CN203200370U - Crystal growth cooling device - Google Patents
Crystal growth cooling device Download PDFInfo
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- CN203200370U CN203200370U CN 201320196216 CN201320196216U CN203200370U CN 203200370 U CN203200370 U CN 203200370U CN 201320196216 CN201320196216 CN 201320196216 CN 201320196216 U CN201320196216 U CN 201320196216U CN 203200370 U CN203200370 U CN 203200370U
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Abstract
The utility model provides a crystal growth cooling device. A pressure regulating channel of the device comprises a first branch and a second branch in parallel, wherein the first branch comprises a first gas cylinder, a first gas reducing valve, a first hand-operated direction valve and a first one-way valve which are sequentially connected; the second branch comprises a second gas cylinder, a second gas reducing valve, a second hand-operated direction valve and a second one-way valve which are sequentially connected; the first one-way valve and the second one-way valve are converged at a first node; a high-pressure inflation channel of the device is connected with the pressure regulating channel through the first node. According to the device, two parallel branches are arranged in the pressure regulating channel, each branch comprises a gas cylinder, when the gas in the first gas cylinder is insufficient, the second branch can be opened, the second gas cylinder of the second branch supplies gas to the device, then the first branch is turned off, and the first gas cylinder is replaced, so that the function of replacing the gas cylinder is realized on the premise of continuously supplying gas to the device, the proper temperature field gradient suitable for crystal growth is guaranteed, and the crystal quality is improved.
Description
Technical field
The utility model relates to the crystal growth equipment technical field, more particularly, relates to a kind of crystal growth refrigerating unit.
Background technology
Along with the reach of science, development of technology, countries in the world are more and more paid attention to energy-saving and emission-reduction and environment protection aspect.LED(Light Emitting Diode, photodiode) and solar cell as the important component part in the energy-saving and emission-reduction project, obtain swift and violent development.As the crystal product of one of LED and the requisite starting material of sun power industry, its demand also promotes greatly.
Crystal product is that crystal raw material obtains through a series of purification with after processing, crystal raw material is placed crystal growing furnace, thermal field in the crystal growing furnace carries out crystal growth then with the crystal raw material heating and melting under certain warm field gradient, obtain needed crystal product.
In the crystal growing process, the temperature of crystal growing furnace thermal field is the key factor that influences the crystal product quality.What some crystal growing furnace used in the market is the well heater that exotic materials is made, because the singularity of structure and material, what it often produced in the process of heating is uniform thermal field, and this uniform heat-field does not have long brilliant favourable warm field gradient, can not satisfy the warm field condition of the needed cold lower part and hot upper part of crystal growth.
Be fit to long brilliant warm field gradient in order to produce, currently used method mainly is that the crystal growth refrigerating unit is set, concrete, as shown in Figure 1, be the structure iron of crystal growth refrigerating unit in the prior art, this device comprises: pressure regulation path, high-pressure aerated path, air feed path, cooling channel and gas compressor 105.Wherein, the pressure regulation path comprises successively gas cylinder 101, gas pressure reducer F1, manually operated directional valve F2 and the first check valve F3 that connects, the pressure regulation path be used for shielding gas that gas cylinder 101 is flowed out by high pressure drop to low pressure; High-pressure aerated path comprises gas regulating valve F4 and the first electro-pneumatic ball valve F5 that connects successively, and gas regulating valve F4 is connected with the first check valve F3, and this path is used for adjusting the air pressure of shielding gas, to inflate to the air feed path; The air feed path comprises the first tensimeter P1, the second electro-pneumatic ball valve F6, mass-flow gas meter F7 and the chamber internal cooling pipe 102 that connects successively, the first tensimeter P1 is connected with the first electro-pneumatic ball valve F5, chamber internal cooling pipe 102 feeds the crucible bottom of crystal growing furnace 106, shielding gas is flowing out and is taking the heat in the furnace chamber out of furnace chamber by the flow through crucible bottom of crystal growing furnace 106 of air feed path; Cooling channel comprises cooling tube 103, strainer 104, the second tensimeter P2, the second check valve F8 and the 3rd electro-pneumatic ball valve F9 outside the chamber that connects successively, cooling tube 103 is connected with the air outlet of chamber internal cooling pipe 102 outside the chamber, cooling tube 103 is connected with cooled flow water L1 outside the chamber, with the heat of the shielding gas of taking away this place that flows through; The air intake of gas compressor 105 is connected with the 3rd electro-pneumatic ball valve F9; the air outlet is connected with the tie point of the first electro-pneumatic ball valve F5 and the first tensimeter P1; and also be connected with cooled flow water L2 in the gas compressor 105; shielding gas enters gas compressor 105 through behind the cold filtration of cooling channel, and gas compressor 105 compresses shielding gas; to increase the pressure of shielding gas; shielding gas flows out from the air outlet of gas compressor 105, enters the air feed path again, circulates.
