.
3. linear gas distribution according to claim 1 mechanism is characterized in that described aeration tank has level Four, and pore also should have level Four mutually;
First step aeration tank has 1, and on the center line that is centered close to gas panel of first step aeration tank, the two ends of first step aeration tank arrange first step pore respectively, and first step pore is 1/4 of gas panel total length to the distance of gas panel respective end;
Second stage aeration tank has 2, the junction of each second stage aeration tank and corresponding first step pore is the center of second stage aeration tank, the two ends of each second stage aeration tank arrange second stage pore respectively, and the second stage pore outside being positioned at is 1/8 of gas panel total length to the distance of gas panel respective end;
Third stage aeration tank has 4, the junction of each third stage aeration tank and corresponding second stage pore is the center of third stage aeration tank, the two ends of each third stage aeration tank arrange third stage pore respectively, and the third stage pore outside being positioned at is 1/16 of gas panel total length to the distance of gas panel respective end;
Fourth stage aeration tank has 8, and the junction of each fourth stage aeration tank and corresponding third stage pore is the center of fourth stage aeration tank, and the two ends of each fourth stage aeration tank arrange fourth stage pore respectively, and each fourth stage pore is the qi-emitting hole of gas panel.
4. linear gas distribution according to claim 3 mechanism is characterized in that the width of described first step aeration tank is 3mm, and the width of second stage aeration tank is 2mm, and the width of third stage aeration tank is 1mm, and the width of fourth stage aeration tank is 1mm.
5. linear gas distribution according to claim 1 mechanism is characterized in that be respectively equipped with gas on described top board and the press table and introduce seat, the air outlet that gas is introduced seat is connected with the first step aeration tank of gas panel, a gas introducing external source of the gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320139229 CN203212644U (en) | 2013-03-25 | 2013-03-25 | Linear air distribution mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320139229 CN203212644U (en) | 2013-03-25 | 2013-03-25 | Linear air distribution mechanism |
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| Publication Number | Publication Date |
|---|---|
| CN203212644U true CN203212644U (en) | 2013-09-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201320139229 Expired - Fee Related CN203212644U (en) | 2013-03-25 | 2013-03-25 | Linear air distribution mechanism |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105782720A (en) * | 2014-12-25 | 2016-07-20 | 陈闺艳 | Novel industrial gas uniform distribution system and manufacturing process thereof |
| CN112281126A (en) * | 2020-10-29 | 2021-01-29 | 河南卓金光电科技股份有限公司 | Reactive magnetron sputtering separation type gas distribution method |
| CN113481469A (en) * | 2021-06-04 | 2021-10-08 | 广东铭丰包装材料有限公司 | Even gas mechanism and aluminizing machine |
-
2013
- 2013-03-25 CN CN 201320139229 patent/CN203212644U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105782720A (en) * | 2014-12-25 | 2016-07-20 | 陈闺艳 | Novel industrial gas uniform distribution system and manufacturing process thereof |
| CN112281126A (en) * | 2020-10-29 | 2021-01-29 | 河南卓金光电科技股份有限公司 | Reactive magnetron sputtering separation type gas distribution method |
| CN113481469A (en) * | 2021-06-04 | 2021-10-08 | 广东铭丰包装材料有限公司 | Even gas mechanism and aluminizing machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130925 Termination date: 20180325 |