But above-mentioned crystal growth refrigerating unit can not make crystal growing furnace form very suitable warm field gradient, causes the crystal mass of growing not high enough.
The utility model content
The utility model provides a kind of crystal growth refrigerating unit, so that the crystal growing furnace thermal field forms good warm field gradient, improves the quality of the crystal of growing.
For achieving the above object, the utility model embodiment provides following technical scheme:
A kind of crystal growth refrigerating unit, the pressure regulation path of described crystal growth refrigerating unit comprise first branch road and second branch road in parallel;
Described first branch road comprises first gas cylinder, first gas pressure reducer, first manually operated directional valve and first check valve that connects successively;
Described second branch road comprises second gas cylinder, second gas pressure reducer, second manually operated directional valve and second check valve that connects successively, described first check valve and described second check valve meet at first node, and the high-pressure aerated path of described crystal growth refrigerating unit is connected with described pressure regulation path by described first node.
Preferably, described crystal growth refrigerating unit also comprises low pressure tonifying Qi path, described low pressure tonifying Qi path comprises low pressure modulating valve, electro-pneumatic ball valve and the 3rd check valve that connects successively, described low pressure modulating valve is connected with described first node, and described the 3rd check valve is connected with the air intake of the gas compressor of described crystal growth refrigerating unit.
Preferably, described crystal growth refrigerating unit also comprises low pressure tonifying Qi path, described low pressure tonifying Qi path comprises the 3rd gas cylinder, the 3rd gas pressure reducer and the 4th check valve that connects successively, and described the 4th check valve is connected with the air intake of the gas compressor of described crystal growth refrigerating unit.
Preferably, the chamber internal cooling pipe of described crystal growth refrigerating unit comprises: first pipeline, second pipeline, the 3rd pipeline, the 4th pipeline, Connection Block and cutting ferrule;
The one end sealing of described first pipeline, the tube wall of the top of this end and described first pipeline is an integral body, described first pipeline is enclosed within described second pipeline outside, the inboard of the top of one end of the inboard and sealing of the tube wall of described first pipeline all with outside the tube wall of described second pipeline has the gap, described first pipeline and second pipeline are separately fixed on the described Connection Block, described the 3rd pipeline is connected with described Connection Block by described cutting ferrule respectively with the 4th pipeline, one end of described the 3rd pipeline is communicated with gap between described first pipeline and the second pipe wall inboard, and an end of described the 4th pipeline is communicated with described second pipeline;
Cool off pipe coupling outside the chamber of the other end of described the 3rd pipeline and described crystal growth refrigerating unit, the other end of described the 4th pipeline is connected with the mass-flow gas meter of described crystal growth refrigerating unit, the part of described first pipeline and second pipeline is positioned at the crucible bottom of crystal growth furnace interior, rest part is positioned at the crystal growing furnace outside, one end of described first pipe sealing is positioned at described crystal growth furnace interior, and described the 3rd pipeline, the 4th pipeline, Connection Block and cutting ferrule are positioned at the crystal growing furnace outside.
Preferably, be connected with first manual ball valve between first gas pressure reducer of described first branch road and first manually operated directional valve, be connected with second manual ball valve between second gas pressure reducer of described second branch road and second manually operated directional valve.
Compared with prior art, technical scheme provided by the utility model has the following advantages at least:
Crystal growth refrigerating unit provided by the utility model, by two branch roads in the parallel connection of pressure regulation channel setting, each branch road all has a gas cylinder, when the gas in first gas cylinder is not enough, can open second branch road, make second gas cylinder of second branch road to the device air feed, turn-off first branch road then, change first gas cylinder, thereby realized continuing under the prerequisite of device air feed, change the function of gas cylinder, guaranteed the warm field gradient that long crystalline substance is suitable, improved crystal mass.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, to do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below, apparently, accompanying drawing in describing below only is embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the structure iron of a kind of crystal growth refrigerating unit in the prior art;
The structure iron of the crystal growth refrigerating unit that Fig. 2 provides for the utility model embodiment;
The structure iron of the chamber internal cooling pipe of the crystal growth refrigerating unit that Fig. 3 provides for the utility model embodiment;
Fig. 4 is the structure iron of the chamber internal cooling pipe of a kind of crystal growth refrigerating unit in the prior art;
Fig. 5 is the structure iron of another kind of crystal growth refrigerating unit in the prior art;
Fig. 6 is the structure iron of the chamber internal cooling pipe of another kind of crystal growth refrigerating unit in the prior art;
The structure iron of the another kind of crystal growth refrigerating unit that Fig. 7 provides for the utility model embodiment.
Embodiment
Just as stated in the Background Art, traditional crystal growth refrigerating unit can not make crystal growing furnace form suitable warm field gradient, cause the crystal mass of growing not high enough, the contriver discovers, cause the reason of this phenomenon to mainly contain: the time that the growth needs of crystal is long, be generally more than 20 day, so the abundance that the gas that is used for cooling off must compare.For adopting gas cylinder to carry out the device of air feed as source of the gas, owing to use the time of gas cylinder long, gas in the gas cylinder might be able to not support to long brilliant the end, must change gas cylinder midway, but change gas cylinder and just must turn-off the gas passage, cause changing gas cylinder during this period of time in, the heat of the crucible bottom of crystal growing furnace does not have gas to take away, the warm field gradient of crucible upper heat and lower cold is destroyed, thus the quality of the crystal of influence growth.
Based on this, the utility model provides a kind of crystal growth refrigerating unit, and the pressure regulation path of this device comprises first branch road and second branch road in parallel;
Described first branch road comprises first gas cylinder, first gas pressure reducer, first manually operated directional valve and first check valve that connects successively;
Described second branch road comprises second gas cylinder, second gas pressure reducer, second manually operated directional valve and second check valve that connects successively, described first check valve and described second check valve meet at first node, and the high-pressure aerated path of described crystal growth refrigerating unit is connected with described pressure regulation path by described first node.
Crystal growth refrigerating unit provided by the utility model, by two branch roads in the parallel connection of pressure regulation channel setting, each branch road all has a gas cylinder, when the gas in first gas cylinder is not enough, can open second branch road, make second gas cylinder of second branch road to the device air feed, turn-off first branch road then, change first gas cylinder, thereby realized continuing under the prerequisite of device air feed, change the function of gas cylinder, guaranteed the warm field gradient that long crystalline substance is suitable, improved crystal mass.
More than be core concept of the present utility model, can become apparent more for making above-mentioned purpose of the present utility model, feature and advantage, below in conjunction with accompanying drawing embodiment of the present utility model is described in detail.
A lot of details have been set forth in the following description so that fully understand the utility model, but the utility model can also adopt other to be different from alternate manner described here and implement, those skilled in the art can do similar popularization under the situation of the utility model intension, so the utility model is not subjected to the restriction of following public specific embodiment.
Secondly, the utility model is described in detail in conjunction with synoptic diagram, when the utility model embodiment is described in detail in detail; for ease of explanation; the sectional view of indication device structure can be disobeyed general ratio and be done local the amplification, and described synoptic diagram is example, and it should not limit the scope of the utility model protection at this.The three-dimensional space size that in actual fabrication, should comprise in addition, length, width and the degree of depth.
Present embodiment provides a kind of crystal growth refrigerating unit, as shown in Figure 2, this device comprises at least: pressure regulation path, high-pressure aerated path, air feed path, cooling channel and gas compressor 206, the pressure regulation path of described crystal growth refrigerating unit comprise first branch road and second branch road in parallel;
Described first branch road comprises first gas cylinder 201, the first gas pressure reducer F10, the first manually operated directional valve F12 and the first check valve F13 that connects successively;
Described second branch road comprises second gas cylinder 202, the second gas pressure reducer F14, the second manually operated directional valve F16 and the second check valve F17 that connects successively, the described first check valve F13 and the described second check valve F17 meet at first node 208, and the high-pressure aerated path of described crystal growth refrigerating unit is connected with described pressure regulation path by described first node 208.
In addition, because the gas that is led in the device is generally special gas such as helium, nitrogen, be generally special air compressor so install used gas compressor 206, the purity of the gas of special air compressor requirement compression is more than 99%, so device preferably need be operated the air of pipe interior before feeding gas and discharge by emptying, vacuumize etc.; Concrete, be example with first branch road, when gas arrives the first manually operated directional valve F12, the indication handle of the first manually operated directional valve F12 is transferred to the direction of the first check valve F13 dorsad, gas in first gas cylinder 201 can directly be discharged in the air, then the indication handle of the first manually operated directional valve F12 is transferred to when pointing to the mid-way, gas in first gas cylinder 201 is blocked, can not flow to any one direction, so repeat several times, air in the pipeline between first gas cylinder, 201 to the first manually operated directional valve F12 is by progressively discharge, the gas of only coming in higher first gas cylinder 201 of remaining purity in the last pipeline, and this process is emptying.In like manner, before using second branch road, according to same step the pipeline of second branch road is carried out emptying.By the operation of emptying, can make pressure regulation tunnel gas purity and the interior gas purity basically identical of gas cylinder of device, guaranteed the work of gas compressor 206 stability and high efficiencies, be that sufficient high-purity gas is supplied with in crystal growth.
The first check valve F13 and the second check valve F17 make the gas can only be according to the arrow direction uniflux on the valve among the figure, gas volume deficiency in the gas cylinder can not appear, when air pressure reduces, situation in the high pressure gas refluence return-air bottle in the pipeline, further, in changing the gas cylinder process, first branch road and second branch road open simultaneously during this period of time in, the air pressure of second branch road is than the air pressure height of first branch road, and owing to the existence by check valve, the gas in second branch road can not flow in first branch road.
Because the first manually operated directional valve F12 and the second manually operated directional valve F16 are when turn-offing the gas passage, may not tight especially, so, present embodiment preferably is connected with the first manual ball valve F11 between the first gas pressure reducer F10 of described first branch road and the first manually operated directional valve F12, be connected with the second manual ball valve F15 between the second gas pressure reducer F14 of described second branch road and the second manually operated directional valve F16, when the replacing gas cylinder need turn-off the gas passage, with respect to the indication handle tuning mid-way of passing through the first manually operated directional valve F12 or the second manually operated directional valve F16, realize the mode that turn-off the gas passage, directly turn-off the mode of the first manual ball valve F11 or the second manual ball valve F15, more tight, gas is difficult for leaking.
The pipeline of the device that present embodiment provides is connected to form by a plurality of valves and pipe, the situation that there is micro-leakage at each connecting interface place might appear in long-time use, and the circulation that gas does not stop in pipeline, especially after gas arrives the interior high-temperature zone of crystal growing furnace, have the consumption of trace, the air pressure in the pipeline descends to some extent; After gas compressor high-pressure side (being place, the gas compressor air outlet) pressure of device was lower than certain value, the gas flow in the cooling tube of device will not reach the flow that needs, and influences cooling performance, and then the crystal mass that causes growing descends.
Therefore, in order to guarantee the gas flow abundance in the cooling tube, make high-pressure side (being place, the gas compressor air outlet) pressure-stabilisation of gas compressor, present embodiment preferably increases by a low pressure tonifying Qi path, described low pressure tonifying Qi path comprises low pressure modulating valve F20, the second electro-pneumatic ball valve F21 and the 3rd check valve F22 that connects successively, described low pressure modulating valve F20 is connected with described first node 208, and described the 3rd check valve F22 is connected with the air intake of the gas compressor 206 of described crystal growth refrigerating unit.
Gas is through low pressure modulating valve F20, pressure is down to 5～10psig by 250psig, when gas volume in the cooling channel of crystal refrigerating unit is not enough, above-mentioned low pressure tonifying Qi path is opened, to the air intake air feed of gas compressor 206, to guarantee normally circulation between air feed path, cooling channel and the gas compressor 206 of crystal refrigerating unit of gas.
Low pressure tonifying Qi path is except being realized by said structure, can also be realized by following mode, as shown in Figure 7, described low pressure tonifying Qi path comprises the 3rd gas cylinder 701, the 3rd gas pressure reducer F28 and the 4th check valve F29 that connects successively, and described the 4th check valve F29 is connected with the air intake of the gas compressor 206 of described crystal growth refrigerating unit.The 3rd gas cylinder 701 is directly to the air intake air feed of gas compressor 206 in this path, and gas flows out from the 3rd gas cylinder 701, and through the 3rd gas pressure reducer F28, air pressure is down to 5～10psig.
High purity for gas in the assurance device, preferably between the strainer 205 of cooling channel and the second tensimeter P4, a branch road is set, and at this branch road one the 5th electro-pneumatic ball valve F27 is set, before feeding gas in the pipeline, open the 5th electro-pneumatic ball valve F27, connect vaccum-pumping equipment at above-mentioned branch road, pipeline is vacuumized, so that the air in the pipeline is discharged, close the 5th electro-pneumatic ball valve F27 then, just can feed gas in the pipeline.
In addition, the concrete structure of high-pressure aerated path, air feed path, cooling channel and the gas compressor 206 of the crystal growth refrigerating unit that provides of present embodiment is as follows:.
Wherein, high-pressure aerated path comprises septum valve F18 and the first electro-pneumatic ball valve F19 that connects successively, and septum valve F18 is connected with first node 208;
The air feed path comprises the first tensimeter P3, the 3rd electro-pneumatic ball valve F23, mass-flow gas meter F24 and the chamber internal cooling pipe 203 that connects successively, the first tensimeter P3 is connected with the 3rd electro-pneumatic ball valve F23, and chamber internal cooling pipe 203 feeds the crucible bottom of crystal growing furnace 207;
Cooling channel comprises cooling tube 204, strainer 205, the second tensimeter P4, the 4th check valve F26, the 4th electro-pneumatic ball valve F25 and the 5th electro-pneumatic ball valve F27 outside the chamber that connects successively, cooling tube 204 is connected with the air outlet of chamber internal cooling pipe 203 outside the chamber, and cooling tube 204 is connected with cooled flow water L3 outside the chamber;
The air intake of gas compressor 206 is connected with the 4th electro-pneumatic ball valve F25, and the air outlet is connected with the tie point of the first electro-pneumatic ball valve F19 and the first tensimeter P3, and also is connected with cooled flow water L4 in the gas compressor 206.
The gas of 250psig pressure is divided into two-way after arriving first node 208, and pressure drops to about 150psig behind one tunnel process septum valve F18, opens the first electro-pneumatic ball valve F19 then, to air feed path and cooling channel inflation; Before inflation, at first open all valves of air feed path and cooling channel, the branch road by the 5th electro-pneumatic ball valve F27 place vacuumizes the pipeline of air feed path and cooling channel; When being extracted in the pipeline when being placed on perfect vacuum, open the first electro-pneumatic ball valve F19, gas is charged in the pipeline;
When the registration of the first tensimeter P3 and the second tensimeter P4 no longer changes, open gas compressor 206, because the compression pressurization of 206 pairs of gases of gas compressor, the registration of the first tensimeter P3 (being the pressure of gas in the air feed path) can be higher than 150psig, this registration is greater than the registration of the second tensimeter P4, therefore, gas produces pressure difference in pipeline;
Gas passes through the first tensimeter P3 of air feed path successively, the 3rd electro-pneumatic ball valve F23, mass-flow gas meter F24, enter from the air intake of chamber internal cooling pipe 203, flow into the crucible bottom of crystal growing furnace 207, take away furnace heat, flow out from the air outlet of chamber internal cooling pipe 203, enter cooling tube 204 outside the chamber then, cooling tube 204 is connected with the water coolant L3 that flows outside the chamber, with gas cooling, because leading to the pipeline of crystal growing furnace 207 is to be made by special mmaterial, its powder that has trace under hot conditions splits away off from duct wall, along with air-flow circulates in pipeline together, influence the work-ing life of special air compressor, at this moment, gas inflow filter 205 through overcooling, impurity in the gas is filtered device 205 and removes, gas is successively through the second tensimeter P4 afterwards, the 4th check valve F26, the 4th electro-pneumatic ball valve F25, enter from the air intake of gas compressor 206, gas compressor 206 is connected with the water coolant L4 that flows, gas here is further cooled and pressurizes, flow into the air feed path afterwards again, circulate again.
In the present embodiment, the concrete structure of chamber internal cooling pipe 203 as shown in Figure 3, this chamber internal cooling pipe 203 comprises: first pipeline 301, second pipeline 303, the 3rd pipeline 304, the 4th pipeline 305, Connection Block 306 and cutting ferrule 307;
The one end sealing of described first pipeline 301, the top 302 of this end is an integral body with the tube wall of described first pipeline 301, described first pipeline 301 is enclosed within described second pipeline 303 outsides, the inboard of the top 302 of one end of the inboard and sealing of the tube wall of described first pipeline 301 all with outside the tube wall of described second pipeline 303 has the gap, described first pipeline 301 and second pipeline 303 are separately fixed on the described Connection Block 306, described the 3rd pipeline 304 is connected with described Connection Block 306 by described cutting ferrule 307 respectively with the 4th pipeline 305, one end of described the 3rd pipeline 304 is communicated with gap between described first pipeline 301 and second pipeline, the 303 tube wall inboards, and an end of described the 4th pipeline 305 is communicated with described second pipeline 303;
The one end sealing of first pipeline 301 of above-mentioned chamber internal cooling pipe 203, the top 302 of this end is an integral body with the tube wall of described first pipeline 301, there is not weld seam between top 302 and the tube wall, even therefore under the crystal growing furnace furnace high-temperature, the gas of pipe interior can not revealed yet, and the impurity in the stove is difficult for entering in the pipeline, therefore can not destroy the atmosphere of the gas of crystal growth in the stove.
In the prior art, the tube wall of the outer side sleeve of chamber internal cooling pipe 203 and top normally weld together, as shown in Figure 4, tube wall 401 and the top 402 of the outer side sleeve that contacts with crucible bottom of chamber internal cooling pipe are not an integral body, the two is by being welded together, and the gas in the pipeline is very easy to leak by weld seam 403, causes the waste of source of the gas, and the impurity in the stove also is very easy to enter in the pipeline by weld seam 403, influences gas purity.
In addition; the device that present embodiment provides also has the temperature of privileged site in the efficient reduction stove; form the advantage of the needed temperature field gradient of crystal growth fast; concrete; as Fig. 5; shown in Figure 6; crystal growth refrigerating unit for the open vent method of available technology adopting; this device adopts gas cylinder 501 air feed; shielding gas is through installing pipes; flow out from the cooling tube 601 of the opening of device and to arrive in the crystal growing furnaces 502; shielding gas is discharged in the air outlet 503 of crystal growing furnace 502 1 sides; in order to take away furnace heat; reach the purpose of cooling; thereby make and produce warm field gradient in the stove; and the method for this open ventilation; because gas is in whole path process; need vacuum pump to assist and to flow; gas can absorb other the local heat in the body of heater, and along with vacuumizing, 503 are taken away from the air outlet; and in the stove everywhere gas can form convection current; and then everywhere temperature in the stove become temperature of the same race, be difficult to form the warm field gradient of cold lower part and hot upper part, in addition; amount is bigger in the needed gas of this method, increases cost virtually.
The crystal growth refrigerating unit that this enforcement provides adopts closed ventilation, only the crystal growing furnace crucible bottom is lowered the temperature, gas can not enter other position in the stove, so, with respect to the method for open ventilation, can take away furnace heat fast and effectively, form suitable warm field gradient.
And, in order to make the gas can the rapid absorption furnace heat, present embodiment preferably adopts the high gas of ratio of specific heats, as helium, when this kind gas passes through crucible bottom, chamber internal cooling pipe and crucible bottom can be close to a large amount of heats at position takes out of outside the stove, thereby reach the purpose that reduces local temperature, this moment, the well heater of crystal growing furnace still guaranteed the certain power heating, and it is low then can to produce under the crucible surface temperature, the warm field gradient that last surface temperature is high guarantees the high-quality growth of crystal.
The crystal growth refrigerating unit that present embodiment provides, by two branch roads in the parallel connection of pressure regulation channel setting, one of them branch road is as main air supply channel, and another branch road is as standby air supply channel, when the gas of main air supply channel is not enough, adopt standby air supply channel to the device air feed, with the more gas cylinder of change owner air supply channel of racing against time, thereby realized continuing under the prerequisite of device air feed, to change the function of gas cylinder, guarantee the warm field gradient that long crystalline substance is suitable, improved crystal mass.
Further, by increasing by a low pressure tonifying Qi path, the gas of 250psig is divided into two-way, wherein one the road flow into this low pressure tonifying Qi path, when gas volume is not enough in the cooling channel of device, low pressure tonifying Qi path can normally circulate between air feed path, cooling channel and the gas compressor of device to guarantee gas to the gas compressor air feed.
Further, be holistic first pipeline by adopting top and tube wall, make the closure of chamber internal cooling pipe 203 very good, it enters the part in the body of heater, even under the crystal growing furnace furnace high-temperature, the gas of pipe interior can not revealed yet, and, impurity in the stove is difficult for entering in the pipeline, therefore can not destroy the atmosphere of the gas of crystal growth in the stove.
Further, by between the strainer of cooling channel and second tensimeter, a branch road being set, and at this branch road one electro-pneumatic ball valve is set, feed gas in the pipeline before, can vacuumize pipeline by this branch road, guarantee the high purity of gas in the device.
Though the utility model discloses as above with preferred embodiment, yet is not in order to limit the utility model.Any those of ordinary skill in the art, do not breaking away under the technical solutions of the utility model scope situation, all can utilize method and the technology contents of above-mentioned announcement that technical solutions of the utility model are made many possible changes and modification, or be revised as the equivalent embodiment of equivalent variations.Therefore, every content that does not break away from technical solutions of the utility model according to any simple modification, equivalent variations and the modification that technical spirit of the present utility model is done above embodiment, all still belongs in the scope of technical solutions of the utility model protection.
Claims (5)
1. a crystal growth refrigerating unit is characterized in that, the pressure regulation path of described crystal growth refrigerating unit comprises first branch road and second branch road in parallel;
Described first branch road comprises first gas cylinder, first gas pressure reducer, first manually operated directional valve and first check valve that connects successively;
Described second branch road comprises second gas cylinder, second gas pressure reducer, second manually operated directional valve and second check valve that connects successively, described first check valve and described second check valve meet at first node, and the high-pressure aerated path of described crystal growth refrigerating unit is connected with described pressure regulation path by described first node.
2. device according to claim 1, it is characterized in that, also comprise low pressure tonifying Qi path, described low pressure tonifying Qi path comprises low pressure modulating valve, electro-pneumatic ball valve and the 3rd check valve that connects successively, described low pressure modulating valve is connected with described first node, and described the 3rd check valve is connected with the air intake of the gas compressor of described crystal growth refrigerating unit.
3. device according to claim 1, it is characterized in that, also comprise low pressure tonifying Qi path, described low pressure tonifying Qi path comprises the 3rd gas cylinder, the 3rd gas pressure reducer and the 4th check valve that connects successively, and described the 4th check valve is connected with the air intake of the gas compressor of described crystal growth refrigerating unit.
4. according to claim 2 or 3 each described devices, it is characterized in that the chamber internal cooling pipe of described crystal growth refrigerating unit comprises: first pipeline, second pipeline, the 3rd pipeline, the 4th pipeline, Connection Block and cutting ferrule;
The one end sealing of described first pipeline, the tube wall of the top of this end and described first pipeline is an integral body, described first pipeline is enclosed within described second pipeline outside, the inboard of the top of one end of the inboard and sealing of the tube wall of described first pipeline all with outside the tube wall of described second pipeline has the gap, described first pipeline and second pipeline are separately fixed on the described Connection Block, described the 3rd pipeline is connected with described Connection Block by described cutting ferrule respectively with the 4th pipeline, one end of described the 3rd pipeline is communicated with gap between described first pipeline and the second pipe wall inboard, and an end of described the 4th pipeline is communicated with described second pipeline;
Cool off pipe coupling outside the chamber of the other end of described the 3rd pipeline and described crystal growth refrigerating unit, the other end of described the 4th pipeline is connected with the mass-flow gas meter of described crystal growth refrigerating unit, the part of described first pipeline and second pipeline is positioned at the crucible bottom of crystal growth furnace interior, rest part is positioned at the crystal growing furnace outside, one end of described first pipe sealing is positioned at described crystal growth furnace interior, and described the 3rd pipeline, the 4th pipeline, Connection Block and cutting ferrule are positioned at the crystal growing furnace outside.
5. device according to claim 4, it is characterized in that, be connected with first manual ball valve between first gas pressure reducer of described first branch road and first manually operated directional valve, be connected with second manual ball valve between second gas pressure reducer of described second branch road and second manually operated directional valve.
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| CN 201320196216 CN203200370U (en) | 2013-04-17 | 2013-04-17 | Crystal growth cooling device |
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| CN 201320196216 CN203200370U (en) | 2013-04-17 | 2013-04-17 | Crystal growth cooling device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109853042A (en) * | 2018-12-07 | 2019-06-07 | 张忠恕 | A kind of novel oxidized diffusion furnace system air inlet pipe |
| CN111594754A (en) * | 2020-07-22 | 2020-08-28 | 烟台青孜新材料科技有限公司 | Protective gas supplementing device for single crystal vapor phase growth |
-
2013
- 2013-04-17 CN CN 201320196216 patent/CN203200370U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109853042A (en) * | 2018-12-07 | 2019-06-07 | 张忠恕 | A kind of novel oxidized diffusion furnace system air inlet pipe |
| CN111594754A (en) * | 2020-07-22 | 2020-08-28 | 烟台青孜新材料科技有限公司 | Protective gas supplementing device for single crystal vapor phase growth |
| CN111594754B (en) * | 2020-07-22 | 2020-10-09 | 烟台青孜新材料科技有限公司 | Protective gas supplementing device for single crystal vapor phase growth |
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